JPH11207666A - Handling robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To attain simplified control of appearing and disappearing operations of a robot link mechanism, and an increase in stroke, and a decrease in the gate width of a transfer chamber. SOLUTION: This handling robot is provided with the first and second robot link mechanisms B1 , B2 capable of revolving, which involve conveyance tables 8a, 8b and whose conveyance tables 8a, 8b are operated so as to appear and disappear in the same direction as the revolving direction, or in such a direction as the position is shifted a little by conducting extending and shrinking operations, whereas, the first and second robot link mechanisms B1 , B2 consist of a plurality of bosses formed so as to rotate independently, two pairs of arms 56a, 56d, 56b, 56c including arms formed at a pillar 56e erected on the top surface of a boss, a pair of links 57a, 57d, and 57b, 57c connected near the front ends of the respective pairs of arms, and the conveyance tables 8a, 8b connected near the front ends of each pair of arms. The pillar 56e is erected on an appearing/disappearing direction line of both the robot link mechanisms B1 , B2 operating in the same direction as the rotational direction, or in the middle of both the appearing and disappearing direction lines of both the robot link mechanisms B1 , B2 operating in a shifted direction toward the rotational direction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing apparatus, an LCD manufacturing apparatus, and the like, in which a plurality of process chambers are provided around a single transfer chamber, and processing is performed in each process chamber. Multi-chamber type manufacturing in which a thin plate-like work such as a wafer to be transferred is transferred from one process chamber to another process chamber by a handling robot provided in the transfer chamber via a transfer chamber. The present invention relates to the handling robot in the apparatus.

[0002]

2. Description of the Related Art A multi-chamber type semiconductor manufacturing apparatus is shown in FIG. 1 and a process chamber station 2a, 2b, 2c, 2d, 2e comprising a plurality of process chambers is provided around a transfer chamber 1.
And work transfer stations 3 and 3 for transferring the work to the outside, and the inside of the transfer chamber 1 is always kept in a vacuum state by a vacuum device.

The transfer chamber 1 is shown in FIG.
In they become as shown, Yes includes possible handling robot A ₁ in the center of this pivoting, in the peripheral wall, and each process chamber stations 2a, 2b, 2c, 2
Gates 6 serving as entrances and exits of the work to each process chamber station are provided on the partition wall 5 facing the work transfer stations 3 and 3 and d and 2e. The gate 6 is opened and closed by a gate valve (not shown) provided inside the transfer chamber 2 so as to face each gate 6.

[0004] and the handling robot A ₁ to a conventional handling robot used in semiconductor manufacturing apparatus of this type are said double-arm of a so-called frog leg type are known.

[0005] Handling robot A ₁ of a double-arm type of frog leg type of the prior art is as shown in FIGS. 3-5.

Two arms 7 of the same length with respect to the center of rotation
a and 7b are provided rotatably. On the other hand, two transfer tables 8a and 8b having the same shape are located on both sides with respect to the center of rotation, and one end of two links 9a and 9b of the same length is provided at the base of each transfer table 8a and 8b. Are connected. One end of each of the two links 9a, 9b is connected to the carriage 8a,
The link 9a and 9b are connected to the transfer table 8a and 8b in a completely symmetrical direction with respect to each of the transfer tables 8a and 8b. One of the two links connected to the transport tables 8a and 8b is connected to one arm, and the other link is connected to the other arm.

FIG. 4 shows the above-mentioned frog-leg type carriage platform attitude regulating mechanism. The distal ends of two links 9a and 9b connected to the carriages 8a and 8b are as shown in FIG. 4 (a). The gears 9c, 9c mesh with each other and are connected by a gear structure.
The attitude angles θR and θL of the a and 9b are always the same. Thus, the transfer tables 8a and 8b are always directed in the radial direction of the transfer chamber 1 and are operated in the radial direction. The link between the links 9a and 9b may be replaced by a belt 9d crossed as shown in FIG. 4B instead of a gear.

