TW503553B - Mask case and mask structure with active anti-ESD function - Google Patents

Abstract

A mask case and the mask structure with active anti-ESD function are proposed in the present invention. The invention includes a mask case or mask, and an electronic loop, which is connected with the electric conductor of the mask-case type mask and is capable of absorbing the static electricity. The electronic loop includes a first independent sub-loop and a second independent sub-loop. These sub-loops include a diode device and an active device, in which the diode device is used as the switch for controlling the flowing direction of electrostatic current and is connected with the electric conductor of the mask-case type mask. In addition, the active device, which is used for adjusting the electric potential balance between the mask-case type mask and the electronic loop, is connected with the diode device.

Description

503553

V. Description of the invention (1) [Known technical description The present invention relates to a structure of an active anti-static destruction (ant i-ESD) function, especially a kind of light which can prevent static electricity from breaking into the inside. The structure of the reticle pod of the cover, and the structure of the reticle that prevents the static electricity from damaging the circuit pattern. In the semiconductor process, the photomask is used to define the required pattern on the photoresist layer of the semiconductor wafer. Then the semiconductor wafer is based on the pattern of the photoresist layer and continues the following etching or ion layout process. The role of the photomask is the beginning of the definition of the entire semiconductor process pattern. If there is a problem in the beginning, no matter how well the subsequent adjustments of the exposure, development, and engraving systems are adjusted, it is just as good. Please refer to the top view of FIG. 1A, and the photomask box 10 of FIG. The mask 14 is 16, and the mask 1 4 is dropped. On the cover 16, a handle 20 is mentioned. When the line is in operation, the operator uses the predetermined position, but then, the 20 and so on are all covered with plastic covers. The figures on the bottom cover are equipped with the process advance machine and the handle connection diagram. FIG. 1B and FIG. 1A are cross-sectional diagrams of the conventional light, which is a line aa in FIG. 1A, and is a square box. The photomask box 10 is supported on the chassis 12. There is a cover on the chassis 12 to prevent outside particles from reaching the photomask 14, and the original photomask 14 has a groove 18 at the center of the square. The groove 18 is equal to 7 operators. Lithography carried the handle 20 and took the photomask box 10 to the step before performing the lithography process. The chassis 12 and the cover 16 on the photomask box 10 are formed by. Once the reticle box 10 communicates with foreign objects

503553

, It is very easy to generate electrostatic effects, and a large amount of charge is accumulated in a local area on the photomask box 10. In addition, with the shrinkage of the patterns in the semiconductor manufacturing process, the line width and line pitch of the metal mask on the photomask 14 are becoming smaller and smaller, so that the charges generated by the electrostatic effect easily lead to the metal lines on the photomask 14 An arcing discharge due to an electric field is like the discharge effect of a lightning rod. However, the high heat during the arc discharge can cause the metallic chromium to melt and change the pattern of the photomask 14. If the pattern of the photomask 14 is wrong, of course, the semiconductor wafers produced according to the pattern of the photomask 14 will become waste. In order to solve the change in the mask pattern caused by such static electricity, many methods have been implemented in the industry. One is to start from the environment. For example, the operator's gloves are equipped with a grounding device to prevent static electricity when hands touch the photomask box, or spraying ions (Ionizer) on the placement position and moving path of the photomask box to neutralize the may- Can generate static electricity. The other is to start with the material of the mask box ίο. For example, replacing the material of the cover 16, the recess 18, and the chassis 12 of the photomask box 10 with conductive materials can prevent the generation of static electricity. However, no matter how it is improved, it is a passive K antistatic method. If there is no conductor to ground, for example, if the operator does not touch the hand, the static electricity cannot flow out through the operator, and it remains on the photomask box 10 all the time. , Causing static electricity to damage the pattern of the photomask 14. [Summary of the Invention] In view of this, the first object of the present invention is to provide a photomask box structure with an active anti-static destruction function, which reduces the chance of static electricity on the one hand and blocks static electricity from light on the other. The effect of the hood can prevent static electricity at any time under any external machine and process environment changes.

