TW459130B - Substrate inspecting device - Google Patents

Substrate inspecting device Download PDF

Info

Publication number
TW459130B
TW459130B TW089122356A TW89122356A TW459130B TW 459130 B TW459130 B TW 459130B TW 089122356 A TW089122356 A TW 089122356A TW 89122356 A TW89122356 A TW 89122356A TW 459130 B TW459130 B TW 459130B
Authority
TW
Taiwan
Prior art keywords
inspection
substrate
jig
macro
glass substrate
Prior art date
Application number
TW089122356A
Other languages
English (en)
Chinese (zh)
Inventor
Tsutomu Ozawa
Nobuo Fujisaki
Makoto Nishizawa
Yasushi Sato
Original Assignee
Olympus Optical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co filed Critical Olympus Optical Co
Application granted granted Critical
Publication of TW459130B publication Critical patent/TW459130B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
TW089122356A 1999-10-25 2000-10-24 Substrate inspecting device TW459130B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30280299 1999-10-25

Publications (1)

Publication Number Publication Date
TW459130B true TW459130B (en) 2001-10-11

Family

ID=17913297

Family Applications (1)

Application Number Title Priority Date Filing Date
TW089122356A TW459130B (en) 1999-10-25 2000-10-24 Substrate inspecting device

Country Status (2)

Country Link
KR (1) KR100380809B1 (ko)
TW (1) TW459130B (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100732349B1 (ko) * 2005-04-29 2007-06-27 주식회사 에이디피엔지니어링 기판 외관 검사 장치
KR100579502B1 (ko) * 2005-07-29 2006-05-12 (주)오엘케이 연속 글라스 검사 공정에서의 글라스 표면결함 검사 방법및 장치
KR100688985B1 (ko) * 2005-08-05 2007-03-08 삼성전자주식회사 기판검사장치 및 그의 제어방법
KR100796521B1 (ko) * 2007-02-26 2008-01-21 와이즈플래닛(주) 엘시디의 목시검사장치

Also Published As

Publication number Publication date
KR100380809B1 (ko) 2003-04-18
KR20010051203A (ko) 2001-06-25

Similar Documents

Publication Publication Date Title
JP4842422B2 (ja) シート材料の検査方法
JP4653500B2 (ja) 座標検出装置及び被検体検査装置
US7684031B2 (en) Visual inspection apparatus, visual inspection method, and peripheral edge inspection unit that can be mounted on visual inspection apparatus
KR100783618B1 (ko) 매크로 검사장치
JP3745750B2 (ja) 表示パネルの検査装置および検査方法
US9007456B2 (en) Device and method for inspecting semiconductor wafers
JP2000009661A (ja) フラットパネル検査装置
JP5722049B2 (ja) 基板検査システム
JP2007248292A (ja) 外観検査装置
KR20080023142A (ko) 외관 검사용 기판 유지 장치
TW459130B (en) Substrate inspecting device
JP5005945B2 (ja) 基板検査装置
JP2001194311A (ja) 基板検査装置
KR100661759B1 (ko) 2개의 다관절 로봇을 구비하는 평판 디스플레이 패널검사장치
CN109065469B (zh) 一种带激光切割功能的ic芯片光学抽检机
JP4256974B2 (ja) 基板検査装置
JP2008076079A (ja) 基板検査装置
TW455684B (en) Parallel mechanism and test apparatus
KR20160066741A (ko) 평판디스플레이 패널 에지 검사장치 및 방법
JP3791698B2 (ja) ウエハ検査装置
CN218974154U (zh) 一种外观检测装置
JP2001194312A (ja) マクロ検査用ホルダ機構
KR100633975B1 (ko) 홀더 장치
KR100542727B1 (ko) 글라스 이송유닛을 구비한 평판 디스플레이 패널 검사장치
JP2006066747A (ja) 基板の位置決め装置及び位置決め方法

Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent