TW434659B - Storage unit and storage device for plate substrate - Google Patents

Abstract

There are provided a storage unit and storage device for plate substrate. The storage unit comprises: a main body with a holding plane on which plate substrates are placed; walls provided at one end of the holding plane and on both sides of one end for preventing the plate substrates from moving to three ends; a flotation blowout portion for blowing supplied gas out of the holding plane to float the plate substrates placed on the holding plane; and a discharge portion for pushing the plate substrates floated by the flotation blowout portion toward the other end of the holding plane.

Description

434659 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a storage unit and a storage device for a plate-shaped substrate, and more particularly to a storage unit for a plate-shaped substrate, such as a glass plate for storing and handling the plate-shaped substrate. And those who contain the device. [Conventional Technology] For the glass plate, there are various articles such as those used for the TFT-type liquid crystal display Is. Such quadrangular glass plates are usually produced by glass waste dealers and transported to users. Conventionally, the conveyance of glass plates is performed in the following manner. When manufacturers transfer glass plates, they place mats made of synthetic resin or the like between glass plates and overlap glass plates to pack glass plates. Packages with overlapping glass plates are sent to the user. At this time, the attitude of the inner glass plate is determined by the thickness and strength of the plate, and it is determined to be either the vertical or horizontal conveying attitude or packing mode. On the user side, the glass plate is opened by receiving the package, removing the cushion body, and placing the taken-out glass plate on a stand. The stand is a special conveyer for glass plates. Thereafter, the aforementioned stand is moved to a working place where a processing device for glass plate processing and processing is installed. After the gantry is transported to the work place, the glass plate is moved from the gantry to the loading portion of the device. The glass plate is moved by the robot arm of the robot device. The robotic arm sequentially sucks and removes the glass plate from the stand, and then rotates the glass plate 'again to move to the conveying surface of the loading section. After the robotic arm moves the glass plate, the glass plate is placed on the conveying surface. [Problems to be Solved by the Invention] With the development of large-scale screens' in the field of flat panel displays (FPD)

Page 5 434659 V. Description of the invention (2) _ As a thin film transistor (TFT) or electro-polymer display panel (pj) p) object, a large glass plate as described below is used. That is, as a thin film transistor user, try to make a glass plate with a thickness of 0.3 ~ 1.1 [111111] and a plane size of 650 \ 830 [111111] or more, and as a plasma display panel system, try a thickness of 8 [mm] and a plane size of 1000. x100 mm [mm] or more. With the support of a robotic arm or the support of both ends of a shelf plate using a stand, a large glass plate can be greatly buckled by gravity. In this case, a large plate-shaped glass plate may have a concave bend of 100 to 250 [mm], and a large plate-shaped large glass plate may also have a bend of 20 to 30 [mm]. Therefore, in consideration of the deflection occurring on a large glass plate, it is necessary to set the interval between the shelf plates of the stage, that is, the interval between the glass plates arranged vertically. Also, when the robot arm takes out the glass plate from the stand, the glass plate is not flat, so the adsorption of the robot arm will be insufficient, and the glass plate will easily fall off. There is also a method in which the upper surface of the conveying package is directly opened without using a stand and the robot arm is pulled out vertically. However, when the glass plate is pulled out, it will rub against the inner wall of the packing material, which will cause the glass plate to be damaged. Further, when the glass plate is thin, the glass plate is liable to be bent, which makes it difficult to pull out the glass plate. In addition, the robot arm must be installed in a place where overlapping glass plates are placed next to each other. Therefore, the conventional transportation method requires a space for placing a stand, a space for setting a robot, and a space for the robot device to transfer the glass plate from the stand back to the processing device. In addition, the robot device must have the function of adsorbing the glass plate with a robot arm and the function of rotating the glass plate horizontally by 180 degrees with the robot arm. So the habit of moving

434659 V. Description of the invention (3) The structure and control of the robot device used in the operation mode are extremely complicated. In addition, when the glass plate is taken out, the glass plate cannot be taken out in a non-contact manner because the robotic arm of the robot device adsorbs the glass plate. The object of the present invention is to provide a conveying device for a plate-shaped substrate, which does not require a robotic device for taking out the plate-shaped substrate, and can take out a glass plate in a non-contact manner. [Means for Solving the Problems] The plate-shaped substrate conveying device of the present invention includes: a body portion having a holding surface for placing the plate-shaped substrate; and a wall portion provided on one end of the holding surface and on both sides of the one end, and Prevent the plate-shaped substrate from moving toward the three ends; the floating ejection portion sprays the supply gas from the holding surface, and the plate-shaped substrate placed on the holding surface floats from the holding surface; The plate-like substrate raised by the above-mentioned floating ejection portion is pushed toward the other end of the holding surface. According to the foregoing configuration, the plate-like base system is placed on the holding surface of the main body portion. Thereafter, the plate-shaped substrate is transferred and stored. At the end of transportation and storage, supply gas to the main body. The supplied gas system is ejected from the ejection portion on the floating surface of the holding surface. As a result, the plate-like base system floats on the self-sustaining surface. The floating plate-like base system is pushed out by the discharge portion toward the other end of the holding surface and discharged to the outside of the storage unit. In addition, the present invention is characterized by comprising: a main body portion having a holding surface for placing a plate-shaped substrate; and a first wall portion provided on one end side of the holding surface and preventing the plate-shaped substrate placed on the holding surface from facing the one end Side movement; the second wall portion and the third wall portion 'prevent the plate-like substrate from moving in the vertical direction described above

Page 7 434659 V. Description of the invention (4) --- Set the same holding surface as the one who can be easily removed; the first fixed 2 wall ~ / first; = the second wall part and the third wall part, at the same time The second wall portion and the third wall are mounted on the holding surface; and η are respectively installed with the first fixing device card a and the second mouth of the second fixing device 3, Qiu Xuanxuan Yu Jian, +, / device card 0, and The second wall portion and the holding surface for floating on the second direction are arranged in the vertical direction at the same time, and the ejection portion for the upper wall is used to hold the supply gas from the holding and make the makeup placed on the holding surface. Potassium y '屮 Qiu, the π matrix floats from the aforementioned holding surface; the row moves out of the direction. ^ Zhi Zhiji Zhao's orientation is different: The above? Therefore, the second wall portion and the third wall portion are freely attachable to and detachable from the holding surface. ★ As a result, the second and third wall portions can be mounted on the holding surface in accordance with the width of the plate-shaped body being stored or transported '. The size of the holding surface can be set in accordance with the plate-shaped substrate. In addition, the present invention provides a storage device for a plate-shaped substrate. The plate-shaped substrate can be sent out to the carrying-in portion of the processing device when the plate-shaped substrate is received and processed, and is characterized in that it includes: It has a storage unit for the second or third item of the patent application park; a lifting device can be placed on the aforementioned transporter to move the aforementioned transporter up and down, and the designated positions of the aforementioned storage unit are aligned In the carrying-in section; the supply device, after the alignment of the lifting device is completed, the person who supplies gas to the storage unit located in the carrying-in section. According to this structure, a plurality of plate-like base systems are carried and maintained by a carrier. After the transportation and storage of the plate-like substrate is completed, the aforementioned carrier is placed on a lifting device. The lifting device is to move the placed carrier up and down and

434659 V. Description of the invention (5) The designated containment unit is located in the loading section. After the alignment of the lifting device is completed, the aforementioned supply device supplies the gas D to the storage unit located in the carry-in portion, and thereby the plate-like base system is discharged from the carrier toward the carry-in portion. [Implementation Mode of Invention] Next, an implementation mode of the invention will be described. [Embodiment Mode 1 of the Invention] In Embodiment Mode 1, the plate-like substrate storage unit according to the present invention will be described. Fig. 1 is a perspective view of a accommodating unit of a plate-like substrate according to a first embodiment of the present invention. Figure 2 is a plan view of Figure 1. Figure 3 is a view after Figure 1. Fig. 4 is a schematic cross-sectional view of the I-I cross section of Fig. 2. Fig. 5 is a schematic cross-sectional view of the II-II cross section of Fig. 2. Fig. 6 is a schematic cross-sectional view of the II-III section of Fig. 2. Fig. 7 is an explanatory view of a state where the glass plate is moved in the first embodiment. Fig. 8 is an explanatory diagram showing a state where the glass plate is moved in the first embodiment. The storage unit of the plate-shaped substrate according to the embodiment 1 is shown in FIG. 1 and has the following features: a body portion 10 having a holding surface (bottom surface 11E) for placing a plate-shaped substrate (such as a glass plate); It is installed on one end of the holding surface and on both sides of the end to prevent the plate-shaped substrate from moving toward the three ends; the ejection part for floating (multiple ejection holes 14) ejects the supply gas from the holding surface to make The plate-shaped substrate placed on the holding surface floats from the holding surface; the discharge section (multiple ejection holes 16) is to move the plate-shaped substrate floated by the above-mentioned floating ejection section toward the other end of the holding surface (moving Exit 11A) launched. The accommodating unit of the plate-shaped substrate of the implementation mode 1 (hereinafter referred to as 收 · π · γ ^ 34659 V. Description of the invention (6) accommodating unit) will be described in detail below. As shown in Fig. 1, the storage unit 1 is a body portion 10 having a rectangular shape. A concave portion 11 is provided on the upper surface 10A of the main body portion 10. The main body portion 10 on the outside of the recessed portion 11 is a wall portion. The recessed portion 11 is an article for placing a glass plate to be transferred. The glass plate placed in the recess 11 is an article for a TFT-type liquid crystal display, and is formed in a rectangular shape. One of the side walls of the recessed portion 11 is removed, and a passable portion is formed to remove the placed glass plate and a port 11A is used for removal. The holding portion is formed by the recessed portion 11 and the carrying port 11A. Since one side wall of the recessed portion 11 is removed, the recessed portion 11 is formed by three side walls 11 B to 11 D surrounding the flat bottom surface 11 E. The main body portion 10 is provided with a main body portion as shown in FIG. 2. 12A and the first hollow portion 12 of the supply path 12B. The main body portion 12A is formed as a cavity opposed to the bottom surface 11E and the side walls 11B, 11D of the recessed portion 11. The shape of the supply path 12B is tubular, and one end of the supply path 12B is connected to the main body portion 12A. The other end of the supply path 12B is tapered and continues to the side wall 10B of the main body portion 10. Thereby, an opening is formed in the side wall 10B of the main body portion 10, and this opening becomes a floating gas supply port 12C as shown in Fig. 3. A second hollow portion 13 including a main portion 13A and two discharge paths 1 3B is provided on the main body portion 10. The main body portion 13A is formed as a cavity facing the side wall 11C of the recessed portion 11. The two discharge paths 1 3B are arranged parallel to the length directions of the side walls 丨 B and 11D. The discharge path 13B is provided in the main body portion 12A as a partition body 12A as shown in FIG. 4. One end of each discharge path 13B is closed so as to form a side wall of the main body part 2A in the extending direction of one end of the discharge path 1 3B as