5. Description of the invention (3) Damage caused by placing the mask in it. Electrically broken: Yu Yu-supply-a kind of active anti-static photomask = the effect on the photomask, which can prevent static electricity at any time from damaging the 'proposed by the present invention-a kind of active anti-static circuit can absorb Electrostatic circuit of static electricity. The electronic circuit includes a loop and a second sub-loop. For the 子 -sub return, the first is used to control the static current flow on. And the first active element, d :: the cathode of the conductor-diode element of the photomask box, 哕 = the potential of the positive electrode connected to the second electronic circuit; and 2j the photomask The anode of the box and the diode element and the first active [: diode element, the cathode of the second diode element is connected to the first — :: pole connection 'and the first ζϊ; forward: partial m Circuit. The first-forward: pressure =-message display element, can be monitored at any time: thunder and consumed. And current conditions. The second sub-circuit package includes: electricity: the life of the parts on the circuit and the switch for controlling the flow of electrostatic current, and the second diode element of the flute is used to be connected to the conductor of the photomask box. ^ The cathode of the second diode element is connected to the negative electrode of the active element, and the third and second active elements are connected to the third and second active elements. Potential balance between electronic circuits. And 0503-5934TWF; TSMC2000-0667; Jacky.ptd Article 503553 V. Description of the invention (4) The fourth diode element, the positive pole of the element is connected, and the negative pole of the active element is connected to the forward bias circuit. Heat energy is consumed. Through the invention of parts on electronic circuits, the degree of semiconductor production can be increased. In addition, the invention also has a light-arm structure, which includes, for example, a chrome film, and a type that includes an independent first sub-element and a first diode element. The potential of the first diode element and the first active element, the cathode of the body element, and the main are balanced. The anode of the element and the cathode of the first main element are connected to the first forward bias circuit. This piece is used to enable the electrostatic energy display element to monitor the condition at any time. And the second sub-loop makes the electrostatic current flow to the fourth and second poles of the switch to form: a passive and a signal and current to effectively put the stability of the product into a photomask, which can absorb the static circuit and the first, When the anode is connected to the first active element and the second second movable element, an active element and a forward bias are converted to measure the electron. The electron includes: the third, the third body element, the polar element, and the second forward element. situation. The mask box and the letter have a main and an electric secondary circuit that are controlled by the element to adjust the negative-pressure loop thermal energy of the positive connection of the polar element and the negative direction of the three-pole-polar anode on the circuit. Bias is used to make the component quiet. The movable type prevents the photomask from a sub-circuit. The positive electrode of the electrostatic mask is connected to the mask member, the junction, and the pole connection further includes the consumed parts, body elements, and the second active electrode and the second circuit. The second electrostatic energy can be monitored at any time to eliminate the electricity to the conductor with the lowest electrostatic destruction function. The first sub-circuit of the electronic circuit includes the flow to the switch and the conductor. Take the first dipole and the electric second two and the second in the form: a bedding. And brother's life and, used to connect the cathode circuit, the polar element, the diode, the first motive element, the message, the current, as the control.

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f photoconductor. And a second active element, the second main f negative electrode is connected to the anode of the third diode element, the active element adjusts the @potential between the photomask and the electronic circuit and a fourth element, the fourth diode The anode of the element is connected to the second active element, and the cathode of the fourth diode element is connected to the second active negative electrode to form a second forward bias circuit. The second forward direction further includes: a passive element for converting the electrostatic energy into / shaw. And a message display element can monitor the life and current status of the electronic parts at any time. The moving element is used to adjust the bias of the positive element of the diode and return the thermal energy to the circuit.

According to this invention, the static electricity on the photomask can be reliably eliminated to a minimum, and the circuit pattern on the photomask can be scrapped due to electrostatic damage. The greatest advantage of the present invention is the cost savings. It is only connected with an active static elimination electronic circuit. This action will not affect the conventional mask box and the external structure of the mask. Therefore, the interface of the machine and the processing environment for processing the mask box and the mask need not be changed, which can save the cost of change. In order to make the above-mentioned objects, features, and advantages of the present invention more comprehensible, two preferred embodiments are given below and described in detail with the accompanying drawings as follows:

[Brief description of the drawings]: FIG. 1A is a top view of a conventional photomask box; FIG. 1B is a schematic cross-sectional view taken along line aa in FIG. 1A; and FIG. 1C is a schematic photomask box of a conventional passive static elimination Figure 2 is the active static elimination photomask of the first embodiment of the present invention

