TW516119B - Chemical mechanical planarization of metal substrates - Google Patents

Chemical mechanical planarization of metal substrates Download PDF

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Publication number
TW516119B
TW516119B TW090119649A TW90119649A TW516119B TW 516119 B TW516119 B TW 516119B TW 090119649 A TW090119649 A TW 090119649A TW 90119649 A TW90119649 A TW 90119649A TW 516119 B TW516119 B TW 516119B
Authority
TW
Taiwan
Prior art keywords
polishing
chemical mechanical
metal substrates
mechanical planarization
carrier
Prior art date
Application number
TW090119649A
Other languages
English (en)
Chinese (zh)
Inventor
Glenn C Mandigo
Ian G Sullivan
Ross E Ii Barker
Wendy B Goldberg
Craig D Lack
Original Assignee
Rodel Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rodel Inc filed Critical Rodel Inc
Application granted granted Critical
Publication of TW516119B publication Critical patent/TW516119B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/0056—Control means for lapping machines or devices taking regard of the pH-value of lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • B24B37/044—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
TW090119649A 2000-08-11 2001-08-10 Chemical mechanical planarization of metal substrates TW516119B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US22433900P 2000-08-11 2000-08-11
US22746600P 2000-08-24 2000-08-24

Publications (1)

Publication Number Publication Date
TW516119B true TW516119B (en) 2003-01-01

Family

ID=26918631

Family Applications (1)

Application Number Title Priority Date Filing Date
TW090119649A TW516119B (en) 2000-08-11 2001-08-10 Chemical mechanical planarization of metal substrates

Country Status (6)

Country Link
US (1) US6602436B2 (enExample)
EP (1) EP1307319A2 (enExample)
JP (1) JP2004506337A (enExample)
KR (1) KR20030020977A (enExample)
TW (1) TW516119B (enExample)
WO (1) WO2002014014A2 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7516536B2 (en) * 1999-07-08 2009-04-14 Toho Engineering Kabushiki Kaisha Method of producing polishing pad
US6869343B2 (en) * 2001-12-19 2005-03-22 Toho Engineering Kabushiki Kaisha Turning tool for grooving polishing pad, apparatus and method of producing polishing pad using the tool, and polishing pad produced by using the tool
US6790768B2 (en) * 2001-07-11 2004-09-14 Applied Materials Inc. Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects
US6638326B2 (en) * 2001-09-25 2003-10-28 Ekc Technology, Inc. Compositions for chemical mechanical planarization of tantalum and tantalum nitride
KR100548085B1 (ko) * 2001-10-09 2006-02-02 히다치 가세고교 가부시끼가이샤 Ｃｍｐ용 연마 패드, 이것을 사용한 기판의 연마 방법 및ｃｍｐ용 연마 패드의 제조법
JP3934388B2 (ja) * 2001-10-18 2007-06-20 株式会社ルネサステクノロジ 半導体装置の製造方法及び製造装置
CN1311009C (zh) * 2001-11-15 2007-04-18 三星电子株式会社 添加剂组合物、含有该添加剂组合物的淤浆组合物及使用该淤浆组合物抛光物体的方法
US6806193B2 (en) * 2003-01-15 2004-10-19 Texas Instruments Incorporated CMP in-situ conditioning with pad and retaining ring clean
US6843708B2 (en) * 2003-03-20 2005-01-18 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Method of reducing defectivity during chemical mechanical planarization
US6843709B1 (en) 2003-12-11 2005-01-18 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing method for reducing slurry reflux
US20050164603A1 (en) * 2004-01-22 2005-07-28 House Colby J. Pivotable slurry arm
US7485028B2 (en) 2004-03-19 2009-02-03 Saint-Gobain Performance Plastics Corporation Chemical mechanical polishing retaining ring, apparatuses and methods incorporating same
US7086939B2 (en) * 2004-03-19 2006-08-08 Saint-Gobain Performance Plastics Corporation Chemical mechanical polishing retaining ring with integral polymer backing
KR100645957B1 (ko) * 2004-10-26 2006-11-14 삼성코닝 주식회사 Ｃｍｐ용 수성 슬러리 조성물
EP1994112B1 (en) * 2006-01-25 2018-09-19 LG Chem, Ltd. Cmp slurry and method for polishing semiconductor wafer using the same
JP2009033038A (ja) * 2007-07-30 2009-02-12 Elpida Memory Inc Ｃｍｐ装置及びｃｍｐによるウェハー研磨方法
US20100130013A1 (en) * 2008-11-24 2010-05-27 Applied Materials, Inc. Slurry composition for gst phase change memory materials polishing
JP5407748B2 (ja) * 2009-10-26 2014-02-05 株式会社Ｓｕｍｃｏ 半導体ウェーハの研磨方法
KR102275303B1 (ko) * 2016-10-11 2021-07-12 후지필름 일렉트로닉 머티리얼스 유.에스.에이., 아이엔씨. 상승된 온도 cmp 조성물 및 이의 사용 방법

