WO2001074695A1

WO2001074695A1 - Tape feeder and bonding device with the tape feeder

Info

Publication number: WO2001074695A1
Application number: PCT/JP2001/002686
Authority: WO
Inventors: Makoto Ohta; Tadashi Ito
Original assignee: Shibaura Mechatronics Corporation
Priority date: 2000-03-31
Filing date: 2001-03-29
Publication date: 2001-10-11
Also published as: JP3907476B2; TW528712B

Abstract

A tape feeder capable of feeding a carrier tape smoothly by effectively preventing the carrier tape from being caught into a sprocket even when a thin carrier tape is fed, wherein a plurality of teeth (11a) of the sprocket (11) are engaged in order with perforations provided along both side edges of the carrier tape (20) to feed the carrier tape (20) in order to the right side, a wire (14) extending along the carrier tape (20) is provided under the carrier tape (20) fed drivingly by the sprocket (11), the carrier tape (20) is supported by the wire (14) at the time point when departing from each tooth (11a) of the sprocket (11), and the perforations (20a) of the carrier tape (20) are extracted surely from each tooth (11a) of the sprocket (11).

Description

Description Tape feeder and bonding device with the same

The present invention relates to a tape feeder for transporting a carrier tape, and more particularly to a tape feeder for transporting a carrier provided with a performance along a side edge in a width direction, and a bonding device having the same. Related to the device. Background technology

2. Description of the Related Art Conventionally, there has been known a tape feeder which transports a carrier tape provided with a performance along both side edges in a width direction by a pair of sprockets in order to transport a tape carrier package (TCP) with high accuracy.

FIG. 7 is a diagram showing such a conventional tape feeding device. As shown in FIG. 7, the conventional tape feeder 40 is provided in a path of a pair of guide rails 34, 34 for guiding the carrier tape 20, and performs a perforation of the carrier tape 20. A pair of sprockets 11 and 11 having a plurality of teeth 11a that engage with 20a and a pair of pinch rollers 12 that sandwich the carrier tape 20 between the sprockets 11 and 11 , 1 and 2. The sprockets 11 and 11 rotate around their axis via a spline drive shaft 22.

However, in the above-described conventional tape feeder 40, if the thickness of the carrier tape becomes extremely thin (for example, the thickness becomes 50 μm or less), it may be caused by deformation of the performance 20a or the like. As a result, the carrier tape 20 bites into the teeth 11 a of the sprocket 11, and as shown by the two-dot chain line in FIG. 7, the gap between the sprocket 11, 11. 1 and the guide rails 34, 34. There is a problem that the carrier tape 20 gets caught in the gap. Disclosure of the invention

The present invention has been made in view of the above points, and has a thin thickness carrier. —To provide a tape feeder capable of effectively preventing the carrier tape from being entangled in the sprocket even when the tape is conveyed and smoothly conveying the carrier tape, and a bonding apparatus having the same. I do.

The present invention provides a sprocket having a plurality of teeth that mesh with a perforation provided along a side edge in a width direction of a carrier tape, the sprocket being disposed on the sprocket side with respect to the carrier tape, An extraction member for extracting a perforation of the carrier tape from each tooth so that the carrier tape sent in mesh with each tooth is sent out from the sprocket while maintaining a predetermined conveyance path. Provided is a tape feeding device characterized by the following.

In the present invention, it is preferable that the extraction member is disposed at the center in the width direction of the carrier tape with respect to each tooth of the sprocket. The sprocket has a groove provided along the outer peripheral edge of the sprocket on the center side in the width direction of the carrier tape with respect to each tooth, and the extraction member is inserted into a part of the groove. Preferably, they are arranged in a state. Further, it is preferable that the extraction member is a wire extending along the carrier tape.

Further, the present invention relates to a bonding apparatus for bonding a semiconductor element to a carrier tape, a tape feeder for transferring a carrier tape to a bonding position, and bonding the semiconductor element to the carrier tape transferred to the bonding position. A bonding tool, wherein the tape feeding device includes: a sprocket having a plurality of teeth that engage with a perforation provided along a lateral edge of the carrier tape; and The perforation of the carrier tape is arranged such that the carrier tape, which is arranged on the sprocket side and is sent in a state of being engaged with the teeth of the sprocket, is sent out from the sprocket while maintaining a predetermined transport path. And an extraction member that is extracted from each tooth. To provide a tape feeding device which is characterized and.

