TW512547B - Patterning of electrodes in OLED devices - Google Patents
Patterning of electrodes in OLED devices Download PDFInfo
- Publication number
- TW512547B TW512547B TW090122225A TW90122225A TW512547B TW 512547 B TW512547 B TW 512547B TW 090122225 A TW090122225 A TW 090122225A TW 90122225 A TW90122225 A TW 90122225A TW 512547 B TW512547 B TW 512547B
- Authority
- TW
- Taiwan
- Prior art keywords
- baking
- patent application
- pier
- operation includes
- item
- Prior art date
Links
- 238000000059 patterning Methods 0.000 title abstract description 8
- 239000010410 layer Substances 0.000 claims abstract description 63
- 239000002346 layers by function Substances 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims description 79
- 239000000758 substrate Substances 0.000 claims description 49
- 239000002904 solvent Substances 0.000 claims description 20
- 239000012044 organic layer Substances 0.000 claims description 14
- 239000002245 particle Substances 0.000 claims description 14
- 230000000694 effects Effects 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 9
- 238000010894 electron beam technology Methods 0.000 claims description 9
- 230000035515 penetration Effects 0.000 claims description 4
- 229920000547 conjugated polymer Polymers 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims 3
- 239000000463 material Substances 0.000 abstract description 29
- 239000000126 substance Substances 0.000 abstract description 9
- 230000008021 deposition Effects 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- -1 polyethylene terephthalate Polymers 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- 239000004642 Polyimide Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 239000011575 calcium Substances 0.000 description 2
- 230000001413 cellular effect Effects 0.000 description 2
- 239000002800 charge carrier Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 239000012780 transparent material Substances 0.000 description 2
- LIKMAJRDDDTEIG-UHFFFAOYSA-N 1-hexene Chemical compound CCCCC=C LIKMAJRDDDTEIG-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 229920000265 Polyparaphenylene Polymers 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 101100014660 Rattus norvegicus Gimap8 gene Proteins 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052770 Uranium Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 125000005487 naphthalate group Chemical group 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920002577 polybenzoxazole Polymers 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 230000008521 reorganization Effects 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/841—Self-supporting sealing arrangements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/17—Passive-matrix OLED displays
- H10K59/173—Passive-matrix OLED displays comprising banks or shadow masks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/60—Forming conductive regions or layers, e.g. electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
- H10K71/221—Changing the shape of the active layer in the devices, e.g. patterning by lift-off techniques
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/SG2000/000134 WO2002021883A1 (en) | 2000-09-06 | 2000-09-06 | Patterning of electrodes in oled devices |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW512547B true TW512547B (en) | 2002-12-01 |
Family
ID=20428858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW090122225A TW512547B (en) | 2000-09-06 | 2001-09-07 | Patterning of electrodes in OLED devices |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7057337B1 (OSRAM) |
| EP (1) | EP1317874B1 (OSRAM) |
| JP (1) | JP2004508691A (OSRAM) |
| CN (1) | CN100431196C (OSRAM) |
| AU (1) | AU2000274683A1 (OSRAM) |
| DE (1) | DE60010531T2 (OSRAM) |
| TW (1) | TW512547B (OSRAM) |
