KR20030020977A - 금속 기판의 화학적 기계적 평탄화 - Google Patents

금속 기판의 화학적 기계적 평탄화 Download PDF

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Publication number
KR20030020977A
KR20030020977A KR10-2003-7001898A KR20037001898A KR20030020977A KR 20030020977 A KR20030020977 A KR 20030020977A KR 20037001898 A KR20037001898 A KR 20037001898A KR 20030020977 A KR20030020977 A KR 20030020977A
Authority
KR
South Korea
Prior art keywords
wafer
planarization
fluid
weight
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR10-2003-7001898A
Other languages
English (en)
Korean (ko)
Inventor
만디고글렌씨.
바커2세로스이.
랙크레이그디.
설리반이안지.
골드버그웬디비.
Original Assignee
로델 홀딩스 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 로델 홀딩스 인코포레이티드 filed Critical 로델 홀딩스 인코포레이티드
Publication of KR20030020977A publication Critical patent/KR20030020977A/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/0056—Control means for lapping machines or devices taking regard of the pH-value of lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • B24B37/044—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
KR10-2003-7001898A 2000-08-11 2001-08-09 금속 기판의 화학적 기계적 평탄화 Withdrawn KR20030020977A (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US22433900P 2000-08-11 2000-08-11
US60/224,339 2000-08-11
US22746600P 2000-08-24 2000-08-24
US60/227,466 2000-08-24
PCT/US2001/025038 WO2002014014A2 (en) 2000-08-11 2001-08-09 Chemical mechanical planarization of metal substrates

Publications (1)

Publication Number Publication Date
KR20030020977A true KR20030020977A (ko) 2003-03-10

Family

ID=26918631

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2003-7001898A Withdrawn KR20030020977A (ko) 2000-08-11 2001-08-09 금속 기판의 화학적 기계적 평탄화

Country Status (6)

Country Link
US (1) US6602436B2 (enExample)
EP (1) EP1307319A2 (enExample)
JP (1) JP2004506337A (enExample)
KR (1) KR20030020977A (enExample)
TW (1) TW516119B (enExample)
WO (1) WO2002014014A2 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7516536B2 (en) * 1999-07-08 2009-04-14 Toho Engineering Kabushiki Kaisha Method of producing polishing pad
US6869343B2 (en) * 2001-12-19 2005-03-22 Toho Engineering Kabushiki Kaisha Turning tool for grooving polishing pad, apparatus and method of producing polishing pad using the tool, and polishing pad produced by using the tool
US6790768B2 (en) 2001-07-11 2004-09-14 Applied Materials Inc. Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects
US6638326B2 (en) * 2001-09-25 2003-10-28 Ekc Technology, Inc. Compositions for chemical mechanical planarization of tantalum and tantalum nitride
TW561541B (en) * 2001-10-09 2003-11-11 Hitachi Chemical Co Ltd Polishing pad for CMP, method for polishing substrate using it and method for producing polishing pad for CMP
JP3934388B2 (ja) * 2001-10-18 2007-06-20 株式会社ルネサステクノロジ 半導体装置の製造方法及び製造装置
WO2003042310A1 (en) * 2001-11-15 2003-05-22 Samsung Electronics Co., Ltd. Additive composition, slurry composition including the same, and method of polishing an object using the slurry composition
US6806193B2 (en) * 2003-01-15 2004-10-19 Texas Instruments Incorporated CMP in-situ conditioning with pad and retaining ring clean
US6843708B2 (en) * 2003-03-20 2005-01-18 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Method of reducing defectivity during chemical mechanical planarization
US6843709B1 (en) 2003-12-11 2005-01-18 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing method for reducing slurry reflux
US20050164603A1 (en) * 2004-01-22 2005-07-28 House Colby J. Pivotable slurry arm
US7086939B2 (en) * 2004-03-19 2006-08-08 Saint-Gobain Performance Plastics Corporation Chemical mechanical polishing retaining ring with integral polymer backing
US7485028B2 (en) 2004-03-19 2009-02-03 Saint-Gobain Performance Plastics Corporation Chemical mechanical polishing retaining ring, apparatuses and methods incorporating same
KR100645957B1 (ko) * 2004-10-26 2006-11-14 삼성코닝 주식회사 Ｃｍｐ용 수성 슬러리 조성물
EP1994112B1 (en) * 2006-01-25 2018-09-19 LG Chem, Ltd. Cmp slurry and method for polishing semiconductor wafer using the same
JP2009033038A (ja) * 2007-07-30 2009-02-12 Elpida Memory Inc Ｃｍｐ装置及びｃｍｐによるウェハー研磨方法
US20100130013A1 (en) * 2008-11-24 2010-05-27 Applied Materials, Inc. Slurry composition for gst phase change memory materials polishing
JP5407748B2 (ja) * 2009-10-26 2014-02-05 株式会社Ｓｕｍｃｏ 半導体ウェーハの研磨方法
KR102275303B1 (ko) * 2016-10-11 2021-07-12 후지필름 일렉트로닉 머티리얼스 유.에스.에이., 아이엔씨. 상승된 온도 cmp 조성물 및 이의 사용 방법

