JP2000218585A - Rotary driving gear - Google Patents

Abstract

PROBLEM TO BE SOLVED: To shorten a length of an output shaft in a motor unit for rotating an arm bracket SOLUTION: In this rotary driving gear connecting an output member of arm brackets 24a, 24b, etc., to an output shaft of motor units 14a, 14b comprising stators 16a, 16b supported by a motor support part 21b and output shafts 22a, 22b positioned inside this stator to be provided with rotors 15a, 15b opposed to the stator in the external periphery, an output side end part of the output shaft of the motor unit is supported to a support member through bearings 23a, 23b.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an arm which is connected to an end of an output shaft of a motor and which is attached to one end of an arm which is an output member. The arm bracket is rotated by driving the output shaft of the motor. The present invention relates to a rotary drive device that performs a rotation operation of a rotary drive.

[0002]

2. Description of the Related Art As a rotary drive of this type, there are a semiconductor manufacturing apparatus having a rotary output section in a vacuum state, and an LC drive.
D manufacturing equipment. And, for example, as in a multi-chamber type semiconductor manufacturing apparatus, a process chamber serving as a plurality of stations is arranged around one transfer chamber, and a thin plate-like work such as a wafer processed in each process chamber is processed. It is used for a handling robot provided in a transfer chamber that is transported via the transfer chamber.

A multi-chamber type semiconductor manufacturing apparatus is shown in FIG.
Around the process chamber stations 2a, 2b, 2c, 2d, 2e comprising a plurality of process chambers;
A work transfer station 3 for transferring works to the outside is provided, and the inside of the transfer chamber 1 is always kept in a vacuum state by a vacuum device.

The transfer chamber 1 is shown in FIG.
A handling robot A is rotatably provided at the center of the processing chamber, and is provided on the peripheral wall and at the process chamber stations 2a, 2b, 2c, 2d,
A gate 6 is provided on the partition wall 5 facing the work transfer station 3 and the work transfer station 3 as an entrance and exit of a work to each process chamber station. The gates 6 are provided inside the transfer chamber 1 so as to face the respective gates 6 and are opened and closed by opening and closing doors (not shown).

The above-mentioned handling robot A is a so-called frog-leg type double-arm type, and the structure thereof is as shown in FIG. 3 to FIG.

Two arms 7 of the same length with respect to the center of rotation
a and 7b are provided rotatably. On the other hand, it has two carriages 8a, 8b of the same shape, and two links 9a, 9a,
One end of 9b is connected. These two links 9a, 9b
Is connected to the carriages 8a, 8b via a frog-leg-type carriage posture regulating mechanism, and both links 9a, 9b rotate completely symmetrically with respect to the carriages 8a, 8b. It has become. And each carrier 8a,
One of the two links connected to 8b is connected to one arm, and the other link is connected to the other arm.

FIG. 4 shows the above-mentioned frog-leg type carriage platform attitude regulating mechanism. The distal ends of two links 9a and 9b connected to the carriages 8a and 8b are as shown in FIG. 4 (a). The gears 9c, 9c mesh with each other and are connected by a gear structure.
The attitude angles θR and θL of the a and 9b are always the same. Thus, the transfer tables 8a and 8b are always directed in the radial direction of the transfer chamber 1 and are operated in the radial direction. The link between the links 9a and 9b may be replaced by a belt 9d crossed as shown in FIG. 4B instead of a gear.

FIG. 5 shows a conventional rotary driving device for independently rotating the arms 7a and 7b. The bases of the arms 7a and 7b are fixed to ring-shaped arm brackets 10a and 10b, respectively.
The arm brackets 10a and 10b are fixed to the ends of the output shafts 11a and 11b of the motor unit, respectively. The output shafts 11a and 11b are arranged concentrically with one output shaft 11a being hollow and the other output shaft 11b penetrating through the hollow, and the respective output shafts 11a and 11b are provided in a transfer chamber. 1 rotatably supported by support members 12a and 12b fixed to the first member. The output shafts 11a and 11b are connected to support members 13a. It is connected to the output of the motor units 14a and 14b supported by 13b.