FIG. 5 shows a mechanism for independently rotating the arms 7a and 7b. The bases of the arms 7a and 7b are ring-shaped, and the ring-shaped bosses 10a and 10b are rotatably supported on the transfer chamber 1 so as to be coaxial with the center of rotation.

On the other hand, disc-shaped bosses 11a and 11b are arranged inside the two ring-shaped bosses 10a and 10b so as to face each other and are concentric with each other. Is the magnetic coupling 12a,
At 12b, they are magnetically coupled via an airtight partition 17.

The rotating shafts 13a, 13b of the disc-shaped bosses 11a, 11b are arranged concentrically.
The respective rotating shafts 13a, 13b are connected to output portions of motor units 14a, 14b which are concentrically supported by the frame 1a of the transfer chamber 1 and are displaced in the axial direction.

The motor units 14a and 14b are integrally connected to a motor 15 using, for example, an AC servomotor and a reducer 16 having a large reduction ratio using a harmonic drive (trade name). Each reduction gear 1
The output units 6 and 16 are connected to the base ends of the rotating shafts 13a and 13b. The inside of the transfer chamber 1 in which the arms 7a and 7b are located is maintained in a vacuum state by the partition wall 17.

[0012] in FIG. 6 (a), (b) is intended to show the effect of a conventional handling robot _{A 1} described above, by rotating ring boss 10a, 10b to each other as shown in FIG. 6 (a) When both arms 7a, 7b are diametrically symmetrical with respect to the center of rotation, both carriages 8a, 8b are moved to the pivot center side by the expanding operation of each pair of links 9a, 9b, and are in a standby state. .

In this state, by rotating both arms 7a and 7b in the same direction, both carriers 8a and 8b are rotated with respect to the center of rotation while maintaining the position in the radial direction. Further, from the state shown in FIG. 6A, both arms 7a and 7b are
By rotating them in directions approaching each other (opposite directions), as shown in FIG.
b, the transfer table 8a located on the side where the angle formed by b becomes smaller is pushed by the links 9a and 9b and protrudes outward in the radial direction, so that the process chamber provided adjacent to the transformer chamber 1 radially outward. Stations 2a, 2
b, 2c, 2d, 2e, and 3 enter the process chamber of one station.

At this time, the other carrier is moved toward the center of rotation, but the amount of movement is small due to the angle between the arms 7a, 7b and the links 9a, 9b.

[0015]

In the first handling robot A ₁ of the conventional [0005] By conveying table there are two, alternatively the two transport stand to each station, or Although it can be used continuously and expected to have the effect of a dual-arm robot, there are actually the following problems.

That is, when the order of processes is determined and wafers processed in each process chamber station are sequentially sent to each station, there are wafers being processed or processed in each station. At this time, when a processed wafer in a certain station is replaced with an unprocessed wafer, the handling robot A1 of the _first prior art described above uses FIGS.
As shown in, first, opposed from supports the wafer W ₁ unprocessed one transfer table 8a to the station 2e to be exchanged carrier table 8b your free turning the handling robot A ₁ (FIG. 7).

[0017] Then, you receive the wafer W ₂ processed the transfer table 8b of the person who has the vacant top of this by rush into the station 2e (Fig. 8), is conveyed to the transfer chamber 1. After that, the handling robot A ₁
The turning 180 degrees (FIG. 9), rush moving the carrier table 8a supporting the wafer W ₁ unprocessed to which the station 2e in from to face the said station 2e (Fig. 10)
And then transferring the wafer W ₁ unprocessed to this station 2e within carrier table 8a became empty transfer chamber 1
(FIG. 11).

[0018] Thus, the above in the conventional handling robot A _1, it must be the turning degree to 180 degrees to replace the wafer with respect to a single station, a problem that the cycle time of wafer exchange becomes long was there.

The present invention has been made in view of the above. In a handling robot having two robot link mechanisms each having a carrier at the tip thereof, the handling robot is provided with respect to one process chamber station. By simply turning or not turning at all, the processed work in the station and the unprocessed work in the transfer chamber can be exchanged. It is an object of the present invention to provide a handling robot capable of simplifying operation strokes, and making it possible to take a large intruding and retracting stroke without causing a link of each robot link mechanism to interfere with a gate of a transfer chamber. Things.

