TW504814B - Manufacturing method of caving type IC package carry board - Google Patents
Manufacturing method of caving type IC package carry board Download PDFInfo
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- TW504814B TW504814B TW90128287A TW90128287A TW504814B TW 504814 B TW504814 B TW 504814B TW 90128287 A TW90128287 A TW 90128287A TW 90128287 A TW90128287 A TW 90128287A TW 504814 B TW504814 B TW 504814B
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504814 五、發明說明(1) 【發明領域】 本發明係關於_種穴人式κ封裝載板之製造方法, 別有關於將多層線路基板及開孔基板分別製造後,再對庶 堆疊,,形成-穴入式多層基板,該開孔基板供晶片心 入組成杈組〔module〕,以減少電子產品的印刷電路板面 積0 【先前技術】 傳統上印刷電路板供電子元件〔如積體電路元件〕焊 設置形成具有各種功能的電器、。一般印刷電路板由多層板 組成,其由有機材料或無機材料製成並設置内層線路、 層線路等,以便提供電子元件適當的機械性支^及電性連 接。在印刷電路板製造技術發展趨向增加層次、增加透孔 密度、減少線寬等,以便在有限的印刷電路板表^上辦 電子元件設置的數量。在傳統印刷電路板上開設孔穴^ 片組置入固定,兩者再進行對應的電性連接, 要g 晶片組置入孔穴内能減少電子元件佔用印刷電路板表面。' 若在多層印刷電路板再進行開設孔穴製程時,笋生諸多技 術問題往往使印刷電路板製程具有加工裕度不^的問題。 傳統上製造開孔穴多層線路基板製造方法是以定深度開 孔穴,該孔穴底部不適合設置線路,無法供晶片打線連 接,因此發生各線路層間訊號連接不易且浪費基板表面空 間之缺點。 第!圖揭示習用穴入式1(:封裝載板構造之剖視圖。請參 照第1圖所示,該穴入式1C封裝載板1包含一線路層la及一504814 V. Description of the invention (1) [Field of the invention] The present invention relates to a method for manufacturing a _ cave hole type κ package carrier board, and specifically relates to manufacturing a multilayer circuit substrate and an open-hole substrate separately, and then stacking them, Forming-hole-type multi-layer substrate, the open-hole substrate is used for the core of the wafer to form a module [module] to reduce the printed circuit board area of electronic products. [Previous technology] Traditionally, printed circuit board electrical components [such as integrated circuits] Components] Welding is provided to form appliances with various functions. Generally, a printed circuit board is composed of a multilayer board, which is made of an organic material or an inorganic material and is provided with an inner layer circuit, a layer circuit, etc., so as to provide appropriate mechanical support and electrical connection of electronic components. The development of printed circuit board manufacturing technology tends to increase levels, increase through-hole density, reduce line width, etc., in order to handle the number of electronic component settings on a limited number of printed circuit board tables. A hole ^ is set on a traditional printed circuit board and the chip group is fixed. The two are electrically connected to each other. It is necessary to place the chip group in the hole to reduce the use of electronic components on the surface of the printed circuit board. 'When the multi-layer printed circuit board is subjected to a hole-opening process, many technical problems arise, which often makes the printed circuit board process have a processing margin problem. Traditionally, a method for manufacturing an open-hole multi-layer circuit substrate is to make holes at a fixed depth. The bottom of the hole is not suitable for wiring, and cannot be used for chip wiring. Therefore, the shortcoming of signal connection between the layers of the circuits and the waste of space on the substrate surface occur. Number! The figure reveals a cross-sectional view of a conventional cavity type 1 (: package carrier board structure. Please refer to Figure 1. The hole type 1C package carrier board 1 includes a circuit layer la and a
開孔層lb。該多層印刷電路板製造方法之開孔主 孔冰及大小規格之數個孔穴丨c。然而,利用此制止 成之該孔穴lc之底部ld不適合設置精密線路的;=,波^ 般僅能適合設置低精密的銅片。因為當製造該孔穴卜ς — 進行電鍍或製造外線路層時,該孔穴卜之底部ld設 牧 必然被破壞,除非在進行外線路層之前先適當孔2 lc之底部id之線路。 更μ札八Opening layer lb. The multi-layer printed circuit board manufacturing method has a main hole ice and a plurality of holes of size and size c. However, the bottom ld of the hole lc formed with this stop is not suitable for setting a precision circuit; =, generally, it is only suitable for setting a low-precision copper sheet. Because when the hole hole is made-when electroplating or manufacturing the outer circuit layer, the bottom layer of the hole hole must be destroyed unless the hole with the bottom id line is properly applied before the outer circuit layer. More μ Zhaha
