JP5318856B2 - Substrate transfer device - Google Patents

Abstract

A substrate transport apparatus including a first shaftless rotary motor including a first stator and a first rotor, the first stator being linearly distributed and the first rotor being coupled to a first arm, a second shaftless rotary motor including a second stator and second rotor, the second stator being linearly distributed and the second rotor being coupled to a second arm, the second arm being connected to the first arm and a first substrate support being coupled to at least one of the first and second arms, wherein the first stator and second stator are configured so that the first and second arms and the first substrate support are inside the stators and a motor output at a connection between the first and second shaftless rotary motors and a respective one of the first and second arms is a resultant force disposed peripheral to the first and second arms.

Description

  Exemplary embodiments relate to a substrate transfer apparatus, and more specifically to a robot transfer arm of a substrate transfer apparatus.

  This application claims the benefit of US Provisional Application No. 60 / 916,724, filed May 8, 2007, and is US Provisional Application No. 60, filed May 8, 2007. / 916,781, the entire disclosures of both applications are incorporated herein by reference.

  Various types of substrate transport devices are well known in the art. Examples of substrate transport devices are detailed in US Pat. Nos. 5,404,894, 5,431,529, and 5,765,983. U.S. Pat. No. 4,951,601 discloses a substrate processing apparatus having a plurality of processing chambers and a substrate transfer apparatus.

  In many substrate processing applications, the substrate transfer apparatus has a substrate transfer robot mounted in a central transfer chamber. Usually, the transfer robot has a controller that controls a drive unit that supplies power to the arm unit. The arm portion typically operates in a transfer chamber to transport a substrate to or from various processing chambers on a substrate support or end effector.

  In general, the transfer chamber and the processing chamber are maintained in a substantially vacuum state to prevent contamination of the substrate during transfer and processing. Other atmospheres may be maintained in the transfer chamber and processing chamber as needed. Some processing techniques may require the use of an atmosphere that is corrosive and hot, or that typically provides a harsh environment for the transfer robot electronics and drive. In such cases, it may be advantageous to place the controller and drive outside the adverse environment of the transfer chamber. It would also be advantageous to simplify the mechanical coupling between the drive and the end effector. Furthermore, it would be advantageous to couple the drive and end effector in a manner that does not require mechanical coupling through the walls of the transfer chamber.

  In one exemplary embodiment, a substrate transfer apparatus is provided. The apparatus includes a first shaftless rotary motor having a linearly arranged first stator and a first rotor coupled to a first arm, and a linearly arranged second stator. And a second rotor coupled to the second arm, wherein the second arm is coupled to the first arm, a second shaftless rotary motor, and the first and second arms A first substrate support coupled to at least one of the first substrate support. The first and second stators are such that the first and second arms and the first substrate support are inside both stators, and the first and second shaftless rotary motors and the first and second arms The motor output in connection with each one of these is configured to be a resultant force formed around the first and second arms.

  In another exemplary embodiment, a substrate transfer apparatus is provided. The apparatus includes a first shaftless rotary motor having a linearly arranged first stator and a first rotor coupled to a first arm, and a linearly arranged second stator. And a second rotor coupled to the second arm, wherein the second arm is coupled to the first arm, a second shaftless rotary motor, and the first and second arms A first substrate support coupled to at least one of the first substrate support. The first and second stators are arranged to substantially surround the first and second arms.

  In yet another exemplary embodiment, a substrate transfer apparatus is provided. The apparatus includes a housing, a first stator disposed substantially linearly along the peripheral wall of the housing, and a second stator disposed substantially linearly along the peripheral wall of the housing. A first substrate transfer arm having a rotation center point located in the housing, wherein the upper arm is rotatable at the rotation center point and forms a first rotor, and the rotation center point In a position eccentric with respect to the upper arm at the first end and rotatably coupled to the front arm forming the second rotor and to the second opposite end of the front arm. And a first substrate transfer arm including the first substrate support. The first stator and the first rotor form a first motor, the second stator and the second rotor form a second motor, and the upper arm, the forearm, and the first substrate support are first and Motor outputs of the first and second motors are formed around the upper and front arms at the connection point between the first and second motors and one of the upper and forearms, inside the second stator. It has become a combined force.

  Aspects and other features of the exemplary embodiments described above are described below in connection with the accompanying drawings.

1 is a schematic top plan view illustrating a substrate processing system incorporating features of an exemplary embodiment. FIG. 1 is a side view of a substrate transfer apparatus according to an exemplary embodiment. FIG. 3 is a top view of the embodiment shown in FIG. 2. FIG. 4 is a diagram illustrating an example of arm and rotor coupling according to an exemplary embodiment. FIG. 4 is a top view of the substrate transfer apparatus of FIG. 3 with the end effector it comprises in the extended position. FIG. 4 is a top view of the substrate transfer apparatus of FIG. 3, in which the end effector included is shown in a different extended position. FIG. 4 is a top view of the substrate transfer apparatus of FIG. 3, with the end effector it comprises in the retracted position. FIG. 4 is a top view of the substrate transfer apparatus of FIG. 3, in which the end effector provided is shown at different retracted positions. FIG. 4 is a top view of the substrate transfer apparatus of FIG. 3, in which the end effector provided is shown at different retracted positions. It is a top view of the end effector of the board | substrate conveyance apparatus shown by the position different from the above. It is a top view of the end effector of the board | substrate conveyance apparatus shown by the position different from the above. It is a top view of the end effector of the board | substrate conveyance apparatus shown by the position different from the above. FIG. 6 illustrates another exemplary embodiment of a substrate transfer apparatus in which a stator of the substrate transfer apparatus is located in a transfer chamber. FIG. 6 is a diagram illustrating yet another exemplary embodiment of a substrate transport apparatus in which a stator of the substrate transport apparatus and a rotor of the apparatus are vertically aligned. FIG. 6 illustrates yet another exemplary embodiment in which the stator and rotor are vertically offset from the end effector. FIG. 6 illustrates yet another exemplary embodiment in which the stator is integrated into the housing of the substrate processing system. 1 is a schematic top plan view of a substrate transfer apparatus according to an exemplary embodiment. FIG. 6 is a schematic top plan view of a substrate transfer apparatus according to another exemplary embodiment. FIG. 6 is a schematic top plan view of a substrate transfer apparatus according to yet another exemplary embodiment. It is a side view of the board | substrate conveyance apparatus of FIG. 11A and FIG. 11B. It is a partial side view of the board | substrate conveyance apparatus of FIG. FIG. 6 is a schematic top plan view of a substrate transfer apparatus according to another exemplary embodiment. FIG. 6 is a schematic top plan view of a substrate transfer apparatus according to yet another exemplary embodiment. FIG. 15 is a partial side view of the substrate transfer apparatus of FIG. 14. FIG. 6 is a schematic top plan view of a substrate transfer apparatus according to yet another exemplary embodiment. FIG. 6 is a schematic top plan view of a transport apparatus according to yet another exemplary embodiment. It is a side view of the board | substrate conveyance apparatus of FIG. 2 is an illustration of an example structural configuration of a transfer chamber according to an exemplary embodiment. FIG. 3 is a partial schematic diagram of an example transport apparatus according to an exemplary embodiment.

  Referring to FIG. 1, a schematic top plan view of a substrate processing system 100 incorporating features of an exemplary embodiment is shown. Although the disclosed embodiments are described with reference to the embodiments shown in the drawings, it should be understood that the embodiments can be incorporated into a number of alternative embodiments. In addition, any suitable size, shape, or type of member or material may be used.

  As shown in FIG. 1, the substrate processing system 100 includes a substrate transfer apparatus 105, but the system may include a plurality of processing chambers 110, a substrate cassette elevator or load lock 115, and a central transfer chamber 120. The substrate processing system 100 is shown in the figure as a clustered processing system, but this is for illustrative purposes only. The substrate processing system 100 is only one example of a substrate processing system, and the exemplary embodiment is equivalent to any suitable type of substrate processing system including, but not limited to, a linear processing system. Please understand that it applies. Suitable processing systems that can incorporate such exemplary embodiments include US patent application Ser. No. 11 / 442,511, filed May 26, 2006, entitled “Linearly Distributed Semiconductor Worker Processing Tool”. However, the present invention is not limited to this. The entire disclosure of the application is incorporated herein by reference. The substrate transfer device 105 can be at least partially disposed within the transfer chamber 120. The apparatus 105 is for moving a substrate for processing, for example, from one of the load locks 115 to the processing chamber 110. When the processing chamber 110 finishes processing the substrate, the substrate transfer device 105 can be used to move the substrate to another processing chamber 110 or return the substrate to one of the load locks 115.

