A7 ----^-------- 五、發明說明（\ ) [發明所屬之技術領域] 本發明，係關於搬送用機械手臂，更詳言之，係關於 多室型之半導體製造裝置、或LCD製造裝置等製造裝置的 搬送用機械手臂’以將在處理室加工處理之晶片等薄板狀 工件搬送至處理室。 [習知技術] 多室型之半導體製造裝置，其構成如圖1所示，在轉 移室1之周圍，設有由複數個處理室所構成之處理室站2a 、2b、2c、2d、2e ’及對外部交接工件之交接站3，轉移 室1內恆以真空裝置保持真空。 又，上述轉移室1，其構成如圖2所示，在該室1之 中心部，具備如圖3所示，亦即，如日本專利特表平8-506771號公報所述之能轉動的搬送用機械手臂A1。在轉 移室1之周壁，亦即在對向於處理室站2a、2b、2c、2d、 2e及工件交接站3之隔板5上，設有工件搬送至各處理室 站之出入口的門6。該門6，係以設置在轉移室1之內側、 面對各門6之未圖示的開關門扇來進行開關。 上述搬送用機械手臂A1，係使用所謂蛙腿式之雙臂型 者，其構造如圖3、圖4、圖5所示。 在搬送用機械手臂A1之中心部，設有二支能分別旋 轉、相同長度之臂部7a、7b。搬送用機械手臂A1，具有 相同形狀之二個搬送台8a、8b，在該搬送台8a、8b之基 部，連結二支相同長度之連桿9a、9b之一端。該兩連桿 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁)A7 ---- ^ -------- 5. Description of the invention (\) [Technical field to which the invention belongs] The present invention relates to a transport robotic arm, more specifically, to a multi-chamber semiconductor A transfer robot 'of a manufacturing apparatus or a manufacturing apparatus such as an LCD manufacturing apparatus transfers a thin plate-like workpiece such as a wafer processed in a processing chamber to the processing chamber. [Conventional Technology] A multi-chamber type semiconductor manufacturing apparatus has a structure as shown in FIG. 1. Around the transfer chamber 1, there are processing chamber stations 2a, 2b, 2c, 2d, and 2e composed of a plurality of processing chambers. 'And the transfer station 3 for externally transferring workpieces, the vacuum in the transfer chamber 1 is constantly maintained by a vacuum device. The transfer chamber 1 is structured as shown in FIG. 2, and the center of the chamber 1 is provided with a rotatable mechanism as shown in FIG. 3 as shown in FIG. 3, that is, as described in Japanese Patent Application Publication No. 8-506771. Robot arm A1 for transportation. On the peripheral wall of the transfer chamber 1, that is, on the partition plate 5 facing the processing chamber stations 2a, 2b, 2c, 2d, 2e and the workpiece transfer station 3, there are doors 6 for transferring workpieces to the entrances and exits of the processing chamber stations. . This door 6 is opened and closed by a not-shown door leaf provided inside the transfer chamber 1 and facing each door 6. The above-mentioned conveying robot arm A1 is a so-called frog-leg type double-arm type, and its structure is shown in Figs. 3, 4, and 5. In the central portion of the transfer robot arm A1, two arm portions 7a and 7b which can rotate and have the same length are provided. The transfer robot arm A1 has two transfer tables 8a and 8b of the same shape. One end of two links 9a and 9b of the same length is connected to the base of the transfer tables 8a and 8b. The two connecting rods The paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page)
Mmw--------訂---------線·- 經濟部智慧財產局員工消費合作社印製 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（) 9a、9b之一端，透過蛙腿式之搬送台姿勢限制機槍淹。 丨传題結方々 搬送台8a、8b ’兩連桿9a、9b係相對搬送台8a、Su 、 而旅 轉於完全對稱方向。此外，連結於各搬送台8a、8b 硬 連桿中，一邊之連桿連結於一邊之臂部，另一邊之喻^支 <'題桿則 連結於另一邊之臂部。 圖4(a)、（b)，係顯示上述蛙腿式之搬送台姿擊^ 次努限制機 構。連結於搬送台8a、处之一支連桿9a、9b之前端气 如圖4〇)所示，係藉互相嚙合之齒輪9c、9c所構成之^輪 構造來結合’使相對搬送台8a、8b之連桿9a、9b之姿^ 角度SR、eL恆呈相同。藉此，即使改變連桿9a與連桿 9b所成之角度’搬送台8a、8b亦能恆朝向轉移室1之半 徑方向，同時藉由改變該角度而向半徑方向動作。上述連 桿9a、9b前端部之連結，亦有如圖4(b)所示，取代齒輪， 而在連稈％、9b之前端部所設置之相同直徑之滑輪％、 9e上，將皮帶9d交叉斜掛而構成者。 圖5，係顯示使圖3所示之先前之搬送用機械手臂A1 之臂部7a、7b分別獨立旋轉所使用之現有的機構。臂部 7a、7b之基部’係分別結合於旋轉軸13a、13b，各旋轉軸 i 3 a、13 b係配置成同心狀。該各個旋轉軸13 a、13 b ’係連 結於直接驅動型馬達Ua ' Mb之輸出部’在轉移室1之框 架la上，以同心狀且位置錯開於軸方向的方式支撐該馬達 14a、14b。此時，一邊之馬達14a之旋轉軸13a變長而貝 穿另〆邊馬達⑽而向上方延長。又，該現有技術:^ 在馬達內進行真空環境側之轉移室與外側環境之間^， 國家標準（CNS)A4規格（210 X 297公釐 --------訂---------線· rtt先閱讀背面之速意事項再填寫本頁} 經濟部智慧財產局員工消費合作社印制衣 1/ 7 ·> 4 > ° A7 _______B7_____ 五、發明說明（S ) 此，在構成馬達14a、Mb之定子16與轉子Π間設置隔板 18，由該隔板18來隔離上述兩環境。 然後，如圖3所示，當兩臂部7a、7b相對旋轉中心在 直徑方向位於對稱位置時，連桿9a、9b旋轉成相對兩搬送 台8a、8b呈最爲擴張之狀態，因此兩搬送台8a、8b向旋 轉中心側移動。 於該狀態下，藉將兩臂部7a、7b向同一方向旋轉，兩 搬送台8a、8b即在維持半徑方向之位置的情形下相對旋轉 中心旋轉。又，藉使兩臂部7a、7b向互相接近之方向（互 爲相反方向）旋轉，使位於兩臂部7a、7b所夾角度較小方 之搬送台8a被連桿9a、9b推出而朝放射方向外側突出’ 進入鄰接轉移室1之放射方向外側所設置之上述站2a'2b 、2c、2d、2e中之一個站之處理室內。 該時，另一邊之搬送台雖向旋轉中心側移動’但 臂部7a、7b與連桿9a、9b所夾角度之關係，其移動量甚 小。 又，作爲習知技術，除上述日本專利特表平8_5()6771 號公報所示者外，亦有使用具有如日本專利特開_ 1(^ 128692號公報所示之機構之直接驅動型真空馬達的搬送用 機械手臂。 [發明欲解決之課題] 上述現有技術中，由於係將二個馬達之位置錯開於軸 方向（上下），且將各自的輸出軸於同一方向配置成同心狀 5 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） — — — — — — — — — — in! ^* — 1 —---- „^· (請先閱讀背面之注意事項再填寫本買) A7 B7 ~ — ' 五、發明說明（t) ’上側馬達之輸出軸爲中空構造，其中貫穿了下側馬達之 輸出軸。因此，位於下側之馬達之輸出軸變得較長使得其 剛性降低，而產生因扭曲振動使定位精度降低等之問題。 此外，由於驅動部之軸方向之尺寸係向上下變大，因 此該驅動部大大地突出於轉移室之下部，而有使轉移窆之 下部之維修空間變窄之問題。 再者，在高溫處理等需將製造裝置全體加以絕熱時， 若機械手臂驅動部大大地突出於轉移室之下部，則又產生 絕熱構件之構造變得複雜，使絕熱效果減低之問題。 又，上述現有技術中，由於將真空環境及與此相离之 環境間隔開的隔板係位於馬達內，因此用以保持馬達部之 真空環境側之氣密的構造變得複雜。 本發明，係鑑於上述問題點而爲，其目的在提供一種 使馬達輸出部之剛性變得極大，能消除定位精度之降低、 或扭曲變形所引起之振動之發生，且能大幅減少轉移室下 部之突出尺寸，飛躍地提高維修性，進一步的，在高溫過 程等將製造裝置全體予以絕熱時，亦能使絕熱構件之構造 簡單，而能簡單地構成馬達部之真空環境側之氣密機構的 搬送用機械手臂。 [用以解決課題之手段及作用效果] 爲達成上述目的，申請專利範圍第1項之搬送用機械 手臂，係將連結搬送台之機械手臂連桿機構之基端構件固 接於馬達之輸出構件，其特徵在於：馬達之定子、轉子、 6 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） (請先閱讀背面之淡意事項再填寫本頁) —丨丨丨—丨訂---------線一 經濟部智慧財產局員工消費合作社印製 A7 ____B7___ 五、發明說明（ζ ) 位置偵測器、及轉子支撐軸承，係在軸方向設置於大致同 一位置。 根據該構造，由於馬達之輸出櫸件之軸方向長度變短 ，能提高該輸出構件之扭曲剛性，因此固接於該輸出構件 之機械手臂連桿機構之振動減少，能消除定位精度之降低 、或扭曲變形等所引起之振動的產生。又，由於能減小驅 動部分之軸方向之大小，故能大幅減少軸之轉移室下部之 突出尺寸，而能圖謀機械手臂全體之小型輕量化。又，如 上述般，由於軸方向之尺寸縮短，藉大幅減少轉移室下部 之突出尺寸，能飛躍地提高維修性。 進一步的，由於馬達驅動部分之向軸方向之尺寸減小 ，且該部分之轉移室下部之突出尺寸減少，因此在高溫過 程等將製造裝置全體加以絕熱時，亦能使絕熱構件之構造 簡單，且提高裝置全體之絕熱效果。 又，申請專利範圍第2項之搬送用機械手臂，其特徵 在於：包含複數個馬達、分別固接於各馬達之輸出構件的 臂部、以及透過連桿連結於上述臂部之搬送台；藉上述馬 達之驅動，透過臂部及連桿使搬送台朝與軸成直角之方向 來回動作、及/或繞軸之周圍旋轉；至少將一個馬達之定子 、轉子、位置偵測器及轉子支撐軸承，在軸方向設置於大 致同一位置。 根據該構造，使用複數之馬達，且以該馬達透過臂部 及連桿使搬送台動作之搬送用機械手臂，能獲得與上述申 請專利範圍第1項所述之構造者同樣之作用效果。 7 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) --------訂---------線. 經濟部智慧財產局員工消費合作社印製 經濟部智慧財產局員工消費合作社印製 A7 _B7___ 五、發明說明（v ) 又，申請專利範圍第3項之搬送用機械手臂，係在申 請專利範圍第2項之搬送用機械手臂中，具有分離爲二個 相異之環境之構件，於一邊之環境內配置馬達之定子、轉 子、臂部與連桿及搬送台。 根據該構造，藉將馬達之定子及轉子配置於二個相異 環境中一邊之環境內，而不需將間隔一邊之環境，例如將 真空環境、及與此相異之另一邊環境的隔板，設置於馬達 內，故能使馬達部之對相異環境側之氣密構造簡單，且能 使該驅動機構部既簡潔又具有高剛性。 又，申請專利範圍第4項之搬送用機械手臂，係在申 請專利範圍第2項之搬送用機械手臂中，具有分離爲二個 相異之環境之構件，在一邊之環境內配置馬達之定子、轉 子，而在另一邊之環境內，配置輸出構件、臂部、連桿及 搬送台，使馬達之動力透過電磁聯結器傳至輸出構件。 根據該構造，藉將除了輸出構件外之馬達全體，例如 配置於大氣側，能將一般在大氣中所使用者用於馬達所使 用之材質，而能防止因在與大氣環境相異之環境，例如在 真空環境中使用時所需之表面處理等，造成馬達之成本增 加。 又，申請專利範圍第5項之搬送用機械手臂，係在申 請專利範圍第2項之搬送用機械手臂中，具有分離爲二個 相異之環境之構件，在一邊之環境內配置馬達之定子，在 另一邊之環境內配置除定子外之馬達全體、及臂部、連桿 以及搬送台。 8 本紙張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） ------------费--------tr--------- (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員Η消費合作社印制衣 A7 五、發明說明（q ) 根據該發明，能將以捲線構成之馬達之定子配置於一 邊之相異之環境、例如大氣側中，而能抑制從捲線向另一 相異之環境放出之含塵埃的氣體，又，構成定子之捲線之 材質’亦能使用大氣用之一般所使用者。 又’申請專利範圍第6項之搬送用機械手臂，係在申 請專利範圍第2項至第5項之搬送用機械手臂中，藉使各 馬達之各輸出構件互相朝相反方向旋轉，來使搬送台朝與 軸成直角之方向來回動作，藉使其向相同方向旋轉，來使 搬送台旋轉。 根據該構造，搬送台對應馬達之輸出構件之旋轉角的 行程來回動作於軸直角方向，而能使搬送台圓滑地出如轉 移室之處理室站。 又，申請專利範圍第7項之搬送用機械手臂，係在申 請專利範圍第2項至第5項之搬送用機械手臂中，於各馬 達之輸出構件上，沿旋轉方向設置複數個固接臂部之位置 ’在馬達輸出構件之上述複數個臂部固接位置中之任一位 置上固接臂部，藉各馬達之驅動，透過臂部、連桿，使搬 送台在軸直角方向來回動作、及/或旋轉動作。 根據該構造，能將相對臂部之輸出構件之固接位置改 變於旋轉方向，藉改變該固接位置，能改變搬送台之打開 角度，此外，能配合室之設置角度。 又，申請專利範圍第8項之搬送用機械手臂，係將連 結搬送台之機械手臂連桿機構之基端構件，固接於馬達之 輸出構件，其特徵在於：具有分離爲二個相異之環境之構 9 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） --------訂---------線m (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（多） 件，在一邊之環境內，配置包含馬達之定子、轉子及上述 搬送台之機械手臂連桿機構。 