0503-5934TWF; TSMC2000-0667; Jacky.ptd Page 8 ---. V. Description of the invention (6) The box is not intended; Figure 3 is a schematic diagram of the active electrostatic of the second embodiment of the present invention; Chen Zhijiu Dan Fig. 4 is a circuit of active static elimination according to the present invention. [Symbol description]: %%. 1 0 ~ mask box, 16 ~ cover, 18 ~ groove, 21 ~ operator's hand, 23 ~ mask, 32 ~ pattern area 42 and 42 '~ resistor on the mask, 44 ~ fuse, 12 ~ Chassis, 14 ~ Mask, 20 ~ Handle, 22 ~ Active static elimination circuit, 31 ~ Chrome film on the mask, 41 and 4Γ ~ Battery, 43, 43 ', 46 and 46, ~ Diode 4 5 and 4 5 ′ ~ bulb embodiments: Difference 1 embodiment: Please refer to FIG. 1C, FIG. 2 and FIG. 4, FIG. 1C is a schematic diagram of a conventional passive static elimination mask box, and FIG. 2 is the present invention The first embodiment is a schematic diagram of an active static elimination mask box, and FIG. 4 is an embodiment of the active static elimination circuit of the present invention. In Figure lc, the area where the operator's hand most often touches the mask box 20, that is, the handle 20 and the surface of the groove 18j, are all made of conductive material, and the contact between the conductive material and the hand causes static electricity. Via hand = 'This is the conventional static elimination method, which is passive. _See Figure 2. Figure 2 is the active mode of the present invention.

0503-5934TW; TSMC2000-0667; Jacky. Ptd Page 9 503553 V. Description of the invention (7) Schematic diagram of static elimination mask box. In the second figure, the present invention proposes a main f-type (active) antistatic destruction ( anti-ESD) structure, which includes a mask box ο, which is used to cover a mask 23, on the mask box 10 :, on the electrical body, for example, a hand made of a conductor, The groove, cover or chassis forms an electronic circuit 22 capable of absorbing static electricity. For the electronic circuit 22, please refer to FIG. 4. The electronic circuit includes a fuse element and an independent: sub-circuit and a second sub-circuit. The first sub-element ^ ^ on the left side of FIG. 4 includes a first diode element 46, which is used to control the electrostatic current flow to the two anodes connected to the first diode element 46. The mask box 10 and the first active element 41 are the positive pole of the first active element 41 and the first pole of the diode element 46, and the first active element ② is used to adjust the two second poles and the electronic circuit 22 And the second element j, the anode of the second diode element 43 is connected to the first active diode 5 and the cathode of the second diode element 43 is connected to the 41 The negative poles are connected to form a first forward bias circuit. The first forward bias circuit P is white. M, ^, +, and 峪 further include a resistor 42 for the electrostatic energy to be measured and consumed. And—the information display element 45 can be monitored at any time: upper: the life of the part and the current status, and includes: a third diode element 46, which is used as: Yu Xiyi switch 'the third diode The cathode of the element 46 'is connected to the second active element 41, and the negative electrode of the second active element 41 ,, ^ ^ ^, is connected to the third diode element 46, Between the anode and the thunder, 2 ^ 41, is used to adjust the vertical balance between the photomask box 10 and the electronic circuit 22, and the fourth diode element 43, the fourth diode

503553 V. Description of the invention (8) '-------- The anode of the 5 element 43' is connected to the anode of the second active element 41 ', and the cathode of the fourth diode element 43' is connected to The second active element 41 = 2 ′ to form a second forward-biased M-loop. The first: forward-biased magic circuit further includes: a resistor 42, which is used to convert the electrostatic energy into thermal energy and consume more. And a message display element 45, can monitor the life and current status of the parts of the electronic circuit at any time. By this invention, the static electricity on the photomask box 10 can be reliably eliminated to a minimum, the influence of static electricity on the photomask 23 in the photomask box 10 can be reduced, and the stability and reliability of semiconductor products can be improved. Please refer to FIG. 4, which is an embodiment of the active static elimination circuit of the present invention. When the electrostatic potential energy on the photomask box 10 is higher than the potential energy of the battery 41 or 41 of the circuit 22, static electricity will flow into the active static elimination circuit 22, and in the resistance 42 or 42 of the circuit 22, The static current will be converted into thermal energy and disappear automatically. Therefore, no matter whether the static electricity remaining on the photomask box is positive or negative, the present invention can achieve the effect of active static elimination anytime, anywhere. Second embodiment: Please refer to FIG. 3 and FIG. 4. FIG. 3 is a schematic diagram of an active static elimination mask according to a second embodiment of the present invention. FIG. 4 is an embodiment of an active static elimination circuit of the present invention. . Please refer to FIG. 3 'FIG. 3 is a schematic diagram of an active static elimination mask according to the second embodiment of the present invention' In FIG. 3, the present invention proposes an active anti-ESD function A photomask structure includes a photomask 23 for lithographically exposing a circuit pattern, and