Page 10 434659 V. Description of the invention (7) Non-contact state. As a result, the body portion 12A in a state partitioned by the discharge path 13B can freely circulate gas. The other end of the discharge path 13B is connected to the main body portion 13A. An opening is provided on the side wall of the main body portion 10 to continue the main body portion 1 A. This opening is the exhaust gas supply port 1C (see FIG. 3). A plurality of floating ejection holes 14 are provided in the body portion 10. The ejection hole 14 is an article for floating the glass plate placed on the bottom surface 11E. The shape of the ejection hole 4 is tubular, and one end of the ejection hole 14 is connected to the bottom 11 E. Thereby, an opening is formed in the bottom surface 11E. The other end of the ejection hole 14 is connected to the main body portion 12A. The ejection holes 14 are connected in the shape shown in the fifth circle. That is, the length direction of the tubular ejection hole 14 is perpendicular to the bottom surface 11E, and the ejection hole 14 is disposed between the bottom surface 11E and the main body portion 12A. As a result, when the gas supply ports 12C formed on the side wall 10B are supplied with gas, the gas system flows through the main body 2a and is ejected from each of the ejection holes 14. Since the ejection holes 14 are connected to be perpendicular to the bottom surface 11E, the gas system from the ejection holes 14 is ejected in a vertical direction with respect to the bottom surface 11E. The force exerted by the ejected gas on the glass plate becomes a dedicated force for floating and acts on the glass plate. The main body portion 10 is provided with a plurality of discharge ejection holes 15 to 18 (refer to FIGS. 4, 5 and 6). The ejection holes 15 to 18 discharge the glass plate floating on the ejection hole 14 from the outlet 11A of the storage unit 1 in the direction A (refer to FIG. 2). The nozzles 15 and 17 (see Figure 4) can prevent the floating glass plate from hitting the side walls 11 B and 11 D. Nozzle holes 16 (refer to Figure 5) prevent floating glass

434659 V. Description of the invention (8)-The glass plate collides with the side wall UC, and the glass plate can be discharged in the direction of A at the same time. The shapes of the ejection holes 15, 17 are tubular (see Fig. 4). One end of the ejection holes 15, 17 is connected to the side walls 118, 11D, respectively. Thereby, openings are formed in the side walls 11B and 11D. The other ends of the ejection holes 15, 17 are connected to the first! The body part 1 2 A of the hollow part 12. Similarly, the shape of the ejection hole 16 is tubular (see Figs. 5 and 6), and one end of the ejection hole 16 is connected to the side wall 1 1c. Thereby, an opening is formed in the side wall 11c. The other end of the ejection hole 16 is connected to the body portion 1 3 A of the second hollow portion 13. The length direction of the tubular ejection holes 15 to 17 is parallel to the bottom surface 11E. The ejection holes 15 and 17 are provided between the side walls 11B and UD and the main body portion 12A. Between the body portions 13a. The ejection holes 18 discharge the floating glass plate in the direction a. The shape of the ejection hole 18 is tubular (see FIG. 6), and one end of the ejection hole 18 is connected to the bottom surface 11E. Thereby, an opening is formed in the bottom surface 11E. The other end of the ejection hole 18 is connected to a discharge path 13B of the second hollow portion 13. A spray hole 18 is provided between the bottom surface 11E and the discharge path 3β so that the longitudinal direction of the tubular spray hole 18 is inclined with respect to the bottom surface 11E in the direction A. When gas is supplied to the floating gas supply port 丨 2C formed on the side wall 10B, the 'milk system flows through the main body portion 12A and exits from the aforementioned ejection holes 14, and also ejects from the ejection holes 15, 17 at the same time. Since the ejection holes 15, 17 are arranged parallel to the bottom surface 11E, the gas system ejected from the ejection holes 15, 17 is parallel to the bottom surface 11E, and is ejected toward the center of the bottom surface 11E. An exhaust gas supply port 1 3 c formed in the side wall 10 B is supplied with gas.

Page 12 434659 5. In the description of the invention (9), the gas system circulates through the main body part 13A, and is ejected from the ejection holes 6 and 18. Since the ejection holes 16 are parallel to the bottom surface 11E, the gas from the ejection holes 16 is Zhao parallel to the bottom surface 11E and is ejected toward the carrying port ha. Since the ejection holes 18 are inclined with respect to the bottom surface 11e, the chaotic system from the ejection holes 18 is inclined with the bottom surface 11E and ejected toward the carrying port ha. The method of using this embodiment will be described next. For example, when a glass plate for a TFT-type liquid crystal display is moved and supplied to a processing device, as shown in FIG. 7 (a), the operator places a glass plate 1000 on the bottom surface of the storage unit 1. Thereafter, the storage unit 1 on which the glass plate 100 is placed is moved by the operator toward the loading port of the processing apparatus. After the movement of the storage unit 1 is completed, as shown in FIG. 7 (b), the operator inserts the tapered front end of the gas supply pipe into the floating gas supply port 12C of the storage unit 1 to supply the storage unit 1 gas. The gas system used at this time is selected from various types such as clean dry air, high-purity nitrogen, and other inert gases. Gas is ejected from the ejection holes 14, 15, 17 of the storage unit ^ by the supply of gas. By the gas ejected from the ejection hole 14, the glass plate 1000 floats from the bottom surface 11E. Furthermore, the position of the glass plate 1000 is maintained by the gas 1001 ejected from the ejection holes 15, 17 as shown in Fig. 8 at the center 1001 of the glass plate 1000 and the center i1F of the bottom surface UE. The gas systems ejected from the respective ejection holes 14, 15, 17 in Fig. 8 are shown by arrows. The lice body glass plate 1000 which exited to the ejection holes 14'15 and 17 floated from the bottom surface iiE to make the side walls iiB and 11D non-contact with the bottom surface 11E. After the glass plate 1000 floats, as shown in FIG. 7 (c), the operator will supply

Page 13 434659 Description of the fifth invention (发明) The tapered front end portion 92 of the gas supply pipe is directly inserted into the exhaust gas supply port 13C of the storage unit 1 to supply gas to the storage unit 1. The gas is ejected from the ejection holes 16, 18 of the storage unit 1 by the supply of the gas. The glass plate 1000 in a floating state by the ejection of the gas is moved toward the carrying port 11A, that is, in the direction A. As a result, the glass plate 1000 is removed from the storage unit 1 and discharged to the processing apparatus. In this way, according to the implementation mode 1, the glass plate can be held in a non-contact state 'and the glass plate can be discharged toward a target device or the like. As a result, the glass plate does not rub against the side surfaces 11B to 11D or the bottom surface 11E of the accommodating unit 1, and defects can be prevented from occurring on the glass plate. In addition, the gas system released from the ejection holes 16 provided on the side wall 11C of the recessed portion 11 and the gas system emitted from the ejection holes 18 provided on the bottom surface Π are applied as the exhaust force of the glass plate 1000. Therefore, even if the glass plate 1000 is very heavy, the glass plate 1000 can be discharged from the storage unit 1. [Embodiment Mode 2 of the Invention] Embodiment Mode 2 describes a storage unit related to the present invention. Fig. 9 is a plan view of a receiving unit of a plate-like substrate according to a second embodiment of the present invention. Also, in FIG. 9, the components that are the same or look the same as the containing units in FIGS. 1 to 6 described earlier are labeled with the same symbols, respectively. As shown in Fig. 9, the storage unit 2 of the implementation mode 2 is formed by omitting the two discharge paths 13B of the storage unit 1 of the implementation j. In addition, the bottom surface 11E is provided only with the ejection holes 14 connecting the main body portion 12A. θ As a result, the storage unit 2 of the implementation type 2 is most suitable for holding and transporting a light-weight glass plate. Also ’according to the implementation mode 2