The motor units 14a and 14b are connected to rotors 15a and 15b fixed to the output shafts 11a and 11b.
b and the stator 16 fixed to the support members 13a and 13b
a and 16b, and the rotors 15a and 15b are rotated by the induced electromotive force between the two. The rotors 15a, 1 of these motor units 14a, 14b
Between the stator 5b and the stators 16a and 16b, vacuum partition members 17a and 17b as vacuum sealing bodies are provided as support members 12a and 12b.
The transfer chamber 1 is connected to the output shafts 11a and 11b from the output shafts 11a and 11b.
Is airtight with respect to the outside of the support portion.

FIGS. 6 (a) and 6 (b) show the operation of the above-mentioned handling robot A. As shown in FIG. 6 (a), both arms 7a and 7b are diametrical with respect to the center of rotation. When the positions are symmetrical, the links 9a and 9b are rotated so that the links 9a and 9b are expanded with respect to the two carriages 8a and 8b. Therefore, the two carriages 8a and 8b are moved to the rotation center side.

In this state, the rotary drive device is driven to rotate both arms 7a and 7b in the same direction, so that both carriages 8a and 8b are rotated with respect to the center of rotation while maintaining their positions in the radial direction. . Further, from the state shown in FIG. 6A, the arms 7a and 7b are rotated in a direction in which they approach each other (opposite directions), so that the arms 7a and 7b The transfer table 8a located at the side where the angle to be formed becomes smaller is pushed by the links 9a and 9b and protrudes outward in the radial direction, and the stations 2a and 2a provided adjacent to the transfer chamber 1 radially outward are provided. 1 of 2b, 2c, 2d, 2e, 3
Rush into one station.

At this time, the other carrier is moved toward the center of rotation, but the amount of movement is small due to the angle between the arms 7a, 7b and the links 9a, 9b.

[0013]

In the rotary drive for rotating the handling robot A and the like, each motor unit is disposed outside the transfer chamber 1 and the output shaft of this motor unit is connected to the transfer shaft. Since the motor unit must be connected to the arm bracket located in the chamber 1, the output shaft of the motor unit is configured to protrude longer from the motor drive unit toward the output member.

In such a conventional rotary drive device, as shown in FIG. 5, each of the motor units 14a, 14a
b output shafts 11a and 11b are connected to each motor unit 14a,
14b rotors 15a, 15b, stators 16a, 16
bearings 18 at both axial positions of the drive section b.
a, 18b, 18c, 18d, and 18e.

For this reason, it is necessary to provide bearings at both ends of each motor unit. However, the vacuum bulkhead must have a structure in which rigidity is weak and the bearing support force does not act on the vacuum bulkhead. However, there is a problem that the number of components in this portion increases and the length of the motor unit increases.

The present invention has been made in view of the above, and it is possible to shorten the length of a motor unit for rotatingly driving an arm bracket, to simplify a bearing structure of the motor unit, and to further reduce the length of the motor unit. In the case of providing an airtight partition between the stator and the rotor,
It is an object of the present invention to provide a rotary drive device in which this partition can be configured with a simple shape and with a small number of parts.

[0017]

In order to achieve the above object, a rotary drive device according to the present invention comprises a stator supported by a motor support, a stator positioned inside the stator, and In a rotary drive device in which an output member such as an arm bracket is coupled to an output shaft of a motor unit including an output shaft provided with a rotor opposed to a stator, an output end of the output shaft of the motor unit is supported by a support member. It is configured to be supported via.

[0018] A plurality of motor units, which are composed of a stator supported by a motor supporting portion and an output shaft provided inside the stator and having a rotor facing the stator on the outer periphery, are concentrically provided. In a rotary drive device in which the output shafts are displaced in the axial direction and an output member such as an arm bracket is coupled to the output shaft of each motor unit, the output shafts of the motor units are arranged in a ring shape, and the outermost output The output end of the shaft is supported by a support member fixed to the frame side via a bearing, and the output end of the inner output shaft is sequentially supported inside the outermost output shaft via a bearing. The bearings are arranged at substantially the same position in the axial direction.

In each of the rotary drive devices, a vacuum partition member serving as an airtight wall having a closed front end and a base end fixed to a support member is interposed between the stator and the rotor of the motor unit.

According to the above configuration, the output shaft of the motor unit is supported only at the output end thereof, and there is no support at the end opposite to the output portion. The length of the output shaft can be reduced, and the overall length of the motor unit can be reduced. Since the output shaft can be supported at one point on the output side, the support structure can be simplified.