  For illustrative purposes, the substrate may be a semiconductor wafer, flat panel display, glass panel, or any other substrate suitable for processing in the substrate processing system 100.

  It should be understood that while the transfer chamber 120 can maintain a vacuum, the transfer chamber 120 can include any desired atmosphere for processing the substrate. For example, the atmosphere can include, but is not limited to, a controlled air or inert gas atmosphere. The substrate processing system 100 may include appropriate systems and piping (not shown) for creating and maintaining a desired atmosphere in the transfer chamber 120. For example, a suitable pump can be used to connect a vacuum pump (not shown) to the transfer chamber 120 to draw a desired vacuum within the transfer chamber 120. The vacuum pump may be controlled by a controller using a suitable monitoring device (not shown) such as a pressure gauge. In an alternative embodiment, the substrate transfer device 105 may be placed in a chamber that is exposed to outside air and may include an air pump for introducing controlled air or inert gas into the chamber.

  2 shows a side view of an exemplary embodiment of the substrate transfer apparatus 105, and FIG. 3A shows a top view. While the exemplary embodiment is described with respect to a particular transport assembly, the magnetic drive system described herein can be applied or adapted to any suitable transport assembly, and the transport illustrated in the figures. It should be understood that the invention is not limited to use with an assembly.

  In this example, the substrate transfer apparatus 105 has a first winding set also called a first stator 200 and a second winding set also called a second stator 205, which are electrically connected to the controller 240. Yes. The controller 240 may be any suitable controller having any suitable electrical circuitry and / or program instructions for operating the substrate transfer apparatus described herein. In one embodiment, the controller 240 may be part of a clustered architecture as described in US patent application Ser. No. 11 / 178,615, the entire disclosure of which is incorporated herein by reference. . The first stator 200 and the second stator 205 can have at least two primary windings 245 as shown in FIG. 3A. The stators 200 and 205 can be configured to substantially any suitable profile of the transfer chamber housing 285. The outline can include an outer surface of the chamber wall, an inner surface of the chamber wall, or an interior of the chamber wall (eg, in or integral with the chamber wall). In the exemplary embodiment shown in FIG. 2, the stators 200 and 205 are configured to substantially match the profile of the sidewall 285 '. In other exemplary embodiments, the stators 200 and 205 may be configured to substantially match the contours of the upper wall 285 ″ and lower wall 285 ″ ″ of the housing 285. In alternative exemplary embodiments, the stator may be configured to any suitable structural profile that is inside or outside of the transfer chamber 120. For example, the stator may be adapted to the contour of a stator support that may have any suitable structural form inside or outside the transfer chamber 120.

  Stator 200 and 205 can also be similar to the stator described in US Pat. Nos. 5,720,590, 5,813,823, and 5,899,658, Note that the entirety is incorporated herein by reference. For example, each of the first stator 200 and the second stator 205 may be mounted on the drive housing 285 and isolated from the air inside the transfer chamber 120 (i.e., each drive housing has its own rotation). Having a portion that passes between the rotor and the stator, with sufficient clearance between the rotor and this portion of the drive housing). In one example, the magnetic field that can be generated by the stators 200 and 205 outside the transfer chamber 120 provides rotational motion to the first rotor 215 and the second rotor 220 that are in the transfer chamber 120. In other exemplary embodiments, the stator is positioned at any suitable location relative to the transfer chamber 120 to provide rotational motion to the first rotor 215 and the second rotor 220, as described below. May be. For example, the stators 200 and 205 may be arranged substantially in accordance with the outer shape of the movable housing 297 described later.

  In this example, the substrate transfer apparatus 105 also has a first rotor 215 and a second rotor 220. The first rotor 215 and the second rotor 220 may be permanent magnet rotors each having at least two bars. While the rotors 215 and 220 shown in FIG. 3A are ring-shaped, the rotors 215 and 220 are suitable for any other shape, such as disk-shaped, star-shaped, spoke-shaped wheel, or application as a rotor. It should be understood that any shape is possible.

  The controller 240 can operate to power the primary winding 245 within the first stator 200 and the second stator 205. The first stator 200 and the first rotor 215 operate together as a first motor 250 and are also called a first drive unit. The first stator 200 and the first rotor 215 can form a first shaftless rotating device or motor without a shaft that provides torque to the rotor 215 or the arm of the transfer assembly, as described below. As shown in FIG. 3A, the stator 200 and / or the rotor 215 can be linearly arranged, for example, arcuate. In alternative embodiments, the stator 200 and / or the rotor 215 can be arranged in any suitable manner, such as following a linear and / or curvilinear path of any suitable predetermined rotor. . The second stator 205 and the second rotor 220 operate together as a second motor 260 and are also called a second drive unit. The second stator 205 and the second rotor 220 can form a second shaftless rotational drive that is substantially similar to the shaftless rotational drive described above with respect to the stator 200 and the rotor 215. The motor 250 and the motor 260 can have magnetic bearings. That is, the forces that the stators 200 and 205 apply to the rotors 215 and 220, respectively, can support the respective positions of the rotors 215 and 220 without the need for conventional bearings and / or support shafts. In alternative embodiments, motor 250 and motor 260 may be any other suitable type such as, for example, a brushless DC motor, a stepper motor, or a conventional motor.

  In this exemplary embodiment, the first motor 250 and the second motor 260 are shown stacked vertically, but this is for illustrative purposes only. It should be understood that the motor 250 and the motor 260 can be arranged coaxially with each other, arranged in parallel with an offset, arranged at an angle, or arranged in any other spatial direction relative to each other.

  Regardless of the type of motor configuration, each stator 200 and 205 generates magnetic torque with the associated rotors 215 and 220, respectively, and when this is applied with sufficient force, the rotors 215 and 220 respectively Rotate. The controller 240 may be capable of powering the stators 200 and 205 so that the rotors 215 and 220 rotate axially independently or synchronously. The controller 240 can supply power only to the stator 200 to control the position of the rotor 215 in the axial direction, and can supply power only to the stator 205 to control the axial direction of the rotor 220. It may be possible to control the position. The combination of the stators 200 and 205 and the rotors 215 and 220 is self-contained in that an appropriate air gap AG is maintained between the rotors 215 and 220, the chamber walls, and / or the stators 200 and 205. It may be substantially similar to a bearing motor.

  Furthermore, as shown to FIG. 3A, the 1st stator 200 and the 2nd stator 205 can have several permanent magnets 270 distributed on the outer periphery. In this exemplary embodiment, the permanent magnet 270 on the first stator 200 and the second stator 205 is such that the magnetic force between the permanent magnet 270 and the first rotor 215 and the second rotor 220 is mechanical. Arranged to act to stop or hold the first rotor 215 and the second rotor 220 in a generally vertical position without support and without the presence of power. Therefore, when no power is applied to the first stator 200 and the second stator 205, the specific spatial relationship between the first stator 200 and the first rotor 215, and the second stator 205 and the second stator A specific spatial relationship between the two rotors 220 can be maintained.

  In one exemplary embodiment, as shown in FIG. 2, the Z drive unit 298 is coupled to the transport system such that the rotors 215 and 220 and the respective stators 200 and 205 are vertically movable. Also good. In one embodiment, the rotor may be housed in a movable chamber or housing 297 within transfer chamber housing 285. The movable chamber 297 may have an isolated atmosphere (ie, vacuum, inert gas, controlled air, etc.). In alternative embodiments, the movable chamber 297 may share an atmosphere with the transfer chamber housing 285. The Z drive unit 298 may be coupled to the movable chamber 297 such that the movable chamber 297 moves in the vertical direction or the Z direction. Any suitable seal 296 may be disposed between the movable chamber 297 and the transfer chamber housing 285 to prevent gas leakage to or from the transfer chamber 120. The seal 296 may be any suitable flexible seal that allows operation of the movable chamber 297, such as, for example, a bellows seal. In alternative embodiments, the seal may be any movable seal that can minimize particle generation during operation of the seal.