根據該構造，在將連結搬送台之機械手臂連桿機構之 基端構件，固接於馬達之輸出構件的搬送用機械手臂中， 由於不需將間隔一邊之相異之環境，例如將真空環境，及 與此相異之另一邊之環境加以間隔之隔板設置在馬達內， 因此能使馬達部中對相異環境側之氣密機構更爲簡單。 此外，申請專利範圍第9項之搬送用機械手臂，包含 複數個馬達、分別固接於各馬達之輸出構件之臂部、及透 過連桿連結於上述臂部之搬送台，藉上述馬達之驅動，透 過臂部及連桿，使搬送台在與軸成直角之方向來回動作， 及/或繞軸之周圍旋轉動作，具有分離爲二個環境之構件， 在一邊之環境內，配置馬達之定子、轉子與臂部與連桿及 搬送台。 根據該構造，藉將馬達之定子、轉子配置於一邊之相 異環境，例如真空環境內，而不需將間隔一邊之相異環境 ，例如將真空環境，及與此相異之另一邊之環境加以間隔 之隔板設置在馬達內，能使複數個馬達部中對相異環境側 之氣密機構更爲簡單。 [圖式之簡單說明] 圖1，係多室型製造裝置之一例之半導體製造裝置的 槪略俯視圖。 圖2，係槪略地顯示轉移室的立體圖。 10 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） --------1---------'^# (請先閱讀背面之注意事項再填寫本頁) /7^4 A7 B7 係顯不搬送用機械手臂之一例的俯視圖。 (a)、（b)係顯示搬送台姿勢限制機構的說明圖。 係顯示習知之搬送用機械手臂之臂部旋轉機構 係顯示本發明之第1實施形態的截面圖。 係顯示本發明之第1實施形態的俯視圖。 係顯示本發明之第1實施形態之進出動作狀態 圖。 五、發明說明（ 圖3 圖4 圖ί 的截面圖 圖6 圖7 圖2 的立體圖。 圖9，係顯示本發明之第2實施形態的截面圖。 圖10，係顯示本發明之第3實施形態的截面圖。 圖11，係顯示本發明之第4實施形態的截面圖。 圖12，係顯示本發明之第3、第4實施形態的立體圖 圖13，係顯示本發明之第5實施形態之驅動部的截面 圖14，係顯示本發明之第6實施形態的截面圖。 圖15，係顯示本發明之第7實施形態的截面圖。 圖16，係顯示本發明之其他實施形態的前視圖。 -----------_f--------訂---------線_ (請先閱讀背面之注音？事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 [符號說明] Α 卜 Α2、A3、Α4、Α5、Α6、Α7 ' Α8 Bl、B2 la la 臂 浮腎避哥! 駿 奉酸 11 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 五、發明說明（ 2a、2b、2c、2d、2e 3 5 6 A7 B7 處醒站 工件交接站 廠 門 7a、7b、30a、30b、30c、30d、40a、40b、40c、40d 8a、8b 臟台 9a ' 9b、31a、31b、31c、31d、41a、41b、41c、41d 臂部 經濟部智慧財產局員工消費合作社印製Mmw -------- Order --------- Line · -Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed A7 B7 V. Invention Description () At one end of 9a and 9b, machine gun flooding was restricted by the frog-leg-type transfer platform posture.丨 Passing the answer 々 Transfer platform 8a, 8b ′ The two connecting rods 9a, 9b are relative to the transfer platform 8a, Su, and the travel is in a completely symmetrical direction. In addition, among the rigid links connected to each of the transfer tables 8a and 8b, the link on one side is connected to the arm portion on one side, and the metaphor ^ support on the other side is connected to the arm portion on the other side. Figures 4 (a) and 4 (b) show the above-mentioned frog-leg-type conveying platform posture hitting mechanism. The front end of the connecting rods 9a, 9b connected to the conveying platform 8a, as shown in FIG. 4), is connected to the conveying platform 8a, by the structure of the wheels formed by the intermeshing gears 9c, 9c. The postures of the connecting rods 9a, 9b of 8b ^ The angles SR, eL are always the same. Thereby, even if the angle formed by the connecting rod 9a and the connecting rod 9b is changed ', the transfer tables 8a and 8b can be constantly oriented in the radial direction of the transfer chamber 1 and can be moved in the radial direction by changing the angle. As shown in FIG. 4 (b), the front ends of the connecting rods 9a and 9b are connected with gears, and the belts 9d are crossed on the pulleys 9 and 9e of the same diameter set at the front ends of the continuous rods 9 and 9b. Constructed diagonally. FIG. 5 shows a conventional mechanism used to independently rotate the arm portions 7 a and 7 b of the conventional transfer robot arm A1 shown in FIG. 3. The base portions' of the arm portions 7a and 7b are respectively connected to the rotation shafts 13a and 13b, and the rotation shafts i 3a and 13b are arranged concentrically. The respective rotating shafts 13 a and 13 b are connected to the output portion of the direct drive motor Ua 'Mb' on the frame la of the transfer chamber 1 and support the motors 14 a and 14 b in a concentric manner and staggered in the axial direction. . At this time, the rotation shaft 13a of the one side motor 14a becomes longer and the other side motor ⑽ is extended upward. In addition, the prior art: ^ between the transfer chamber on the vacuum environment side and the outside environment in the motor ^, national standard (CNS) A4 specification (210 X 297 mm -------- order ---- ----- line · rtt first read the quick notice on the back and then fill out this page} printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 1/7 · > 4 > ° A7 _______B7_____ 5. Description of the Invention (S) Here, a partition plate 18 is provided between the stator 16 and the rotor Π constituting the motors 14a and Mb, and the two environments are separated by the partition plate 18. Then, as shown in FIG. 3, when the relative rotation centers of the two arm portions 7a and 7b are at When the diameter direction is located in a symmetrical position, the connecting rods 9a and 9b are rotated to the most expanded state relative to the two transfer tables 8a and 8b, so the two transfer tables 8a and 8b are moved to the rotation center side. In this state, the two arms The parts 7a, 7b rotate in the same direction, and the two conveying tables 8a, 8b rotate relative to the center of rotation while maintaining the radial position. Moreover, the two arm parts 7a, 7b are in a direction approaching each other (the opposite directions to each other). ) Rotate so that the conveying table 8a located at the smaller angle between the two arm portions 7a, 7b is connected by the links 9a, 9b is pushed out and protrudes outward in the radial direction 'and enters into the processing chamber of one of the above-mentioned stations 2a' 2b, 2c, 2d, and 2e located outside the radial direction adjacent to the transfer chamber 1. At this time, although the transfer station on the other side faces The rotation center side moves' but the relationship between the angles between the arms 7a, 7b and the links 9a, 9b is small, and the amount of movement is small. As a conventional technique, in addition to the aforementioned Japanese Patent Publication No. Hei 8_5 () 6771 In addition, there is also a transfer robot using a direct-drive vacuum motor having a mechanism as shown in Japanese Patent Laid-Open No. 1 (^ 128692). [Problems to be Solved by the Invention] In the above-mentioned prior art, Stagger the positions of the two motors in the axial direction (up and down), and arrange their respective output shafts in the same direction in a concentric shape. 