Further, a plurality of motor units are concentrically arranged,
In addition, in the configuration in which the output side end of the output shaft of each motor unit is supported by a bearing in addition to the above-described effects, the bearing portion of each output shaft is arranged in the axial direction. By being substantially at the same position, the size of this bearing portion in the axial direction can be reduced. Further, the output shaft of each motor unit is arranged in a ring, and the output side end of the outermost output shaft is supported via a bearing on a support member fixed to the frame side, and the output side end of the inner output shaft is provided. Since the portions are sequentially supported inside the outermost output shaft via bearings, each output shaft also serves as a housing for each bearing, and the number of parts for the bearing structure can be reduced.

Further, when a vacuum partition member is arranged between the rotor and the stator of the motor unit so that the inside of the rotor is evacuated, the structure of the vacuum partition member is a cylindrical integrated structure with a bottom. It can be configured with a simple shape and with a small number of parts. In addition, the integrated structure reduces the number of vacuum seals such as O-rings, and improves the reliability of isolation between the atmosphere and vacuum.

[0023]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIG. In this embodiment, FIG.
The same members as the conventional constituent members described above are denoted by the same reference numerals and described.

FIG. 7 shows a first embodiment of the present invention. In the figure, reference numeral 21 denotes a support member fixed to the center of the transfer chamber 1. The upper part of the support member 21, that is, a portion that is cylindrically opposed to the inside of the transfer chamber 1, is a cylindrical bearing support portion 21a. The lower portion of the support member 21, that is, a portion protruding outside the transfer chamber 1 is a motor support member 21b.

The first and second motor units 14a and 14b are supported concentrically and displaced in the axial direction on the motor support portion 21b of the support member 21 similarly to the conventional structure shown in FIG. I have. The output shaft 22a of the first motor unit 14a is hollow, and the output shaft 22b of the lower second motor unit 14b passes through the axis of the first motor unit 14a concentrically. I have. Then, the first rotor 15a is provided on the outer peripheral portion of the first output shaft 22a.
The first stator 16a opposed thereto is attached to the inner peripheral portion of the motor support 21b, and the second stator 16a
A second rotor 15b is provided on an outer peripheral portion of the output shaft 22b, and a second stator 16b opposed thereto is mounted on an inner peripheral portion of the motor support portion 21b.

Of each motor unit 14a, 14b,
The output side end of the output shaft 22a of the first motor unit 14a located radially outward is rotatably supported by a bearing support 21a of the support member 21 via a bearing 23a. The output side end of the output shaft 22b of the second motor unit 14b located radially inward is rotatably supported inside the first output shaft 22a via a bearing 23b.

Thus, the two motor units 14, 14
The respective output shafts 22a and 22b of b are rotatably supported at their respective output side ends and at substantially the same position in the axial direction. The output shafts 22a and 22b are supported near the output of the rotary drive.

The first output shaft 22a and the second output shaft 22b
The first arm bracket 24 is attached to each output end of the
a, the second arm bracket 24b is integrally fixed. Each of the arm brackets 24a and 24b is formed in a hat shape so as to cover a bearing portion that supports each of the output shafts 22a and 22b, and is arranged in a stacked manner in the axial direction. The base ends of the first and second arms 7a, 7b are connected to the arm brackets 24a, 24b.

In order to maintain rigidity, the bearings 23a and 23b use, for example, one cross roller type or a combination of two ball bearings.

According to this configuration, the output shafts 22a and 22b of the first and second motor units 14a and 14b are supported in a cantilever manner at the respective output side ends and at substantially the same position in the axial direction. Is done.

In the first embodiment, the drive units of the motor units 14a and 14b are housed in the motor support 21b of the support member 21. When the transfer chamber 1 is evacuated, the motor The inside of the support part 21b is also vacuum-processed.

In this case, the stators 16a and 16b composed of coil members are arranged in a vacuum atmosphere. In order not to contaminate the vacuum atmosphere by the stators 16a and 16b, severe restrictions are imposed on the materials and configurations of the stators 16a and 16b.

FIG. 8 shows a second embodiment in which the above problem is solved. That is, the rotor and the stator of the first and second motor units 14a and 14b have substantially the same configuration, and the opposing portions of the rotor and the stator forming a pair are communicated with each other by the first and second motor units 14a and 14b. ing. Therefore, between the rotors and the stators of the two motor units 14a and 14b, a cylindrical vacuum partition member 25 whose front end is closed downstream of the second motor unit 14b.
Intervene. Base end (upper end) of this vacuum partition member 25
Is fixed to the support member 21 in an airtight manner,
The rotor side of each of the motor units 14a and 14b is located inside the transfer chamber 1 where the vacuum is established, and the stator side is the atmosphere side. A non-magnetic material is used for the vacuum partition member 25. For example, stainless steel that releases a small amount of gas in a vacuum is used.