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4752628A (en) * 1987-05-15 1988-06-21 Nalco Chemical Company Concentrated lapping slurries
JP2714411B2 (ja) * 1988-12-12 1998-02-16 イー・アイ・デュポン・ドゥ・ヌムール・アンド・カンパニー ウェハーのファイン研摩用組成物
MY114512A (en) 1992-08-19 2002-11-30 Rodel Inc Polymeric substrate with polymeric microelements
US6022264A (en) 1997-02-10 2000-02-08 Rodel Inc. Polishing pad and methods relating thereto
US5607718A (en) 1993-03-26 1997-03-04 Kabushiki Kaisha Toshiba Polishing method and polishing apparatus
US5391258A (en) 1993-05-26 1995-02-21 Rodel, Inc. Compositions and methods for polishing
US5340370A (en) 1993-11-03 1994-08-23 Intel Corporation Slurries for chemical mechanical polishing
US5489233A (en) 1994-04-08 1996-02-06 Rodel, Inc. Polishing pads and methods for their use
WO1996025270A1 (en) 1995-02-15 1996-08-22 Advanced Micro Devices, Inc. Abrasive-free selective chemo-mechanical polish for tungsten
JP3076244B2 (ja) * 1996-06-04 2000-08-14 日本電気株式会社 多層配線の研磨方法
US5637031A (en) * 1996-06-07 1997-06-10 Industrial Technology Research Institute Electrochemical simulator for chemical-mechanical polishing (CMP)
US5652177A (en) 1996-08-22 1997-07-29 Chartered Semiconductor Manufacturing Pte Ltd Method for fabricating a planar field oxide region
US5972792A (en) 1996-10-18 1999-10-26 Micron Technology, Inc. Method for chemical-mechanical planarization of a substrate on a fixed-abrasive polishing pad
US6022268A (en) 1998-04-03 2000-02-08 Rodel Holdings Inc. Polishing pads and methods relating thereto
TW375556B (en) * 1997-07-02 1999-12-01 Matsushita Electric Industrial Co Ltd Method of polishing the wafer and finishing the polishing pad
JP3371775B2 (ja) * 1997-10-31 2003-01-27 株式会社日立製作所 研磨方法
JP2002517593A (ja) * 1998-06-10 2002-06-18 ロデール ホールディングス インコーポレイテッド 金属ｃｍｐにおける研磨用組成物および研磨方法
WO2000037217A1 (en) * 1998-12-21 2000-06-29 Lam Research Corporation Method for cleaning an abrasive surface

Also Published As

Publication number Publication date
WO2002014014A2 (en) 2002-02-21
US6602436B2 (en) 2003-08-05
JP2004506337A (ja) 2004-02-26
US20020058426A1 (en) 2002-05-16
WO2002014014A3 (en) 2002-05-02
EP1307319A2 (en) 2003-05-07
TW516119B (en) 2003-01-01

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