5 The paper size applies the Chinese National Standard (CNS) A4 specification (210 x 297 mm). — — — — — — — — — — — In! ^ * — 1 —---- „^ · (Please read the precautions on the back before filling out this purchase) A7 B7 ~ — 'V. Description of the invention (t)' of the upper motor The output shaft is a hollow structure, which runs through The output shaft of the side motor. Therefore, the output shaft of the lower motor becomes longer and its rigidity is lowered, which causes problems such as lowering of positioning accuracy due to torsional vibration. In addition, the dimensions of the drive section in the axial direction are upward. The bottom part becomes larger, so that the driving part protrudes greatly from the lower part of the transfer chamber, and there is a problem that the maintenance space of the lower part of the transfer part becomes narrow. Furthermore, when the entire manufacturing apparatus needs to be insulated during high temperature processing, if the machinery The arm driving part greatly protrudes from the lower part of the transfer chamber, and then the structure of the heat insulation member becomes complicated, which causes a problem that the heat insulation effect is reduced. Moreover, in the above-mentioned prior art, since the partition space separating the vacuum environment and the environment separated therefrom is located in the motor, the structure for maintaining the airtightness of the vacuum environment side of the motor portion becomes complicated. The present invention has been made in view of the above-mentioned problems, and an object thereof is to provide a motor output section with maximum rigidity, which can eliminate the decrease in positioning accuracy or the occurrence of vibration caused by distortion, and can greatly reduce the lower part of the transfer chamber. The projected size greatly improves maintainability. Further, when the entire manufacturing apparatus is insulated in a high-temperature process, the structure of the heat-insulating member can be simplified, and the air-tight mechanism of the vacuum environment side of the motor section can be simply constructed. Robot arm for transportation. [Means to solve the problem and its effects] In order to achieve the above-mentioned purpose, the transfer robot arm of the first patent application scope is a base member of the robot arm link mechanism connected to the transfer platform is fixed to the output member of the motor , Which is characterized by: the stator, rotor of the motor, 6 paper sizes are applicable to the Chinese National Standard (CNS) A4 specification (210 x 297 mm) (please read the light matter on the back before filling this page) — 丨 丨 丨 —丨 Order --------- Line A printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ____B7___ V. Description of the invention (ζ) The position detector and the rotor support bearing are arranged at approximately the same direction in the axis direction position. According to this structure, since the axial length of the output beech piece of the motor is shortened, the torsional rigidity of the output member can be improved, so the vibration of the mechanical arm link mechanism fixed to the output member is reduced, and the reduction in positioning accuracy can be eliminated. Or distortion caused by vibration. In addition, since the size of the driving portion in the axial direction can be reduced, the protruding size of the lower portion of the transfer chamber of the shaft can be greatly reduced, and the size and weight of the entire robot arm can be attempted. In addition, as described above, since the dimension in the axial direction is shortened, the projecting dimension of the lower part of the transfer chamber can be greatly reduced, and the maintainability can be greatly improved. Further, since the size of the motor-driven portion in the axial direction is reduced and the protruding size of the lower portion of the transfer chamber of the portion is reduced, the structure of the heat-insulating member can also be simplified when the entire manufacturing apparatus is insulated at a high temperature process. And improve the overall thermal insulation effect of the device. In addition, the transfer robot arm of the second patent application range is characterized in that it includes a plurality of motors, an arm portion fixed to each of the output members of each motor, and a transfer table connected to the arm portion through a link; Driven by the motor, the conveying table moves back and forth and / or rotates around the shaft through the arm and the connecting rod; at least one of the motor's stator, rotor, position detector and rotor support bearing , Set at approximately the same position in the axial direction. According to this structure, using a plurality of motors and using the motors to transfer the robot through the arm portion and the link to move the transfer platform, a robotic arm for transportation can obtain the same effect as that of the constructor described in item 1 of the aforementioned patent application scope. 7 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) -------- Order -------- -Line. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and printed by A7 _B7___ 5. Explanation of the invention (v) In addition, the robot arm for transport in the scope of patent application No. 3 is applied for patent The transport robotic arm of the second item in the scope has components separated into two different environments, and a stator, a rotor, an arm portion, a connecting rod, and a transfer table of the motor are arranged in one environment. According to this structure, by arranging the stator and rotor of the motor in one environment of two different environments, it is not necessary to place the environment on one side, such as a vacuum environment and a partition plate on the other side of the environment. Because it is installed in the motor, it can make the airtight structure of the motor part on the side of the different environment simple, and make the drive mechanism part simple and highly rigid. In addition, the transfer robot arm of the patent application scope item 4 is a transfer robot arm of the patent application scope item 2 and has a component separated into two different environments. The stator of the motor is arranged in one side environment. , Rotor, and in the environment on the other side, the output member, arm, connecting rod and transfer platform are arranged so that the power of the motor is transmitted to the output member through the electromagnetic coupling. According to this structure, by disposing the entire motor other than the output member, for example, on the atmosphere side, the user generally used in the atmosphere can be used for the material used by the motor, and the environment different from the atmospheric environment can be prevented. For example, the surface treatment required when used in a vacuum environment causes the cost of the motor to increase. In addition, the transfer robot arm of the patent application scope item 5 is a component of the transfer robot arm of the patent application scope item 2 which is separated into two different environments, and the stator of the motor is arranged in one side environment. In the environment on the other side, the entire motor except the stator, the arm, the connecting rod, and the transfer table are arranged. 