43465g on page 14 V. Description of the invention (11) When the ejection hole 14 is formed on the bottom surface 11E, only the main body portion 10 of the storage unit 2 can be processed from the vertical direction, so the processing of the main body portion can be simplified. 〇 [Embodiment Mode 3 of the Invention] Embodiment Mode 3 is a description of the storage unit of the present invention. Fig. 10 is a cross-sectional view of a storage unit of a plate-shaped substrate according to a third embodiment of the present invention. As shown in Fig. 10, the "containment unit 3 of the implementation mode 3 replaces the body portion 10 of the fractured state 1 and 2 and uses the body portion 30." The peripheral surface 32 of the exit hole 31 is low. According to this, when the glass unit 1000 is placed on the receiving unit 3, the contact area between the lower surface 1002 of the glass plate 1000 and the bottom surface of the concave portion of the main body portion 30 can be reduced. [Embodiment Mode 4 of the Invention] Embodiment Mode 4 describes the storage unit of the present invention. Fig. U is a standing vessel of a glass substrate containing unit according to Embodiment 4 of the present invention. Figure 12 is a side view of Figure 11. FIG. 13 is an explanatory diagram for explaining a use state of the fourth embodiment. It is characterized in that it has a first fitting portion formed on the periphery of the holding portion and formed with a protruding portion or a recessed portion (for example, a coupling tip 41) provided on the upper surface 40 A of the main body portion 40, and The lower surface of the main body portion is a second fitting portion which is located at the same position as the first fitting portion and is fitted to the first fitting portion. The storage unit of the plate-shaped substrate of the solid% type 4 will be described in detail below. As shown in FIG. 11 and FIG. 12, the storage unit 4 of the implementation form uses the body part 10 instead of the body parts 10 and 30 used in the implementation form 3.

Page 15 434659 V. Description of the invention (12) In addition, the illustrations of the ejection holes for floating and discharging are omitted in Figs. 11 and 12. The four corners of the upper surface 40A of the main body 40 are separated from each other. Of the four combined tips 4 1. Each coupling tip 41 is cylindrical and protrudes from 40 A on the upper surface. On the lower surface 40C of the main body portion 40, recessed portions 42 are respectively provided on portions corresponding to the positions where the coupling tips 41 are disposed. The recessed portion 42 is formed in the shape of the fitting coupling tip 41. That is, the concave portion 42 is a cylindrical depression. According to such a storage unit 4, as shown in FIG. 13, the operator places the glass plate 1000 in the recessed portion of each body portion 40 and overlaps to accommodate the unit 4. At this time, the operator inserts the coupling tip 41 of the lower storage unit 4 on the concave portion 42 of the upper storage unit 4 to overlap the storage unit 4. Yu Miyun Camp _ .—— Guangzhou team only a few thousand kings to help prisoners. The cypress 41 is fitted into the recessed portion 42, so that the storage unit 4 can be prevented from sliding. That is, the implementation of the type 4 can carry the storage unit 4 collectively ... Because the combination of the tip f is on the four corners of the upper surface 40A, the storage unit 4 can be prevented from sliding when the storage unit 4 is transported, and the overlapping storage units can be overlapped. 4 Strengthened. Taxi, the uppermost containment unit 4 can be covered with 43 if necessary. Gai Zhao 43 and the lower surface of the containment unit are provided with a closed quadrilateral. In the cover 43A. The cover 43 can prevent one or at most three pieces of dust, such as dust falling from the upper side of the glass plate from the same recessed portion as the containing phase, from the 14th to the 0th to the 41st. Or the semi-cylindrical knot-shaped conical joint of round button a shown in Figure 14 (b), or Figure 14 ((;

Page 16 434659 V. Description of the invention (13) The quadrangular prism-shaped deformed joint tip shown in (13). The coupling tip 41 having a cylindrical shape is a deformed coupling tip having various shapes of articles. In addition, although the illustration is omitted on the lower surface 40C of the main body portion 40, a recessed portion 0 for fitting and deforming a coupling tip is provided. Thus, the storage unit is overlapped by using the deforming coupling tip and the recessed portion fitted with the tip. One type can integrate the direction of the exit. [Embodiment Mode 5] Embodiment Mode 5 describes the accommodating device of the plate-like substrate of the present invention. Fig. 15 is a schematic diagram showing the configuration of a plate-like substrate storage device according to Embodiment 5 of the present invention. Fig. 16 is a diagram showing a schematic configuration of a supply device according to a fifth embodiment. Fig. 17 is an explanatory diagram for explaining a joint portion of the fifth embodiment. It is characterized in that it has: a carrier 51 superimposed with a storage unit of the implementation mode 4; a placeable carrier 51 can move the placed carrier 51 up and down and can align the height position of the designated storage unit 51A with The lifting device 52 of the carrying-in section 1100; the supply device 53 for supplying gas to the accommodating unit 51A located in the carrying-in section 1100 after completing the alignment with the lifting device 52. The accommodating device of the plate-shaped substrate according to the fifth embodiment will be described in detail below. As shown in Fig. 15, the accommodating device 5 (hereinafter abbreviated as the accommodating device 5) of the plate-shaped substrate of the embodiment 5 is provided with a carrier 51, an elevating device 5 and a supply device 53. The elevating device 52 and the supplying device 53 are installed on a pedestal 5A, and the pedestal 5A is installed on a work place of a glass plate. The processing equipment for processing and processing glass plates at the work place is set close. Processing equipment

Page 17 434659 V. Description of the invention (14) The loading section 11 0 0 into the glass plate. In addition, the carrying-in portion 1100 moves the glass plate along the carrying surface 1101 in the direction B. At this time, the movement of the glass plate is carried out by floating the glass plate by ejecting gas, and the floating plate is conveyed, or the mechanical conveyance is carried out by a mechanical device such as a conveyor. The carrier 51 is an article in which the storage unit 51A is stacked. Containment unit 51A is one of Containment Units 1 to 4 of Implementation Mode 4. A glass plate is placed in each storage unit 51A of the carrier 51. These glass plates are stacked on each accommodating unit 51A on the quotient side of the glass factory. Then, the carrier 51 is transported to the handling device on the user's side by the transportation device of the truck Deng. In some cases, the carrier 51 is transported to the processing apparatus after being stored by the manufacturer or the user. In this manner, the carrier 51 is used for storage and transportation of glass plates. After that, the carrier 51 is stored in the lifting device 52 after storage and transportation. The lifting device 52 is a measuring vertical mechanism. The measuring up and down mechanism is provided in advance in the loading section 1100 of the processing device. The lifting device 52 includes a table 52A and a main body 52B. A carrier 51 can be placed on the table 52a. The body 5 2B is internally provided with an actuator and a position detector (not shown). The actuator moves the shaft body 52C in the up-down direction, that is, in the direction c and its reverse direction by air pressure. In addition to this type of drive using air pressure, there are also mechanical drives. One example is a drive device using a lead screw. The lead screw is a structure formed by inserting a nut between a nut and a rod-shaped screw, such as a plurality of balls, and can implement precise transmission action. This Zhao 52B uses a single movement of the actuator to move the table 52A mounted on the front end of the shaft body we by a certain pitch, that is, the thickness of the accommodation unit 51A.

Page 18 ^ 34659 V. Description of the invention (15) At this time, the position detector detects the position of the table 5 2A, and the main body 5 2B drives the actuator according to the detected position of the table. By this driving, the main body 52B lowers the table 52A from the initial position to the direction c in sequence at each preset cycle time. The initial position is set so that the carrying-out port of the lowermost accommodation unit 51A of the carrier 51 and the carrying surface iioi of the carrying-in unit 1100 coincide. Of course, as the initial position, an arbitrary section of the storage unit 5 1 A can be selected. After the movement of the table 52A is completed, the carrier 51 is placed on the table 52A, and the table 52A automatically rotates the signal indicating the end to the supply device 53 via the signal line 5 2D. Then, the uppermost container is accommodated. After the operation of the unit 51A is moved to the loading unit 1100, the main body 52B returns the table 5 2A to the initial position in the next cycle time and repeats the previous series of operations. The supply device 53 is provided with a control section 53A, a supply section 53B, a solenoid valve 53C, and a coupling section 53D as shown in Fig. 16. The control unit 53A transmits the first driving signal to the combining unit 53D after receiving the final signal from the signal line 52D. After the first driving signal is output, the control unit 53A transmits the second driving signal to the supplying unit 53 B after a predetermined time has elapsed. After the second drive signal is output, the control unit 53A transmits the third drive signal to the solenoid valve 53C after a certain delay time has passed. The control unit 53A continuously transmits the first driving signal, the second driving signal, and the third driving signal until the end of the cycle time. The coupling portion 53D includes a driving device 5 3D !, couplings 53D2, and 5303 as shown in FIG. The driving device 531) moves the couplers 53D2 and 53D3 toward the receiving unit 51A, that is, the D direction, only while receiving the first driving signal from the control unit 53A.