  The Z drive unit 298 can be isolated from the atmosphere inside the transfer chamber 120 and / or the movable chamber 297. The Z drive unit 298 may be any suitable drive unit such as, but not limited to, a pneumatic, hydraulic, magnetic, or mechanical drive unit. In an exemplary embodiment, in the event of a power failure, the substrate (eg, a wafer) on the transfer device 105 or transfer device in the transfer chamber may be damaged or any of the transfer chamber or any connected to it. An uninterrupted power supply can be coupled to the Z drive unit 298 (and / or the stator) so as not to collide with internal chamber components. In alternative embodiments, any suitable mechanical, magnetic, or electrical safety device may be used to damage the transport device and / or the substrate on the transport device in the event of a power outage or other system failure. Can be prevented. Note that any or all of the exemplary embodiments described herein can include a Z drive unit.

  Referring again to FIG. 3A, in an alternative embodiment, the stators 200 and 205 are respectively driven by the controller 240 to change the vertical position of the rotors 215 and 220 in relation to the stators 200 and 205, respectively. A secondary winding 310 may be included. The secondary winding 310 can be arranged and driven to generate additional magnetic forces on the rotors 215 and 220 so that a vertical electric force can be generated on the rotors 215 and 220. Note that the secondary winding can be configured to overcome the magnetic force of the permanent magnets described above so that the rotors 215 and 220 can move vertically. As a possibility, the power or magnetic field supplied to the secondary winding may be such that the magnetic force generated in the secondary winding decreases as the rotor rotates with a permanent magnet. The secondary winding 310 on the rotor 215 can be driven independently of the secondary winding 310 on the rotor 220, and the vertical positions of the rotors 215 and 220 can be independently controlled. In an alternative embodiment, the respective secondary windings 310 of the rotors 215 and 220 can be driven synchronously so that the rotors 215 and 220 move vertically all together.

  Any suitable transfer assembly or transfer assembly may be coupled to the first rotor 215 and the second rotor 220 for transferring the substrate to and from the transfer chamber 120. As in the exemplary embodiment shown in FIGS. 2 and 3A, the transfer assembly is coupled to the first rotor 215 by the first arm 225 and to the second rotor 220 by the second arm 230. It may have a body or end effector 210. Note that the transport assembly described herein is merely exemplary in nature. It should also be understood that any suitable transport device can be adapted to the rotor / stator configuration described above. The first arm 225 is rotatably coupled to the first rotor 215 so that the first arm 225 rotates at least in a plane parallel to the plane 275 defined by the first rotor 215. Similarly, the second arm 230 is rotatably coupled to the second rotor 220 so that the second arm 230 rotates at least in a plane parallel to the plane 280 defined by the second rotor 220. In this exemplary embodiment, first arm 225 and second arm 230 may be coupled to the periphery of first rotor 215 and second rotor 220, respectively. In alternative exemplary embodiments, the first arm 225 and the second arm 230 may be coupled to the first rotor 215 and the second rotor 220 in any suitable location and in any suitable manner. As can be realized, the motor output is leverage forces F and F ', which can be applied to a fulcrum that can be the center point of the rotors 215 and 220 in this example. Further, as shown in FIG. 3A, the forces F and F ′ that the motor applies to the respective rotors 215 and 220 are eccentric with respect to the respective one rotation axis of the rotors 215 and 220. Eccentric lever forces F and F ′ are shown as opposing forces in FIG. 3A (eg, forces that rotate the respective rotors in opposite directions), but this is for illustrative purposes only and the direction of the force It should also be understood that can be reversed or that the rotor can rotate in the same direction. In this example, a force in the same direction (a force that rotates the rotor in the same direction and at the same speed) rotates the transport device without substantial extension or retraction of the end effector 210, as described in detail below. Note that the opposing forces cause the end effector 210 to stretch and retract. As can be realized, the force generated in the same direction to rotate the rotor at different speeds can rotate or retract the end effector 210 at the same time as rotating the conveying device.

  3B is an example of a linking assembly 320 that can be used to couple the first arm 225 or the second arm 230 to the first rotor 215 or the second rotor 220, respectively. In this example, shaft member 325 or other suitable elongate member passes through first rotor 215 and first arm 225 and is held in place by holding mechanism 330. The retention mechanism may be any suitable retention mechanism, such as any suitable mechanical or chemical fastener (eg, nut / bolt, C-clip, cotter pin, etc.). A bushing 335 or other suitable bearing device (which may be integrated into the shaft member 325) separates the first arm 225 from the first rotor 215 and the first arm is relative to the first rotor 215. To be able to rotate. In an alternative embodiment, the shaft may be fixed to the rotor 215 and the arm 225 may be attached to the shaft with a bearing. In alternate embodiments, any other bond type may be used.

  4A-4E illustrate one exemplary type of operation of the substrate transport apparatus 105. FIG. In the exemplary transport configuration shown in FIG. 4A, end effector 210, first arm 225, and second arm 230 are shown in an extended state. The end effector 210 is retracted by rotating the rotors 215 and 220 in opposite axial directions as indicated by arrows 400 and 405. When the rotors 215 and 220 are operated to rotate synchronously in opposite axial directions 400 and 405, respectively, the end effector 210 can be retracted in one direction along the linear path 410. As shown in FIG. 4E, when the operations of the rotors 215 and 220 are continued in this manner, the end effector 210 is moved to the full retracted position. It is understood that by rotating the rotors 215 and 220 in the opposite direction as indicated by arrows 400 and 405, the end effector 210 can move in the opposite direction along the linear path 410 and extend to the extended position. I want to be.

  5A-5C illustrate another exemplary type of operation of the substrate transport apparatus 105. FIG. In FIG. 5A, the end effector 210, the first arm 225, and the second arm 230 are shown in the retracted state, and the end effector 210 faces in the direction A. By rotating the rotors 215 and 220 synchronously in the same direction, as indicated by arrows 500 and 510, respectively, the end effector 210 can rotate in the axial direction and point in any desired direction. It should be understood that the rotors 215 and 220 can rotate synchronously in the opposite direction as indicated by the arrows 500 and 510, thereby rotating the end effector 210 in the opposite direction. As described above, rotating the rotor in the direction of arrows 500 and 510 at the same speed can cause rotation of the transport device 105 with substantial extension or retraction of the end effector 210.

  The controller 240 combines the operations of the substrate transport apparatus 105 shown in FIGS. 4A-4E and FIGS. 5A-5C to convert the end effector 210 into various components of the substrate processing system 100 (FIG. 1) (transfer chamber 120, processing module). 110, or any load shaft 115) can be powered to the stators 200 and 205.

  Referring to FIGS. 2 and 3A, the first rotor 215 and the second rotor 220 may each be a permanent magnet rotor having at least two bars. The first stator 200 and the second stator 205 may have at least two primary windings 245. In this embodiment, the first stator 200 and the second stator 205 are located outside the transfer chamber 120, and the first rotor 215 and the second rotor are located inside the transfer chamber 120. Accordingly, the first stator 200 and the second stator 205 are described in US Pat. Nos. 5,720,590, 5,813,823, and 5,899,658, which are incorporated herein by reference. Is separated from the first rotor 215 and the second rotor 220 by the housing 285 of the substrate processing system 100 and is isolated from the atmosphere inside the transfer chamber 120.

  In this exemplary embodiment, the first stator 200 and the first rotor 215 are arranged concentrically with each other, similar to the second stator 205 and the second rotor 220. The end effector 210, the first arm 225, and the second arm 230 are interposed between the rotors 215 and 220. In alternate embodiments, the rotor, stator, and transfer assembly may have any suitable structural form.

  In FIG. 6, a substrate transport apparatus 605 is illustrated in yet another exemplary embodiment. In this embodiment, the stators 200 and 205 are located in the transfer chamber 120. In this exemplary embodiment, there is no mechanical connection through the walls of the transfer chamber 120, but electrical connections are made to the stators 200 and 205 through the walls of the transfer chamber 120. This electrical connection may be a physical connection (eg a wired connection) or a contactless connection such as via an inductance. The transfer chamber 120 and / or transfer device 605 of this exemplary embodiment may be supported in any suitable manner, such as a magnet and / or a Z drive unit described above with respect to FIG.

  In FIG. 7, a substrate transport apparatus 705 is shown in yet another exemplary embodiment. In this exemplary embodiment, stators 200 and 205 are located outside transfer chamber 120 and are aligned vertically with rotors 215 and 220 located inside transfer chamber 120. The end effector 210, the first arm 225, and the second arm 230 are always interposed between the rotors 215 and 220. Also, in this exemplary embodiment, transfer chamber 120 and / or transfer device 705 and its drive are suitably in any suitable manner, such as, for example, a magnet and / or a Z drive unit as described above with respect to FIG. It can be supported and aligned with the processing chamber 110.