0503-5934TWF; TSMC2000-0667; Jacky. Ptd page 11 503553 V. Description of the invention (9) = 23 = Conductor, such as a chromium film 31, is connected to a circuit 22 capable of absorbing static electricity. The electronic circuit 22 includes a fuse element, an independent core sub-circuit and a second sub-circuit. The first element on the left side of FIG. 4 includes: zither: diode element 46, which is used to control the static current flow; on the body: ΐ: the anode of the element 46 is connected to the The pole of the reticle 23 and the vehicle body are an active element 41, and the positive pole of the first active element 41 is connected to. The cathode of the first diode element 46 and the active element 41 adjust the potential balance between the photomask 23 and the electronic circuit 22. The second: the body element 43, the anode of the second diode element 43 and the first-active plant w ΐ the first cathode are connected with the negative electrode of the first active 7L member 41 to form a first forward bias The first forward bias circuit further includes: a resistor 42 to make the static electricity = heat energy to be consumed. And—the message shows the life and current status of the parts on the electronic circuit. The second sub-circuit that is located at any time includes: a third diode element 46 ,, == a static current flow switch, and the cathode of the third diode element 46, is greater than the photomask 23 On the chromium film 31. And the second active element 41:,: = the negative pole of the active element 41 'is connected to the anode of the third diode element ^, and the active element 41' is used to adjust the photomask 23 and the electronic circuit ^ 'potential balance . And the fourth diode element 43, the anode of 43 'of the fourth-4 is connected to the positive pole of the second active element 41, and the cathode of the integrated element pole element 43, is connected to the second active element 41. ,, forty-two to form a second forward bias circuit. The second forward bias is defeated, connected, and a resistor 42 'is used to convert the electrostatic energy into thermal energy; Shaw consumes more including:

503553 V. Description of the invention (ίο) A message display element 4 5 ′ can monitor the sidelines and current conditions of parts on the electronic circuit at any time. 7 With this invention, static electricity on the reticle 23 can be reliably eliminated to a minimum, the influence of the static electricity on the reticle 23 can be reduced, and the precision of the exposure of the reticle pattern 32 in the lithography process can be increased. Please refer to FIG. 4 'FIG. 4 is an embodiment of the active static elimination circuit of the present invention. When the electrostatic potential energy on the photomask 23 is higher than the potential energy of the battery 41 or 41 'of the circuit 22, static electricity will flow into the active static elimination circuit 22, and in the resistance 42 or 42 of the circuit 22, The electrostatic current will be converted into thermal energy and will disappear automatically. Therefore, the present invention can achieve the effect of active elimination of electricity anytime, anywhere, regardless of the static state remaining on the reticle 23 == negative. Although the present invention is disclosed as above with a preferred embodiment, the bran 1 determines the present invention, and any person skilled in the art can use it as follows: Within the scope, when it can be changed slightly, the spirit of non-invention is not blood. , Xingrun decoration, so the captive scope # of the present invention is determined by the scope of the attached patent application. "

Claims (1)