Page 19 43465S V. Description of the invention (16) The coupler 53D2 and the coupler 53D3 are arranged to correspond to the floating gas supply port 5 1 A! And the discharge gas supply port 51A2 of the storage unit 5 1 A, respectively. The coupler 53D2 and the coupler 53D3 are moved in the direction D by the driving device 53Dt and are inserted into the floating gas supply port 5 1 Ai and the exhaust gas supply port 51A2, respectively. Gas is introduced into the coupler 53D2 and the coupler 53D3 from the piping 53E and the piping 53F, respectively, as described later. Thereafter, the coupler 53D2 and the coupler 53D3 flow the supplied gas to the floating gas supply port 51 and the exhaust gas supply port 51 A2, respectively. After the supply unit 53B receives the second driving signal from the control unit 53A, the gas flows through the pipe 53E. The gas system used at this time is clean dry air, high-purity nitrogen, or other gases selected in advance from other inert gases. The gas system from the supply unit 53B flows through the pipe 53E to the coupler 53D2 and the solenoid valve 53C. The solenoid valve 53C is a valve which is operated by a third driving signal from the control unit 53A. That is, the solenoid valve 53C is turned on when the third drive signal is received, and the gas from the supply unit 53B is circulated through the pipe 53F. The gas system from the solenoid valve 53C flows to the coupler 53D3 via a pipe 53F. The operation of the fifth embodiment will be described next. The carrier 51 is used to transport and store glass plates. After the glass plate has been transported and maintained, the carrier 51 is placed on the table 52A of the lifting device 52. By this, the body 52B transmits the final signal to the supply device 53. After receiving the end signal, the control unit 53A of the supply device 53 transmits the first driving signal to the combining unit 53D. »It is only during the period when the first driving signal is received. The driving unit 53D of the combining unit 53D! Orient the couplers 53D2 and 53D3. Receive

Page 20 434659 V. Description of the invention (17) The capacity unit 51A moves. When the coupler 53 D2 and the coupler 53 D3 are driven by the driving device 5 3 込, they are inserted into the floating gas supply port 51 and the exhaust gas supply port 51 A2 when moving in the direction D, respectively. After the insertion of the coupler 5 3 D2 and the coupler 5 3 D3 respectively, that is, when the first drive signal is output, the control unit 5 3 A transmits the second drive signal to the supply unit 53B after a certain period of time »the supply unit 53B After receiving the second driving signal, the gas is circulated through the pipe 53E. The gas system from the supply unit 53B flows through the pipe 53E to the coupler 53D2 and the solenoid valve 53C. The coupler 53D2 circulates the supplied gas to the floating gas supply port 51A ,. Thereby, the glass plate of the accommodating unit 51A floats. After the glass plate floats, that is, after the second drive signal is output, the control unit 53A transmits the third drive signal to the solenoid valve 53C after the delay time has passed. »After receiving the third drive signal, the solenoid valve 53C is turned on and comes from the supply unit. The gas system of 53B flows to the coupler 53D3 through a pipe 53F. The coupler 5 3D3 circulates the supplied gas to the exhaust gas supply port 51A2. Thereby, the glass goblets floating in the containing unit 51 A are discharged toward the carrying surface Π 01 of the carrying-in section 1100. In this way ', in the implementation mode 5, the glass plates in the carrier 51 are sequentially discharged to the processing device in sequence after the carriers 51 having the plurality of storage units 51A are placed in the lifting device 52. Also, since the robotic device for removing the broken glass plate is not required, the glass plate can be discharged in a non-contact manner, that is, without absorbing the surface of the glass plate and not rubbing the lower surface thereof. In addition, when the robotic device for removing the glass plate is not required, the effect of significantly reducing the equipment investment can be achieved.

434659 V. Description of the invention (18) If the glass manufacturer places the carrier 51 in the clean room, the carrier 51 can be directly packed as a carousel and transported to the end user. On the other hand, the end user does not need to replace the received conveyer 51 ′, and can directly integrate the conveyer 51 to the processing device. On the glass manufacturer side and the end user side, it is possible to reuse the accommodating unit 51A and therefore the glass plate is transported rationally. Also, "Implementation mode 5 describes the removal of the glass plate of the storage unit 5", but on the contrary, it is also possible to carry the glass plate into the storage device 5 and use the storage device 5 as a storage device user. The supplementary braking device for the glass plate can use the gas A4k ejected from the gas ejection hole for self-exhaustion. [Embodiment 6 of the invention] Embodiment 6 describes the storage device β of the present invention. Schematic diagram of the structure of the plate-shaped substrate storage device related to the implementation mode 6. Fig. 19 is a plan view of a containing unit according to a sixth embodiment. Figure 20 is a perspective view of Figure 19. Figure 21 is a partial plan view of the containment unit. Figure 22 is a perspective view of the connector. In Figures 18 to 22, the components that are the same as or considered to be the same as those in Figures i to 6 described earlier are marked with the same symbols. Alas. ::: The containing device 6 is provided with a carrying device 61 and a lifting device 62. The lifting device 62 of the limited-strength l team that accommodates Jin 6 is installed on Block D 5A, and the containment device 6 is the same as the penetrating type 5 and is located close to the loading unit of the processing device. 11〇 (^ Conveyor 61 is a layered storage unit 6ια. Containment unit 61A series

Page 22 434659 V. Description of the invention (19) The first hollow part 丨 2 and the second hollow part 13 of the storage unit of the implementation types 1 to 4 are changed as follows. That is, the structure for removing the floating gas supply 012C on the first hollow portion 12 of the implementation mode 4 and removing the exhaust gas supply port 13C on the second hollow portion 13 is implemented. Also, as shown in Fig. 19, one end of the connection pipe 61Ai is connected to the housing unit 61A to connect the main body portion 1 2 A of the first hollow portion 12. In Fig. 19, the ejection holes 15 to 18 of the side walls UB to 11D are omitted. The splicing tube 61 A! Is a tube-shaped and is used for gas flow. The other end of the connection tube 61A! Is connected to the main body portion 13A of the second hollow portion 13. Thereby, the gas from the main body portion 12a flows to the main body portion 1 3 A. A solenoid valve 61A2 is installed in the middle of the connection pipe 61 Ai. The solenoid valve 61A2 is normally closed 'to prevent gas from flowing into the connection pipe 6 1 A !. The solenoid valve 61A2 is operated after the delay time when the second control signal is received. That is, the solenoid valve 61A2 is opened only when the delay time is delayed and circulates the gas to 61A !. The solenoid valve 61A2 has a delay circuit for delaying the second control signal using a resistor and a capacitor to generate a delay time. The second control signal is applied to the solenoid valve 61A2 via the connector 61 a3 as shown in FIG. 20. The connector 61A3 is inserted into a circular hole 61A4 provided above and below the accommodation unit 61A as shown in FIG. 21. The connector 61A is provided with a cylindrical portion 601 made of an insulator as shown in FIG. 22. A common electrode 610 and a selection electrode 6 21 to 631 are provided on the cylindrical portion 601. In addition, one of the selection electrodes 62 and 631 on the solenoid valve 61A2 of each storage unit 61A is connected to the common electrode 610. Each signal applied to these two electrodes is a second control signal.

Page 23 434659 V. Description of the invention (20) A first quick connector 6 1 As is provided on the upper surface of the accommodation unit 61A (refer to FIG. 2). The first quick connector 6 1 A5 is connected to the main body portion 12A of the first hollow portion 12 ^ The first quick connector 61 A5 is normally locked to prevent the gas in the main body portion 12 A from escaping to the outside. When the second quick connector (not shown) is inserted into the first quick connector 61A5, the first quick connector 61 A5 is opened and the gas of the main body part 12A is discharged to the outside. Although not shown in Fig. 20, a second quick connector is provided on the lower surface of the accommodating unit 61 A, which faces the first quick connector 61A5. On the upper surface of the accommodating unit 61A, two cylindrical coupling tips 61A6 are provided as in the fourth embodiment. A recessed portion (not shown) fitted into the coupling tip 61A6 is provided on the lower surface of the accommodating unit 61A and faces the coupling tip 61. The lifting device 62 includes a table 62A and a main body 62B. The table 6 2A is provided with a connector 61A3, a first quick connector 61, and two joint pins 61As at the same positions as the hole 61A4, the second quick connector, and the two recesses of the accommodation unit 61A. Thereby, the hole 61A4, the second connector, and the two recesses of the lowermost accommodation unit 61A of the accommodation unit 61 A of the carrier 61 are respectively fitted into the connector 61A3, the first quick connector 61A5, and the first quick connector 61A5 of the table 62A. Two combined tips 61AS. The common electrode 610 and the selection electrodes 621 to 631 of the two connectors 61 A3 inside the hole 61 A4 are electrically connected to each other by contact. Although not shown, the main body 62B is provided with the same measuring up and down mechanism as the lifting device 52 of the fifth embodiment. The main body 6 2B includes a control unit 6281 and a supply unit 6282 inside. After the movement of the table 62 of the measuring mechanism is completed, the control unit 62B! Transmits a first control signal to the supply unit 62B2.

