JP2000317867A - Rotary drive - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce costs and to reduce the radial dimension of an entire device within a vacuum chamber by reducing the diameters of bearings which support driven members rotating within the vacuum chamber. SOLUTION: A partition wall 33 formed in a bottomed, cylindrical shape is secured to one of the opposite walls of a vacuum chamber such as a transfer chamber 1, with the cylindrical part of the partition wall 33 projecting outside of the vacuum chamber, and with the inside and outside of the partition wall 33 directed respectively to the inner side and the atmosphere side of the vacuum chamber. Magnet couplings MC1, MC2 comprising outer and inner magnets which face each other across the partition wall 33 are arranged on the cylindrical part of the partition wall 33 and the output members of motors 29a, 29b supported on the outside of the vacuum chamber are connected to the outer magnets 32a, 32b of the magnet couplings M1, MC2. Driven members 36a, 36b are connected to the inner magnets 37a, 37b of the magnet couplings MC1, MC2 and are supported against bearings provided at support members 34a, 34b provided within the vacuum chamber.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a driving unit driven by an output unit of a driving motor located on the atmosphere side and a driven unit located on the vacuum chamber side are arranged concentrically via a partition wall. The present invention relates to a rotary drive device in which the drive unit and the driven unit are magnetically coupled by a magnet coupling facing each other with a partition wall therebetween.

[0002]

2. Description of the Related Art As a rotary driving device of this kind, there are a semiconductor manufacturing device in which a rotation driven portion is formed in a vacuum state,
There is a CD manufacturing device. And, for example, as in a multi-chamber type semiconductor manufacturing apparatus, a process chamber serving as a plurality of stations is arranged around one transfer chamber, and a thin plate-like work such as a wafer processed in each process chamber is processed. It is used for a handling robot provided in a transfer chamber that is transported via the transfer chamber.

A multi-chamber type semiconductor manufacturing apparatus is shown in FIG.
Around the process chamber stations 2a, 2b, 2c, 2d, 2e comprising a plurality of process chambers;
A work transfer station 3 for transferring works to the outside is provided, and the inside of the transfer chamber 1 is always kept in a vacuum state by a vacuum device.

The transfer chamber 1 is shown in FIG.
A handling robot A is rotatably provided at the center of the processing chamber, and is provided on the peripheral wall and at the process chamber stations 2a, 2b, 2c, 2d,
A gate 6 is provided on the partition wall 5 facing the work transfer station 3 and the work transfer station 3 as an entrance and exit of a work to each process chamber station. The gates 6 are provided inside the transfer chamber 1 so as to face the respective gates 6 and are opened and closed by opening and closing doors (not shown).

The above-mentioned handling robot A is a so-called double arm type of a frog leg type, and the structure is as shown in FIG. 3 to FIG.

Two arms 7 of the same length with respect to the center of rotation
a and 7b are provided rotatably. On the other hand, it has two carriages 8a, 8b of the same shape, and two links 9a, 9a,
One end of 9b is connected. These two links 9a, 9b
Is connected to the carriages 8a, 8b via a frog-leg-type carriage posture regulating mechanism, and both links 9a, 9b rotate completely symmetrically with respect to the carriages 8a, 8b. It has become. And each carrier 8a,
One of the two links connected to 8b is connected to one arm, and the other link is connected to the other arm.

FIG. 4 shows the above-mentioned frog-leg type carriage platform attitude regulating mechanism. The distal ends of two links 9a and 9b connected to the carriages 8a and 8b are as shown in FIG. 4 (a). The gears 9c, 9c mesh with each other and are connected by a gear structure.
The attitude angles θR and θL of the a and 9b are always the same. Thus, the transfer tables 8a and 8b are always directed in the radial direction of the transfer chamber 1 and are operated in the radial direction. The link between the links 9a and 9b may be replaced by a belt 9d crossed as shown in FIG. 4B instead of a gear.

FIGS. 5 (a) and 5 (b) show the operation of the above-mentioned handling robot A. As shown in FIG. 5 (a), both arms 7a and 7b are diametrical with respect to the center of rotation. When the positions are symmetrical, the links 9a and 9b are rotated so that the links 9a and 9b are expanded with respect to the two carriages 8a and 8b.

In this state, the rotary drive device is driven to rotate both arms 7a and 7b in the same direction, so that both carriers 8a and 8b are rotated with respect to the center of rotation while maintaining the position in the radial direction. . Further, from the state shown in FIG. 5A, the arms 7a and 7b are rotated in a direction in which they approach each other (opposite directions), so that the arms 7a and 7b The transfer table 8a located at the side where the angle to be formed becomes smaller is pushed by the links 9a and 9b and protrudes outward in the radial direction, and the stations 2a and 2a provided adjacent to the transfer chamber 1 radially outward are provided. 1 of 2b, 2c, 2d, 2e, 3
Rush into one station.

At this time, the other carriage is moved toward the center of rotation, but the amount of movement is small due to the angle between the arms 7a and 7b and the links 9a and 9b.

Incidentally, as a conventional technique of this kind of rotary driving device, there is one disclosed in Japanese Patent Publication No. 7-55464. This prior art is shown in FIG.

In FIG. 6, reference numeral 10 denotes a partition wall which is a cylindrical vacuum sealing body. A radially outer side of the partition wall 10 is an airtight transfer chamber 1 and an inner side communicates with the atmosphere. It is a chamber. Motor mounts 11a and 11b are fixed to the inside of the partition 10 so as to be spaced apart from each other in the axial direction, and motors 12a and 12b are respectively mounted on the mounts 11a and 11b. Each motor 12a, 12b has a speed reducer 13a, 13b
The driving members 14a and 14b are connected via a magnet, and magnets 15 are attached to the outer peripheral portions of the driving members 14a and 14b.
a and 15b are fixed. This magnet 15a,
Reference numeral 15b is a position slightly separated from the inner peripheral surface of the partition wall 10. 16, 16 are the driving members 14a, 1
4b is an inner bearing that supports the motor mounts 4b on the motor mounts 11a and 11b.

On the other hand, driven members 18a and 18b are provided at an outer side of the partition wall 10 in the radial direction via an outer bearing 17, and are separated from the driven members 18a and 18b by an outer magnet 19a. , 19b are fixed. Each of the outer magnets 19a and 19b is
And at a position slightly away from the outer peripheral surface of the inner magnet 15 and at a position facing the inner magnets 15a and 15b. Each pair of magnets 15a, 15b, 19a, and 19b that face each other on the inside and outside of the partition wall 10 constitutes a magnetic coupling.

As shown in FIG. 3, one arm 7a is fixed to one of the driven members 18a and 18b and the base end of the other arm 7b is fixed to the other, so that the rotation of both motors 12a and 12b is prevented. The above magnets 15a, 15
Power is transmitted to each arm 7a, 7b via a magnetic coupling composed of b, 19a, 19b.

[0015]

In the above-mentioned prior art apparatus, a magnet is disposed at a position distant from the center of rotation to some extent in order to secure the transmission force of the motor driving force. Due to the arrangement of the motors 12a and 12b, the diameter of the partition wall 10 must be increased to some extent. In this prior art, since the driven members 18a and 18b on the driven side are arranged radially outside of the partition 10, the outer bearing 17 for supporting the driven members 18a and 18b has a vacuum environment. In this case, the bearing becomes a special bearing that can be used in such a case.

Further, a driven member 18 is provided together with the bearing 17.
Since a and 18b also become large, the space occupied by the robot in the transfer chamber 1 on the vacuum side becomes large, and it is difficult to apply the robot to a small device.

The present invention has been made in view of the above, and it is possible to reduce the diameter of a bearing that supports a rotating driven member that is positioned inside a vacuum chamber, thereby achieving cost reduction. It is an object of the present invention to provide a magnetically coupled rotary drive device capable of reducing the size of the entire device in the radial direction.

[0018]

In order to achieve the above object, a rotary drive device according to the present invention is formed in a cylindrical shape with a bottom on one of opposed walls of a vacuum chamber such as a transfer chamber. The partition wall is formed by projecting the cylindrical portion of the partition wall to the outside of the vacuum chamber, facing the inside of the vacuum chamber toward the inside of the vacuum chamber, and fixing the outside to the atmosphere side, and opposing the cylindrical portion of the partition wall with the partition wall therebetween. A magnet coupling consisting of outer and inner magnets is arranged, the output member of the driving device supported outside the vacuum chamber is connected to the outer magnet of the magnet coupling, and the robot located in the vacuum chamber is connected to the inner magnet. , And the driven member is supported by a bearing provided on a support member provided in the vacuum chamber.

In the above-structured rotary drive device,
In the axial direction of the partition wall, the output member of the driving device is connected to each outer magnet, and a plurality of sets of the inner magnets are connected to the driven members, and a bearing that supports each driven member is provided. The diameters were shifted in the axial direction to have substantially the same diameter.

A plurality of sets of magnet couplings are arranged in the axial direction of the partition wall by connecting the output member of the driving device to the respective outer magnets and by connecting the inner magnet driven members. Are provided at substantially the same position in the axial direction with different diameters.