、此1,若在鑽孔太深時,該孔穴1(:之底部ld設有線路功 被破壞,若在鑽孔太淺時,該孔穴丨c之底部丨d設有線路為 法暴露,導致無法發揮正常的功能或產品信賴度不佳。泛 此除非在該孔穴1 c之底部丨d的線路在製程上不致受損外, 在穴入式I C封裝載板之製造上必然受限於該孔穴1 c之底旬 1 d不適合設置線路。一般而言,若該孔穴丨c之底部丨d未这 善上述鑽孔損壞精密線路問題時,該底部丨d之位置仍邏 適合設置精密線路的佈線供晶片打線連接,因而減低印艰 電路板之空間利用率。, 1, if the hole is too deep, the hole at the bottom of ld is provided with line work is destroyed, if the hole is too shallow, the hole at the bottom of the hole 丨 c is exposed by the method, resulting in failure Plays normal functions or has poor product reliability. Generally, unless the line at the bottom of the hole 1 c is not damaged in the manufacturing process, the manufacturing of the hole-type IC package carrier board is bound to be limited by the hole. The end of 1 c and 1 d are not suitable for wiring. Generally speaking, if the hole 丨 c bottom 丨 d is not good enough for the above-mentioned drilling to damage the precision wiring problem, the position of the bottom 丨 d is still logically suitable for setting precision wiring. It is used for chip wiring connection, thus reducing the space utilization of printed circuit boards.
在多層印刷電路板製造上,假設在該孔穴1 c之底部丨d位 置利用改良製程方法,適當改善做為設置線路位置時,需 要開孔加工裕度較大的製造方法用以克服孔穴底部設置線 路的技術問題’使多層印刷電路板能提升佈線利用率及製 造效率。 有鑑於此,本發明在印刷電路板製造方法上,分別製造 多層線路基板及開孔基板後,再配置堆疊壓合形成穴入式In the manufacture of multi-layer printed circuit boards, it is assumed that the improved process method is used at the bottom d position of the hole 1 c. When it is appropriately improved as the position of the circuit, a manufacturing method with a large opening processing margin is required to overcome the bottom of the hole. The technical problem of the circuit 'enables the multilayer printed circuit board to improve wiring utilization and manufacturing efficiency. In view of this, in the method for manufacturing a printed circuit board, the present invention separately manufactures a multilayer circuit substrate and an open-hole substrate, and then arranges and stacks them to form a cavity type.
C:\Logo-5\Five Continents\PK8202.ptd 第 6 頁 504814 五、發明說明(3) 多層基板, 路,其解決 時省略信賴 於孔穴底部 率、製程效 【發明概要 本發明主 法,其壓合 保護膜保護 層,該製造 板。 本發明次 法,其先分 合形成穴入 精密線路之 電路板之佈 本發明再 法,其先開 孔基板堆疊 賴度不佳的 多層印刷電 根據本發 驟如下:分 層線路基板 並在孔 傳統上 度不佳 設置線 率及產] 要目的 形成穴 線路以 方法適 穴上覆蓋一保護膜以保護多層基板之線 在孔八底部無法設置線路的問題,其同 的多層基板定深開孔穴製程,因而適用 路’以改善多層印刷電路板之佈線利用 品信賴度。· 係提供一種穴入式I c封裝載板之製造方 入式多層基板後孔穴上覆蓋保護膜,該 便進行後續製程如電鍍、製造外線路 用於開孔底部設置線路之穴入式多層基 要目的係提供一種 別製造 式多層 穴入式 多層線路基 基板,該製 多層基板, 線利用率、製程效 一目的係提供一種 孔製造 壓合形 多層基 路板之 明之穴 別製造 及開孔 開孔基板後 成穴入式多 板定深開孔 開孔加工裕 入式IC封裝 穴入式1C 板及開孔 造方法適 使本發明 率及產品 穴入式1C ,再將該 層基板, 穴製程, 度之功效 載板之製 一多層線路基板及一 基板堆疊壓合形成一 封裝載板之製造方 基板後,再堆疊壓 用於開孔底部設置 具有改善多層印$ 信賴度之功效。U 封裝載板之製造方 多層線路基板及開 該製造方法省略信 使本發明具有改善 〇 造方法,其包含步 開孔基板;將該多 穴入式多層基板;C: \ Logo-5 \ Five Continents \ PK8202.ptd Page 6 504814 V. Description of the invention (3) Multi-layer substrates and circuits, which are omitted to rely on the hole bottom ratio and process efficiency [Summary of the invention, the main method of the invention, The protective film is laminated with a protective layer, and the board is manufactured. This method of the present invention first divides and combines to form a circuit board cloth for a hole-into-precise circuit. According to the present method, a multilayer printed circuit with a poorly stacked substrate and a poor opening is first layered as follows: Holes have traditionally been poorly set line rate and production] The purpose is to form a hole line to cover the hole with a protective film to protect the wire of the multi-layer substrate. The problem that the line cannot be set at the bottom of the hole 8 is the same as the multi-layer