Page 24 434659 V. Description of the invention (21) After a certain period of time has passed after the first control signal is output, the control section 62B transmits the second control signal to the connector 61A3 of the table 62A via the signal line 62B3. The second control signal is a signal for selecting the accommodating unit 61A corresponding to the carrying unit 1100. After receiving the first control signal from the control unit 6 2 B !, the supply unit 6 2 B2 supplies gas to the first quick connector 61A5 of the table 62A through the pipe 62B4. The gas to be used can be selected in advance from various types such as clean dry air, high-purity nitrogen, and other inert gases. The operation related to implementation mode 6 will be described next. When the carrier 61 is placed on the table 62A of the lifting device 62, the control section 6 2B! Transmits the first control signal to the supply section 6 2B2. After receiving the first control signal, the supply unit 62B2 circulates gas to the first quick connector 61 of the table 62A 5 through the pipe 62B4. Thus, the glass plate in the containing unit 61A floats up> After the glass plate floats, that is, after the first control signal is output, the second control signal is transmitted to the connector 61A3 by the control section 626 丨 via the signal line 62B3 . After receiving the second control signal, the solenoid valve 61A2 of the containing unit 61A to which this signal is applied becomes open, and the gas from the main body portion 12A of the first hollow portion 12 flows through the solenoid valve 61 to the second hollow portion 13 The body part 13A. As a result, the floating glass plate in the accommodation unit 61A is discharged toward the conveyance surface 1101 of the carry-in portion 1100. In this way, in Embodiment 6, when the carrier 61 having the plurality of storage units 61A is placed on the lifting device 62, the glass plate in the carrier 61 can be automatically discharged toward the processing device. In addition, it does not require machinery for taking out the glass plate

Page 25 4346 59 V. Description of the invention (22) The device can be discharged without touching the glass plate, that is, without touching the upper surface of the broken glass plate and rubbing the lower surface. In this case, an arbitrary position of the containing unit 51A can be selected as the initial position. [Implementation Mode 7 of the Invention] The implementation mode 7 is to explain the situation of the carrier used in the storage device related to the present invention. Fig. 23 is an explanatory diagram of a moving vehicle according to Embodiment 7 of the present invention. The containment device implementing Pear State 7 is equipped with a sealing device that isolates the carrier from outside air. The following describes the carrier used in the storage device of the implementation mode 7 in detail. As shown in FIG. 23, in the implementation mode γ, the closing tool 7 is mounted on the transporter 5 when the transporter 51 of the implementation mode 5 is transported and stored. A cover 51B is covered on the carrier 51. The closure 7 includes a table portion 71, shielding plates 72, 73, and a container box 74. The table portion 71 is an article for placing the carrier 51 and is formed in a quadrangular shape. The shielding plate 72 covers items on the side of the outlet 51A, of each of the storage units 51A of the carrier 51, and the shielding plate 73 covers items on the side of the gas supply port 51A2 of the floating unit 51A. The shielding plates 72 and 73 can cover all openings on the carrier 51. Although not shown on the shielding plates 72, 73, rod-shaped fixtures for inserting the shielding plates 72, 73 are provided on the stage portion 71 to prevent the shielding plates 72, 73 from falling over.

The container box 74 includes a mounting tool 74A and a cover 74B. Install JL74A

V. Description of the invention (23) The body 74B is a bag-shaped object mounted on the mounting tool 74A, and is a size that can cover the carrier 51. The hermetic seal 7 having such a structure can perform the following functions. When the carrier 51 is transported and stored, the operator places the carrier 51 on the table portion 71 under a clean environment. Thereafter, the operator mounts the mounting tool 74A of the container box 74 on the table portion 71. Thereby, a partially cleaned space 75 is formed in the container case 74. As a result, each glass plate in the carrier 51 is blocked from the outside, and it is possible to prevent the glass plate from being contaminated by dust and the like carried by the external air flow. [Embodiment Mode 8 of the Invention] The embodiment mode 8 describes the storage unit related to the present invention. The first figure is an explanatory diagram of the containing unit according to the eighth embodiment of the present invention. As shown in FIG. 24, the 'container unit 8 replaces the main unit of the storage unit used in the implementation mode 4 and the storage unit used in the carriers of implementation modes 5 to 7' and uses the main body unit 80. A portion of the recessed portion 81 on the hip portion 80 opposite to the carrying port 81A is processed into a semicircular shape. 'Thereby forming a semicircular side wall 81B. A discharge portion for discharging is provided on the side wall 81B in the same manner as in Embodiment 4. Similarly, the bottom surface 81C of the main body portion 80 is provided with only a floating ejection portion or both a floating ejection portion and a discharge ejection portion. In Fig. 24, the respective ejection portions and the accompanying ejection holes are omitted. In this way, the object to be accommodated is not limited to a rectangular glass plate, but also a circular plate-like substrate, for example, a large silicon wafer is accommodated in the accommodation unit 8. In addition, when the side wall of the main body is processed in accordance with the shape of the plate-like substrate, a plate-like substrate having an arbitrary shape can be accommodated.

V. Description of the invention (24) [Inventive implementation mode 9] The implementation mode 9 describes the storage unit related to the present invention. Fig. 25 is a plan view of a accommodating unit of a plate-shaped substrate according to a ninth embodiment of the present invention. Fig. 26 is a sectional view taken along the line IV-IV in Fig. 25; Fig. 27 is a sectional view taken along the V-V cross section of Fig. 25; As shown in FIG. 25, the storage unit related to Embodiment 9 includes a main body portion 101 and a fixing portion 102. The body part 101 includes a body part 101A and side parts 101B and 101C. The main body part is a thin cuboid with a thin inner hollow body, and the upper part of the main body part 101A is a flat surface 1001. A plurality of ejection holes 101A2 are provided on the plane 1 〇 1 A !. The ejection holes 10A2 are the same as those used in the first embodiment. Therefore, as shown in Fig. 26, the ejection hole 101 A2 ejects the gas from the supply path 103. On both sides of the main body portion 101A, side portions 10 1 B and 101 C which are hollow inside are integrally installed. The heights of the side portions 1 0 1 B and 1 0 1 C are the same as those of the implementation mode 1 and are formed higher than the body portion 101A. The phases of the side portions 101B and 10lc are opposite to each other, and the front surface 1〇 丨 Βι, 10 ci is inclined like the first embodiment. The front surfaces 101B! And 101Cl are provided with ejection holes ι1β2 and 10K2. The ejection holes 101 \, 101 C2 are the same as those in the first embodiment, and are used for moving the glass plate to the center 101D of the flat surface 101A], and eject the gas supplied to the supply path 103. Such a body portion 101 is made by combining flat plates. In other words, flat plates of various specifications are joined by welding or the like to form the body portion 101. A fixing portion 102 is attached to the main body portion 101. Install the fixing part 102

Page 28 434659 V. Description of the invention (25) The situation in the body 101 is as follows. That is, as shown in Fig. 27, a fixed portion 102 having the same hollow inside is mounted on the hollow body portion 101 inside the body. At this time, the main body portion 101 and the fixed portion] 2 are separated by a partition plate 104. The fixing portion 102 and the side portions 101B and 101C form a wall portion. As in the first embodiment, the supply path 103 for supplying the floating gas passes through the inside of the fixing portion 102. One end of the supply section 103 is connected to the partition plate 104, and the other end of the supply path 103 is processed into a cone shape to serve as a gas supply port 103A for floating. In addition, although not shown in the drawing, the same as Embodiment 1, a fixed gas supply port 1002 is provided with a gas supply port for discharge parallel to the gas supply port 1003A for floating. A plurality of ejection holes 102A are provided on the front surface 1 0 A of the plane 1 01 Ai side of the fixed portion 102. The discharge hole 102A! Is the same as that of the first embodiment, and is a discharge object for a glass plate, and is used to discharge the gas supplied to the previous exhaust gas supply port. In this way, in Embodiment 9, the storage unit can be made by combining flat plates of various specifications, so the storage unit can be simply manufactured. Further, in the implementation of the pear state 9, the flat surface 101A is provided, and only the ejection holes for floating 1101A2 are provided on the plane. However, the ejection holes for discharge may be provided on the flat surface 101i as in the first embodiment. In this case, a partition plate that is passed to the fixed portion 102 is provided on the discharge nozzle, and the gas supplied to the fixed portion 102 is circulated to the discharge nozzle. [Implementation Mode 1 of the Invention] The implementation mode 10 is to describe the storage unit related to the present invention. Fig. 28 is an exploded perspective view of a storage unit of a plate-shaped substrate related to the implementation form 10 of the present invention. FIG. 29 is a three-dimensional view of the state of the combined storage unit of FIG. 28

Page 29 434659 V. Description of the invention (26) Figure. Figure 30 is a top view of Figure 29. Fig. 31 is a sectional view taken along the VI-VI cross section of Fig. 30. Fig. 32 is a sectional view of the fitting hole of Fig. 31. Fig. 33 is a front view of the movable portion of Fig. 28. Fig. 34 is a bottom view of the movable portion of Fig. 33. Fig. 35 is a plan view of the state when the position of the movable part in Fig. 28 is changed. As shown in FIG. 28, the storage unit of the plate-shaped substrate of the implementation form 10 includes a main body portion Π 1 ′ provided with a holding surface (plane 111A) for placing the plate-shaped substrate, and an end surface provided on one of the holding surfaces, and The first wall portion (fixing portion 112) that prevents the plate-shaped substrate placed on the holding surface from moving toward one end side, and the plate-shaped substrate that prevents the plate-shaped substrate from moving in the vertical direction, and is separately mounted on the holding surface to be easily removable 2 and 3 wall parts (movable parts 113, 114), and the first fixing for mounting on the second wall part and the third wall part and mounting the second and third wall parts on the holding surface Device 'and the second fixing device (fitting hole rows 117, Π8) of the η group in which the second and third wall portions are fixed to the holding surface and sequentially aligned in the vertical direction by engaging the i-th fixing device, The ejection part (a plurality of ejection holes 115A) for floating is used to eject the supplied gas from the holding surface and the plate-like substrate placed on the holding surface is lifted from the holding surface, and the floating part is ejected from the ejection part for floating. A discharge portion (a plurality of outlet holes 112A ″) that is pressed by the plate-shaped substrate in the moving direction. Embodiment 1 0 The accommodating unit of the plate-shaped substrate is described in detail below. ~ As shown in Fig. 28 and Fig. 29, it is provided with a main body portion η !, a fixed portion 112, and a movable portion 113'114. ° The main body portion 111 is hollow inside Very thin cuboid, body part