  In FIG. 8, a substrate transport apparatus 805 is shown in yet another exemplary embodiment. In this exemplary embodiment, the rotors 215 and 220 are concentrically and horizontally aligned with the respective stators 200 and 205. End effector 210, first arm 225, and second arm 230 are vertically offset from rotors 215 and 220 and stators 200 and 205. In this exemplary embodiment, the transport device 805 and / or the transfer chamber 120 can be appropriately supported in the Z-direction described above. In alternate embodiments, transfer chamber 120 and / or transfer device 805 can be properly supported vertically in any suitable manner.

  In FIG. 9, a substrate transport apparatus 905 is shown in yet another exemplary embodiment. Similar to the exemplary embodiment of FIG. 2, the first stator 200 and the first rotor 215 are arranged concentrically with each other, similar to the second stator 205 and the second rotor 220. . The end effector 210, the first arm 225, and the second arm 230 are interposed between the rotors 215 and 220. In this exemplary embodiment, the first stator 200 and the second stator 205 are incorporated into the housing 285 or otherwise integrated into the housing 285. As illustrated, the first stator 200 and the second stator 205 are incorporated in a wall 910 of the housing 285. It should also be noted that the transfer device 905 and / or the transfer chamber 120 can be supported vertically in any suitable manner. For example, in one embodiment, the Z drive unit 298 described above with respect to FIG. 2 may be suitably coupled to the transfer chamber 120 and / or the transfer device 905. In an alternative exemplary embodiment, the substrate transport device 905 may be supported vertically, for example with magnetic interaction between the rotor and the stator.

  A magnetic coil, such as a motor stator, is placed outside the transfer chamber 120, or the magnetic coil is incorporated within the chamber housing 285 (eg, placed in, integrated with, or embedded in the wall of the housing, etc.) On the other hand, with proper design and the use of magnetic and non-magnetic materials, all of the moving parts including the motor rotor can be mounted in the transfer chamber 120. For example, the transfer chamber housing 285 can be made of a non-magnetic material and can function as a magnetic stator that is mounted outside the housing 285 or built into the housing 285. Placing the stator outside or in the housing wall can eliminate known gas release problems and electrical feedthroughs that degrade the performance of systems with active electromagnets in a vacuum environment.

  In the figure, for example, as shown in FIGS. 9 and 12, the housing 285 of the transfer chamber 120 can provide a non-magnetic barrier that separates the vacuum region or interior of the chamber from the ambient region or exterior of the chamber. Thus, the transfer chamber 120 can have a portion of the housing 285 that passes between the rotor 1106 and the stator 1009, for example. Accordingly, a sufficient gap or air gap AG shown in FIG. 12 can be provided between the rotor 1106 and the chamber housing 285. The air gap AG can be maintained in any suitable manner. For example, in the structural example shown in FIG. 12, the air gap is maintained by using the shaft 1201 '. In another exemplary embodiment, the drive system of the transport device can be configured as a self-bearing drive system where the air gap is maintained, for example, by the magnetic force of the stator and rotor.

  With reference to FIGS. 10, 13, and 19, a substrate transport apparatus 1000 is shown in another exemplary embodiment. In this exemplary embodiment, the transport apparatus 1000 includes stators 1006 and 1007 (stator 1006 and 1007 are most clearly shown in FIG. 19), first rotor link 1004 and second rotor link 1005, first Arm links 1003 and second arm links 1002 and a substrate support or end effector 210D are provided. This exemplary embodiment is similar to the exemplary embodiment of FIGS. 2 and 3A, except that the rotor is a link or spoke rather than a ring, as described below. Whereas links 1002-1005 in the figure are substantially straight structural forms, in alternative embodiments, links 1002-1005 include (but are not limited to) curves and other geometric shapes. Note that it can have any suitable shape or structure.

  The stators 1006 and 1007 may be substantially similar to the stators 200 and 205 except that there is no permanent magnet 270 that produces the magnetic bearing described above. It should also be noted that the stators 1006 and 1007 can be placed within the transfer chamber 120 or isolated from the atmosphere of the transfer chamber 120 as described above. The stators 1006 and 1007 can have primary windings that generate magnetic torque at the rotor links 1004 and 1005 when driven, as described below. In this exemplary embodiment, stators 1006 and 1007 are shown concentrically stacked, for example, so that stator 1006 sits on top of stator 1007 (FIG. 19). In alternate embodiments, the stator may have any other suitable structural form.

  In the exemplary embodiment, the first rotor link 1004 and second rotor link 1005 examples are pivotable to a center point C of the transfer chamber 120. In alternative embodiments, the first rotor link and the second rotor link may be pivotable to any desired axis within the transfer chamber. The first rotor link 1004 and the second rotor link 1005 may be rotatably mounted on the shaft 1201 (the state shown in FIG. 13 is most easily understood). The shaft 1201 may be disposed at the center point C of the transfer chamber 120. In alternative embodiments, the transport device may be configured such that the shaft 1201 is at any desired location within the transfer chamber. A bearing support sleeve 1302 may be attached to the shaft 1201. The bearing support sleeve 1302 may be slip fit or press fit on the shaft 1201. In alternate embodiments, any suitable method may be used to fit the bearing sleeve to the shaft. In this embodiment, the bearing 1301A is fitted to the upper part of the bearing sleeve 1302, and the bearing 1301B is fitted to the lower part of the bearing sleeve 1302. The bearings 1301A and 1301B may be any suitable bearing for supporting vertical and / or radial loads. The bearings 1301A and 1301B may be press-fitted to the bearing support sleeve 1302. In alternate embodiments, any suitable method may be used to fit the bearing to the support sleeve. In other alternative embodiments, the shaft 1201 may be a spline shaft and the bearing support sleeve may have a linear spline guide 1304. The spline guide prevents the bearing support sleeve from rotating, and at the same time allows the conveying device 1000 to move in the vertical direction along the spline shaft. In yet another alternative embodiment, the bearing can be mounted to the shaft or otherwise secured to the shaft without a bearing support sleeve.

  The proximal end of the first rotor link 1004 may be rotatably mounted on the shaft 1201 with a bearing 1301A, for example, and the proximal end of the second rotor link 1005 may be mounted on the shaft 1201 with a bearing 1301B, for example. And may be rotatably mounted. The proximal end of the rotor link can be coupled to the bearing in any suitable manner. In alternative embodiments, the first rotor link 1004 and the second rotor link 1005 can be rotatably mounted with the shaft 1201 in any suitable manner. A cover 1303 or cap may be applied over the shaft / bearing assembly to prevent particles that may arise from the bearing from entering the transfer chamber 120. In alternative embodiments, any suitable particle containment device may be used, such as, for example, a vacuum device or a fan. The distal ends of the first rotor link 1004 and the second rotor link 1005 extend radially from the shaft 1201, which in this example coincides with the center point C of the transfer chamber 120, toward the outer wall of the chamber 120. Yes. In an alternative embodiment, the shaft 1201 may be located away from the center point C of the transfer chamber. Magnets 1001A and 1001B may be attached to the distal ends of rotor links 1004 and 1005, respectively. Magnets 1001A and 1001B may be permanent magnets having two bars, for example. The magnet can have any suitable shape, such as but not limited to an arcuate segment or platen, block and / or disk. In alternate embodiments, any suitable type and / or shape of magnet may be used. Rotor link 1004 and magnet 1001A can interact with stator 1006 to form a first motor, and rotor link 1005 and magnet 1001B interact with stator 1007 to interact with a second motor. Can be formed. The motor may be a divided three-phase motor so that the motor parts can be independently controlled to operate different linkages on the same motor armature. In alternate embodiments, the motor can have any suitable number of phases. As described above with respect to the stators 200 and 205 of FIG. 2, a controller, such as the controller 240, can be used to power the windings of the stators 1006 and 1007.

  In this exemplary embodiment, the proximal end of the first arm link 1003 is rotatably coupled to the distal end of the first rotor link 1004, and the distal end of the first arm link 1003 is The end effector 210D is rotatably connected. The proximal end of the second arm link 1002 is rotatably connected to the distal end of the second rotor link 1005, and the distal end of the arm link 1002 is rotatably connected to the end effector 210D. doing. The arm links 1002 and 1003 may be rotatably connected to the rotor links 1004 and 1005 by any suitable connection method such as, for example, connection using pins or bolts as shown in FIG. 3B. The arm links 1002 and 1003 may be coupled to the end effector in substantially the same manner, for example, using a pin or bolt. The connection of the arm links 1002 and 1003 with the end effector 210D is configured such that the longitudinal axis of the end effector 210D is always along the extension / retraction axis 1020 when the transport device 1000 moves from the extended position and the retracted position. May be.