8 This paper size applies to China National Standard (CNS) A4 (210 x 297 mm) ------------ fees -------- tr -------- -(Please read the precautions on the back before filling in this page) Member of the Intellectual Property Bureau of the Ministry of Economic Affairs and Consumer Cooperatives printed clothing A7 5. Description of the invention (q) According to the invention, the stator of the motor composed of coils can be arranged on one side In a different environment, for example, in the atmosphere side, the dust-containing gas that can be released from the winding wire to another different environment can be suppressed, and the material of the winding wire constituting the stator can also be used by ordinary users for the atmosphere. Also, the transfer robot arm of the patent application scope item 6 is the transfer robot arm of the patent application scope items 2 to 5, and the output members of the motors are rotated in opposite directions from each other to make the transfer The table moves back and forth in a direction at right angles to the shaft, and the conveying table is rotated by rotating it in the same direction. According to this structure, the stroke of the transfer table corresponding to the rotation angle of the output member of the motor moves back and forth in the direction of the right angle of the shaft, so that the transfer table can smoothly exit the processing room station such as the transfer room. In addition, the transfer robot arm of the patent application item 7 is a transfer robot arm of the patent application scope items 2 to 5, and a plurality of fixed connecting arms are provided on the output member of each motor in the rotation direction. The position of the part is fixed to the arm at any one of the above-mentioned fixed positions of the plurality of arm parts of the motor output member. By the drive of each motor, the conveying table moves back and forth in the orthogonal direction of the shaft through the arm and the connecting rod. , And / or rotation. According to this structure, the fixed position of the output member facing the arm can be changed to the rotation direction, and by changing the fixed position, the opening angle of the conveying table can be changed, and in addition, the installation angle of the chamber can be matched. In addition, the conveying robot arm of the eighth patent application is a base member of the robot arm link mechanism connected to the conveying table and is fixed to the output member of the motor. It is characterized in that it has two separate parts. The structure of the environment 9 This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) -------- Order --------- Line m (Please read the note on the back first Please fill in this page for further information) Printed by A7 B7, Employee Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (multiple) pieces. In one side of the environment, it is equipped with the motor's stator, rotor, and the robot arm linkage mechanism of the transfer platform. . According to this structure, the base end member of the robot arm link mechanism connected to the transfer table is fixed to the transfer robot arm of the output member of the motor, because there is no need to separate the different environments on one side, such as a vacuum environment. A partition plate that is spaced apart from the environment on the other side is provided in the motor, so that the airtight mechanism on the side of the different environment in the motor portion can be made simpler. In addition, the conveying robot arm of the scope of patent application No. 9 includes a plurality of motors, an arm portion fixed to each of the output members of each motor, and a transfer table connected to the arm portion through a link, and is driven by the motor. Through the arm and the connecting rod, the conveying table moves back and forth in a direction perpendicular to the shaft, and / or rotates around the shaft. It has a component separated into two environments, and the stator of the motor is arranged in one environment. Rotor and arm and connecting rod and transfer platform. According to this structure, by disposing the stator and the rotor of the motor in a different environment, such as a vacuum environment, it is not necessary to place a different environment on one side, such as a vacuum environment, and an environment on the other side. The spaced-apart partition plate is arranged in the motor, which can make the air-tight mechanism on the side of the different environment in the plurality of motor parts easier. [Brief Description of Drawings] FIG. 1 is a schematic plan view of a semiconductor manufacturing apparatus which is an example of a multi-chamber manufacturing apparatus. FIG. 2 is a perspective view schematically showing a transfer chamber. 10 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -------- 1 --------- '^ # (Please read the precautions on the back before (Fill in this page) / 7 ^ 4 A7 B7 is a top view of an example of a robot arm for non-transport. (a), (b) are explanatory drawings which show the attitude | position restriction mechanism of a conveyance stand. It is a cross-sectional view showing a conventional arm rotation mechanism of a transfer robot arm. It is a top view showing the first embodiment of the present invention. It is a diagram showing the state of movement in and out of the first embodiment of the present invention. V. Description of the invention (Fig. 3, Fig. 4 and Fig. 6 are sectional views of Fig. 6 and Fig. 7 are perspective views of Fig. 2. Fig. 9 is a sectional view showing a second embodiment of the present invention. Fig. 10 is a third embodiment of the present invention. Fig. 11 is a sectional view showing a fourth embodiment of the present invention. Fig. 12 is a perspective view showing a third and fourth embodiment of the present invention. Fig. 13 is a fifth embodiment of the present invention. FIG. 14 is a cross-sectional view showing a sixth embodiment of the present invention. FIG. 15 is a cross-sectional view showing a seventh embodiment of the present invention. FIG. 16 is a front view showing another embodiment of the present invention. View. -----------_ f -------- Order --------- line_ (Please read the note on the back? Matters before filling out this page) Ministry of Economy Printed by the Intellectual Property Bureau's Consumer Cooperatives [Symbols] Α Β Α2, A3, Α4, Α5, Α6, Α7 'Α8 Bl, B2 la la Arm floating kidney to avoid brothers! Junfeng acid 11 This paper size applies to Chinese national standards ( CNS) A4 specification (210 X 297 mm) V. Description of the invention (2a, 2b, 2c, 2d, 2e 3 5 6 A7 B7 Wake-up station workpiece transfer station factory door 7 a, 7b, 30a, 30b, 30c, 30d, 40a, 40b, 40c, 40d 8a, 8b Dirty table 9a '9b, 31a, 31b, 31c, 31d, 41a, 41b, 41c, 41d Printed by Employee Consumer Cooperative