434659 V. Description of the invention (27) The upper part of 111 is plane 111A. An elongated rectangular parallelepiped fixing portion 112 is attached to one end of the flat surface 111A. At this time, the distance in the longitudinal direction as shown in Fig. 30, that is, the length from the other end of the plane 111A to the fixed portion 112 is L1. Slim shaped movable portions 113 and 114 are mounted on both ends of the plane 111A. As described later, the mounting positions of the movable sections 113 and 114 can be changed. When installing the movable parts 113 and 114, the maximum distance in the horizontal direction, that is, the maximum length from the movable part 113 to the movable part 114 is L2 (Fig. 30). The mounting of the fixing portion 112 on the main body portion 111 is as follows. That is, as shown in FIG. 31, a fixed portion 112 that is also hollow inside is integrally mounted on the hollow body portion in that is inside. At this time, it is the same as the embodiment 9 in that the main body portion 111 and the fixed portion 112 are separated by a partition plate 10a. The supply path 119A for supplying the floating gas is the same as that of the first embodiment, and passes through the inside of the fixing portion 112. One end of the supply path 119 is connected to the separator 110A ', and the other end of the supply path 119A is processed into a tapered shape as a floating gas supply port 119B. Although not shown, it is the same as in the first embodiment. The fixed portion 112 is provided with a gas supply port for discharge in parallel with the gas supply port 119B for floating. A plurality of ejection holes 112Ai are formed in the front surface 112A of the fixing portion 112 facing the plane 111A. The ejection hole 112Ai is the same as that of the embodiment 1 for ejecting the glass plate, and ejects the gas supplied to the previous exhaust gas supply port. The largest part, that is, the length of L1 and the length of L2 (hereinafter referred to as the largest surface part) is provided with a plurality of ejection hole rows 5 at equal intervals. to

434659 V. Description of the invention (28) A plurality of ejection holes n 5A are arranged side by side in a row of ejection filling holes 115 in the longitudinal direction. The ejection holes 11 5 A are the same as those in Embodiment 1 for floating glass plates. Also, a row of ejection hole rows 11 16 is provided at the same interval as the ejection hole row 115 to hold the largest surface portion. Each of the ejection holes in the ejection hole row 11 6 6A is the same as the ejection hole 115A for floating glass plates. The second fixing devices as the second group on the plane Π 1 A are respectively provided with fitting hole rows 11 7 and 11 8 11, and the ejection hole rows are not limited to only two groups. Therefore, the combining hole row 117 has two circular fitting holes 丨 separated in the longitudinal direction. The fitting hole row 11 7 is for positioning the movable part 11 3, 11 4 for the user. A fitting cylindrical portion 1176 having the same diameter as the hole and a depth equal to the length of a protruding portion described later is mounted on the fitting hole 11 7 A. The fitting cylindrical portion 1176 does not have a cylindrical cylindrical portion 11 7Bi as shown in FIG. 32, and the lower side of the cylindrical portion 11 7Bi is closed by the bottom portion 11 7β2. With such a structure, the gas supplied to the main body portion 111 can be prevented from blowing out from the fitting hole 11 7A. The fitting hole 11 8A is fitted to the fitting hole row 118 in the same manner as the fitting hole 11 7A (not shown). The arrangement of the fitting hole rows 11 7 is as follows. That is, the fitting hole row U 7 is arranged at a position separated from the side wall of the main body portion 111 by a distance L3 (Fig. 30). The distance 3 is determined in the following manner. When the movable portions 113 and 114 are moved in the direction from the center to the plane 111A, the distance L3 is determined so that the bottom surface of the movable portions 11 3 and Π 4 blocks the ejection hole row 116. Thereby, when the movable parts 113 and 114 move toward the center of the plane = 1AA, the gas from the ejection hole row 116 does not exit from the plane 111A, so that unnecessary gas not ejected to the glass plate can be prevented from being ejected from the plane 111A.

Page 32 434659 V. Description of the invention (29) The arrangement of the fitting hole row 11 8 is as follows. That is, the fitting hole row 11 8 is formed at a distance L4 (Fig. 30) from the fitting hole row 11 7 and is arranged on the center side of the plane 111A, respectively. The distance from the fitting hole row 118 to the fitting hole row 11 7 is equal to the moving distance of the movable portions 113 and 114. The components fitted into the fitting holes 117A and 118A of the fitting hole rows 117 and 118 arranged as described above are provided on the movable portions 113 and 114, respectively. On the bottom surface 11 3A of the movable portion 113, as shown in FIG. 33, two protruding portions 11 3B are provided as a fitting element. A gasket 11 3B is wound around the protruding portion 11 3B. The gasket 11 3B! Is made of an elastic material such as synthetic rubber. These protruding portions 113B and the spacer 113Bt form a first fixing device. The protruding portions 113B 113B are closely fixed to the fitting holes 117A and 118A by the spacer 113Bi. The movable portion 114 is provided with two protruding portions similar to the movable portion 113. The inside of the movable portion 113 is hollow (Fig. 31). The front surface 113C of the movable portion 113 opposite to the movable portion 114 is inclined. A plurality of ejection holes 113Ci are formed in the front surface 113C. The ejection hole i13Ci is the same as that of the embodiment 1 for discharging the glass plate, and ejecting the gas supplied to the movable part 113. The front surface 114C of the movable portion 114 is provided with the same ejection holes luq as the ejection holes 11 3 (^). The structure for supplying gas to the movable portions 11 3, 11 4 is as follows. The movable portion 113 is shown in FIG. 34, An opening 113D is provided on the bottom surface 113A. The opening U3D is a slender hole having a larger width than the diameter of the ejection holes 115A and 11 6A. The position of the opening 11 3D is as follows. In the movable portion 11 3, 11 4 When the holes η 7 are respectively fixed to the plane 11 1 A through the fitting hole row, the opening is opened when the portion surrounded by the fixed portion U2 and the movable portions 113 and Π4 is the largest surface portion.

P.33 434659 Jade, description of invention (30) 11 3 The D system is arranged to face the ejection hole row 1 1 6. In Fig. 34, the ejection hole rows 116 are shown by dotted lines. When the opening 11 3D is arranged so as not to cross the fitting hole 11 7A, the length of the opening 1 1 3D is shortened. Thereby, the gas entering the movable portion 113 through the opening 1 1 3D can be prevented from escaping from the fitting hole 117A. With this structure, the gas is supplied from the ejection holes Π6A of the ejection hole row 116 to the movable portion 113 through the opening 113D. The ejection hole 113C provided on the front surface 113C of the movable portion 113 ejects the gas supplied to the movable portion 113 toward the center of the plane 111 A. The movable portion 11 4 is also the same as the movable portion 113 and is ejected from the ejection hole. The gas supplied in column 116. The storage unit configured as described above is 'to make the distance between the movable portion 113 and the movable portion 114 be L2, that is, to insert the protruding portions 113B of the movable portions 13 and 14 into the fitting holes 11 7 behind the fitting holes 1 1 7 A' The glass plate with the largest width that can be stored in the aforementioned storage unit can be carried and stored. In addition, the protruding portions 113B of the movable portions 113 and 114 are inserted into the fitting holes 11 8A of the fitting hole row 118 and the movable portions 113 and 114 are moved toward the center of the plane 1ΠA by a distance L4 as shown in FIG. The distance between the portion 113 and the movable portion 114 is L5. Since the distance L5 is smaller than the distance L2, the storage unit can be changed to a glass plate with a narrower carrying and storage width. In this way, according to the implementation mode 10, the movable portions 113 and 114 can be easily inserted and replaced, and can correspond to glass plates of different widths. [Embodiment Mode 11 of the Invention] In Embodiment Mode 11, the storage unit related to the present invention will be described. Fig. 36 is a plan view of a receiving unit of a plate-shaped substrate according to Embodiment 11 of the present invention. Fig. 37 is a sectional view taken along the line VII-VII in Fig. 36. Figure 38