substrate. Hole process, so it is applicable to improve the reliability of wiring utilization products of multilayer printed circuit boards. · To provide a hole-type I c package carrier board for manufacturing square-hole multi-layer substrates. The holes are covered with a protective film. The subsequent processes such as electroplating and manufacturing external circuits are used to provide hole-type multilayer substrates at the bottom of the holes. The purpose is to provide a special manufacturing multilayer hole-type multilayer circuit base substrate. The multilayer substrate has a line utilization rate and a process efficiency. The purpose is to provide a hole manufacturing press-fit multilayer base circuit board. After opening the substrate, a hole-type multi-plate fixed-depth hole-opening process for a hole-type IC package hole-type 1C board and a method for making the hole are suitable for the present invention and the product hole-type 1C. Cavity process, the efficiency of the carrier board, the production of a multilayer circuit board and a substrate stacked to form a load board manufacturing side substrate, and then stacked and pressed for the bottom of the opening to improve the reliability of multi-layer printing . Manufacturing method of U package carrier board Multilayer circuit substrate and development method The manufacturing method omits the messenger method of the present invention. The manufacturing method includes a step opening substrate; the multi-hole type multilayer substrate;
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μ =入式多層基板進行鑽孔形成數個通孔;將該開孔基 反之t個孔穴進行覆膜,使每個該孔穴蓋上一保護膜;將 該通孔之孔壁進行電鍍形成一銅箔層導通各線路層;將該 孔八之保護膜去除以暴露孔穴内部;再將該穴入式多層基 板進行防焊等後續製程以完成一穴入式IC封裝載板。 【發明說明】 為了讓本發明之上述和其他目的、特徵、和優點能更明 確被了解,下文將特舉本發明較佳實施例,並配合所附圖 式’作詳細說明如下。 本發明穴入式I c封裝載板之製造方法,其包含主要步驟 如下·分別製造一多層線路基板及一開孔基板;將該多層 線路f板及開孔基板堆疊壓合形成一穴入式多層基板,完 成该多層線路基板表面之數條線路對應結合於該開孔基板 之數個孔穴,以便在後續封裝製程上晶片置入該孔穴後打 線連接該線路;將該開孔基板之數個孔穴進行覆膜,每 個该孔穴盍上一保護膜,該保護膜保護線路以便進行彳g讀 製程如電鍍、製造外線路層,該製造方法適用於開孔底部 設置線路之穴入式多層基板。 本發明將前述的主要技術内容適當揭示於以下所列舉的 杈佳貫施例内,並利用該較佳實施例配合相關技術將本發j 明之主要技術内容予以適當實施。 第2 a至2 f圖揭示本發明第一較佳實施例穴入式】c封裝載 板之製造方法,依序各製造步驟之示意圖。 請芩照第2a圖所示,本發明第一較佳實施例之製造方法μ = drilling through a multi-layer substrate to form several through holes; covering the opening base with t holes, and covering each hole with a protective film; plating the wall of the through hole to form a hole The copper foil layer conducts each circuit layer; removes the protective film of the hole eight to expose the inside of the hole; and then performs subsequent processes such as solder masking on the hole-type multilayer substrate to complete a hole-type IC package carrier board. [Explanation of the Invention] In order to make the above and other objects, features, and advantages of the present invention more clearly understood, the preferred embodiments of the present invention will be specifically described below in conjunction with the accompanying drawings' as follows. The method for manufacturing a hole-type IC package carrier board according to the present invention includes the main steps as follows: manufacturing a multilayer circuit substrate and an open-hole substrate separately; stacking and pressing the multilayer circuit f-board and the open-hole substrate to form a cavity. The multi-layer substrate is completed, and a plurality of lines on the surface of the multi-layer circuit substrate are correspondingly combined with a plurality of holes of the open-hole substrate, so that the chip is wired into the hole after subsequent packaging processes to connect the lines; the number of the open-hole substrate Each hole is covered with a film, and each of these holes is covered with a protective film, which protects the circuit for the 彳 g reading process such as electroplating and manufacturing the outer circuit layer. The