/ 、、 Scope of patent application 1 · One type includes: a photomask and an electronic conductor. 2 · Rushen circuit includes 3 · Rushen circuit includes parts on the other end. 4 · Rushen sub-circuit includes the first active element of the active element between the second and the first two-pole and the circuit of the first main body element. Bias-backed photomask box structure with active anti-Wei > electrical damage function, the box is used to cover a photomask; and the circuit has a function of absorbing static electricity and is connected to the photomask box f range The mask box structure according to item 1, wherein the electrons are independent of the first sub-loop and the second sub-loop. Please cover the mask box structure described in item 1, where the electronic two: fuse: pieces, one end is connected to the conductor of the mask box, and the sub-circuit can be protected at any time, and the electronic circuit can be protected at any time. The photomask box structure, in which the first polar body element is used to roll in the soil 丨 μ ^ lie down-from ΛΑ, Tian Zuo controls the static current flow to the switch, the anode of the body 7G part is connected to the reverse ... on the conductive body of the photomask box; a moving element, the positive electrode of the first master flip-flop 70 active part is connected to the first two cathodes, and the active element is used to adjust the photomask box and the electronics Potential balance; and ^ ^ polar body element, the anode of the first-one coin one pole body element is connected to the first positive electrode, and the 篦-1 Μ Μ self-fabricated, check 4 brothers-1 pole The cathode of the body element is connected to the t ΐ Ϊ 以 to form a first forward bias circuit. The mask box structure described in Item 4 of the Moon Range, wherein the first way further includes: '' 0503-5934TWF; TSMC2000-0667; Jacky.ptd Page 14 503553 VI. Patent application scope-a passive element to convert the electrostatic energy into heat and consume it; and a message display element that can monitor the electronic circuit at any time Parts life and current conditions. ° 6. The photomask box structure according to item 2 of the application scope, wherein the second sub-circuit includes: a second diode element, which is used as a switch for controlling the flow of electrostatic current, the second diode element The cathode is connected to the conductive body of the photomask box and a second active element, and the negative electrode of the second active element is connected to the anode of the third body element, which is used to adjust the photomask. The potential balance between the box and the electronic circuit; and a fourth diode element, the anode of the fourth diode element is connected to the positive electrode of the second moving element, and the cathode of the fourth diode element is connected to the The negative pole of the first active 7L piece is connected to form a second forward bias circuit. 7. The photomask box structure described in item 6 of the scope of application, wherein the second forward bias circuit further includes ... Passive components are used to convert the electrostatic energy into thermal energy to be consumed; and a message display component can monitor the life and current conditions on the electronic circuit at any time. 8．If any of the application scope items 4 and 6 The mask box structure described in the item, In such active element is a battery. Reticle according to any one of the junction box 9. The application range of the eye item 5 and 7 The scope of the patent is claimed ‘where the passive components are resistors.丨 〇 · If any of the scope 5 and 7 of the scope of application, where the information display elements are light bulbs, light-emitting / photoresist box junctions U. A kind of active anti-static destruction pole. Including: The mask structure of the sword criminal, whose optical army ’uses an electronic circuit. Lithographic exposure pattern; and, with the function of absorbing static electricity, the electrons and the photomask structure described in item 11 of the application scope are selected in the guide of the photomask, and the c-channel includes an independent first Sub-loop and second sub-loop. The circuit includes, for example, the Λ mask structure described in item 11 of the application / 1, where the electronic bracket is connected to the conductive body of the mask, and the component is connected to the sub-circuits, which can be connected at any time. 14. The photomask structure described in item 12 of the scope of application for protection of the electronic circuit, wherein the sub-circuit includes: ', w = 々 the first diode element, which is used as a switch to control the flow of electrostatic current, The anode of the first diode element is connected to the conductive body of the photomask; and a first active element, the anode of the first driving element is connected to the cathode of the first diode element, and the active element is used for Adjusting the potential balance between the photomask and the electronic circuit; and a second diode element, the anode of the second diode element is connected to the positive electrode of the first active element, and the second diode element The cathode is the same as the first 0503 _ 5934TWF; TSMC20〇〇〇〇667; Jacky · p t d " ^ 16 Μ ^ ^ ^ 03553 VI. Scope of patent application An anode of the active device is connected to form a first forward bias circuit. 15. The photomask structure according to item 14 of the application scope, wherein the first forward bias circuit further comprises: a passive element for converting the electrostatic energy into thermal energy for consumption; and an information display element, It can monitor the zero life and current status on the electronic circuit at any time. May 16. The mask structure according to item 12 of the application scope, wherein the second sub-loop includes: The third diode element is used as a switch for controlling the flow of electrostatic current. The cathode of the μdiode element is connected to the conductive body of the photomask. With the first active element, the anode of the polar element, the The potential balance between the circuits; the negative electrode of the second active component is connected to the 70th and second active components, which are used to adjust the photomask and the electronic return card 70 忏, and the positive connection of the fourth diode active component The negative electrode 1 of the fourth diode and the negative electrode of the second and second active element are connected, and the cathode in the shape of + is connected to the pressure circuit described in item 16 of the first application scope. The forward bias circuit further includes: a zigzag, zigzag, and zigzag structure, in which the second passive element is used to make the static electricity fall; and here it is converted into thermal energy and consumes an information display element, which can be aged and current at any time situation. Regulate the life of parts on this electronic circuit 0503-5934TWF; TSMC200-〇667; Jacky.ptd 503553 VI. Scope of patent application 18. The photomask structure described in any one of item 14 and 16 of the scope of application, wherein the active components are batteries. 19. The photomask structure according to any one of items 15 and 17 of the scope of application, wherein the passive components are resistors. 2 0. The photomask structure according to any one of items 15 and 17 of the scope of application, wherein the information display elements are light bulbs and light emitting diodes. # 0503-5934TWF; TSMC2000-0667; Jacky.ptd Page 18