TW487151U - Piezoelectric fluid control valve - Google Patents

Piezoelectric fluid control valve

Info

Publication number
TW487151U
TW487151U TW090206115U TW90206115U TW487151U TW 487151 U TW487151 U TW 487151U TW 090206115 U TW090206115 U TW 090206115U TW 90206115 U TW90206115 U TW 90206115U TW 487151 U TW487151 U TW 487151U
Authority
TW
Taiwan
Prior art keywords
control valve
fluid control
piezoelectric fluid
piezoelectric
valve
Prior art date
Application number
TW090206115U
Other languages
English (en)
Inventor
Toyonobu Sakurai
Original Assignee
Smc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Smc Corp filed Critical Smc Corp
Publication of TW487151U publication Critical patent/TW487151U/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezoelectric stacks

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Flow Control (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
TW090206115U 2000-05-08 2001-04-18 Piezoelectric fluid control valve TW487151U (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000134831A JP2001317646A (ja) 2000-05-08 2000-05-08 圧電式流体制御弁

Publications (1)

Publication Number Publication Date
TW487151U true TW487151U (en) 2002-05-11

Family

ID=18643032

Family Applications (1)

Application Number Title Priority Date Filing Date
TW090206115U TW487151U (en) 2000-05-08 2001-04-18 Piezoelectric fluid control valve

Country Status (6)

Country Link
US (1) US6345803B2 (zh)
EP (1) EP1154180A3 (zh)
JP (1) JP2001317646A (zh)
KR (1) KR100439667B1 (zh)
CN (1) CN1279302C (zh)
TW (1) TW487151U (zh)

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JP4743763B2 (ja) * 2006-01-18 2011-08-10 株式会社フジキン 圧電素子駆動式金属ダイヤフラム型制御弁
US20070205384A1 (en) * 2006-03-02 2007-09-06 Smc Kabushiki Kaisha Flow Rate Control Apparatus
CN100419279C (zh) * 2007-03-22 2008-09-17 浙江大学 压电晶体数字阀
JP4933936B2 (ja) * 2007-03-30 2012-05-16 株式会社フジキン 圧電素子駆動式制御弁
US9308307B2 (en) 2007-09-13 2016-04-12 Fresenius Medical Care Holdings, Inc. Manifold diaphragms
US9358331B2 (en) 2007-09-13 2016-06-07 Fresenius Medical Care Holdings, Inc. Portable dialysis machine with improved reservoir heating system
US8597505B2 (en) 2007-09-13 2013-12-03 Fresenius Medical Care Holdings, Inc. Portable dialysis machine
US8240636B2 (en) 2009-01-12 2012-08-14 Fresenius Medical Care Holdings, Inc. Valve system
US8105487B2 (en) 2007-09-25 2012-01-31 Fresenius Medical Care Holdings, Inc. Manifolds for use in conducting dialysis
US8114288B2 (en) 2007-11-29 2012-02-14 Fresenlus Medical Care Holdings, Inc. System and method for conducting hemodialysis and hemofiltration
US9199022B2 (en) 2008-09-12 2015-12-01 Fresenius Medical Care Holdings, Inc. Modular reservoir assembly for a hemodialysis and hemofiltration system
US7841579B2 (en) * 2007-11-01 2010-11-30 Honeywell International Inc. Piezoelectric actuator with a gimballed valve
AU2009302327C1 (en) 2008-10-07 2015-09-10 Fresenius Medical Care Holdings, Inc. Priming system and method for dialysis systems
CN105056324B (zh) 2008-10-30 2019-01-01 弗雷塞尼斯医疗保健控股公司 模块化便携透析系统
TWI435196B (zh) * 2009-10-15 2014-04-21 Pivotal Systems Corp 氣體流量控制方法及裝置
CN102072352B (zh) * 2010-11-18 2012-07-04 北京航空航天大学 一种压电阀门
US9400004B2 (en) 2010-11-29 2016-07-26 Pivotal Systems Corporation Transient measurements of mass flow controllers
DE102011084107A1 (de) * 2011-10-06 2013-04-11 Continental Automotive Gmbh Piezoelektrischer Aktuator
US8783652B2 (en) * 2012-03-12 2014-07-22 Mps Corporation Liquid flow control for film deposition
JP5985314B2 (ja) * 2012-09-07 2016-09-06 株式会社堀場エステック 弁要素及び流体制御弁
CN102979941B (zh) * 2012-12-13 2014-06-04 浙江师范大学 一种自带传感器的大流量压电叠堆阀
US9201036B2 (en) 2012-12-21 2015-12-01 Fresenius Medical Care Holdings, Inc. Method and system of monitoring electrolyte levels and composition using capacitance or induction
US9157786B2 (en) 2012-12-24 2015-10-13 Fresenius Medical Care Holdings, Inc. Load suspension and weighing system for a dialysis machine reservoir
JP5775110B2 (ja) * 2013-03-26 2015-09-09 株式会社フジキン 流量制御装置用の流量制御弁
KR102155810B1 (ko) * 2013-09-04 2020-09-14 가부시키가이샤 호리바 에스텍 인터레이스 리프팅 기구
KR102079533B1 (ko) * 2013-09-30 2020-02-21 히타치 긴조쿠 가부시키가이샤 유량 제어 밸브 및 그것을 사용한 질량 유량 제어 장치
US9354640B2 (en) * 2013-11-11 2016-05-31 Fresenius Medical Care Holdings, Inc. Smart actuator for valve
WO2015125438A1 (ja) * 2014-02-24 2015-08-27 株式会社フジキン 圧電式リニアアクチュエータ、圧電駆動バルブ、及び、流量制御装置
DE102014116295A1 (de) * 2014-11-07 2016-05-12 Bürkert Werke GmbH Sitzventil
US10401202B2 (en) 2015-07-10 2019-09-03 Pivotal Systems Corporation Method and apparatus for gas flow control
CN109952459B (zh) 2016-11-08 2021-02-26 株式会社富士金 阀装置、使用该阀装置的流量控制方法和半导体制造方法
WO2018100968A1 (ja) * 2016-11-30 2018-06-07 株式会社フジキン バルブ装置、このバルブ装置を用いた流量制御方法および半導体製造方法
CN111133239A (zh) * 2017-09-25 2020-05-08 株式会社富士金 阀装置、流量调整方法、流体控制装置、流量控制方法、半导体制造装置和半导体制造方法
WO2019102882A1 (ja) * 2017-11-24 2019-05-31 株式会社フジキン バルブ装置およびその制御装置を用いた制御方法、流体制御装置および半導体製造装置
US11079774B2 (en) * 2017-11-30 2021-08-03 Fujikin Incorporated Flow rate control device
KR102337975B1 (ko) * 2018-03-09 2021-12-10 가부시키가이샤 후지킨 밸브 장치
WO2020158459A1 (ja) * 2019-01-31 2020-08-06 株式会社フジキン バルブ装置、このバルブ装置を用いた流量制御方法、流体制御装置、半導体製造方法、および半導体製造装置
CN113423987A (zh) * 2019-01-31 2021-09-21 株式会社富士金 阀装置、流量控制方法、流体控制装置、半导体制造方法以及半导体制造装置
IL268254B1 (en) * 2019-07-24 2024-06-01 Ham Let Israel Canada Ltd Flow control accessory
DE102020115057A1 (de) * 2020-06-05 2021-12-09 Bürkert Werke GmbH & Co. KG Ventillinearantrieb sowie Ventil
US11879567B2 (en) * 2021-09-10 2024-01-23 New Scale Technologies, Inc. Microvalve using near-field-acoustic levitation and methods thereof