Further, a plurality of sets of magnet couplings are arranged in the axial direction of the partition wall by connecting the output member of the driving device to the respective outer magnets and connecting the driven members of the inner magnet to each other. Bearing to support the
It was provided inside each magnet coupling and inside the cylindrical portion of the partition.

According to the above construction, the driving device is supported outside the vacuum chamber partitioned into the inside and the outside of the vacuum chamber by the partition wall formed into a bottomed cylindrical shape, and the driven member is supported inside. The diameter of the bearing for the vacuum environment supporting the driven member can be made smaller than the diameter of the cylindrical portion of the partition wall, so that the cost can be reduced.

Further, since the cylindrical portion of the partition wall in which the magnet coupling is disposed projects outside the vacuum chamber, the space occupied by the driven member connected inside the magnet coupling on the vacuum chamber side is reduced. The size of the robot in the vacuum chamber can be reduced.

Further, in a rotary drive device in which a plurality of magnet couplings are arranged in the axial direction of the partition wall, the bearings for supporting the driven members located inside the magnet couplings are displaced in the axial direction to have the same diameter. Accordingly, the diameter can be reduced by the above configuration, and the same diameter can be used for a common bearing to further reduce the cost.

Further, since the bearings having different diameters are provided at substantially the same position in the axial direction, the space in the axial direction for a plurality of bearings can be reduced, and the entire apparatus can be reduced in the axial direction. it can.

Further, since each of the bearings is provided inside the magnet coupling and in the cylindrical portion of the partition wall, the space of the bearing portion is not taken up at all on the vacuum chamber side, but projects toward the vacuum chamber. The size of the part to be formed can be reduced.

[0027]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIG. In this embodiment, FIG.
The same members as those of the conventional components shown in FIGS.

FIG. 7 shows a first embodiment of the present invention. In the figure, reference numeral 25a denotes a first support base having a cylindrical shape, and a flange provided at an upper end of the first support base 25a. 26 is fixed to the bottom wall 27 of the transfer chamber 1.
A cylindrical second support 25b is attached to a lower end of the first support 25a.
b, flanges 28a and 28b vertically spaced apart from each other
First and second motors 29a and 29b are mounted coaxially with their output members 30a and 30b facing upward. The output member 30b of the lower second motor 29b penetrates the axis of the upper motor 29a and protrudes upward. The motor 29a,
29b is a stepping motor or the like that can be accurately controlled, and a device provided with a speed reducer as necessary, although not particularly shown or described, is used.

A first drive member 31a formed in a bowl shape with an open top is fixed to the output member 30a of the first motor 29a located on the upper side. The output member 30b of the second motor 29b penetrates through the first drive member 31a and protrudes upward from the first drive member 31a. The output member 30b is formed in a bowl shape having an open top at the tip end of the second output member 30b. A second driving member 31b disposed inside the first driving member 31a is fixed.

The open ends of the first and second drive members 31a and 31b are vertically displaced (axially), and the first and second outer magnets 32a and 32 are provided inside the open ends.
b are provided at the same radial position. A bottomed cylindrical partition wall 33 is provided inside the outer magnets 32a and 32b. The partition wall 33 protrudes below the bottom wall 27 of the transfer chamber 1. The outer peripheral surface of the cylindrical portion of the partition wall 33 faces a position slightly separated from the inner peripheral surfaces of the outer magnets 32a and 32b. The upper end of the partition wall 33 is air-tightly fixed to the first support table 25a side. Therefore, the outside (motor side) and the inside of the partition 33 are air-tightly separated by the partition 33.

A first support member 34a is fixed above the first support base 25a, and a first driven member 36a is supported inside the first support member 34a via a first bearing 35a. The first outer magnet 3 is formed on the outer periphery of the lower end of the first driven member 36a in the axial direction with a partition wall 33 interposed therebetween.
A first inner magnet 37a facing 2a is fixed. The axially upper portion of the first driven member 36a is
The first arm bracket 38a is formed to extend radially outward from above the first bearing 35a beyond above the first support member 34a, and a cylindrical first arm bracket 38a is formed at this portion.

A second support member 34b is formed in a cylindrical shape above the first driven member 36a.
b inside the second driven member 36b via the second bearing 35b.
Is supported. The second driven member 36b penetrates radially inward of the first driven member 36a,
A second inner magnet 37b facing the second outer magnet 32b with a partition wall 33 interposed therebetween is fixed to the outer periphery of the lower end. The upper portion of the second driven member 36b in the axial direction is increased from above the second bearing 25b to the outside in the radial direction beyond the upper portion of the second support member 34b. An arm bracket 38b is formed.