| WO (1) | WO2002021883A1 (OSRAM) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6699728B2 (en) | 2000-09-06 | 2004-03-02 | Osram Opto Semiconductors Gmbh | Patterning of electrodes in oled devices |
| TWI221645B (en) * | 2001-01-19 | 2004-10-01 | Semiconductor Energy Lab | Method of manufacturing a semiconductor device |
| US7423375B2 (en) | 2002-05-07 | 2008-09-09 | Osram Gmbh | Encapsulation for electroluminescent devices |
| US7148624B2 (en) | 2002-05-07 | 2006-12-12 | Osram Opto Semiconductors (Malaysia) Sdn. Bhd | Uniform deposition of organic layer |
| KR100875097B1 (ko) * | 2002-09-18 | 2008-12-19 | 삼성모바일디스플레이주식회사 | 광학 공진 효과를 이용한 유기 전계발광 소자 |
| US7026660B2 (en) | 2003-04-25 | 2006-04-11 | Osram Opto Semiconductors (Malaysia) Sdn. Bhd | Interconnection for organic devices |
| US8025831B2 (en) | 2004-05-24 | 2011-09-27 | Agency For Science, Technology And Research | Imprinting of supported and free-standing 3-D micro- or nano-structures |
| US6992326B1 (en) | 2004-08-03 | 2006-01-31 | Dupont Displays, Inc. | Electronic device and process for forming same |
| US7166860B2 (en) | 2004-12-30 | 2007-01-23 | E. I. Du Pont De Nemours And Company | Electronic device and process for forming same |
| DE102005039528A1 (de) * | 2005-08-18 | 2007-02-22 | Merck Patent Gmbh | Lösungen organischer Halbleiter |
| JP2008273211A (ja) * | 2008-05-19 | 2008-11-13 | Nitto Denko Corp | 透明ガスバリア性部材及びこれを用いた有機エレクトロルミネッセンス素子 |
| JPWO2012029156A1 (ja) * | 2010-09-02 | 2013-10-28 | 昭和電工株式会社 | Ｅｌ素子、ｅｌ素子の製造方法、表示装置および照明装置 |
| AU2013365772B2 (en) | 2012-12-19 | 2017-08-10 | Basf Se | Detector for optically detecting at least one object |
| US9989623B2 (en) | 2013-06-13 | 2018-06-05 | Basf Se | Detector for determining a longitudinal coordinate of an object via an intensity distribution of illuminated pixels |
| US9741954B2 (en) * | 2013-06-13 | 2017-08-22 | Basf Se | Optical detector and method for manufacturing the same |
| CN105452808A (zh) | 2013-06-13 | 2016-03-30 | 巴斯夫欧洲公司 | 用于光学检测至少一个对象的取向的检测器 |
| EP3036503B1 (en) | 2013-08-19 | 2019-08-07 | Basf Se | Optical detector |
| US10185171B2 (en) | 2014-06-04 | 2019-01-22 | Sharp Kabushiki Kaisha | Light control member, method of manufacturing light control member, apparatus for manufacturing light control member, and display device |
| KR102397527B1 (ko) | 2014-07-08 | 2022-05-13 | 바스프 에스이 | 하나 이상의 물체의 위치를 결정하기 위한 검출기 |
| WO2016051323A1 (en) | 2014-09-29 | 2016-04-07 | Basf Se | Detector for optically determining a position of at least one object |
| EP3230841B1 (en) | 2014-12-09 | 2019-07-03 | Basf Se | Optical detector |
| CN107438775B (zh) | 2015-01-30 | 2022-01-21 | 特里纳米克斯股份有限公司 | 用于至少一个对象的光学检测的检测器 |
| WO2017012986A1 (en) | 2015-07-17 | 2017-01-26 | Trinamix Gmbh | Detector for optically detecting at least one object |
| CN108141579B (zh) | 2015-09-14 | 2020-06-12 | 特里纳米克斯股份有限公司 | 3d相机 |
| CN109564927B (zh) | 2016-07-29 | 2023-06-20 | 特里纳米克斯股份有限公司 | 光学传感器和用于光学检测的检测器 |
| JP2019532517A (ja) | 2016-10-25 | 2019-11-07 | トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング | 光学的に検出するための光検出器 |
| JP7241684B2 (ja) | 2016-10-25 | 2023-03-17 | トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング | 少なくとも１個の対象物の光学的な検出のための検出器 |
| EP3571522B1 (en) | 2016-11-17 | 2023-05-10 | trinamiX GmbH | Detector for optically detecting at least one object |
| US11860292B2 (en) | 2016-11-17 | 2024-01-02 | Trinamix Gmbh | Detector and methods for authenticating at least one object |
| US11060922B2 (en) | 2017-04-20 | 2021-07-13 | Trinamix Gmbh | Optical detector |
| US11067692B2 (en) | 2017-06-26 | 2021-07-20 | Trinamix Gmbh | Detector for determining a position of at least one object |
| JP2022185322A (ja) | 2021-06-02 | 2022-12-14 | 株式会社ジャパンディスプレイ | 電子機器及びその製造方法 |
| KR20230050544A (ko) * | 2021-10-07 | 2023-04-17 | 삼성디스플레이 주식회사 | 표시 장치 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2602323B2 (ja) * | 1989-03-31 | 1997-04-23 | 東洋インキ製造株式会社 | カラーフィルターの製造方法 |
| GB8909011D0 (en) * | 1989-04-20 | 1989-06-07 | Friend Richard H | Electroluminescent devices |