9c 9d 13a、13b 14a、14b、21a、21b、21c 18、34a、34b 20a、20b、20c 17、22a、22b 23a > 23b 24 16、25a、25b 26a、26b 27 28 M 齒輪 方繼由 馬達 隱反 車 轉子 轉子邏® 固麵 定子 位置偵測器 支擦台 支讎件 永久石纖 [發明之實施形態] 以下，根據圖6〜圖8，說明本發明之第1實施形態 12 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 7^4 A7 ______ B7__ 五、發明說明（^ ) 搬送用機械手臂A2具有二個搬送台，位於轉移室1之中 心部。該第1、第2輪轂20a、20b呈同心狀，以從下側依 序重疊之狀態配置。 弟1、弟2馬達之21 a、21 b爲直接驅動型者。上述第 1、第2輪轂2〇a、20b分別直接結合於各馬達21a、21b之 轉子22a、22b，透過轉子支撐軸承23a、23b，分別旋轉自 如地支撐於固定軸24，該固定軸24係與固接於轉移室i 側所設置之支撐台27成爲一體。 第1馬達21a，由定子2〗a、轉子22a、位置偵測器 26a、及支撐上述轉子22a之轉子支撐軸承23a所構成。同 樣地’第2馬達21b ’由定子2Sb、轉子22b '位置偵測器 26b、及支撐上述轉子22b之轉子支撐軸承23b所構成。又 ，作爲支撐第1馬達21a之定子25a的構件有支撐台27， 作爲支撐第2馬達21b之定子25b的構件則有支撐構件28 。此外’上述支撐台27係固接於轉移室1之框架la，又 ’支撐構件28係固接於固定軸24，第1、第2馬達21a、 21 b係一體構成。 兩馬達21a、21b之轉子22a、22b上，在面向定子 25a、25b之部分固接有永久磁鐵Μ。而固接該永久磁鐵Μ 之轉子22a、22b之構成材料，係使用導磁率高之材料，例 如，係使用鐵。一體結合於各該轉子22a、22b之輪轂20a ' 20b，爲求其輕量化，例如係使用鋁材。因此，此實施形 態中’雖係將該兩構件，亦即、將轉子22a、22b及輪轂 20a、20b之兩不同構件以螺栓加以結合，但若無重量之限 13 本纸張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） --------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印制衣 A7 B7 五、發明說明（丨〆） 制時，亦使用鐵來作爲輪轂20a、20b ’將兩者以導磁率高 之相同材料構成爲一體亦可。 上述各馬達21a、21b之定子25a、25b，轉子22a、 22b，位置偵測器26a、26b及轉子支撐軸承23a、23b，係 與各馬達21a、21b —起，在軸方向配置於大致同一位置， 該第1、第2馬達之21a、21b爲同軸狀，且以重疊於軸方 向之狀態配置。藉此，能使各馬達21a、21b成爲薄型。又 ，馬達21a、21b之定子25a、25b及轉子22a、22b，配置 的較位置偵測器26a、26b爲外側，藉此，能將構成馬達 21a、21b之構件在半徑方向取大，且能增大馬達21a、21b 之輸出轉矩。另一方面，轉子支撐軸承23a、23b，藉由相 對上述其他構件配置在最內側，而能使用直徑較小者來作 爲該轉子支撐軸承23a、23b，故能抑制軸承之成本。而且 該轉子支撐軸承23a、23b位在內側其直徑愈小，效果愈大 〇 另一方面，此實施形態中，各馬達21a、21b之各構成 要件，係選擇實施表面處理來減低氣體放出量、或在真空 下氣體放出量較少之材料，並排除輪轂20a、20b與馬達 21a、21b間之氣密用隔板、及電磁聯結器，以將馬達21a 、21b全體配置於真空環境下。據此，能實現簡潔且高剛 性之驅動機構。 亦即，本實施形態中，係藉轉移室1之框架la，及固 接於該框架la之支撐台27，來隔開爲轉移室1之真空側 與大氣側，將包含馬達21a、21b在內之搬送用機械手臂 14 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ---------------------訂---------線· (請先閱讀背面之注意事項再填寫本頁) A7 B7 五、發明說明 A2全體，配置於轉移室1之真空側。據此，能簡化馬達部 中轉移室1真空側的氣密機構。 (請先閱讀背面之注音？事項再填寫本頁) 在搬送用機械手臂A2之第1輪轂2〇a之側面’朝放 射方向突設有第1、第2臂部3〇a、30b ’又，在第2輪轂 20b之側面，朝放射方向突設有第3之臂部30c ’再者’在 該第2輪轂20b之頂面，透過腳柱30e朝放射方向突設有 第4臂部30d，第4臂部30d以其前端部下面爲旋轉支點 ，其他臂部，以各臂部之前端部上面爲旋轉支點。 自上述各臂部30a〜30d之各旋轉支點至輪轂中心之半 徑爲相同尺寸。此外，於上述各臂部30a〜30d之旋轉支點 ，旋轉自如地連結有實質上爲相同長度之第1 '第2、第3 、第4之連桿31a、31b、31c、31d的一端部。而連結在第 1臂部30a之前端上面側所設置之旋轉支點的第1連桿31a 之旋轉支點部，係朝外側懸垂向上方折彎成C字狀。又， 上述第1臂部30a之旋轉支點不一定位於該前端上面側， 將第1臂部30a之前端朝外側懸垂向上方折彎成C字狀， 將旋轉支點設於第1臂部30a之前端下面側，以將第1連 經濟部智慧財產局員工消費合作社印製 桿31a之前端部連結在該第1臂部30a之前端下面側亦可 〇 在第1連桿31a與上述第4連桿31d之前端部，透過 搬送台姿勢限制機構連結第1搬送台8a，據此構成第1機 械手臂連桿機構B1。此時，上述第1連桿31a之匚字狀的 立起高度，係使搬送台8a位於輪轂上側，且使後述第2機 械手臂連桿機構B2之搬送台8b及一邊之臂部30c與連桿 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製 1/7^4 A7 ___B7_____ 五、發明說明（VV) 31c，能鑽過該第1臂部3〇a與連桿31a之間而移動。又， 在第2、第3連桿31b、31c之前端部，透過搬送台姿勢限 制機構連結第2搬送台8b，據此構成第2機械手臂連桿機 構B2。此外，藉錯開該兩機械手臂連桿機構Bl ' B2之位 相安裝於輪轂，搬送台8a、8b即成爲在旋轉方向相隔〇:( 例如60° )而不致在旋轉方向重複，且工件搭載面在上下 方向爲同一位置。 上述兩機械手臂連桿機構Bl、B2之搬送台8a、8b向 旋轉方向之位置偏差量，至少應使兩搬送台8a、8b在旋轉 方向不致重複’而最好是將工件裝載於各搬送台8a、8b上 時，能使該兩工件在互不干涉之範圍內偏差。 搬送用機械手臂A2，係以各搬送台8a、8b從旋轉中 心看，位於半徑方向同一位置之姿勢爲待機狀態（圖7)。且 在該待機狀態時，如上所述，兩搬送台8a、8b之位置係在 旋轉方向錯開α，自此狀態，藉各輪轂20a、20b之互向相 反方向的旋轉’使各搬送台8a、8b向輪轂20a、20b之半 徑方向進出動作(圖8)，又，在上述待命狀態下，藉各輪轂 20a、20b之互向相同方向之旋轉，使搬送用機械手臂A2 旋轉動作。 圖9，係顯示本發明之第2實施形態。此實施形態之 搬送用機械手臂A3，其第1、第2馬達21a、21b之定子 25a、25b及固接永久磁鐵μ之轉子22a、22b之半徑方向 的位置關係，係與圖6所示之第i實施形態者半徑方向相 反。此實施形態中’轉子22a、22b係兼用爲輪轂20a、 16 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） --------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（A) 20b ° 此第2實施形態之構成，與圖6所示之第1實施形態 相較，能使轉子22a、22b之永久磁鐵Μ與定子25a、25b 之對向位置，自輪轂20a、20b之旋轉中心向半徑方向增大 ，故能增加馬達21a、21b之輸出轉矩。 圖10，係顯示本發明之第3實施形態之搬送用機械手 臂A4。此實施形態中，驅動部之構造與圖6所示之第1實 施形態之搬送用機械手臂A2相同，以第1、第2輪轂2〇a 、20b使一個搬送台8a進出動作。 又，圖11係顯示本發明之第4實施形態之搬送用機械 手臂A5。本實施形態中，驅動部之構造與圖9所示之第2 實施形態之搬送用機械手臂A3相同，以第1、第2輪轂 20a、20b使一個搬送台8a進出動作。 該第3、第4實施形態之搬送用機械手臂A4、A5 ’其 構成如圖12所示，係分別於第1、第2輪轂20a、20b上 各設置一支臂部3Qa、30b，於各該臂部30a、30b前端所 連結之連桿31a、31b之前端，連結一個搬送台8a。 圖13，係顯示本發明之第5實施形態之搬送用機械手 臂A6。本實施形態，係採用圖6所示之第1實施形態之搬 送用機械手臂A2之驅動部之變形例的驅動部’藉密閉固 定於支撐台27之隔板32，將馬達21a、21b全體與真空側 隔離，亦即配置於大氣側。此外，轉子22a、22b與輪轂 20a、20b ’係以電磁聯結器33a、33b連結於旋轉方向。因 此’藉將馬達21a、21b全體配置於大氣側’能將馬達2la 17 本纸張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ------1----I · I------訂· —-------線 {請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（y L) 、21 b所使用之材料改爲一般在大氣中所使用者。 圖Η，係顯示本發明之第6實施形態之搬送用機械手 臂Α7之驅動機構部。本實施形態，係採用圖9所示之第2 實施形態之搬送用機械手臂A3之驅動部之變形例的驅動 部，將馬達21a之定子25a與位置偵測器26a之定子的組 ，與馬達21b之定子25b與位置偵測器26b之定孑的組， 藉分別密閉固定於支撐台27及支撐構件28之隔板34a及 3处，來與真空側隔離。因此，能將包含線圏之定子25a與 真空側隔離，抑制氣體從線圈放出，使線圈之材質能使用 一般在大氣中所使用者。又，本實施形態中，若使用光電 耦合器’亦即所謂之編碼器來做作爲位置偵測器時等，雖 有不需將位置偵測器與真空側隔離之情形，但此時，僅將 各馬達21a、21b之定子25a、25b以隔板34a、34b加以自 真空側隔離亦可。 圖15 ’係顯示本發明之第7實施形態之搬送用機械手 臂A8之驅動機構部。本實施形態中，第1、第2馬達21a 、21b，係將與上述各實施形態者同樣的支撐於固接在框架 la之支擦台27，以|亥支撐台27將搬送用機械手臂A8全 體配置於轉移室1之真空側。此外，分別將各馬達21a、 21b之定子25a、25b，轉子22a、22b，位置偵測器26a、 26b之配置在軸方向予以錯開。 亦即’本實施形態中，一邊之馬達21a，相對於定子 25a、轉子22a分別將轉子支撐軸承23a與位置偵測器26a 配置於軸方向之相異位置。又，另一邊之馬達21b，雖係 18 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） -------—------------訂------.---線 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 7^4 A7 -____B7___ 五、發明說明（4 ) 相對定子25b與轉子22b將位置偵測器26b配置於軸方向 之同一位置’但轉子支撐軸承23b則係相對的錯開於軸方 向。又，本實施形態，雖圖示了在轉子支撐軸承23a、23b 之上側配置位置偵測器26a ' 26b之例，然而，亦可使上下 方向相反。又，圖中之24係固定軸，28係支撐構件，此 等構件與支撐台27成爲一體狀。 又’亦可將上述本發明之各實施形態所示之搬送用機 械手臂之驅動機構部，適用於圖3所示之習知之搬送用機 械手臂。又’上述各實施形態中，雖就馬達21a、21b爲同 心狀且將位置錯開於上下方向之構造加以說明，但並不限 定於此，例如，亦能將本發明適用於如日本專利特開平4-129685號公報所示之，相對大旋轉軸之中心設置一對在軸 直角方向分開的小旋轉軸，而能藉旋轉兩小旋轉軸使二個 搬送台進出動作，藉旋轉大旋轉軸，改變搬送台進出之動 作方向的搬送用機械手臂。當然，在該情形下，不使用如 本發明般之2軸一體型的馬達，而係使用一對單軸之馬達 。亦即，例如將圖6所示之第1、第2之馬達21a、21b， 分別在軸直角方向分開配置。 又，上述第1至第6之各實施形態中’雖顯示了第1 、第2馬達21a、21b之雙方爲相同構成，亦即，使定子 25a、25b，轉子22a ' 22b，位置偵測器26a、26b及轉子 支撐軸承23a、Ub，在軸方向大致爲同一位置的例，但此 —構成.，可以是第1、第2馬達21a、21b中’任一者之構 成。此時，能使至少一個馬達之軸方向尺寸較其他馬達爲 19 --------------------訂---------線 {請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 經濟部智慧財產局員工消費合作社印製 A7 _B7_ 五、發明說明) 小，而能使搬送用機械手臂之驅動機構全體之軸方向（上下 方向）較小。 進一步的，上述各實施形態中，爲了簡化說明，雖圖 示了各臂部30a〜30d係固接於輪轂20a、20b成一體之構 造，但各臂部30a〜30d，係在各輪轂20a、20b上設置臂 部安裝台，以螺栓等固接於此處。此外，將該臂部安裝台 之位置錯開於旋轉方向設置複數處，選擇性的加以使用亦 可。藉將臂部之安裝位置予以變更於輪轂之旋轉方向，即 能相輪轂之旋轉行程，改變搬送台之軸直角方向之來回行 程，且能改變搬送台8a、8b之打開角度。此外，藉調整該 搬送台8a、8b之打開角，使其配合轉移室所配置之處理室 之相鄰接的室之設定角，亦能消除工件搬送中之機械手臂 旋轉動作，而提高生產力。 又，上述實施例，雖然皆顯示將二個馬達配置於同軸 上，將臂部結合於各馬達之輸出構件，以各馬達之驅動使 透過連桿連結於各臂部之搬送台8a、8b在軸直角方向來回 動作及繞軸旋轉動作的例，但如圖16所示，亦可將三個以 上之與上述各實施例所示之各馬達相同構造之馬達，配置 於同軸上。圖16，係顯示使用三個馬達21 a、21 b、21C之 例。各馬達21a〜21c之輪轂20a、20b、20c中，分別於第 1馬達21a之輪轂20a上結合第1臂部40a，於第2馬達 21b之輪轂20b上結合第2、第3臂部40b、40c，於第3 馬達21.c之輪轂20c上結合第4臂部40d。又，於各個臂 部40a〜40d上連結第1〜第4之各連桿41a〜41d，於第1 20 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） --------------------訂---------線 (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 Α7 _ Β7_ 五、發明說明（\1) ‘ 連桿41a與第2連桿41b上連結第1搬送台8a，又，於第 3連桿41c與第4連桿41d上連結第2搬送台8b。 此外，該構成中，亦係藉各馬達之相互反轉來使搬送 台8a、8b於軸直角方向進出動作，藉各馬達旋轉於相同方 向來使搬送台8a、8b繞軸旋轉動作。 再者，上述各實施例中，雖顯示了搬送台8a、8b進行 朝軸直角方向之進出動作，及繞軸之旋轉動作等兩動作之 例，但視搬送用機械手臂之使用條件，搬送台8a、8b，亦 有僅進行朝軸直角方向之進出動作、或繞軸之旋轉動作中 之一方的情形。又，例如在習知技術之日本專利特表平9-508758號公報所示之晶片搬送裝置中，藉使上述各實施形 態所示之馬達爲單軸而僅使用一個來作爲旋轉驅動軸用之 馬達，即能使台座（搬送台）在拉入位置與拉出位置間移動 。亦即，本發明之搬送用機械手臂之驅動機構部，能使用 於以一個馬達作爲移動搬送台之型式的搬送用機械手臂中 〇 又，上述各實施例中，雖僅在顯示第1實施形態之圖 6中，於第1、第2輪轂20a、20b之對向面部及第1輪轂 2〇a與支撐台27之對向面部設置曲徑密封（labyrinth seal) ，但該曲徑密封，當然亦可在其他實施形態中視需要設置 21 (請先閱讀背面之注意事項再填寫本頁) .f 訂---------線. 