manufacturing method is suitable for the hole-type multilayer of the circuit at the bottom of the opening Substrate. The present invention appropriately discloses the foregoing main technical content in the following examples of Jiaguan implementations, and uses the preferred embodiment in conjunction with related technologies to appropriately implement the main technical content of the present invention. Figures 2a to 2f show the manufacturing method of the first preferred embodiment of the present invention. Please refer to FIG. 2a, the manufacturing method of the first preferred embodiment of the present invention
C:\Logo-5\Five Continents\PK8202.ptd 第8頁 504814 五、發明說明(5) 首先在一開孔基板2 0上利用機械方式進行開孔形成數個孔 穴21 ’該孔穴21在構造上連通該開孔基板2〇之上表面及下 表面。由於該開孔基板2 0預先開孔該孔穴2 1,使在多層印 刷電路板製造上先開孔製程相對於後開孔製程必然增加開 孔加工裕度。同時,該製造方法省略信賴度不佳的多層基 板定深開孔穴製程,因而多層基板必然適用於孔穴底部設 置線路。 凊參照苐2 b圖所示,本發明第一較佳實施例之製造方法 接著將一多層線路基板1 0與該開孔基板2 〇堆疊壓合形成/ 穴入式多層基板1,該多層線路基板10表面預先設有精密 · 的數條線路11,使該多層線路基板1 Q表面之數條線路1 1對 應結合於该開孔基板2 0之數個孔穴21。在印刷電路板構造 上,該多層線路基板10及開孔基板20之間形成結合。此 時’該孔穴2 1之底部具有該多層線路基板丨〇預先設置之線 路11 ’因此每個孔穴2 1具有特定的線路1丨,以便在後續p 裝製程上晶片置入該孔穴21後打線連接該線路11。 (1 请參照第2 c圖所示,本發明第一較佳實施例之製造方法 接著在該穴入式多層基板1利用雷射或機械方式進行鑽 孔’在預定位置上形成數個通孔2,該通孔2在構造上連通 該穴入式多層基板1之上表面及下表面,同時通過數層線4 路層〔未標示〕。 請參照第2d圖所示,本發明第一較佳實施例之製造方法 接著將該開孔基板2 0之數個孔穴21進行覆膜,在每個該孔 穴21上覆盍形成一保護膜22,該保護膜22係由高分子材料C: \ Logo-5 \ Five Continents \ PK8202.ptd Page 8 504814 V. Description of the invention (5) Firstly, a hole 21 is mechanically opened on a hole substrate 20 to form several holes 21 'The hole 21 is in the structure The upper surface and the lower surface of the opening substrate 20 communicate with each other. Since the hole-making substrate 20 is previously holed in the hole 21, the first hole-opening process in the manufacturing of the multilayer printed circuit board necessarily increases the hole-processing margin relative to the latter hole-opening process. At the same time, the manufacturing method omits the process of setting the depth and opening holes of a multi-layer substrate with poor reliability. Therefore, the multi-layer substrate must be suitable for setting the circuit at the bottom of the hole.凊 Refer to Figure 2b, the manufacturing method of the first preferred embodiment of the present invention then stacks and press-fits a multilayer circuit substrate 10 and the open-hole substrate 20 to form / hole-type multilayer substrate 1. The multilayer The surface of the circuit substrate 10 is provided with a plurality of precise and precise lines 11 in advance, so that the plurality of lines 11 on the surface of the multilayer circuit substrate 1 Q correspond to the holes 21 of the open-hole substrate 20. In the printed circuit board structure, a bond is formed between the multilayer circuit board 10 and the opening substrate 20. At this time, 'the bottom of the hole 21 has the multi-layer circuit board 丨 〇 the pre-set circuit 11', so each hole 21 has a specific circuit 1 丨, so that the wafer is inserted into the hole 21 in the subsequent p-assembly process and wired. Connect this line 11. (1 Please refer to FIG. 2c. The manufacturing method of the first preferred embodiment of the present invention is followed by drilling through the hole-type multilayer substrate 1 by laser or mechanical means to form a plurality of through holes at predetermined positions. 2. The through hole 2 is structurally connected to the upper surface and the lower surface of the hole-type multi-layer substrate 1, and at the same time passes through several layers of lines and 4 layers of layers (not labeled). Please refer to FIG. 2d. The manufacturing method of the preferred embodiment then covers a plurality of holes 21 of the open-hole substrate 20, and forms a protective film 22 on each of the holes 21, and the protective film 22 is made of a polymer material.