  The operation of the transfer apparatus 1000 shown in FIG. 10 is substantially the same as the operation described above with reference to FIGS. 4A to 4E and FIGS. 5A to 5C. However, instead of a drive having a ring-shaped rotor, the rotor in this exemplary embodiment is shaped as links 1004 and 1005. For example, each stator 1006 and 1007 generates a magnetic eccentric lever force at one of the links 1004 and 1005, respectively, which in this example can be a center point C where the shaft 1201 ′ is located. Applies to Although eccentric leverage forces F and F 'are shown in FIG. 10, it should be understood that this is for illustrative purposes only and the direction of the force can be reversed. The leverage force generates torque at each of its rotor links 1004 and 1005, and when applied with sufficient force, the rotors 1004 and 1005 rotate, respectively. The controller 240 may be able to power the stators 1006 and 1007 so that the rotor links 1004 and 1005 rotate axially independently or synchronously. Further, the controller 240 can supply power only to the stator 1006 to control the position of the rotor 1004 in the axial direction, and can supply power only to the stator 1007 to adjust the position of the rotor 1005 in the axial direction. It may be possible to control. When the rotor links 1004 and 1005 are driven to rotate in opposite directions, for example, when the rotor link 1004 rotates clockwise and the rotor link 1005 rotates counterclockwise, the end effector is linear. It may move along the path 1020 toward the extended position or vice versa.

  In one example configuration, each stator 1006 and 1007 has a secondary winding driven by, for example, controller 240 to change the vertical position of rotor links 1004 and 1005 relative to stator 1006 and 1007, respectively. Can have. In this example, the rotor can move freely along the shaft 1201 in the vertical direction. The secondary winding generates a vertical electric force on the rotors 1006 and 1007, and on the rotor link so that the rotors 1006 and 1007 can move along the linear spline guide 1304, for example, on the shaft 1201. It can be arranged and driven to generate additional magnetic forces. In an alternative embodiment, the secondary winding on the rotor 1006 can be driven independently of the secondary winding on the rotor 1007 and the vertical positions of the rotors 1006 and 1007 can be independently controlled. . In other alternative embodiments, the secondary windings form a self-bearing motor that maintains sufficient air gap between the rotor and the housing wall to support the rotor at a desired height. . In order to prevent the rotor and the transport device drive system from colliding with other components when a power failure occurs, a continuous power supply source may be connected to the secondary winding. In other structural embodiments, a Z driving unit similar to the driving unit 298 may be coupled to the shaft 1201 to give the conveying device a vertical movement.

  Although the stators 1006 and 1007 are shown integrated with the housing 285 in the figure, the stators 1006 and 1007 may have other structural configurations as shown, for example, in FIGS. 2 and 6-8. Please understand that.

  In another exemplary embodiment, for example, as shown in FIGS. 10, 13, and 19, the transport device is supported on a shaft, and the end effector 210D and arm links 1002 and 1003 are rotatable. May be such that each coupling of each arm link interacts. For example, FIG. 21 shows a transport apparatus 2100 that is another embodiment. This transport apparatus may be substantially similar to the transport apparatus described above with respect to FIGS. 10, 13 and 19. However, in this exemplary embodiment, the distal end of each of the arm links 2102 and 2103 has, for example, a tooth 2110 or other suitable mating function. Appropriate mating features are configured to maintain the radial or longitudinal alignment of the end effector 210D along the extension / retraction path 1020 as the end effector moves radially in the direction of arrow 2120. is there. Further, the teeth may have a function of linking the operation of the arm link 2103 to the arm link 2102 so that the arm link 2102 can drive the arm link 2103. Also, as shown in FIG. 21, in this exemplary embodiment, only the rotor link 1005 has a magnet 1001B secured to its distal end (in an alternative embodiment, the magnet is rotating It may be arranged on the child link 1004). The engagement of the arm links 2102 and 2103 may allow the transport device to be extended and retracted with only one motor 1006 and 1001B.

  Referring to FIGS. 11A, 11B, and 12, dual end effector transport devices 1100 and 1200 are shown. The dual end effector transport apparatuses 1100 and 1200 may have, for example, two transport units 1000 ′ and 1100 ′ (shown in FIG. 11A), or 1000 ″ and 1100 ″ (shown in FIG. 11B). The dual end effector transport apparatus can have another transport unit on one transport unit. For example, in FIG. 11A, the transport section 1100 'is shown as being above the transport section 1000'. The transport units 1000 ′, 1100 ′, 1000 ″, and 1100 ″ are substantially similar to the transport apparatus 1000 described above. Thus, similar functions are assigned similar reference numbers. Although the rotor of the exemplary embodiment shown in FIGS. 11A, 11B, and 12 is shown as being supported by shaft 1201 ′, the rotor can be supported by the self-bearing described above with respect to FIGS. Note that it should be understood. The example drive system shown in FIGS. 11A, 11B, and 12 can have the Z drive unit described above with respect to FIG. 2, and the Z drive unit can be coupled to the transfer chamber and / or shaft 1201 ′. Note that you can.

  The transfer chamber 120 may have an upper motoring 1201 and a lower motoring 1200 that are integrated into or incorporated into a housing 285 that is substantially similar to that shown in FIG. Upper motoring 1201 and lower motoring 1200 have two stators, 1008 and 1009, and 1006 and 1007, respectively, for driving rotor links 1004 ′, 1005 ′, 1106, and 1107 with magnetic force. May be. Although the stators 1006-1009 shown in FIG. 12 are integrated into the housing 285, in an alternative embodiment, the stator is configured in substantially the same manner as shown in FIGS. 2 and 6-8. Also good. Rotor links 1004 ', 1005', 1106, and 1107 may be mounted in a manner that is substantially similar to the method for transport apparatus 1000 and the method shown in FIG.

  The rotor links 1106 and 1107 of the upper transport unit 1100 ′ may be driven by the upper motor ring 2101, that is, for example, the rotor link 1107 is driven by the stator 1008 and the rotor link 1106 is driven by the stator 1009. It is to drive. The rotor links 1004 ′ and 1005 ′ of the lower transport unit 1000 ′ may be driven by the lower motor ring 1200, that is, for example, the rotor link 1004 ′ is driven by the stator 1006 and the rotor link 1005 ′ is It is driven by the stator 1007. The rotor links 1106 and 1107 and 1004 ′ and 1005 ′ may be driven by their respective stators in a manner substantially similar to that described for the transport apparatus 1000.

  With reference to FIGS. 11A and 12, the operation of the transport apparatus 1100 will be described. The transport units 1000 ′ and 1100 ′ can be extended or retracted individually or all together by a controller such as the controller 240. The operations of the transport units 1000 ′ and 1100 ′ are substantially similar to the operations of the transport device 1000 described above. For example, the upper motoring stator 1008 generates magnetic torque at the rotor link 1107 such that the rotor link 1107 rotates clockwise or counterclockwise, for example, at the center point C of the transfer chamber 120. It may be driven to produce an eccentric lever force. Similarly, the upper motoring stator 1009 may be driven to generate magnetic torque at the rotor link 1106 such that the rotor link 1106 rotates in a clockwise or counterclockwise direction. Rotor links 1106 and 1107 have magnets 1101C and 1101D, respectively, at their distal ends. As the rotor links 1106 and 1107 rotate, the respective distal ends approach or move away from each other, and the proximal ends of the arms 1108 and 1109 also move toward or away from each other, and then the end effector 210B is moved to the axis 1020 ′. Elongate or retract. As shown in FIG. 11A, end effectors 210A ′ and 210B ′ can both extend and retract in the same direction, ie, end effectors 210A ′ and 210B ′ can both be the same processing chamber of processing system 100. 110 or the load lock 115. This may allow the substrate to be quickly replaced as it is moved into and out of the load lock, processing chamber, or any other desired location.

