TW438913B - Apparatus of pulling up single crystals - Google Patents

Apparatus of pulling up single crystals Download PDF

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Publication number
TW438913B
TW438913B TW086114451A TW86114451A TW438913B TW 438913 B TW438913 B TW 438913B TW 086114451 A TW086114451 A TW 086114451A TW 86114451 A TW86114451 A TW 86114451A TW 438913 B TW438913 B TW 438913B
Authority
TW
Taiwan
Prior art keywords
single crystal
pulling
box
support
patent application
Prior art date
Application number
TW086114451A
Other languages
English (en)
Chinese (zh)
Inventor
Shoei Kurosaka
Hiroshi Inagaki
Shigeki Kawashima
Junsuke Tomioka
Original Assignee
Komatsu Denshi Kinzoku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Denshi Kinzoku Kk filed Critical Komatsu Denshi Kinzoku Kk
Application granted granted Critical
Publication of TW438913B publication Critical patent/TW438913B/zh

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/911—Seed or rod holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
TW086114451A 1997-03-26 1997-10-03 Apparatus of pulling up single crystals TW438913B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08998797A JP3874883B2 (ja) 1997-03-26 1997-03-26 単結晶引き上げ装置及び引き上げ方法

Publications (1)

Publication Number Publication Date
TW438913B true TW438913B (en) 2001-06-07

Family

ID=13986005

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086114451A TW438913B (en) 1997-03-26 1997-10-03 Apparatus of pulling up single crystals

Country Status (3)

Country Link
US (1) US5942033A (ja)
JP (1) JP3874883B2 (ja)
TW (1) TW438913B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI845232B (zh) * 2022-03-29 2024-06-11 中國大陸商中環領先半導體科技股份有限公司 籽晶提拉裝置和晶體生長設備

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109505004B (zh) * 2017-09-15 2021-07-13 银川隆基硅材料有限公司 一种避免拉晶过程中单晶硅棒掉落的方法
CN109023507A (zh) * 2018-09-26 2018-12-18 锐捷芯盛（天津）电子科技有限公司 一种单晶炉晶棒定位装置
KR102665191B1 (ko) * 2019-07-05 2024-05-09 주식회사 엘지화학 단결정 성장 장치 및 이를 이용한 단결정 성장 방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1114171B (de) * 1959-12-31 1961-09-28 Siemens Ag Halterung fuer stabfoermiges Halbleitermaterial in Vorrichtungen zum tiegelfreien Zonenschmelzen
US5196086A (en) * 1987-04-09 1993-03-23 Mitsubishi Materials Corporation Monocrystal rod pulled from a melt
DE69112463T2 (de) * 1990-03-30 1996-02-15 Shinetsu Handotai Kk Vorrichtung zur Herstellung von Monokristallen nach dem Czochralski-Verfahren.
JPH0565477A (ja) * 1991-09-05 1993-03-19 Toray Ind Inc フオトクロミツク性材料
JPH07515A (ja) * 1992-06-08 1995-01-06 Saburo Miyazaki 注射針
JPH07103000A (ja) * 1993-10-05 1995-04-18 Kubota Corp ディーゼルエンジン停止装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI845232B (zh) * 2022-03-29 2024-06-11 中國大陸商中環領先半導體科技股份有限公司 籽晶提拉裝置和晶體生長設備

Also Published As

Publication number Publication date
JPH10265291A (ja) 1998-10-06
JP3874883B2 (ja) 2007-01-31
US5942033A (en) 1999-08-24

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