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形成,使該孔穴21内部由該保護膜22覆蓋,以便該穴入式 多層基板1進行後續製程。本發明之覆膜塗佈方式較佳採 用網印〔screen printing〕、簾塗〔curtain coatmg〕、噴塗〔spray c〇ating〕及注塗〔土以 ““μ coatmg〕等。在傳統製造開孔穴多層線路基板上,由於 覆膜技術不易形成保護膜,所以孔穴底部不適合設置線 路0 ,參照第2e圖所示,本發明第一較佳實施例之製造方法 接著將該穴入式多層基板丨之通孔2之内周緣表面孔壁進行 電鍍形成一銅箔層,以便導通該多層線路基板丨〇及開孔基 板2 0之各線路層〔未標示〕。因此,該多層線路基板1 〇完 成各層間訊號連接之外,該多層線路基板1〇及開孔基板2〇 之間形成電性連接。 請參照第2f圖所示,經將該穴入式多層基板i進行外線 路層製作後,本發明第一較佳實施例之製造方法最後將|該 開孔基板20之孔穴21之保護膜22利用適當方法去除,使該 孔穴21内部形成開放空間供晶片置入,同時該孔穴2丨之線 路11則供晶片打線連接,藉此減小印刷電路板與電子元件 結合構造的體積。接著,再將該穴入式多層基板1視需要 進行防焊等後續製程以完成穴入式丨C封裝載板。 本發明之穴入式I c封裝載板之製造方法相較於習用方 法·本發明之穴入式IC封裝載板之製造方法係利用事先分 別製造多層線路基板及開孔基板後,再堆疊壓合形成穴入 式多層基板,特別再配合利用將該開孔基板之數個孔穴進It is formed so that the inside of the cavity 21 is covered by the protective film 22 so that the cavity-type multilayer substrate 1 can be subjected to subsequent processes. The film coating method of the present invention preferably uses screen printing, curtain coatmg, spray coating, spray coating, etc. On a conventionally manufactured multi-layer open circuit substrate with a hole, since the coating technology is not easy to form a protective film, the bottom of the hole is not suitable for setting the line 0. Referring to FIG. 2e, the manufacturing method of the first preferred embodiment of the present invention then inserts the hole into the hole. The inner peripheral surface of the through hole 2 of the multi-layer substrate 丨 is electroplated to form a copper foil layer so as to conduct the circuit layers [not labeled] of the multilayer circuit substrate 丨 and the open-hole substrate 20. Therefore, in addition to the multi-layer circuit substrate 10 completing the signal connection between the layers, an electrical connection is formed between the multi-layer circuit substrate 10 and the open-hole substrate 20. Please refer to FIG. 2f. After the hole-type multi-layer substrate i is manufactured as an outer circuit layer, the manufacturing method of the first preferred embodiment of the present invention will finally make the protective film 22 of the holes 21 of the open-hole substrate 20 It is removed by an appropriate method to form an open space inside the hole 21 for chip placement, and at the same time, the line 11 of the hole 2 is used for wire connection of the wafer, thereby reducing the volume of the combined structure of the printed circuit board and the electronic component. Next, the hole-type multilayer substrate 1 is subjected to subsequent processes such as soldering prevention as necessary to complete the hole-type C package carrier. The manufacturing method of the hole-type IC package carrier board of the present invention is compared with the conventional method. The manufacturing method of the hole-type IC package carrier board of the present invention is that the multilayer circuit substrate and the open-hole substrate are separately manufactured in advance, and then stacked and pressed. Combined to form a hole-type multi-layer substrate, which is specially combined with the use of several holes in the open-hole substrate.