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4752628A (en) * 1987-05-15 1988-06-21 Nalco Chemical Company Concentrated lapping slurries
JP2714411B2 (ja) * 1988-12-12 1998-02-16 イー・アイ・デュポン・ドゥ・ヌムール・アンド・カンパニー ウェハーのファイン研摩用組成物
US6022264A (en) 1997-02-10 2000-02-08 Rodel Inc. Polishing pad and methods relating thereto
MY114512A (en) 1992-08-19 2002-11-30 Rodel Inc Polymeric substrate with polymeric microelements
US5607718A (en) 1993-03-26 1997-03-04 Kabushiki Kaisha Toshiba Polishing method and polishing apparatus
US5391258A (en) 1993-05-26 1995-02-21 Rodel, Inc. Compositions and methods for polishing
US5340370A (en) 1993-11-03 1994-08-23 Intel Corporation Slurries for chemical mechanical polishing
US5489233A (en) 1994-04-08 1996-02-06 Rodel, Inc. Polishing pads and methods for their use
WO1996025270A1 (en) 1995-02-15 1996-08-22 Advanced Micro Devices, Inc. Abrasive-free selective chemo-mechanical polish for tungsten
JP3076244B2 (ja) * 1996-06-04 2000-08-14 日本電気株式会社 多層配線の研磨方法
US5637031A (en) * 1996-06-07 1997-06-10 Industrial Technology Research Institute Electrochemical simulator for chemical-mechanical polishing (CMP)
US5652177A (en) 1996-08-22 1997-07-29 Chartered Semiconductor Manufacturing Pte Ltd Method for fabricating a planar field oxide region
US5972792A (en) 1996-10-18 1999-10-26 Micron Technology, Inc. Method for chemical-mechanical planarization of a substrate on a fixed-abrasive polishing pad
US6022268A (en) 1998-04-03 2000-02-08 Rodel Holdings Inc. Polishing pads and methods relating thereto
TW375556B (en) 1997-07-02 1999-12-01 Matsushita Electric Industrial Co Ltd Method of polishing the wafer and finishing the polishing pad
JP3371775B2 (ja) * 1997-10-31 2003-01-27 株式会社日立製作所 研磨方法
WO1999064527A1 (en) 1998-06-10 1999-12-16 Rodel Holdings, Inc. Composition and method for polishing in metal cmp
WO2000037217A1 (en) 1998-12-21 2000-06-29 Lam Research Corporation Method for cleaning an abrasive surface

Also Published As

Publication number Publication date
WO2002014014A3 (en) 2002-05-02
KR20030020977A (ko) 2003-03-10
JP2004506337A (ja) 2004-02-26
WO2002014014A2 (en) 2002-02-21
EP1307319A2 (en) 2003-05-07
US6602436B2 (en) 2003-08-05
US20020058426A1 (en) 2002-05-16

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