The base end of one arm 7a of the robot is fixed to the first arm bracket 38a, and the base end of the other arm 7b is fixed to the second arm bracket 38b.

In the above configuration, the first outer and inner magnets 32a, 37a constitute a _first magnet coupling MC1, and the second outer and inner magnets 32b, 37b constitute a second magnet coupling MC1. magnet coupling MC ₂ is configured.

As the first motor 29a rotates,
The first arm bracket 38a is rotated via the first magnetic coupling MC _1. Also, the second motor 29b
Rotates, the second magnetic coupling M
The second arm bracket 38b is rotated through the C _2.

The first and second arm brackets 38a, 38
First supporting the 8b, second bearing 35a, first 35b have been described above, the second magnetic coupling _MC 1, MC
The two bearings 35a and 35b can be configured without being influenced by the radial size of the magnet couplings MC ₁ and MC ₂ by being provided at a position shifted in the axial direction above the _two. , Magnet coupling M
The size in the radial direction can be made smaller than C ₁ and MC ₂ . The two bearings 35a and 35b have the same diameter, that is, the same bearings.

FIG. 8 shows a second embodiment of the present invention.
This embodiment differs from the first embodiment in that the position of the bearing that supports the driven member on the driven side is changed.
The other configuration is substantially the same as the configuration of the first embodiment, so the same reference numerals are given and the description is omitted.

The second follower member 36b coupled to the inner side of the second magnetic coupling MC ₂ 'is first driven member 36a as in the first embodiment' second bearing 35 in
b ', the second bearing 35
b 'is disposed radially inside the first bearing 35a' and at substantially the same position in the axial direction.

According to this configuration, the first and second driven side brackets to which the first and second arm brackets 38a 'and 38b' are fixed.
The first and second bearings 35a 'and 35b' supporting the second driven members 36a 'and 36b' are arranged at substantially the same position in the axial direction to support a plurality of sets (two sets) of driven sides. In this case, the axial space of the bearing is small, so that the dimension (height) of the driven side in the axial direction can be reduced.

FIG. 9 shows a third embodiment of the present invention.
This embodiment is different from the first and second embodiments in that the configuration of the rotary member on the driven side and the position of a bearing for supporting the rotary member are changed. Other configurations are the first and second embodiments. Since the configuration is substantially the same as that of the embodiment, the same reference numerals are given and the description is omitted.

The "first bearing 35a for supporting the" first follower member 36a which is fixed a first magnet coupling MC ₁ of the inner magnet 37a is disposed radially inward of the first magnetic coupling MC _1. The first bearing 35a "is supported by the first support member 34a".

The second magnet coupling MC ₂
Driven member 36 to which magnet 37b inside is fixed.
b "the second bearing 35b for supporting the" are disposed radially inward of the first magnetic coupling MC _2. The second bearing 35b "is supported by a shaft 39 provided on the bottom plate side of the partition wall 33". First and second bearings 35
a ″ and 35b ″ have the same diameter.

The second driven member 36b ″ is connected to the first driven member 36b.
The driven members 36a "and 36b" penetrate inside the a "and protrude into the transfer chamber 1, and arm brackets 38a" and 38b "for attaching the arms 7a and 7b are fixed to the respective ends thereof. .

In this configuration, the first and second bearings 3 for supporting the first and second driven members 36a "and 36b" on the driven side.
5a ″ and 35b ″ are disposed inside the first and second magnet couplings MC ₁ and MC ₂ , and a power connection portion (magnet coupling) and a support portion (bearing).
Are located at the same position (height) in the axial direction, so that the axial space for both portions can be reduced. Further, the first and second driven members 36a "and 36b" have a configuration in which only the distal ends thereof project into the transfer chamber 1, and the arm brackets 38a "and 38b" fixed to the respective distal ends.
Diameter can be reduced.

FIGS. 10, 11 and 12 show modifications of the first, second and third embodiments, respectively. Since each of the modified examples is substantially the same as the configuration of each embodiment, the same reference numerals are given to the respective modified examples for the description.

FIG. 10 shows a modification of the first embodiment shown in FIG. This means that the diameters of the first and second driven members 36a and 36b are reduced, and the diameters of the first and second bearings 35a and 35b supporting the same are reduced accordingly. Therefore, the diameter of the arm brackets 38a, 38b formed at the distal ends of the driven members 36a, 36b can be reduced, and the portion of the arm brackets 38a, 38b projecting into the transfer chamber 1 is reduced.

FIG. 11 shows a modification of the second embodiment shown in FIG. This reduces the diameter of the first and second driven members 36a 'and 36b', and accordingly, the first and second bearings 35a 'and 35b' having different diameters for supporting them.
Diameter was reduced. Accordingly, each of the driven members 36a ', 3
6b ', an arm bracket 38a' formed at the tip of
The diameter of 38b 'can also be reduced, and the protruding portion of this portion into the transfer chamber 1 is reduced.