[0020]

In order to achieve the above object, a handling robot according to the present invention has a carrier, and the carrier is extended and retracted so that the carrier is the same in the turning direction. Alternatively, the first retractable operation is performed in a direction in which the position is slightly shifted, and the pivotal movement is integrally performed.
A plurality of boss members provided with a second robot link mechanism so that the first and second robot link mechanisms rotate independently of each other, and a pedestal standing on the top surface of the boss member , Two pairs of arms including the arm provided in the above, a pair of links connected near the tip of each pair of arms, and a carriage connected near the tip of each pair of links, and the pillars, The two robot link mechanisms that operate in the same rotational direction are arranged upright on the line of the retracting operation, or in the middle of both the retracting direction of the two robot link mechanisms that operate in directions deviated in the rotational direction. .

In this configuration, when the paired boss members rotate in opposite directions, one of the robot link mechanisms protrudes, and the other robot link mechanism immerses. Then, by the above-mentioned projecting operation, the transfer table is transferred from the transfer chamber through the gate into the process chamber station, and the work placed on the transfer table is transferred to the process chamber station, or the work in the process chamber station is transferred. receive. Further, by the immersion operation, the carrier is immersed from the process chamber station to the transfer chamber side. In addition, the two robot link mechanisms are immersed, and the two boss members rotate in one direction, so that they are integrally turned in the transfer chamber.

At this time, when loading and unloading a work to and from one process chamber station, both robot link mechanisms need to rotate the handling robot by the amount of shift in the rotation direction of both robot link mechanisms. According to the configuration, the work can be taken in and out and replaced with only a small swing or a small swing with respect to the process chamber station.

That is, the respective carriages of both robot link mechanisms can alternately move in and out in the same or slightly deviated direction in the turning direction. Swapping a workpiece such as a processed wafer in the process chamber station and a workpiece such as an unprocessed wafer in the transfer chamber by simply turning the robot for rotation without turning or only a small turning angle. Cycle time for exchanging these two works can be greatly reduced.

Further, when the respective carriages of the two robot link mechanisms are displaced in the turning direction, the two carriages do not overlap with each other in the vertical direction, and the dust scattered on one of the carriages is removed by the other. The work such as a wafer transferred to both transfer tables can be protected from the dust.

Further, when the two carriages are displaced in the turning direction, the height positions of the two carriages can be made the same, so that the two carriages move up and down at the same height.
Thereby, the vertical opening width of the gate of the transfer chamber in which the two transfer tables appear and disappear can be set to one transfer table without the need for a vertical movement mechanism.
The airtightness of the gate can be improved, and the entire configuration of the handling robot link can be simplified.

In order to provide one of the arms of the two robot link mechanisms, a pedestal provided on the top surface of the boss member is provided on a line extending in and out of the robot link mechanism or in the middle of the two direction lines. , It is possible to make the strokes of the reciprocating motions of both robot link mechanisms the same.

Since the pillars are erected from the center of the boss member in a direction away from the carrier, the pillars are moved when the two robot link mechanisms B ₁ and B ₂ move in and out. The carriage does not interfere with the pillar, and the stroke of the robot link mechanisms B ₁ and B ₂ can be increased.

Each pair of links connected to each of the first and second carriages is formed in a non-linear shape, and the portions of each pair of links which are close to the arm are closer to each other. Due to the curvature, when the robot link mechanism is protruded, the facing distance between the distal ends of each pair of links is reduced, and therefore, the space occupied by the gate when the part is immersed in the gate is reduced. Therefore, the lateral opening width of the gate need only be large enough to allow the work on the carrier to pass through, and the lateral opening width of the gate is set to the dimension of the workpiece to be carried on the carrier regardless of the link. It can be set to a minimum dimension based on this. The small lateral opening width of the gate is extremely advantageous for maintaining a vacuum in the transfer chamber.