FIG. 9 shows a third embodiment of the present invention, which is a single-axis case. An output end of an output shaft 22 of one motor unit 14 having a pair of rotors 15 and a stator 16 is rotatably supported by a support member 21 ′ via a bearing 23. One arm bracket 24 is fixed to the output end of the output shaft 22, and the base end of one arm 7 is connected to the arm bracket 24.

A cylindrical partition wall 25 'having a closed end is provided between the rotor 15 and the stator 16 so as to face the support member 21'.

Also in this embodiment, the output shaft 22 of the motor unit 14 is supported at one location near the output of the rotary drive.

[Brief description of the drawings]

FIG. 1 is a schematic plan view of a semiconductor manufacturing apparatus which is an example of a multi-chamber type manufacturing apparatus.

FIG. 2 is an exploded perspective view showing a relationship between a transfer chamber and a handling robot.

FIG. 3 is a perspective view showing an example of a handling robot.

FIGS. 4A and 4B are explanatory views showing a transport table attitude regulating mechanism.

FIG. 5 is a cross-sectional view showing a conventional example of a rotation drive device used for an arm rotation mechanism of a handling robot.

FIGS. 6A and 6B are explanatory diagrams of the operation of the handling robot.

FIG. 7 is a sectional view schematically showing a main part of the first embodiment of the present invention.

FIG. 8 is a sectional view schematically showing a main part of a second embodiment of the present invention.

FIG. 9 is a sectional view schematically showing a main part of a third embodiment of the present invention.

[Explanation of symbols]

A: Handling robot 1: Transfer chamber 2a, 2b, 2c, 2d, 2e: Process chamber station 3: Work transfer station 5: Partition wall 6: Gate 7, 7, 7a, 7b Arm 8a, 8b: Transfer stand 9a, 9b ... Link 9c ... Gear 9d ... Belt 10a, 10b, 24,24a, 24b ... Arm bracket 11a, 11b, 22,22a, 22b ... Output shaft 13a, 13b, 21,21 '... Support member 14,14a, 14b ... Motor Units 15, 15a, 15b ... Rotors 16, 16a, 16b ... Stators 17a, 17b, 25, 25 '... Vacuum bulkhead members 18a, 18b, 18c, 18d, 18e, 23, 23
a, 23b: Bearing 21a: Bearing support 21b: Motor support

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Mineo Tokuda 1200 Manda, Hiratsuka-shi, Kanagawa F-term (reference) 3F060 EA01 EB12 EC12 GA13 5F031 CA05 GA04 GA42 GA44 GA47 GA48 GA50 MA06 MA09 NA05 NA09 5H605 AA07 BB05 BB17 CC03 CC10 DD09 EA06 EB10 GG06 5H607 AA11 BB01 BB07 BB14 BB23 BB25 CC01 DD02 DD03 DD07 DD16 FF34 GG04 GG08

Claims (3)

[Claims] 1. A stator supported by a motor support,
A rotation drive device comprising an output shaft such as an arm bracket coupled to an output shaft of a motor unit comprising an output shaft provided inside the stator and having a rotor opposed to the stator on the outer periphery. A rotary drive device wherein an output end of a shaft is rotatably supported on a support member via a bearing. 2. A stator supported by a motor support,
A plurality of motor units, which are located inside the stator and have an output shaft provided with a rotor facing the stator on the outer periphery, are arranged concentrically and displaced in the axial direction. In a rotary drive device in which an output member such as an arm bracket is connected to a shaft, the output shaft of each of the motor units is arranged in a ring, and the output side end of the outermost output shaft is fixed to a support member fixed to the frame side. It is rotatably supported via bearings, and the output side end of the inner output shaft is rotatably supported inside each of the outermost output shafts sequentially through bearings. A rotary drive device characterized by being located at substantially the same position. 3. A vacuum partition member serving as an airtight wall having a closed front end and a base end fixed to a support member is interposed between a stator and a rotor of the motor unit.
Or the rotary drive device according to claim 2.