FIG. 12 shows a modification of the third embodiment shown in FIG. This is a bearing 35a ", 35b" for supporting the first and second driven members 36a ", 36b".
Have different diameters. That is, the second driven member 36
b ", the second driven member 36
b ″ supporting the second bearing 35 b ″
a ″, and the second part located inside
The bearing 35b "is arranged substantially identically to the first bearing 35a" in the axial direction.

[Brief description of the drawings]

FIG. 1 is a schematic plan view of a semiconductor manufacturing apparatus which is an example of a multi-chamber type manufacturing apparatus.

FIG. 2 is an exploded perspective view showing a relationship between a transfer chamber and a handling robot.

FIG. 3 is a perspective view showing an example of a handling robot.

FIGS. 4A and 4B are explanatory views showing a transport table attitude regulating mechanism.

FIGS. 5A and 5B are explanatory diagrams of the operation of the handling robot.

FIG. 6 is a cross-sectional view showing a conventional example of a rotation drive device used for an arm rotation mechanism of a handling robot.

FIG. 7 is a sectional view schematically showing a main part of the first embodiment of the present invention.

FIG. 8 is a sectional view schematically showing a main part of a second embodiment of the present invention.

FIG. 9 is a sectional view schematically showing a main part of a third embodiment of the present invention.

FIG. 10 is a cross-sectional view showing a modification of the first embodiment shown in FIG.

FIG. 11 is a cross-sectional view showing a modification of the second embodiment shown in FIG.

FIG. 12 is a cross-sectional view showing a modification of the third embodiment shown in FIG.

[Explanation of symbols]

A: Handling robot 1: Transfer chamber 2a, 2b, 2c, 2d, 2e: Process chamber station 3: Work transfer station 5: Partition wall 6: Gate 7, 7, 7a, 7b Arm 8a, 8b: Transfer stand 9a, 9b ... Link 9c ... Gear 9d ... Belt 10 ... Partition wall 11a, 11b ... Motor mount 12a, 12b ... Motor 13a, 13b ... Reducer 14a, 14b ... Driving member 15a, 15b, 19a, 19b ... Magnet 16, 17 ... Bearing 18a , 18b driven member 20a, 20b magnet coupling 25a, 25b support base 26 flange portion 27 bottom wall 28a, 28b flange 29a, 29b motor 30a, 30b output member 31a, 31b drive member 32a, 32b, 37a, 37b ... Magnet 33 "... partition wall 34a, 34a ', 34b ... support member 35a, 35a', 35a", 35b, 35b ', 35
b "... bearings 36a, 36a ', 36a", 36b, 36b', 36
b "... follower members 38a, 38a ', 38a", 38b, 38b', 38
b "... arm bracket MC _1, MC 2 _... magnet coupling

Claims (4)

[Claims] 1. A partition having a cylindrical shape with a bottom is formed on one of opposite walls of a vacuum chamber such as a transfer chamber, and a cylindrical portion of the partition is projected outside of the vacuum chamber. A magnet coupling consisting of outer and inner magnets facing each other across the partition wall is fixed to the cylindrical part of the partition wall, with the outside facing the atmosphere side, and a vacuum is applied to the magnet outside the magnet coupling. An output member of a driving device supported outside the chamber is connected, a driven member connected to a robot located in the vacuum chamber is connected to the inner magnet, and a bearing provided on a supporting member provided in the vacuum chamber. A rotary drive device supported by: 2. The rotary drive device according to claim 1, wherein a magnet coupling is connected to an output member of the drive device to each outer magnet in an axial direction of the partition wall, and a driven member is attached to an inner magnet. A rotary drive device wherein a plurality of sets are connected to each other and bearings for supporting the driven members are shifted in the axial direction to have substantially the same diameter. 3. The rotary drive device according to claim 1, wherein the magnet coupling is connected to an output member of the drive device to each outer magnet in an axial direction of the partition wall, and a driven member is attached to the inner magnet. A rotary drive device wherein a plurality of sets are connected to each other and bearings for supporting the driven members are provided at substantially the same position in the axial direction with different diameters. 4. The rotary drive device according to claim 1, wherein the magnet coupling includes an output member of the drive device connected to each outer magnet in an axial direction of the partition wall, and a driven member that is driven by the inner magnet. A rotary drive device, wherein a plurality of sets are connected to each other and bearings for supporting each driven member are provided inside each magnet coupling and in a cylindrical portion of a partition wall.