Page 34 434659 5. Description of the Invention (31) is the bottom view of the movable part in Figure 36. Figure 39 is a bottom view of the other movable parts. As shown in FIG. 36, the storage unit of the implementation form 11 replaces the ejection hole row 11 16 provided in the main body portion 111 of the implementation form 10 and uses the gas introduction part 1 21 instead of the movable form of the implementation form 10. The parts 113 and 114 use the movable parts 122 and 123. The gas introduction part 121 is an L-shaped cylindrical body. The gas introduction portions 121 are provided outside the largest surface portion of the main body portion 111, respectively. As shown in Fig. 37, one end of the gas introduction portion 121 is connected to a partition plate 110A between the main body portion 111 and the fixed portion 1 12. In Fig. 37, the supply path 11 9A and the floating gas supply port 11 9B (Fig. 31) are omitted. Further, the other end of the gas introduction part 121 is connected to the outer side of the largest surface portion ', and an opening 121A is formed in the plane 111A. The positions of the openings 1 21A are as follows. That is, when the movable portions 1 22 and 123 move to the fitting hole row 118 of the plane 111A, the bottom surfaces of the movable portions 122 and 123 are located on the openings 1 2 1A, respectively, and the openings 121A are provided in a manner of blocking the openings 1 21 A. By such a gas introduction part 121, the gas supplied to the fixed part 122 flows into the gas introduction part 1 21 and is supplied to the movable parts 122 and 123 from the opening 1 21A. The movable portion 122 receiving the gas supply has the following structure. That is, instead of the opening 1011 of the movable portion 113 of the implementation type 10, as shown in FIG. 38, the openings 122B! And 122B2 are attached to the bottom surface 1 12A of the movable portion 122. The openings 1 22B! And 1 22B2 are circular and located between the protruding portions 1 22C. The protruding portion 122C is the same as the protruding portion 113B of the implementation mode 10, and is provided at the same

Page 35 434659 V. Description of the Invention (32) Location. Also, the opening ISSBi is disposed at a distance of L6 from the opening 122B2. Instead of the openings 1228 丨 and 122B2, as shown in FIG. 39, a hole 1220 connecting the opening 1228 丨 and the opening 12262 may be opened on 122 people on the bottom surface. The movable portion 1 2 3 is also provided with the same opening as the movable portion 1 2 2. The storage unit configured as described above is the same as the embodiment 10. By placing the protruding portions 122C of the movable portions 122 and 123 in the fitting hole row 117 or the fitting hole row 118, it can be used for glass plates of different widths. . [Implementation Mode 1 2 of the Invention] The implementation mode 12 is to describe the storage unit related to the present invention. Fig. 40 is a plan view of a plate-shaped base Zhao's containing unit according to the twelfth embodiment of the present invention. Fig. 41 is a side view of the movable portion of Fig. 40. Fig. 42 is a perspective view of another example of the present invention. Those who implement the accommodating unit of the form 12 can supply gas to the movable portion from the fixed portion. That is, as shown in FIG. 40, a plurality of ejection holes 1 are arranged side by side on both sides of a row of ejection holes 1 2 2 A! Provided on the front surface ι 2A of the fixing portion 112. The nozzle outlet hole 1 31 is a nozzle for supplying gas supplied to the fixing portion 112. The implementation type 12 is the one using the movable parts 132, 133 instead of the movable parts 丨 丨 3, 丨 丨 4 of the implementation type 10. As shown in Fig. 41, an elongated milk introduction portion 132B is provided on a side surface 132A of the movable portion 132 opposite to the front surface 112A of the fixed portion 112. The position of the gas introduction part 132B is as follows. That is, when the protruding portion 113B is inserted into the fitting hole row 117, the gas introduction portion 132B of the movable portion 132 is opposed to all the ejection holes 131 and when the protruding portion 1 13B is inserted into the fitting hole row 1 18, the gas introduction portion 132B The gas introduction portion 1 3 2 B is opposed to the ejection hole 1] 2 A !. Country Page 36 V. Description of Invention (33) ------ The movable part 1 3 3 is the same as the movable part 1 3 2. The storage unit configured in this way is the same as the implementation mode 10. By inserting the protruding portions 1 of 3, 3, and 3 into the fitting hole row, the 7 or the fitting hole 118 can correspond to different widths. glass plate. The above is the description of the implementation mode 12, but the present invention is not limited to these implementation modes. For example, the implementation mode 4 and the implementation modes 8 to 12 are the discharge of glass plates, but the use of gas is not limited thereto. For example, the glass plate may be ejected with a mechanical pushing force. In the implementation mode 7, the case where the closing tool 7 is installed on the carrier of the implementation mode 5 will be described. However, the closing tool 7 may also be installed on the carrier 61 of the implementation mode 6. In this case, the shielding plate 7 3 can be omitted. Instead of the main body portions 10, 30, and 40 used in the implementation modes 1 to 7, the main body portion 200 shown in Fig. 42 may be used. Fig. 42 is a diagram in which the ejection holes are omitted. A recess 201 is provided on the main body 200 to prevent contact with the floating glass plate. »By using such a main body 200, a thick glass plate can be accommodated. In addition, the configuration of the combination tip of the implementation form 4 and the connector 61 A3 of the implementation form 6 and the configuration of the first quick connector 6 1 As and the combination tip 61A6 are not limited to the corner portion of the upper surface of the body portion. Placed on any part of the upper surface. The number of bonding pins can be at least one. In addition, in the implementation mode 12, when a storage unit is overlapped, a buffer material having a shape for suppressing the vibration of the glass plate from above and below may be inserted, and the buffer material may be inserted. Such a buffer material is first discharged to the outside when the gas is supplied to the storage unit because it covers the carrying port. The rear glass plate will be discharged.

P.37 434S59 V. Description of the invention (34) [Effect of the invention] In summary, the plate-shaped substrate transport system of the present invention includes: a main body portion, a holding surface for placing the plate-shaped substrate, and a wall portion. It is provided on one end of the holding surface and on both sides of the one end to prevent the plate-shaped substrate from moving toward the three end portions; the floating ejection portion ejects the supply gas from the holding surface to be placed on the holding The plate-like substrate on the surface floats from the above-mentioned holding surface; the discharge portion 'is a feature that pushes the plate-shaped substrate that has been floated by the above-mentioned floating ejection portion toward the other end of the above-mentioned holding surface. Thereby, 'the plate-shaped substrate can be transported and stored only by placing the plate-shaped substrate system on the holding surface of the holding section β' and 'the plate-shaped substrate in the storage unit is delivered to, for example, a processing device for processing the plate-shaped substrate By supplying gas to the floating portion of the main body, the lower surface of the plate-shaped substrate can be held in a non-contact manner without floating or vibrating while the plate-shaped substrate is floated on the plate-shaped substrate. Send to processing device. As a result, it is possible to surely prevent the lower surface of the plate-like substrate from coming into contact with the bottom surface of the recessed portion to cause abrasion and damage due to sliding. Another feature of the present invention is that it includes: a body portion having a holding surface for placing a plate-like substrate; The wall portion is provided on one end side of the holding surface and prevents the plate-shaped substrate placed on the holding surface from moving toward the one end side; the second wall portion and the third wall portion are moved in the vertical direction, At the same time, it is easy to install and disassemble on the holding surface; ^ The fixing device is provided on the second wall portion and the third wall portion, respectively. At the same time, the second wall portion and the third wall portion are installed on the holding surface. The second fixing device of the 卩 group, the knife is engaged with the first fixing device described above, and the second wall portion and the first

Page 38 V. Description of the invention (35) 3 wall portions are fixed to the holding surface, and are arranged in the vertical direction in the above-mentioned 'floating ejection portion' to eject the supply gas from the holding surface, and 1 The plate-like substrate on the holding surface floats from the above-mentioned holding surface; the discharge portion 'pushes out the plate-like substrate that has been floated by the above-mentioned ejection portion for floating toward the moving direction. Therefore, when the width of the plate-shaped substrate placed on the holding surface is changed, the holding surface can be fitted to the width of the plate-shaped substrate by changing the mounting positions of the second and third wall portions when the plate-shaped substrate is transported and stored. . In addition, in the present invention, the discharge portion is formed by a discharge portion for discharging the supply gas from the wall portion toward the side surface of the plate-like substrate, and is a feature thereof. This allows the plate-shaped substrate to be floated and discharged only by supplying gas to the storage unit. ^ Another feature of the present invention includes: a first fitting portion formed by a protruding portion or a recessed portion provided on the upper surface of the main body portion at a holding periphery; and a second fitting portion provided on the lower surface of the main body portion, At the same time, it is the same position as the first fitting portion and fits into the first fitting portion. Thereby, the upper storage unit can be prevented from sliding on the lower storage unit when the storage units are stacked and transported. In addition, the present invention is characterized in that it includes a carrying device superimposed with the storage unit of the patent application scope item 2 or item 3; a lifting device that mounts the carrying device, and moves the carried carrying device up and down, so that The designated position of the aforementioned storage unit is aligned with the aforementioned carrying-in part; and the supply device is a person who supplies gas to the aforementioned accommodation unit located in the aforementioned carrying-in part after the alignment of the aforementioned lifting device is completed. Thereby, the non-contact state of the lower surface of the plate-like substrate can be maintained, and the plate-like substrate can be discharged from the carrier to the carrying-in portion of the processing device. The result is