  Similarly, the transport units 1100 ′ and 1000 ″ of the transport device 1200 shown in FIG. 11B operate in substantially the same manner as the transport units 1100 ′ and 1000 ″ of the transport device 1100 described above. However, the transporters 1100 ′ and 1000 ″ are opposed to each other so that the end effectors 210A ″ and 210B ″ extend and retract substantially 180 degrees apart from each other, instead of facing in the same direction. You can turn in the direction. For example, the controller 240 drives the upper motoring 1201 and the lower motoring 1200 and the respective stators 1006, 1007, 1008, and 1009 all at once or separately, and each transport unit 1100 ′ and 1000 ″ individually or It can be configured to stretch or retract all at once. In an alternative embodiment, each transport is individually or simultaneously in a clockwise or counterclockwise direction at a center point C of the transfer chamber or any other desired location in a manner substantially similar to that described above. It can be rotated.

  In an alternative embodiment, referring to FIG. 11B, each transport 1100 ′ and 1000 ″ can have end effectors 210A ″ and 210B ″ in the same direction, opposite directions, or any suitable angular relationship to each other. , Can be rotated independently about shaft 1201 'so that it can be extended and retracted. For example, the transporters 1100 ′ and 1000 ″ may each independently rotate to point in the same direction (shown in FIG. 11A), or may be on paths that are at right angles to each other (or any other suitable angle). Each can be independently rotated so that it can extend or retract along.

  With reference to FIGS. 14 and 16, it will be described another transport apparatus 1400 according to an exemplary embodiment. In this example, the transfer device 1400 is illustrated as a selective compliance assembly robot arm (SCARA) type transfer device, which is the transfer device drive system described herein. Note that is for illustrative purposes only to show that can be applied to any suitable transfer arm / device. The scalar transfer device may include stators 1006 'and 1007', an upper arm 1402, a forearm 1405, and an end effector or substrate holder 210C.

  The stators 1006 'and 1007' are substantially similar to the stators 1006 and 1007 described with respect to the transport devices 1100 and 1200. Also, the stators 1006 'and 1007' can be controlled by the controller 240 in substantially the same manner as the stators 1006 and 1007 described above, for example.

  The upper arm 1402 may be rotatably mounted at a shoulder joint 1401 with a disk or rotor center point C substantially similar to that described above with respect to FIGS. In an alternative embodiment, the upper arm 1402 may be a disk or rotor as described above with respect to FIGS. 2 and 3, where, for example, the upper arm is rotatably coupled to the disk in an eccentric position. In other alternative embodiments, the upper arm may have any suitable structural form. Upper arm 1402 and its stator may form a self-bearing motor. In alternative embodiments, the upper arm may be mounted in the center of the transfer chamber and supported in any suitable manner. In another alternative embodiment, the scalar transport device may be configured to be located at any desired location within the transfer chamber. The front arm 1405 is rotatably attached to the upper arm 1402, for example, at an elbow joint 1404. The upper arm 1402 and the forearm 1405 may be rotatably coupled by a support shaft 1601 attached to the upper arm 1402. Support shaft 1601 can have any suitable structural configuration and can extend through forearm 1405. The support shaft 1601 may have suitable bearings to support the forearm 1405, while allowing rotational movement of the forearm 1405 at the elbow joint 1404. In alternative embodiments, the upper arm and forearm can be coupled in any suitable manner. The end effector 210C is rotatably attached to the forearm 1405 at the wrist joint 1406 in substantially the same manner as described above for the forearm and upper arm.

  In this exemplary embodiment, the stators 1006 ′ and 1007 ′ can be integrated or incorporated into the transfer chamber housing 285, as shown in FIG. 16 and above, with a substantially ring around the transport device 1400. Can be formed. In alternative embodiments, the stator can form any suitable shape in relation to the transfer device 1400. Stator 1006 'and 1007' can be stacked concentrically so that one is on top of the other as shown in FIG. In alternative embodiments, the stator can have any other desired configuration, such as the configuration shown in FIGS. 2 and 6-8. In this exemplary embodiment, the upper arm 1402 extends radially from the center point C of the transfer chamber 120 toward the wall or housing 285 of the chamber 120 and toward the stators 1006 'and 1007'. The magnet 1403A may be fixedly attached to the distal end or the elbow end of the upper arm 1402 so that the upper arm 1402 can function as a rotor. The upper arm 1402 and the magnet 1403A interact with, for example, the stator 1007 'to form a first motor. The magnet 1403B may be fixedly attached to the proximal end portion or the elbow end portion of the forearm 1405 so that the forearm 1405 can function as a rotor. The forearm 1405 and the magnet 1403B interact with, for example, the stator 1006 'to form a second motor. Magnets 1403A and 1403B may be substantially similar to the magnets described above with respect to transfer devices 1000, 1100, and 1200.

  The end effector 210 </ b> C is rotatably attached to the distal end portion of the forearm 1405 at the wrist joint 1406. The end effector 210C may be attached to the forearm 1405 in substantially the same manner as the manner in which the forearm 1405 previously attaches the upper arm 1402. The end effector 210C may be a paddle type end effector employing a substrate vacuum grip method, or a fork type end effector employing an active or passive edge grip method. In alternative embodiments, any suitable end effector and substrate grip method can be used. The end effector 210C is configured such that the longitudinal axis of the end effector 210C is always along the radial extension or retraction axis 1020 ′ ″ as the transport device 1400 moves from the extended position to the retracted position or vice versa. May be.

  In an exemplary embodiment, the arm may be in the form of a slave where only the upper arm performs the function of a rotor. For example, there may be a shoulder pulley, elbow pulley, and wrist pulley (not shown) in the upper arm and forearm. The shoulder pulley, elbow pulley, and wrist pulley may have centers of rotation at the shoulder 1401, elbow 1404, and wrist 1406, respectively. The shoulder pulley may be fixedly coupled to any stationary point in the transfer chamber, for example, so that the shoulder pulley is always fixed or stationary when the upper arm rotates with the shoulder. The elbow pulley may be composed of a total of two pulleys, a play pulley that is drivingly connected to the shoulder pulley and a drive pulley that is fixedly connected to the play pulley. The elbow drive pulley may be drivingly connected to the wrist pulley and fixedly connected to the end effector 210C. With respect to the pulley, when the conveying device 1400 is extended or retracted, the elbow pulley is driven by the shoulder pulley by the rotation of the upper arm 1402, and then the longitudinal axis of the end effector is always along the radial extension axis 1020 ′ ″. The elbow pulley may drive the wrist pulley.

  With reference to FIGS. 14 and 16, a description of the operation of an exemplary scalar transport device 1400 will be provided. The operation of the transfer apparatus 1400 shown in FIG. 14 is substantially the same as the operation described with reference to FIG. However, instead of having two rotor links rotating at the center point C of the chamber 120, only the upper arm 1402 rotates at the center point C of the chamber 120 and the forearm 1405 rotates at the elbow 1404 in this example. For example, when the stator 1007 'is driven, it generates a magnetic eccentric lever force that torques the upper arm 1402, and when applied with sufficient force, the upper arm 1402 rotates clockwise at point C. Or rotate counterclockwise. Similarly, the forearm 1402 is rotated by the elbow 1404 by the magnetic torque generated by the stator 1006 '.

  When the upper arm 1402 and the forearm 1405 rotate in opposite directions due to the magnetic torque generated by the stators 1006 ′ and 1007 ′ in both arms, for example, the upper arm 1402 rotates in the clockwise direction and the forearm 1405 is counteracted. When rotating clockwise, the end effector 210C may move along the linear path 1020 ′ ″ toward the extended position or vice versa. Alternatively, the entire conveying device 1400 is rotated clockwise or counterclockwise at the center point C of the shoulder 1401 or the transfer chamber 120 by a controller that drives the stator 1007 ′ so that only the upper arm 1402 rotates. May be. When only the upper arm 1402 rotates, the forearm 1405 and the end effector 210C remain in their relative positions and can rotate naturally with the upper arm 1402. In an alternative embodiment, both stators 1006 'and 1007' may be configured to cause rotation of the transport device 1400 as a unit with the shoulder 1401 when driven.

  As described above, the stators 1006 ′ and 1007 ′ have secondary windings that can be driven by the controller 240 to change the vertical position of the upper arm 1402 and the forearm 1405, ie, the vertical position of the transport apparatus 1400. May be. In alternative embodiments, the vertical position of the transport device may be controlled or changed in any suitable manner, such as a linear motor approach. In another alternative embodiment, the shaft 1601 is configured to allow vertical movement of the forearm 1405 along the shaft so that the secondary winding can cause vertical movement of the forearm relative to the upper arm. Also good.