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JP2529388B2 (ja) * 1988-08-25 1996-08-28 日立金属株式会社 ガス流量制御装置用バルブ
US5092360A (en) * 1989-11-14 1992-03-03 Hitachi Metals, Ltd. Flow rated control valve using a high-temperature stacked-type displacement device
JPH048974A (ja) * 1990-04-27 1992-01-13 Hitachi Metals Ltd ガス流量制御装置用バルブ
JPH0434275A (ja) * 1990-05-26 1992-02-05 Stec Kk 常閉型流体制御バルブ
JP3012042B2 (ja) 1991-07-19 2000-02-21 株式会社リンテック 質量流量制御器の制御弁
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JPH0742869A (ja) * 1993-08-02 1995-02-10 Hitachi Metals Ltd バルブ装置
JP2959700B2 (ja) 1993-12-28 1999-10-06 日本電子株式会社 圧電式流量制御弁
JPH07310842A (ja) * 1994-05-19 1995-11-28 Fujikin:Kk 微流量調整弁
JPH08226562A (ja) * 1995-02-21 1996-09-03 Jatco Corp 流量制御装置
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JPH10231944A (ja) 1997-02-20 1998-09-02 Jeol Ltd 圧電式流量制御弁
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JPH11173440A (ja) 1997-12-10 1999-06-29 Fischer Rosemount Japan Kk 流量制御バルブ

Also Published As

Publication number Publication date
US6345803B2 (en) 2002-02-12
EP1154180A2 (en) 2001-11-14
US20010038083A1 (en) 2001-11-08
KR100439667B1 (ko) 2004-07-12
CN1472457A (zh) 2004-02-04
KR20010102938A (ko) 2001-11-17
EP1154180A3 (en) 2002-12-04
CN1279302C (zh) 2006-10-11
JP2001317646A (ja) 2001-11-16

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MM4K Annulment or lapse of a utility model due to non-payment of fees