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）9c 9d 13a, 13b 14a, 14b, 21a, 21b, 21c 18, 34a, 34b 20a, 20b, 20c 17, 22a, 22b 23a > 23b 24 16, 25a, 25b 26a, 26b 27 28 M Hidden anti-rotor rotor logic® solid surface stator position detector support wiper support permanent stone fiber [Embodiment of the invention] Hereinafter, the first embodiment of the present invention will be described with reference to Figs. 6 to 8 Applicable to China National Standard (CNS) A4 specification (210 X 297 mm) (Please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 7 ^ 4 A7 ______ B7__ V. Description of the invention ( ^) The transfer robot A2 has two transfer tables and is located at the center of the transfer chamber 1. The first and second hubs 20a and 20b are concentric and are arranged in a state of being sequentially stacked from the lower side. Brothers 1, 2 and 21a and 21b of the motor are directly driven. The first and second hubs 20a and 20b are directly coupled to the rotors 22a and 22b of the motors 21a and 21b, respectively, and are rotatably supported on the fixed shaft 24 through the rotor support bearings 23a and 23b. The fixed shaft 24 is It is integrated with a support base 27 provided on the side of the transfer chamber i. The first motor 21a is composed of a stator 2a, a rotor 22a, a position detector 26a, and a rotor support bearing 23a that supports the rotor 22a. Similarly, the 'second motor 21b' is composed of a stator 2Sb, a rotor 22b 'position detector 26b, and a rotor support bearing 23b supporting the rotor 22b. A support base 27 is provided as a member supporting the stator 25a of the first motor 21a, and a support member 28 is provided as a member supporting the stator 25b of the second motor 21b. In addition, the above-mentioned support base 27 is fixed to the frame la of the transfer chamber 1, and the support member 28 is fixed to the fixed shaft 24, and the first and second motors 21a and 21b are integrally formed. Permanent magnets M are fixed to the rotors 22a and 22b of the two motors 21a and 21b at the portions facing the stators 25a and 25b. As the constituent material of the rotors 22a and 22b to which the permanent magnet M is fixed, a material having a high magnetic permeability is used, for example, iron is used. In order to reduce the weight, the hubs 20 a ′ 20 b integrally connected to the rotors 22 a and 22 b are made of aluminum, for example. Therefore, in this embodiment, 'Although the two members, that is, the two different members of the rotors 22a, 22b and the hubs 20a, 20b are bolted together, but there is no limit on the weight. Standard (CNS) A4 specification (210 X 297 mm) -------- Order --------- line (Please read the precautions on the back before filling this page) Intellectual Property Bureau of the Ministry of Economic Affairs Printed clothing A7 B7 for employee consumer cooperatives V. Description of invention (丨 〆) Iron is also used as the hubs 20a and 20b during the manufacturing process. The two may be made of the same material with high magnetic permeability. The stators 25a and 25b, the rotors 22a and 22b, the position detectors 26a and 26b, and the rotor support bearings 23a and 23b of the motors 21a and 21b are arranged at the same position in the axial direction together with the motors 21a and 21b. The first and second motors 21a and 21b are coaxial and are arranged in a state overlapping with the axial direction. Thereby, each of the motors 21a and 21b can be made thin. In addition, the stators 25a and 25b and the rotors 22a and 22b of the motors 21a and 21b are arranged outside the position detectors 26a and 26b, so that the components constituting the motors 21a and 21b can be made larger in the radial direction and can be larger. Increase the output torque of the motors 21a and 21b. On the other hand, since the rotor supporting bearings 23a and 23b are disposed at the innermost side relative to the other members described above, the smaller diameter can be used as the rotor supporting bearings 23a and 23b, so the cost of the bearings can be suppressed. In addition, the smaller the diameter of the rotor supporting bearings 23a and 23b, the greater the effect. On the other hand, in this embodiment, the constituent elements of the motors 21a and 21b are selected to be surface treated to reduce the amount of gas emitted. Or a material with less gas emission under vacuum, and exclude airtight partitions and electromagnetic couplings between the hubs 20a, 20b and the motors 21a, 21b, so that the entire motors 21a, 21b are placed in a vacuum environment. Accordingly, a simple and highly rigid driving mechanism can be realized. That is, in this embodiment, the frame 1a of the transfer chamber 1 and the support table 27 fixed to the frame 1a are used to separate the vacuum side and the atmospheric side of the transfer chamber 1, and the motors 21a and 21b are included. Robotic arm for carrying inside 14 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) --------------------- Order- ------- Line · (Please read the precautions on the back before filling this page) A7 B7 V. Description of the invention A2 as a whole, located on the vacuum side of the transfer chamber 1. This makes it possible to simplify the air-tight mechanism on the vacuum side of the transfer chamber 1 in the motor section. (Please read the phonetic on the back? Matters before filling out this page.) On the side of the first hub 20a of the transfer robot arm A2, the first and second arm portions 30a and 30b are protruded in the radial direction. On the side of the second hub 20b, a third arm portion 30c is protruded in the radial direction. Further, on the top surface of the second hub 20b, a fourth arm portion 30d is protruded in the radial direction through the leg 30e. In the fourth arm portion 30d, the lower end of the front end portion is used as the rotation fulcrum, and the other arm portions are formed by the upper end portion of the front end of each arm portion as the rotation fulcrum. The diameters from the pivot points of the arms 30a to 30d to the center of the hub are the same. In addition, one end of the first, second, third, and fourth links 31a, 31b, 31c, and 31d having substantially the same length are rotatably connected to the rotation fulcrum of each of the arms 30a to 30d. The rotation fulcrum portion of the first link 31a connected to the rotation fulcrum provided on the upper side of the front end of the first arm portion 30a is bent upward and bent in a C shape toward the outside. In addition, the rotation fulcrum of the first arm portion 30a is not necessarily located on the upper side of the front end. The front end of the first arm portion 30a is hung outwardly and bent upward in a C shape, and the rotation fulcrum is provided on the first arm portion 30a. The lower end of the front end can be connected to the lower end of the front end of the first arm 30a by the front end of the printed rod 31a of the Consumer Cooperatives of the Intellectual Property Bureau of the First Company. The first link 31a can also be connected to the fourth connection. The front end portion of the lever 31d is connected to the first conveyance table 8a through the conveyance table posture restricting mechanism, thereby constituting the first robot arm link mechanism B1. At this time, the above-mentioned raised height of the first link 31a is such that the transfer table 8a is located on the upper side of the hub, and the transfer table 8b and the arm portion 30c of one side of the second robot arm link mechanism B2 described later are connected to each other. The size of the paper is