According to the present invention, since the extraction member for extracting the perforation of the carrier tape from each tooth is provided on the sprocket side of the carrier tape fed and driven by the sprocket, the carrier tape bites the teeth of the sprocket. The carrier tape from each sprocket while maintaining the specified transport path. As a result, the carrier tape can be effectively conveyed by the sprocket and the carrier tape can be smoothly transported. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a diagram showing a main part of an embodiment of a tape feeding device according to the present invention, FIG. 2 is a cross-sectional view taken along line II-II of FIG.

FIG. 3 is an enlarged cross-sectional view showing the III portion of FIG. 2,

FIG. 4 is a schematic diagram showing the overall configuration of an inner lead bonding apparatus having the tape feeder shown in FIG. 1,

FIG. 5 is an enlarged perspective view showing a V portion in FIG. 4,

FIG. 6 is a diagram showing a main part of another embodiment of the tape feeding device shown in FIG. 1, and FIG. 7 is a diagram showing a conventional tape feeding device. BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 to 5 are views for explaining an embodiment of the tape feeding device according to the present invention.

First, an inner lead bonding apparatus provided with the tape feeding device according to the present embodiment will be described with reference to FIGS. FIG. 4 is a schematic diagram showing the entire configuration of the inner lead bonding apparatus, and FIG. 5 is an enlarged perspective view showing a portion V in FIG.

The inner lead bonding apparatus 30 shown in FIGS. 4 and 5 is provided with a feeding reel 31 and is wound around a carrier tape 20 having an inner lead 2 Ob (see FIG. 5) formed on the surface thereof in advance. I have. The carrier tape 20 wound on the pay-out reel 31 is guided to guide rails 34, 34 via tension rollers 33, 33, and travels along a predetermined transport path along the guide rails 34, 34. After being conveyed along, it is wound up by a take-up reel 32 via tension rollers 35, 35.

Here, a bonding portion 39 is provided at an intermediate position between the guide rails 34, 34. The semiconductor element 20c (see FIG. 5) is placed on the bonding portion 39. It has a mounting table 37 and a bonding tool 38 for bonding the semiconductor element 20c mounted on the mounting table 37 to the inner lead 20b of the carrier tape 20. A tape guide 36 provided with an opening 36a is provided below the bonding tool 38.

Further, tape feeders 10 and 10 for feeding and driving the carrier tape 20 are provided at the downstream and upstream positions of the guide rails 34 and 34 in the transport direction, respectively. The tape feeders 10 and 10 are a pair of tapes 11a having a plurality of teeth 11a that engage with perforations 20a (see FIG. 5) provided along both side edges of the carrier tape 20. A sprocket 11 is provided between the sprockets 11 and 11 and the sprockets 11 and 11 to prevent the carrier tape 20 from floating by sandwiching the carrier tape 20.

Next, the details of the tape feeding devices 10 and 10 shown in FIGS. 4 and 5 will be described with reference to FIGS. FIG. 1 is a diagram showing the main part of the tape feeders 10 and 10 shown in FIGS. 4 and 5. Of the pair of sprockets 11 and 11 shown in FIGS. FIG. 11 is a view of 11 viewed from the inside of guide rails 34 and 34. FIG. 2 is a cross-sectional view taken along the line II-II of FIG. 1, and shows both the front and rear sprockets 11, 11 shown in FIGS. 4 and 5. FIG. 3 is an enlarged sectional view showing an III portion of FIG.

As shown in FIGS. 1 and 2, each of the tape feeders 10 and 10 has a pair of sprockets 11. One of the sprockets 1 1 (the right sprocket in FIG. 2) has a spline drive shaft 2 2 rotatably supported around its axis via a bearing assembly 23 attached to the side plate 21. It is stuck to. The other sprocket 11 (the sprocket on the left side in FIG. 2) is rotatable coaxially with the one sprocket 11 and around its axis via a bearing assembly 25 attached to the side plate 21. It is supported by. Further, a spline engagement member 24 through which the free end of the spline drive shaft 22 is inserted is attached to the other sprocket 11, whereby the other sprocket 11 is connected to the spline drive shaft 22. On the other hand, it is slidable in the axial direction and engaged in the rotational direction. Note that the spline drive shaft 22 has a belt at one end (the right end in FIG. 2). A pulley 26 around which 27 is wound is attached, and the spline drive shaft 22 can be driven by a motor (not shown).