| US5701055A (en) * | 1994-03-13 | 1997-12-23 | Pioneer Electronic Corporation | Organic electoluminescent display panel and method for manufacturing the same |
| JP3813217B2 (ja) * | 1995-03-13 | 2006-08-23 | パイオニア株式会社 | 有機エレクトロルミネッセンスディスプレイパネルの製造方法 |
| US5641611A (en) | 1995-08-21 | 1997-06-24 | Motorola | Method of fabricating organic LED matrices |
| JP3886219B2 (ja) * | 1997-07-29 | 2007-02-28 | 株式会社アルバック | 有機ｅｌ素子 |
| JP3633229B2 (ja) * | 1997-09-01 | 2005-03-30 | セイコーエプソン株式会社 | 発光素子の製造方法および多色表示装置の製造方法 |
| US6278237B1 (en) | 1997-09-22 | 2001-08-21 | Emagin Corporation | Laterally structured high resolution multicolor organic electroluminescence display device |
| TW432896B (en) * | 1997-10-15 | 2001-05-01 | Siemens Ag | Preparation of organic electroluminescencizing elements |
| JP3663876B2 (ja) * | 1998-01-08 | 2005-06-22 | 松下電器産業株式会社 | 有機エレクトロルミネセンス素子及びその製造方法 |
| JPH11283752A (ja) | 1998-03-27 | 1999-10-15 | Futaba Corp | 有機エレクトロルミネッセンス素子 |
| US6111356A (en) * | 1998-04-13 | 2000-08-29 | Agilent Technologies, Inc. | Method for fabricating pixelated polymer organic light emitting devices |
| GB9808806D0 (en) * | 1998-04-24 | 1998-06-24 | Cambridge Display Tech Ltd | Selective deposition of polymer films |
| US6306559B1 (en) * | 1999-01-26 | 2001-10-23 | Mitsubishi Chemical Corporation | Organic electroluminescent device comprising a patterned photosensitive composition and a method for producing same |
| US6699728B2 (en) | 2000-09-06 | 2004-03-02 | Osram Opto Semiconductors Gmbh | Patterning of electrodes in oled devices |
-
2000
- 2000-09-06 AU AU2000274683A patent/AU2000274683A1/en not_active Abandoned
- 2000-09-06 DE DE60010531T patent/DE60010531T2/de not_active Expired - Lifetime
- 2000-09-06 US US10/363,200 patent/US7057337B1/en not_active Expired - Lifetime
- 2000-09-06 WO PCT/SG2000/000134 patent/WO2002021883A1/en not_active Ceased
- 2000-09-06 EP EP00963240A patent/EP1317874B1/en not_active Expired - Lifetime
- 2000-09-06 JP JP2002526157A patent/JP2004508691A/ja active Pending
- 2000-09-06 CN CNB008198764A patent/CN100431196C/zh not_active Expired - Lifetime
-
2001
- 2001-09-07 TW TW090122225A patent/TW512547B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE60010531D1 (de) | 2004-06-09 |
| EP1317874A1 (en) | 2003-06-11 |
| DE60010531T2 (de) | 2005-05-12 |
| CN100431196C (zh) | 2008-11-05 |
| JP2004508691A (ja) | 2004-03-18 |
| EP1317874B1 (en) | 2004-05-06 |
| WO2002021883A1 (en) | 2002-03-14 |
| AU2000274683A1 (en) | 2002-03-22 |
| US7057337B1 (en) | 2006-06-06 |
| CN1454447A (zh) | 2003-11-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW512547B (en) | Patterning of electrodes in OLED devices | |
| US6784009B2 (en) | Electrode patterning in OLED devices | |
| US8344360B2 (en) | Organic electronic devices with an encapsulation | |
| US20070190682A1 (en) | Patterning of electrodes in oled devices | |
| DE10318187B4 (de) | Verkapselungsverfahren für organische Leuchtdiodenbauelemente | |
| US6949389B2 (en) | Encapsulation for organic light emitting diodes devices | |
| TW586193B (en) | Encapsulation of electronic devices | |
| JP2010027624A (ja) | 電子装置のカプセル化のための方法 | |
| JP2004508679A (ja) | Ｏｌｅｄデバイスのカプセル化 | |
| CN109119450B (zh) | 显示基板及其制作方法、显示面板、显示装置 | |
| EP3333922B1 (en) | Organic luminescence unit and manufacturing method therefor | |
| KR101322310B1 (ko) | 유기전기발광소자 및 그 제조방법 | |
| JP6263603B2 (ja) | 分離されたデバイス領域を形成するためのパターンをインプリントされた基板 | |
| CN101621116A (zh) | 一种有机电致发光器件的制备方法 | |
| CN111564479B (zh) | 一种显示面板的制作方法、显示面板及显示装置 | |
| CN103325949A (zh) | 一种有机发光二极管封装结构及其制备方法 | |
| Huang et al. | A novel method for fabrication of integrated shadow mask for patterning electrode in passive matrix oled displays |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GD4A | Issue of patent certificate for granted invention patent | ||
| MM4A | Annulment or lapse of patent due to non-payment of fees |