in accordance with the Chinese National Standard (CNS) A4 (210 X 297 mm). It is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 1/7 ^ 4 A7 ___B7_____ V. Inventory (VV) 31c. The first arm portion 30a and the link 31a move. In addition, the second transport platform 8b is connected to the front end portions of the second and third links 31b and 31c by the transport platform attitude restricting mechanism, thereby constituting the second robot link mechanism B2. In addition, by staggering the phases of the two robot arm linkage mechanisms Bl'B2 and mounting on the hub, the transfer tables 8a, 8b become separated in the rotation direction by 0: (for example, 60 °) so as not to repeat in the rotation direction, and the workpiece mounting surface is at The vertical direction is the same position. The above-mentioned two robotic arm linkage mechanisms B1, B2 of the transfer positions 8a, 8b in the direction of rotation should be at least such that the two transfer tables 8a, 8b do not repeat in the direction of rotation ', it is best to load the workpiece on each transfer table When 8a, 8b, it can make the two workpieces deviate within a range that does not interfere with each other. The transfer robot arm A2 is in a standby state with each of the transfer tables 8a and 8b positioned at the same position in the radial direction as viewed from the center of rotation (Fig. 7). In this standby state, as described above, the positions of the two transfer tables 8a and 8b are shifted by α in the rotation direction. From this state, each of the transfer tables 8a, 20b is rotated by rotating the hubs 20a and 20b in opposite directions. 8b moves in and out of the hubs 20a and 20b in the radial direction (Fig. 8). In the above standby state, the wheels 20a and 20b are rotated in the same direction with each other to rotate the transport robot A2. Fig. 9 shows a second embodiment of the present invention. The positional relationship in the radial direction between the stators 25a and 25b of the first and second motors 21a and 21b and the rotors 22a and 22b to which the permanent magnet μ is fixed in the transport robot A3 of this embodiment is as shown in FIG. 6 In the i-th embodiment, the radial directions are opposite. In this embodiment, the rotors 22a and 22b are used as the hubs 20a and 16. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 public love). --- line (please read the notes on the back before filling this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of Invention (A) 20b ° The structure of this second embodiment is the same as that shown in Figure 6. Compared with the first embodiment shown, the positions of the permanent magnets M of the rotors 22a and 22b and the stators 25a and 25b can be increased in the radial direction from the rotation centers of the hubs 20a and 20b, so the motors 21a and 21b can be increased. Output torque. Fig. 10 shows a transport robot arm A4 according to a third embodiment of the present invention. In this embodiment, the structure of the drive unit is the same as that of the transfer robot arm A2 of the first embodiment shown in Fig. 6, and one transfer table 8a is moved in and out by the first and second hubs 20a, 20b. Fig. 11 shows a transfer robot arm A5 according to a fourth embodiment of the present invention. In this embodiment, the structure of the drive unit is the same as that of the transfer robot arm A3 of the second embodiment shown in FIG. 9, and one transfer table 8a is moved in and out by the first and second hubs 20a, 20b. As shown in FIG. 12, the robot arms A4 and A5 ′ of the third and fourth embodiments are provided with one arm portion 3Qa and 30b on each of the first and second hubs 20a and 20b. The front ends of the links 31a and 31b connected to the front ends of the arm portions 30a and 30b are connected to a single conveyance table 8a. Fig. 13 shows a transport robot arm A6 according to a fifth embodiment of the present invention. In this embodiment, the drive portion of the modified example of the drive portion of the transport robot arm A2 of the first embodiment shown in FIG. 6 is used. The drive portion 'is hermetically fixed to the partition plate 32 of the support table 27, and the entire motors 21a, 21b and The vacuum side is isolated, that is, it is arranged on the atmospheric side. In addition, the rotors 22a, 22b and the hubs 20a, 20b 'are connected to the rotation direction by electromagnetic couplings 33a, 33b. Therefore, 'by disposing the motors 21a and 21b on the atmosphere side', the motor 2la 17 can be applied to the paper size of China National Standard (CNS) A4 (210 X 297 mm) ------ 1 ---- I · I ------ Order · —------- Line {Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Invention Description ( y L), 21 b The materials used are changed to those generally used in the atmosphere. Fig. 8 shows a drive mechanism portion of a transfer robot arm A7 according to a sixth embodiment of the present invention. In this embodiment, the drive section of the modified example of the drive section of the transport robot arm A3 of the second embodiment shown in FIG. 9 is used, and the combination of the stator 25a of the motor 21a and the stator of the position detector 26a, and the motor The fixed set of the stator 25b of the 21b and the position detector 26b is isolated from the vacuum side by hermetically fixing the partition plates 34a and 3 of the support base 27 and the support member 28, respectively. Therefore, it is possible to isolate the stator 25a including the coil from the vacuum side, suppress the release of gas from the coil, and enable the material of the coil to be used by users generally in the atmosphere. In addition, in this embodiment, if a photocoupler is used as a position detector, it is not necessary to isolate the position detector from the vacuum side, but at this time, only The stators 25a and 25b of each of the motors 21a and 21b may be isolated from the vacuum side by partitions 34a and 34b. Fig. 15 'shows a driving mechanism portion of a transfer robot arm A8 according to a seventh embodiment of the present invention. In this embodiment, the first and second motors 21a and 21b are supported by the wiper table 27 fixed to the frame la in the same manner as those in the above embodiments, and the robot arm A8 for transport is supported by the support table 27 The whole is arranged on the vacuum side of the transfer chamber 1. In addition, the arrangement of the stators 25a and 25b, the rotors 22a and 22b, and the position detectors 26a and 26b of the motors 21a and 21b are shifted in the axial direction, respectively. That is, in this embodiment, the rotor 21a and the rotor 22a on one side of the motor 21a are arranged at different positions in the axial direction with respect to the stator 25a and the rotor 22a, respectively. Also, the motor 21b on the other side, although it is 18 paper sizes, applies the Chinese National Standard (CNS) A4 specification (210 X 297 public love) ------------------- Order ------.