504814 五、發明說明(7)504814 V. Description of Invention (7)
行覆膜’使每個該孔穴上覆蓋一保護膜,該保護膜保護孔 穴底部之線路以便進行後續製程如電鍍、製造外線路層, 該製造方法適用於開孔底部設置線路之穴入式多層基板, 以改善多層印刷電路板之製程效率及開孔加工之工作裕度 〔如方便性及高效率〕;反觀習用方法僅在多層印刷電^ 板上直接鑽孔形成孔穴,其相對於本發明之製造方法,習 用方法之直接開孔方式易損及佈線而不適用於如同本發明 方法之開孔底部設置精密線路。 X 雖然本發明已以前述較佳實施例揭示,然其並非用、 定本發明,任何熟習此技藝者,在不脫離本發明之於M限 範圍内,當可作各種之更動與修改,因此本^ RS > %神和 圍當視後附之申請專利範圍所界定者為準。 μ邊乾"Line film" covers each of the holes with a protective film, which protects the circuit at the bottom of the hole for subsequent processes such as electroplating and manufacturing the outer circuit layer. The manufacturing method is suitable for the hole-in multilayer of the circuit at the bottom of the opening. The substrate is used to improve the process efficiency of the multilayer printed circuit board and the working margin of the opening processing [such as convenience and high efficiency]; in contrast, the conventional method only directly drills holes on the multilayer printed circuit board to form holes, which is relative to the present invention. In the manufacturing method and the conventional method, the direct hole method is easy to damage and wiring, and is not suitable for setting a precise circuit at the bottom of the hole like the method of the present invention. X Although the present invention has been disclosed in the foregoing preferred embodiments, it is not intended to define or use the present invention. Any person skilled in the art can make various changes and modifications without departing from the scope of the present invention within the M limit. ^ RS >% Shenhewei Dang shall be determined by the scope of the attached patent application. μ edge dry
504814504814
【圖號說明】 式簡單說明 【圖式說明】 第1圖··習用多層印刷電路板構造之剖視圖。 第2a圖:本發明第一較佳實施例之穴入式1C封裝載板之 製造方法分別製造多層線路基板及開孔基板之剖面示意 圖0 第2 b圖:本發明第一較佳實施例之穴入式I c封裝載板之 製造方法堆疊壓合之剖面示意圖。 第2 c圖:本發明第一較佳實施例之穴入式I c封裝載板之 製造方法鑽孔之剖面示意圖。 第2 d :本發明第一較佳實施例之穴入式I c封裝載板之製 造方法覆膜之剖面示意圖。 第2e圖:本發明第一較佳實施例之穴入式1(:封裝載板之 製造方法鍍銅箔層之剖面示意圖。 第2 f圖:本發明第一較佳實施例之穴入式I c封裝載板之 製造方法去除保護膜之剖面示意圖。[Illustration of drawing number] Simple explanation of the drawing [Explanation of drawing] Fig. 1 · A cross-sectional view of a conventional multilayer printed circuit board structure. Fig. 2a: A cross-sectional schematic diagram of a method for manufacturing a hole-type 1C package carrier board according to the first preferred embodiment of the present invention for manufacturing a multilayer circuit substrate and an open-hole substrate, respectively. Fig. 2b: A first preferred embodiment of the present invention. Schematic cross-sectional view of the manufacturing method of the hole-type I c package carrier board. Fig. 2c: A schematic cross-sectional view of a drilled hole in the manufacturing method of the hole-type I c package carrier board according to the first preferred embodiment of the present invention. Second d: A schematic cross-sectional view of a method for manufacturing a hole-type I c package carrier board according to the first preferred embodiment of the present invention. Fig. 2e: Hole-in type 1 of the first preferred embodiment of the present invention: (Cross-section schematic drawing of a copper plated copper foil manufacturing method for a package carrier. Fig. 2f: Hole-in type of the first preferred embodiment of the present invention Schematic cross-sectional view of a method for manufacturing an IC package substrate without a protective film.
1 穴入式多層基板 la 線路層 lb 開孔層 lc 孔穴 Id 底部 2 通孔 10 多層線路基板 11 線路 20 開孔基板 21 開孔 22 保護膜1 Hole-type multilayer substrate la Circuit layer lb Hole layer lc Hole Id Bottom 2 Through hole 10 Multilayer circuit substrate 11 Circuit 20 Hole substrate 21 Hole 22 Protective film
C:\Logo-5\Five Continents\PK8202.ptd 第12頁C: \ Logo-5 \ Five Continents \ PK8202.ptd Page 12
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TW90128287A TW504814B (en) | 2001-11-13 | 2001-11-13 | Manufacturing method of caving type IC package carry board |
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TW90128287A TW504814B (en) | 2001-11-13 | 2001-11-13 | Manufacturing method of caving type IC package carry board |
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Cited By (1)
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US11570898B2 (en) | 2019-12-10 | 2023-01-31 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Multi-layer 3D foil package |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US11570898B2 (en) | 2019-12-10 | 2023-01-31 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Multi-layer 3D foil package |
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