  Referring to FIG. 15, another exemplary scalar transport device 1400 'is shown. This exemplary embodiment is substantially the same as the scalar transport device 1400, but the magnets here are not located on the forearm in the elbow position as in the transport device 1400 described above. Rather, the magnet 1403B 'may be located at the distal end of the forearm drive member 1501. The forearm drive member 1501 may be rotatably mounted on a shoulder 1401 ′, which in this example coincides with the center point of the chamber 120, in substantially the same manner as the upper arm 1402 ′. The upper arm 1402 'may be mounted in substantially the same manner as the forearm 1402 described above. Further, for example, when the forearm driving member 1501 rotates, the shoulder pulley 1504 may be attached by the shoulder 1401 ′ or fixedly connected to the forearm driving member 1501 so that the shoulder pulley 1504 rotates together. Good. An elbow pulley 1505 may be attached to the rotating shaft of the forearm 1405 ′ with an elbow joint 1404 ′. The elbow pulley 1505 may be fixedly attached to the forearm 1405 ′ so that, for example, the forearm 1405 ′ rotates together with the elbow pulley 1505. The elbow pulley 1505 may be drivingly connected to the shoulder pulley 1504 by, for example, a drive belt, band, or chain 1410. In an alternative example, any suitable drive can be used. Shoulder pulley 1504, elbow pulley 1505, and belt 1410 may be included in upper arm 1402 ′ and forearm 1405 ′ to prevent possible particles from entering chamber 120. In alternative embodiments, the shoulder pulley, elbow pulley, and belt may be mounted at any suitable location. In other alternative embodiments, the forearm 1405 'and / or the end effector 210C' may become a slave of the upper arm 1402 'via the pulley system described above.

  The operation of the transport apparatus 1400 ′ shown in FIG. 15 is performed except that the front arm 1405 ′ is driven by the front arm driving member 1501 instead of the magnet 1403B attached to the front arm as in the above-described transport apparatus 1400. Is substantially the same as in the case of the transport apparatus 1400. For example, when the forearm drive member 1501 is rotated by the magnetic eccentric lever force and, as a result, the torque generated by the stator 1006 ', the shoulder pulley 1504 is also rotated. Next, the shoulder pulley 1504 rotates the elbow pulley 1505. The shoulder pulley 1504 may be drivingly connected to the elbow pulley 1505 by, for example, a belt 1410. Further, the elbow pulley 1505 rotates the forearm 1405 '. When upper arm 1402 ′ and forearm drive member 1501 are actuated simultaneously, end effector 210C ′ extends or retracts along axis 1020 ″ ″ in a manner substantially similar to that described above with respect to transport apparatus 1400. To do. Note that the end effector 210C 'can have a slave motion that is always longitudinal (e.g., front-to-back) along its extension / retraction axis 1020 "" when extended.

  In another exemplary embodiment, the transport apparatus 1400 and 1400 ′ is a second scalar transport apparatus 1400 ″ that is rotatably mounted at the shoulder or center point of the transfer chamber, as shown in FIGS. And 1400 ′ ″. The scalar type transfer device in the figure is merely an example application of the drive system disclosed herein, and the structure of the drive system is not limited to the structure of any particular arm / transport unit. Please be careful again. Transport devices 1400 "and 1400" "can be mounted in the transfer chamber in substantially the same manner as described with respect to transport device 1100 and shown in FIG. Transport devices 1400 "and 1400" "operate in substantially the same manner as described above with respect to transport devices 1400 and 1400 '. Thereby, it is possible to quickly exchange the transfer device and the substrate with the dual scalar arm. Both dual SCARA arms can be rotated independently or simultaneously at the center point of the chamber in substantially the same manner as described above with respect to FIG. 11B.

  Referring to FIG. 20, transfer chambers 2001 and 2002 comprising the coaxial magnet drive system disclosed herein are shown coupled together as a modular unit. The transfer chambers can be coupled in any suitable manner, such as a load lock or tunnel 2050. Each transfer chamber 2001 and 2002 may be isolated from each other so as to have their own internal atmosphere. In another exemplary embodiment, transfer chambers 2001 and 2002 may not be isolated from each other. While the transfer chamber described above is generally circular, it should be understood that the transfer chamber may have any suitable shape, such as but not limited to the rectangle shown in FIG. Please note that. In this exemplary embodiment, as upper arm 2020 is rotated by the respective rotor and stator, forearm 2030 and end effector 2040 are within processing module PM, other transfer chambers, or any other suitable region. To extend, the transfer assembly 2010 may be a slave type transfer system using, for example, belts and pulleys. Note that although transfer assembly 2010 is shown as a scalar-type assembly, any suitable transfer assembly can be used, such as the assemblies described above with respect to FIGS. The rotor and stator of the transfer assembly 2010 can be suitably positioned within the transfer chambers 2001 and 2002 such that the respective rotors (eg, links 2020, 2030, and 2040) rotate upon extension and retraction of the transfer assembly. . For example, the stator can be placed within the transfer chamber wall within the transfer chamber, or outside the transfer chamber as described above. In an alternative embodiment, the rotor and stator can be placed in the base or housing of the transport assembly 2010 itself.

  In addition to driving the various transfer devices shown in the foregoing exemplary embodiments, in an alternative embodiment, the transfer drive motor can function as a heating element for baking out the chamber. In this alternative embodiment, the motor may have a control mode for operation of the transfer device and a thermal mode for chamber bakeout.

  In yet another alternative embodiment, a Hall sensor, such as sensor 299 shown in FIG. 3A, may be placed in the transport motor. Such a resolution of the Hall sensor can be used as a position feedback device of the transport device.

  Each exemplary embodiment shown in the figure is independent of the different rotors used in the various exemplary embodiments (e.g., circular rotors, spoke-type rotors, etc.) and FIGS. 4A-4E and The operations described above with respect to FIGS. 5A-5C may be possible. Thus, each exemplary embodiment axially moves a substrate in and out of any location in various components of the substrate processing system 100 (FIG. 1) including the transfer chamber 120, processing module 110, or load lock 115. It may also be possible to carry on. This exemplary embodiment is advantageous in that no mechanical connection is required through the walls of the transfer chamber 120.

  Note that any other linkage, arm, or end effector structural configuration suitable for substrate alignment at a particular location can be used in the exemplary embodiments described above.

  In one exemplary embodiment, a substrate transfer apparatus is provided. The apparatus includes a housing, a first stator disposed substantially linearly along the peripheral wall of the housing, and a second stator disposed substantially linearly along the peripheral wall of the housing. A first substrate transport arm that is rotatable at a center point of rotation located in the housing, and an upper arm that is rotatable at the center point of rotation and forms a first rotor, and a center of rotation A second rotor that is rotatably coupled at a point, and is rotatably coupled to the upper arm at a first end at a position that is eccentric with respect to the center point of rotation, and drivingly coupled to the second rotor And a first substrate transport arm including a first substrate support rotatably coupled to a second opposite end of the forearm. The first stator and the first rotor form a first motor, the second stator and the second rotor form a second motor, and the first and second stators are the first and second motors The motor output in connection with each one of the first and second rotors is configured to be a resultant force formed around the upper arm.

  In another exemplary embodiment, a substrate transfer apparatus is provided. The apparatus comprises a frame, a first stator arranged substantially linearly around the frame, and a second stator arranged substantially linearly around the frame, and First and second rotors, each of which is a first substrate transport arm, rotatable at a center point of rotation located within the frame and having a distal end, respectively, and distal of each of the first and second rotors First and second arm links that are rotatably coupled to the end portions and first end portions, respectively, and a first substrate that is rotatably coupled to respective second ends of the first and second arm links. And a first substrate transfer arm including a support. The first and second stators are configured to apply a resultant force to the first and second rotors, the resultant force being in the vicinity of the first and second arm links.

  The above-described embodiments are advantageous in that the controller and stator can be placed outside the transfer chamber. It should be noted that the environment outside the transfer chamber has a corrosive atmosphere, high temperature, or other common harsh environment, so that it is less likely to become contaminated. Also, the mechanical aspect of the transfer device can be simplified to generally include a small number of arms, links, and components, resulting in fewer moving parts in board transfer, speed, and accuracy. And control is improved. All of these factors further contribute to the improvement of substrate processing capability.