Further, the tape feeders 10 and 10 include a pair of pinch rollers 12 and 12 for holding the carrier tape 20 between the sprockets 11 and 11. The pinch rollers 12, 12 are rotatably supported by shafts 28, 28 attached to support arms 29, 29, respectively. Further, concave grooves 12a, 12a for receiving the teeth 11 &, 11a of the sprockets 11, 11 are provided on the outer peripheral edge of the pinch rollers 12, 12, respectively.

Here, a wire (extraction member) 14 (see FIGS. 1 and 3) extending along the carrier tape 20 is provided on the lower surface side of the carrier tape 20 which is driven and driven by the sprockets 11, 11. The perforations 20a of the carrier tape 20 are adjusted so that the carrier tape 20 sent in mesh with each tooth 1 la of each sprocket 11 is sent out from each sprocket 11 at a predetermined height. It can be extracted from tooth 11a. Here, the wire 14 is wound around the V-grooves 13 a and 15 a of the rollers 13 and 15, and both ends thereof are fixed to the wire fixing members 16 and 17. The rollers 13, 15 and one of the wire fixing members 16 are fixed on the side plates 21, 21 (see FIG. 2). The other wire fixing member 17 is connected to a spring fixing member 19 fixed on the side plates 21 and 21 (see FIG. 2) via a spring 18, and the tension of the wire 14 is reduced by the spring 18. It is being adjusted. The wire 14 is disposed inside each tooth 11a of each sprocket 11 in the width direction of the carrier tape 20. More specifically, as shown in FIGS. 1 and 3, each sprocket 11 Inside each tooth 11a, a groove 1 lb is provided along the outer peripheral edge thereof, and the wire 14 is arranged in a state of being inserted into a part of the groove 1 lb.

Next, the operation of the tape feeders 10, 10 having such a configuration will be described.

In FIG. 1, the sprockets 11, 11 of the tape feeders 10, 10 rotate clockwise around the axis of the spline drive shaft 22. When the carrier tape 20 is sent from the left along the guide rails 34, 34, the carrier tape 20 The plurality of teeth 11a of the sprockets 11 and 11 are sequentially engaged with the perforations 20a provided along both side edges (see Fig. 5), and the carrier tape 20 is sequentially conveyed to the right. C? O

Here, a wire 14 extending along the carrier tape 20 is provided on the lower surface side of the carrier tape 20 fed and driven by the sprockets 11, 11. The carrier tape 20 sent in mesh with the teeth 11a receives the support of the wires 14 when the sprocket 11 is separated from the teeth 11a of each sprocket 11, so that the carrier tape 20 The perforations 20a are reliably extracted from each tooth 11a of each sprocket 11.

As described above, according to the present embodiment, the wire 14 extending along the carrier tape 20 is provided on the lower surface side of the carrier tape 20 which is driven and driven by the sprockets 11, 11. Even if the tape 20 bites into the teeth 11a of the sprocket 11, the carrier tape 20 can be sent out from each sprocket 11 while maintaining a predetermined height. The carrier tape 20 can be transported smoothly by effectively preventing the carrier tape 20 from being entangled at 1 1.

Other embodiments

Next, another embodiment of the tape feeding device according to the present invention will be described with reference to FIG. The other embodiment of the present invention is substantially the same as the embodiment shown in FIGS. 1 to 5 except that a pin is used instead of a wire as an extraction member. In other embodiments, the same portions as those in the embodiment shown in FIGS. 1 to 5 are denoted by the same reference numerals, and detailed description will be omitted.