Further, since the portions of the paired links near the connecting portion with the carriage are curved in a direction away from each other, the interval between these portions is locally widened, and the robot link mechanism is immersed. In this case, the link does not interfere with the pillar, and the stroke of the robot link mechanism in the immersion direction can be increased.

[0030]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIG. In this description, the same components as those of the above-described conventional configuration are denoted by the same reference numerals, and description thereof is omitted.

The handling robot A ₂ is located in the center of the transfer chamber 1, which of the first and second two ring-shaped boss 50a, 50b is in a state superposed from below in order to concentrically , And are individually rotatably supported via bearings (not shown).

The two ring-shaped bosses 50a, 50b
Of the disk-shaped bosses 51a, 51
b are rotatably supported individually on the frame 1a side of the transfer chamber 1 via bearings (not shown) in an axially superposed manner.

The two ring-shaped bosses 50 facing each other
a, 50b and the disk-shaped bosses 51a, 51b are magnetically coupled by magnet couplings 52a, 52b. In order to maintain a vacuum state in the transfer chamber 1, an airtight partition 17 is provided between the ring-shaped boss and the disk-shaped boss. Note that when the inside of the transfer chamber 1 in a handling robot A ₂ is good in the same atmosphere, the partition wall 17 is not necessary, so that each ring-shaped boss and a circular plate-shaped boss may be in an integral structure Become.

Each of the two disk-shaped bosses 51a and 51b is provided with a rotating shaft 53 concentrically disposed on their axis.
a, 53b. Of these rotation shafts, the first rotation shaft 53a is hollow, and the first rotation shaft 5a
A second rotating shaft 53b is fitted into 3a.

The rotating shafts 53a and 53b are connected to output shafts 55a and 55b of the first and second motor units 54a and 54b via a connecting mechanism such as a timing belt.

As the motor units 54a and 54b, a combination of a servomotor and a speed reducer such as a harmonic drive is used, and the respective output shafts 55a and 55b are used.
Is decelerated with an extremely large reduction ratio, and forward rotation and reverse rotation are accurately controlled. The connection rotation ratio of the connection mechanism that connects the output shafts 55a and 55b and the rotation shafts 53a and 53b is the same.

The first and second arms 56a and 56b are provided on the side surface of the first ring-shaped boss 50a, the third arm 56c is provided on the side surface of the second ring-shaped boss 50b, and the second arm 56c is provided on the side surface of the second ring-shaped boss 50b. Fourth arms 56d project radially from the top surface of the ring-shaped boss 50b via pillars 56e, and the lower surface of the tip of the fourth arm 56d serves as a rotation fulcrum. , The upper surface of the tip of each arm is a rotation fulcrum.

The radius of the rotation fulcrum of each of the arms 56a to 56d is the same. The first, second, third, and fourth links 57a, 57b, and 57 having substantially the same length are provided at the rotation fulcrums of the arms 56a to 56d.
One ends of c and 57d are rotatably connected. The distal end of the first link 57a connected to the rotation fulcrum provided on the upper end side of the distal end of the first arm 56a is bent upward at the rotation fulcrum at the distal end so as to overhang outward. It has become. The first arm 5
The rotation fulcrum 6a is not necessarily located on the top end side of the tip, but a rotation fulcrum may be provided on the bottom side of the tip of the first arm, and the tip end of the link may communicate with the bottom side of the tip of the first arm. .

The first link 57a and the fourth link 5
A first transfer table 8a is connected to a leading end of 7d via a transfer table posture regulating mechanism, thereby forming a _first robot link mechanism B1. At this time, the U-shaped rising height of the first ring 57a is such that the transfer table 8a is located above the ring-shaped boss, and the transfer table 8b of the _second robot link mechanism B2 and one of the transfer tables 8b described later. The arm 56c and the link 57c are connected to the first arm 56a.
And the link 57a. The second and third links 57 b, are second coupling is carrying table 8b via a transfer table attitude regulating mechanism at the distal end portion of the 57c, whereby the second robot link mechanism B ₂ is constructed . The transfer tables 8a and 8b of the two robot link mechanisms B ₁ and B ₂ are shifted by α (for example, 60 °) in the turning direction so that they do not overlap in the turning direction, and have the same position in the vertical direction. Has become.