--- line (please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 7 ^ 4 A7 -____ B7___ V. Description of the invention (4) Relative stator 25b and the rotor 22b are arranged with the position detector 26b at the same position in the axial direction ', but the rotor support bearing 23b is relatively staggered in the axial direction. In this embodiment, an example in which the position detectors 26a 'to 26b are arranged on the rotor support bearings 23a and 23b is shown. However, the vertical direction may be reversed. In the figure, 24 is a fixed shaft and 28 is a support member, and these members are integrated with the support base 27. Further, the driving mechanism portion of the transfer robot arm shown in each of the above embodiments of the present invention may be applied to the conventional transfer robot arm shown in FIG. 3. Also, in each of the above embodiments, the motors 21a and 21b are described as being concentric and the positions are staggered in the vertical direction. However, the present invention is not limited to this. For example, the present invention can be applied to Japanese Patent Laid-Open As shown in 4-129685, a pair of small rotating shafts that are separated at right angles to the center of the large rotating shaft are provided. By rotating the two small rotating shafts, the two transfer tables can be moved in and out, and by rotating the large rotating shaft, A transfer robot that changes the movement direction of the transfer platform. Of course, in this case, instead of using a two-shaft integrated motor as in the present invention, a pair of single-shaft motors is used. That is, for example, the first and second motors 21a and 21b shown in FIG. 6 are arranged separately from each other in the right angle direction of the shaft. In each of the first to sixth embodiments described above, 'the first and second motors 21a and 21b are shown to have the same configuration, that is, the stators 25a and 25b, the rotors 22a' and 22b, and the position detector. 26a and 26b and the rotor support bearings 23a and Ub are examples in which the axial directions are substantially the same, but this configuration can be any one of the first and second motors 21a and 21b. At this time, the axial direction dimension of at least one motor can be 19 compared to other motors. (Please read the notes on the back before filling this page) This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) Printed by A7 _B7_ of the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. The axis direction (up and down direction) of the entire driving mechanism of the transport robot can be made small. Further, in each of the above embodiments, for the sake of simplifying the description, although the arm portions 30a to 30d are illustrated as being integrally connected to the hubs 20a and 20b, each arm portion 30a to 30d is attached to each hub 20a, An arm mounting table is provided on 20b, and is fixed here with bolts or the like. In addition, the position of the arm mounting table may be staggered at a plurality of positions in the rotation direction, and it may be selectively used. By changing the mounting position of the arm to the rotation direction of the hub, the rotation stroke of the hub can be changed, the back and forth travel of the right angle of the axis of the transfer table can be changed, and the opening angles of the transfer tables 8a and 8b can be changed. In addition, by adjusting the opening angles of the transfer tables 8a and 8b to match the set angles of the adjacent chambers of the processing chambers configured by the transfer chamber, it is also possible to eliminate the rotation of the robot arm during workpiece transfer and improve productivity. In the above embodiments, although the two motors are arranged on the same axis, the arms are connected to the output members of the motors, and the conveying tables 8a and 8b connected to the arms through the connecting rods are driven by the motors. An example of the axis moving back and forth and rotating around the axis, but as shown in FIG. 16, three or more motors having the same structure as the motors shown in the above embodiments may be arranged on the same axis. Fig. 16 shows an example in which three motors 21a, 21b, and 21C are used. Among the hubs 20a, 20b, and 20c of each of the motors 21a to 21c, the first arm portion 40a is coupled to the hub 20a of the first motor 21a, and the second and third arm portions 40b and 20b are coupled to the hub 20b of the second motor 21b. 40c, the fourth arm portion 40d is coupled to the hub 20c of the third motor 21.c. In addition, each of the first to fourth links 41a to 41d is connected to each of the arm portions 40a to 40d, and the Chinese National Standard (CNS) A4 standard (210 X 297 mm) is applied to the first 20th paper size --- ----------------- Order --------- line (please read the notes on the back before filling out this page) Manufacturing A7 _ Β7_ V. Description of the Invention (\ 1) 'The link 41a and the second link 41b are connected to the first transfer table 8a, and the third link 41c and the fourth link 41d are connected to the second transfer table 8b. In addition, in this configuration, the conveyance tables 8a and 8b are moved in and out of the shaft at right angles by reversing each of the motors, and the conveyance tables 8a and 8b are rotated around the shaft by rotating the motors in the same direction. In addition, in the above-mentioned embodiments, although the transporting tables 8a and 8b perform two actions, such as an in-and-out motion toward the axis, and a rotary motion around the axis, the transporting table is determined by the use conditions of the transport robot arm. 8a, 8b, there may be cases in which only one of the movement in and out of the shaft at right angles or the rotation around the shaft is performed. In addition, for example, in the wafer transfer device shown in Japanese Patent Application Publication No. Hei 9-508758, which is a conventional technology, only one motor is used as a rotary drive shaft by using a single shaft as the motor shown in each of the above embodiments. The motor can move the pedestal (transfer table) between the pulled-in position and the pulled-out position. That is, the driving mechanism portion of the transfer robot arm of the present invention can be used in a transfer robot arm having a motor as a mobile transfer platform. In the above-mentioned embodiments, only the first embodiment is shown. In FIG. 6, labyrinth seals are provided on the facing surfaces of the first and second hubs 20 a and 20 b and the facing surfaces of the first hub 20 a and the support base 27. However, the labyrinth seal is, of course, provided. You can also set 21 in other embodiments as needed (please read the precautions on the back before filling in this page). F order --------- line. This paper size applies to China National Standard (CNS) A4 specifications ( 210 X 297 mm)