  It should be understood that the exemplary embodiments described herein can be used independently or in any suitable combination of the embodiments. Furthermore, it should be understood that the foregoing is only illustrative of the invention. Various alternatives and modifications can be devised by those skilled in the art without departing from the invention. Accordingly, the present invention is intended to embrace all such alternatives, modifications and variations that fall within the scope of the appended claims.

Claims (23)

A substrate transfer device,
A first shaftless rotary motor having a linearly arranged first stator and a first rotor coupled to the first arm;
A second shaftless rotary motor having a second stator arranged linearly and a second rotor coupled to the second arm, wherein the second arm is connected to the first arm;
A first substrate support coupled to at least one of the first and second arms,
The first stator and the second stator form a boundary that defines a space between the first stator and the second stator, and the first and second stators are the first stator And the second arm and the first substrate support are inside the stators, and the first and second shaftless rotary motors are connected to one of the first and second arms. A substrate transfer apparatus, wherein a motor output at a point is a resultant force formed around the first and second arms.   The substrate transfer apparatus according to claim 1, further comprising a housing, wherein the first and second stators are arranged substantially linearly around the housing. 3. The substrate transfer apparatus according to claim 2, wherein the first and second stators are integrated with a wall of the housing. The substrate transfer apparatus according to claim 1, wherein each of the first and second arms is
A first rotating arm link having a center point of rotation and a distal end;
A second arm link rotatably coupled to the distal end of the first arm link;
The first arm link of each of the first and second arms comprises one of each of the first and second rotors, and each of the second arm links of the first and second arms is the The substrate transfer apparatus according to claim 1, wherein the substrate transfer device is rotatably coupled to the first substrate support.   The first rotating arm link of each of the first and second arms comprises a respective one of the first and second rotors in the form of a ring or disk, and the distal end is the ring or disk The substrate transfer apparatus according to claim 4, wherein the substrate transfer apparatus is a periphery of the substrate.   6. The substrate transfer apparatus according to claim 5, wherein the ring or disk of each of the first and second arms forms a self-bearing motor with one of each of the first and second stators.   The first rotating arm link of each of the first and second arms comprises one of the first and second rotors in the form of an elongated link member, the distal end being the center of rotation. The substrate transfer apparatus according to claim 4, wherein the substrate transfer apparatus is on the opposite side of the point. The substrate transfer apparatus according to claim 1,
The first arm comprises the first rotor, the first arm having a proximal end located at a center point of rotation thereof;
The second arm includes the second rotor, the second arm is rotatably coupled at a proximal end to a distal end of the first arm at an elbow joint;
The first substrate support is rotatably coupled to a distal end of the second arm;
2. The substrate transfer according to claim 1, wherein the resultant force is applied to the first and second arms by each one of the first and second stators substantially at the elbow joint. apparatus.   9. The substrate transport apparatus according to claim 8, wherein the first substrate support is configured so as to be always aligned with an axis of extension and retraction of the substrate transport apparatus in a substantially longitudinal direction. The substrate transfer apparatus according to claim 1, further comprising a frame,
The first arm comprises the first rotor, the first arm having a proximal end rotatably coupled to an arm support and a distal end in the frame;
The second rotor has a proximal end rotatably coupled to the arm support and a distal end;
The second arm has a proximal end rotatably coupled to the distal end of the first arm at an elbow joint, the second arm drivingly coupled to the second rotor;
The first substrate support is rotatably coupled to a distal end of the second arm;
The resultant force is applied to the first arm by each one of the first and second stators substantially at the elbow joint and substantially at the distal end of the second rotor. The substrate transfer apparatus according to claim 1, wherein   The substrate transport apparatus according to claim 10, wherein the first substrate support is configured so as to be always aligned with an extension / retraction axis of the substrate transport apparatus in a substantially longitudinal direction. The substrate transfer apparatus according to claim 1, further comprising:
A third shaftless rotary motor having a third stator arranged linearly and a third rotor coupled to the third arm;
A fourth shaftless rotary motor having a fourth stator arranged linearly and a fourth rotor coupled to a fourth arm, wherein the fourth arm is coupled to the third arm;
A second substrate support coupled to at least one of the third and fourth arms,
The third and fourth stators are arranged such that the third and fourth arms and the second substrate support are inside the stators, and the third and fourth shaftless rotary motors and the The motor output at a connection point with each one of the third and fourth arms is configured to be a resultant force formed around the first and second arms. Substrate transfer device.   13. The substrate transfer apparatus according to claim 12, further comprising a frame, wherein the first, second, third, and fourth stators are arranged substantially linearly around the frame. . 13. The substrate transfer apparatus according to claim 12, wherein each of the first, second, third, and fourth arms is
A first rotating arm link having a center point of rotation and a distal end;
A second arm link rotatably coupled to the distal end of the first arm link;
The first arm link of each of the first, second, third, and fourth arms comprises one of each of the first, second, third, and fourth rotors;
Each of the second arm links of the first and second arms is rotatably coupled to the first substrate support;
13. The substrate transfer apparatus according to claim 12, wherein each of the second arm links of the third and fourth arms is rotatably coupled to the second substrate support.   The first rotating arm link of each of the first, second, third, and fourth arms is in the form of a ring or disk and each one of the first, second, third, and fourth rotors. 15. The substrate transfer apparatus according to claim 14, wherein the distal end portion is a periphery of the ring or the disk. The rings or discs of each of the first, second, third, and fourth arms form a self-bearing motor with each one of the first, second, third, and fourth stators. The substrate transfer apparatus according to claim 15 .   The first rotary arm link of each of the first, second, third, and fourth arms is in the form of an elongated link member and each one of the first, second, third, and fourth rotors. The substrate transfer apparatus according to claim 12, wherein the distal end portion is opposite to the center point of the rotation. The substrate transfer apparatus according to claim 12, wherein
The first arm comprises the first rotor, the first arm having a proximal end and a distal end located at a center point of rotation thereof;
The second arm comprises the second rotor, the second arm is rotatably coupled at a proximal end to the distal end of the first arm at a first elbow joint;
The first substrate support is rotatably coupled to a distal end of the second arm;
The third arm comprises the third rotor, the third arm having a proximal end located at a center point of rotation thereof;
The fourth arm includes the fourth rotor, the fourth arm is rotatably coupled at a proximal end to a distal end of the third arm at a second elbow joint;
The second substrate support is rotatably coupled to a distal end of the fourth arm;
The resultant force is applied to each of the first, second, third, and fourth stators in each of the first and second elbow joints by the first, second, third, and fourth stators. The substrate transfer device according to claim 12, wherein the substrate transfer device is applied to the fourth arm. The substrate transfer apparatus according to claim 12, further comprising a frame,
The first arm includes the first rotor, the first arm having a proximal end rotatably coupled to an arm support in the frame;
The second rotor has a proximal end rotatably coupled to the arm support;
The second arm has a proximal end rotatably coupled to a distal end of the first arm at a first elbow joint, and the second arm is drivingly coupled to the second rotor. ,
The first substrate support is rotatably coupled to a distal end of the second arm;
The third arm comprises the third rotor, the third arm having a proximal end rotatably coupled to the arm support;
The fourth rotor has a proximal end rotatably coupled to the arm support;
The fourth arm has a proximal end rotatably coupled to a distal end of the third arm at a second elbow joint, and the fourth arm is drivingly coupled to the fourth rotor. ,
The second substrate support is rotatably coupled to a distal end of the fourth arm;
The resultant force is substantially on the first and second arms in each one of the first and second elbow joints and substantially on the distal ends of the second and fourth rotors, The substrate transfer apparatus according to claim 12, which is applied.   13. The substrate transfer apparatus according to claim 12, wherein the first and second substrate supports extend and retract in substantially opposite directions.   13. The substrate transfer apparatus according to claim 12, wherein the first and second substrate supports extend and retract in substantially the same direction. 13. The substrate transfer apparatus according to claim 12, wherein each of the first, second, third, and fourth arms is
A first rotating arm link having a center point of rotation and a distal end;
A second arm link rotatably coupled to the distal end of the first arm link;
The first arm link of each of the first, second, third, and fourth arms comprises one of each of the first, second, third, and fourth rotors; And each of the second arm links of the second arm is rotatably coupled to the first substrate support, and each of the second arm links of the third and fourth arms is the second substrate support. The substrate transfer apparatus according to claim 12, wherein the substrate transfer apparatus is rotatably coupled to the substrate.   2. The substrate transfer apparatus according to claim 1, wherein the first and second stators are configured to move the first and second arms vertically.

Images