The displacement of the transfer tables 8a, 8b of the robot link mechanisms B ₁ , B ₂ in the turning direction should be at least such that the transfer tables 8a, 8b do not overlap in the turning direction. When a work is placed on each of the transport tables 8a and 8b, the shift amount is set so that the two works can be shifted over a range where they do not interfere with each other.

The handling robot _{A 2} is the second of the second and third arm 56b of the robot link mechanism _{B 2,} 5
6c is in a standby state when it becomes linear in the diameter direction. Then, the two transfer tables 8 in the standby state
The positions a and 8b are displaced in the turning direction as described above, and this state (FIG. 14) becomes the standby state of the handling robot. From this state, each transport is performed by rotating the ring-shaped bosses in the opposite directions. The tables 8a and 8b are moved in and out in the radial direction of the ring-shaped boss, and the handling robot is turned in this standby state. The position of the pillar 56e is on the middle bisector M of the shift angle α between the two carriages 8a and 8b, and is shifted from the axis of the ring-shaped boss in a direction away from the carriages 8a and 8b. Has become.

[0042] In this handling robot _{A 2,} first and second respective links 57a~57d robotic link mechanism _B 1, _{B 2,} each robot link mechanisms _B 1, B
₂ , the gate 6 of the transfer chamber 1
56e provided on the top surface of the second ring-shaped boss 50b
It is curved in the horizontal direction so as not to interfere.

That is, each robot link mechanism B ₁ , B
₂ of each pair of links 57a, 57d and 57
The portions of the b and 57c near the connection with the arm are curved in a direction approaching each other, and the portions near the connection with the transfer table are curved in a direction away from each other.

[0044] FIGS. 17 to 20 is intended to show the handling for the operating state of the robot _{A 2} having the above configuration, FIG 17 is waiting in the first and second robotic link mechanism _B 1, _{B 2} is within the transfer chamber 1 State. 18 On the other hand, for example, the first robotic link mechanism B ₁ is started projecting operation toward a process chamber station 2e, illustrating a state where the carrier table 8a is slip through gate 6. At this time, the second carrier table 8b robotic link mechanism B ₂ is first of the first arm 5 of robot link mechanisms B ₁
6a and the link 57a do not interfere with it.

FIG. 19 shows the first robot link mechanism B.
Reference numeral ₁ denotes a state in which the projection operation has been performed to the stroke end. At this time, the transfer table 8 of the _first robot link mechanism B1
Since the portions of the first and fourth links 57a, 57d connected to the first and fourth links 57a, 57d which are connected to the arms are curved in a direction approaching each other, the distance between the two links 57a, 57d is reduced, and therefore the gate 6 is closed. space occupied relative small, for example smaller than the diameter of the wafer W _1. Therefore, the opening width of the gate 6 may be a dimension of only passing the wafer W _1, it can be set based on the size relationship without work opening width of the gate 6 to the link.

[0046] When the robot linkage B ₁ of the first protrudes operation until the stroke end, the second robotic link mechanism B ₂ is immersed operation to the stroke end. At this time, the second robot link mechanism B
Second and third link 57 which is connected to the _second transport platform 8b
Since the portions of the b and 57c near the connecting portion with the carriage are curved in a direction away from each other, the portions are locally widened, and the pillars 56e are avoided by this portion, and the second robot link mechanism B ₁ is immersed to the stroke end without interfering with the pillar 56e.

[0047] Figure 20 is a state where the robot link mechanism B ₂ from the standby state of the second FIG 16 starts projecting operations toward the other process chambers stations 2a, Figure 21 is this stroke end state . At this time, the stroke end of the immersion operation of the _first robot link mechanism B1 is reached.