FIG. 6 is a view similar to FIG. 1, showing the main parts of the tape feeders 10 and 10 according to another embodiment of the present invention. As shown in FIG. 6, on the lower side of the carrier tape 20 driven by the sprockets 11 and 11 of the tape feeders 10 and 10, pins extending along the carrier tape 20 (extraction members) are provided. 4) and 42 are provided, and the carrier tape 20 sent in a state of being engaged with each tooth 11a of each sprocket 11 is maintained at a predetermined height from each sprocket 11. Pull out the perforations 20a of the carrier tape 20 from each tooth 1la so that they can be sent out. ing. Here, the pins 42, 42 are fixed by screws 43, 43 in the cylindrical support members 41, 41, respectively. The columnar support members 41, 41 are fixed on the side plates 21, 21 (see FIG. 2). The pins 42, 42 are arranged inside the teeth 11a of each sprocket 11 with respect to the width direction of the carrier tape 20. Specifically, as shown in FIG. 6, a groove 11b is provided inside each tooth 11a of each sprocket 11 along the outer peripheral edge thereof, and bins 4 2 and 4 2 are provided at the tip portions thereof. Are inserted in a part of the groove 11b.

The pins 42 and 42 need not always be provided on both the downstream side and the upstream side of the sprockets 11 and 11 in the transport direction, and the pins 42 on the upstream side in the transport direction can be omitted. .

In FIGS. 1 and 6, the carrier tape 20 near the point where the perforation 20 a of the carrier tape 20 is pulled out from the tooth 1 la of the sprocket 11 with the wire 14 or the pin 42. Blowing means 45 for blowing compressed gas (air, ionized air, etc.) from below to 20 may be provided. In this case, since the carrier tape 20 is lifted by the blowing action of the compressed gas, the performance 20 a of the carrier tape 20 can be easily transferred to the sprocket 1 compared to the case where only the carrier 14 or the pin 42 is used. It can be extracted from 1 tooth 1 1a. Further, when ionized air is used as the compressed gas to be blown, even if static electricity is generated when the perforation 20a is extracted from the teeth 11a, the static electricity can be removed, and the generated static electricity can be used. It is possible to prevent problems such as electrostatic breakdown of the carrier tape 20 and the semiconductor element 20c bonded to the inner lead 20b of the carrier tape 20.

Further, in FIGS. 1 and 6, the sprocket 11 is arranged below the carrier tape 12, but it is not always necessary to arrange the sprocket 11 below, for example, the sprocket 11 is arranged above the carrier tape 20. Is also good. Such an arrangement can be realized by arranging the tape feeder 10 shown in FIGS. 1 and 6 upside down. At this time, when the tape feeder 10 shown in FIGS. 1 and 6 is arranged upside down, it is preferable to provide a mechanism for urging the vinch roller 12 toward the sprocket 11 with a spring or the like.

Claims

The scope of the claims

1. A sprocket having a plurality of teeth that engage with a perforation provided along the widthwise side edge of the carrier tape;

The carrier tape is disposed on the sprocket side with respect to the carrier tape and is sent in a state of being engaged with the teeth of the sprocket, so that the carrier tape is sent out from the sprocket while maintaining a predetermined conveyance path. An extraction member for extracting a perforation from each tooth.

2. The tape feeding device according to claim 1, wherein the extraction member is disposed at a center side in a width direction of the carrier tape with respect to each tooth of the sprocket.

3. The sprocket has a groove provided along the outer peripheral edge on the center side in the width direction of the carrier tape with respect to each tooth, and the extraction member is inserted into a part of the groove. 3. The tape feed according to claim 2, wherein

4. The tape feeding device according to claim 1, wherein the extraction member is a wire extending along the carrier tape.

5. In a bonding device that bonds semiconductor elements to a carrier tape,

A tape feeder for transferring the carrier tape to a bonding position;

A bonding tool for bonding a semiconductor element to the carrier tape transferred to the bonding position,

The tape feeder has a sprocket having a plurality of teeth that mesh with a performance provided along a lateral edge of the carrier tape,

The carrier tape is arranged on the sprocket side with respect to the carrier tape and is sent in a state of being engaged with the teeth of the sprocket so that the carrier tape is sent out from the sprocket while maintaining a predetermined conveyance path. A pull-out member for pulling out a perforation from each tooth.

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