[0048] In this state, FIG 18, as in the case of the first robotic link mechanism _{B 1} shown in FIG. 19, second and third link 57b linked to the transfer table 8b, spacing 57c gate 6 is sufficiently narrower than the opening width, and the first
The link 57a of the robot link mechanism _{B 1} pedestal 56e
Does not interfere with

In the retracting operation of the first and second robot link mechanisms B ₁ , B ₂ , when the pillar 56 e is in the standby state, the operating direction angle α of the two robot link mechanisms B ₁ , B ₂ is 2 or the like. The pillar 56e is symmetrically swung with respect to the bisector M by being located on the branch line M and at a position deviated from the axis of the ring-shaped boss in a direction away from the carriages 8a and 8b. You.

[0050] Figure 24 Figure 22 shows a handling robot A ₃ according to the second embodiment of the present invention,
This is because the first and second robot link mechanisms B ₁ ′,
B ₂ ′ is located at the same position in the turning direction of the
A and 8b are configured to be displaced vertically.

The configuration of each of the robot link mechanisms B ₁ ′ and B ₂ ′ in the _second embodiment is basically the same as that of the above-described embodiment. The first and second robot links B ₁ ′ and B ₂ ′ are rotated by the bosses 50 a and 50 b rotating in the forward and reverse directions.
Are performed alternately. At this time, as in the case of the first embodiment described above, due to the curved shapes of the links of the robot link mechanisms B ₁ ′ and B ₂ ′, the distance between the portions facing the gate 6 in the protruding state is reduced. In a narrow and immersed state, there is no interference with the pillar 56e.

According to this embodiment, the carriages 8 of the two robot link mechanisms B ₁ ′ and B ₂ ′ at the same position in the turning direction.
a, by being able to haunt work 8b, without completely turning the handling robot A _3, and processed wafers in the process chamber station,
Exchange with an unprocessed wafer in the transfer chamber can be performed.

[Brief description of the drawings]

FIG. 1 is a schematic plan view of a semiconductor manufacturing apparatus which is an example of a multi-chamber type manufacturing apparatus.

FIG. 2 is an exploded perspective view showing a relationship between a transfer chamber and a conventional handling robot.

FIG. 3 is a perspective view showing a conventional handling robot.

FIGS. 4A and 4B are explanatory views showing a transport table attitude regulating mechanism.

FIG. 5 is a sectional view showing a conventional arm rotation mechanism.

6 (a) and 6 (b) are explanatory views of the operation of a conventional handling robot.

FIG. 7 is a diagram illustrating the operation of one conventional processing robot with respect to one process chamber station.

FIG. 8 is a diagram illustrating the operation of one conventional processing robot with respect to one process chamber station.

FIG. 9 is a diagram illustrating the operation of a conventional handling robot with respect to one process chamber station.

FIG. 10 is a diagram illustrating the operation of a conventional handling robot with respect to one process chamber station.

FIG. 11 is a diagram illustrating the operation of a conventional handling robot with respect to one process chamber station.

FIG. 12 is a sectional view showing a boss according to the first embodiment of the present invention.

FIG. 13 is a front view showing the first embodiment of the present invention.

FIG. 14 is a plan view showing the first embodiment of the present invention.

FIG. 15 is a perspective view showing a standby state according to the first embodiment of the present invention.

FIG. 16 is a perspective view showing a retracting operation state according to the first embodiment of the present invention.

FIG. 17 is an operation explanatory view of the process chamber station according to the first embodiment of the present invention.

FIG. 18 is an explanatory diagram of an operation for the process chamber station according to the first embodiment of the present invention.

FIG. 19 is an explanatory diagram of the operation of the process chamber station according to the first embodiment of the present invention.

FIG. 20 is an explanatory diagram of an operation of the process chamber station according to the first embodiment of the present invention.

FIG. 21 is an operation explanatory view of the process chamber station according to the first embodiment of the present invention.

FIG. 22 is a perspective view illustrating a standby state according to the second embodiment of this invention.

FIG. 23 is a perspective view showing a retracting operation state according to the second embodiment of the present invention.

FIG. 24 is a front view showing a second embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Transfer chamber 2a, 2b, 2c, 2d, 2e ... Process chamber station 3 ... Work transfer station 5 ... Partition wall 6 ... Gate 7a, 7b, 56a, 56b, 56c, 56d ... Arm 8a, 8b ... Carrier 9a, 9b, 57a, 57b, 57c, 57d: Link 9c: Gear 9d: Belt 10a, 10b, 50a, 50b: Ring-shaped boss (boss member) 11a, 11b, 51a, 51d: Disc-shaped boss 13a, 13b, 53a, 53d ... rotating shaft 14a, 14b, 54a, 54d ... motor unit 56e ... pedestal _{A 1, A 2, A 3} ... handling robot _{B 1, B 2, B 1} ', B 2' ... robot linkage W _1, W ₂ … wafer

Claims (6)

[Claims] The apparatus has a carrier table (8a, 8b), and causes the carrier table (8a, 8b) to move in and out of the same or slightly shifted position in the turning direction by expanding and contracting. First and second robot link mechanisms (B ₁ , B ₂ ) capable of turning integrally are provided, and the first and second robot link mechanisms are provided.
Robot link mechanisms (B ₁ , B ₂ ) have a plurality of boss members (50
a, 50b) and a pillar (56) standing upright on the top surface of the boss member.
e) two pairs including the arm provided in (e)
d), (56b, 56c) and a pair of links (57a, 57d), (57) connected near the tip of each pair of arms.
b, 57c) and the carriages (8a, 8b) connected near the ends of the pair of links.
e) the two robot link mechanisms (B ₁ , B ₂ ) operating in the same direction in the rotational direction, moving in the direction of the moving-in / out direction of the two robot link mechanisms (B ₁ , B ₂ ) or in the direction shifted in the rotational direction.
_1, B ₂₎ of the handling robot, characterized in that intermediate is erected in both infested operation direction line. 2. The pedestal (56e) is erected at a position deviated from the center of the boss member (50b) in a direction away from the carrier (8a, 8b).
The handling robot described. 3. A pair of links (57a, 57d), (57) connected to the first and second transport tables (8a, 8b).
3. The handling robot according to claim 1, wherein (b, 57c) has a non-linear shape. 4. A pair of links (57a, 57d), (57b, 5) connected to the first and second transfer tables (8a, 8b).
7c) arms (56a, 56d), (56b, 56
4. The handling robot according to claim 3, wherein portions close to the connection with (c) are curved in a direction approaching each other. 5. A pair of links (57a, 57d), (57b, 57b, 57b, 57b, 57b) connected to the first and second transport tables (8a, 8b).
4. The handling robot according to claim 3, wherein a portion of the 57c) near the connecting portion with the transfer table (8a, 8b) is curved in a direction away from each other. 6. A first and second boss member (50a, 50b) rotating concentrically and a first and second arm (56a, 56b) provided on a side surface of the first boss member (50a). )
And a third boss provided on the side surface of the second boss member (50b).
Arm (56c), a fourth arm (56d) provided on a pillar (56e) erected on the top face of the second boss member (50b), and a first arm (56d) connected to each of the arms. 2nd
Third and fourth links (57a, 57b, 57c, 57
d), the first transfer table (8a) connected to the ends of the first and fourth links (57a, 57d), and the first transfer table (8a) connected to the ends of the second and third links (57b, 57c). A second transfer table (8b), and first and fourth arms (56a, 5a).
6d), a first robot link mechanism (B ₁ ) including first and fourth links (57a, 57d) and a first transfer table (8a), and second and third arms (56b, 56c). And a second robot link mechanism (B ₂ ) including a second and third links (57b, 57c) and a second transfer table (8b).
When the first and second boss members (50a, 50b) rotate in directions opposite to each other, one of the transfer tables protrudes and the other of the transfer tables immerses. The two robot link mechanisms (B ₁ , B ₁ , 50 b) are provided so as to be identical or slightly displaced from each other in the rotation direction of the (50 a, 50 b) and operate in the same rotation direction.
The handling is characterized in that it is set up in the middle of the two moving directions of the two robot link mechanisms (B ₁ , B ₂ ) operating in the direction of the moving direction of the retracting operation of B ₂ ) or in the direction deviated in the rotational direction. For robots.