Page 39 434659 V. Description of the invention (36) When the processing device discharges the plate-shaped substrate, the plate-shaped substrate can be prevented from being stained or damaged. Furthermore, when the cut glass plate is placed in a carrier in the clean room on the side of the glass manufacturer, the carrier can be directly set into a transporting package and transported to the end user. On the end user side, the carrier can be installed on the lifting device without replacing the received carrier, and the carrier and the processing device can be directly connected. In addition, the glass manufacturer side and the end user side can reuse the storage unit of the carrier, so the transportation of the glass plate can be rationalized, and no robotic device for taking out the glass plate can be provided, so the expenditure on equipment investment can be greatly reduced . The present invention also includes a sealing device for blocking the carrier from the outside. Thereby, when the carrier is stored and transported, it is possible to prevent a situation in which outside air flows and dust and the like are attached to a glass plate in the carrier. [Brief Description of the Drawings] Fig. 1 is a perspective view of a receiving unit of a plate-like substrate related to Embodiment 1 of the present invention. Figure 2 is a plan view of Figure 1. Figure 3 is a rear view of Figure 1. FIG. 4 is a schematic cross-sectional view taken along the line I-I in FIG. 2. Figure 5 is a schematic cross-sectional view taken along the line II-II in Figure 2. Fig. 6 is a schematic sectional view taken along the line III-III in Fig. 2. FIG. 7 is an explanatory diagram of a state in which the glass plate is moved in implementation mode 1. FIG. 8 is an explanatory diagram of a state in which the glass plate is moved in implementation mode 1. FIG. FIG. 9 is a receipt for a plate-shaped base raft related to the implementation form 2 of the present invention

Page 40 434659 5. Explanation of the invention (37) Top view. Fig. 10 is a cross-sectional view of a storage unit for a plate-like substrate according to a third embodiment of the present invention. Fig. 11 is a perspective view of a glass substrate accommodating unit according to Embodiment 4 of the present invention. Figure 12 is a side view of Figure 11. FIG. 13 is an explanatory diagram illustrating a use state of the fourth embodiment. Fig. 14 is a perspective view of a coupling tip used in a modification of the present invention. Fig. 15 is a schematic diagram showing the configuration of a plate-like substrate storage device according to Embodiment 5 of the present invention. Fig. 16 is a diagram showing a schematic configuration of a supply device according to a fifth embodiment. Fig. 17 is an explanatory diagram for explaining a joint portion of the fifth embodiment. Fig. 18 is a schematic diagram showing the structure of a container-like volume receiving device according to a sixth embodiment of the present invention. FIG. 19 is a plan view of a containing unit according to a sixth embodiment. Figure 20 is a perspective view of Figure 19. Figure 21 is a partially scraped view of the containment unit. Figure 22 is a perspective view of the connector. Fig. 23 is an explanatory diagram of a carrier related to Embodiment 7 of the present invention. Fig. 24 is an explanatory diagram of the containing unit according to the eighth embodiment of the present invention. FIG. 25 shows the accommodation of a plate-shaped substrate related to the implementation form 9 of the present invention.

Page 41 5. Description of the invention (38) Top view of the unit. Fig. 26 is a sectional view taken along the line IV-IV in Fig. 25; Figure 27 is a scraped view of the v-v section of Figure 25. Fig. 28 is an exploded perspective view of a storage unit of a plate-like substrate related to Embodiment 10 of the present invention. FIG. 29 is a perspective view of a state of the combined storage unit of FIG. 28. Figure 30 is a top view of Figure 29. FIG. 31 is a cross-sectional view taken along the VI-VI cross section of FIG. 30. Fig. 32 is a sectional view of the fitting hole of Fig. 31. Fig. 33 is a front view of the movable portion of Fig. 28. Fig. 34 is a bottom view of the movable part on the 33rd lap. Fig. 35 is a plan view of the state when the position of the movable portion in Fig. 28 is changed. Fig. 36 is a plan view of a accommodating unit of a plate-like substrate according to Embodiment 11 of the present invention. Fig. 37 is a sectional view taken along the line VII-VII in Fig. 36. Fig. 38 is a bottom view of the movable portion of Fig. 36. Figure 39 is a bottom view of the other movable parts. Fig. 40 is a plan view of a storage unit of a plate-like substrate according to a twelfth embodiment of the present invention. Fig. 41 is a side view of the movable portion of Fig. 40. Fig. 42 is a perspective view of another example of the present invention. [Symbol description] 1, 2, 3, 4, 8, 51A, 61A ~ containment unit; 5,6 ~ container equipment

4346SS on page 42 5. Description of the invention (39); 7 ~ closed device; 5A, 6A ~ pedestal; 10, 30, 40, 80, 101, 111, 200 ~ body part; 10A, 40A ~ upper surface; 10B, 40B ~ sidewall; 11, 81, 201 ~ recessed portion; 11A, 51A !, 81A ~ exit; 11B ~ 11D, 81B ~ sidewall; 11E, 81A, 113A, 122A ~ bottom surface; 11F, 101A, 101D ~ center: 12 ~ 1st hollow part; 12A, 13A, 101A, 111A ~ body part; 128, 103, 119 people ~ supply path; 12 (:, 51 people 1, 51 eight 2, 103A, 119B ~ floating gas supply port; 1 3 to the second hollow part; 13B to the exhaust path; 13C, 51A2 to the exhaust gas supply ports; 14, 15 to 18, 31, 101A2, 101B2 '101C2, 102A !, 112A !, 113C, 114C, 115A, 116A, 13b spray holes; 32 ~ peripheral surface; 40C, 1002 ~ lower surface; 41, 61A "combination tip; 42, 43A ~ recessed portion; 43, 51 B ~ cover body; 51, 6 b carrier; 52, 62 ~ lifting device; 52A, 62A ~ table; 52B, 62B ~ body; 520 shaft body; 52D, 62B3 ~ signal line; 53 ~ control device: 53A, 62B! ~ Control section; 53B, 62B2 ~ supply section; 53C , 61 A2 • Solenoid valve; 53D ~ combination part; 53IV drive device; 53D2, 53D3 ~ coupler; 53E, 53F, 62B4 ~ piping; 6 1 8 丨 ~ connecting pipe; 61Aγ connector; 61 A4 ~ hole; 61 A5 ~ 1 quick connector; 71 ~ stage part; 72, 73, shielding plate; 74 ~ container box; 74A ~ mounting fixture; 74B ~ cover body; 75 ~ partial clean space; 91, 92 ~ front end; lOlAr plane ; 101B, 1010 side parts; 10%, 10iq, 102A, 112A, 113C '1140 front surface; 102, 112 ~ fixed part; 104, 110A ~ divider; 113, 114, 122, 123 , 13 2, 13 3 ~ movable parts; 1136, 122 (: ~ protruding parts; 113 shirts 1 ~ gaskets; 113D, 121A M22B !, 122B2 ~ openings; 115 '116 ~ ejection hole row; 117, 118 ~ Fitting hole row; 7A, 118A ~ fitting hole; 1ΠB ~

Page 43 434659 V. Description of the invention (40) Fitting cylinder part, 117 B〗 '" Cylinder part' 117 ^ 2 ~ bottom part; 121, 132B ~ gas introduction part; 132A ~ side; Bu cylindrical part; 62 1 -63 Bu selection electrode; 610 ~ common electrode; 1000 ~ glass plate; 100bu center; 1100 ~ carrying section; 110bu transport surface; AD ~ direction: L1_L6 ~ distance °

Page 44

Claims (1)

434659 1. A plate-shaped substrate containing unit, comprising a main body portion having a wall portion on which the plate-shaped substrate ^ is placed, which is provided at one end and two holding surfaces of the aforementioned holding surface; preventing the plate-shaped substrate from facing the three end portions Move the 'β ~ cock' on both sides while floating the ejection part for floating, and the supply gas is ejected from the plate-shaped substrate placed on the holding surface from the front holding surface ', so that the ejection part will be discharged by the above-mentioned floating ejection part. , The surface floats up; and pushed out to the other end of the aforementioned holding surface. The plate-like substrate of the ocean is facing 2. — A plate-like substrate containing unit includes: a main body portion having a holding surface for placing the plate-shaped substrate = wall portion 'is provided on one end side of the above-mentioned holding surface, and is prevented from being placed on the 刖The plate-shaped substrate on the holding surface is moved toward the one end side; the second wall portion and the third wall portion prevent the plate-shaped substrate from moving in the vertical direction, and it is easy to attach and detach on the holding surface at the same time; the first fixing device , Respectively set on the second wall portion and the third wall portion, and simultaneously install the second wall portion and the third wall portion on the holding surface; the second fixing device of the η group (η is a positive integer), respectively The second wall portion and the third wall portion are engaged with the first fixing device to fix the second wall portion and the third wall portion to the holding surface, and are arranged in the vertical direction at the same time; the ejection portion for floating is used to supply gas from the holding surface The ejection causes the plate-shaped substrate placed on the holding surface to float from the holding surface; and the discharge portion pushes the plate-shaped substrate floated by the floating-use ejection portion toward the moving direction. 3. For the accommodating unit of the plate-shaped substrate in the first scope of the patent application, its Page 45 Γ 43465§ & '_PLEASE PLEASE ms ™'-The aforementioned discharge portion is formed by a discharge discharge portion that discharges the supply gas from the wall portion toward the side of the plate-like substrate. 4. For the storage unit of the plate-like substrate in the scope of the patent application, the discharge unit is formed by a discharge ejection unit that discharges the supply gas from the wall toward the side of the plate-like substrate. 5. The grain-receiving unit of the plate-shaped substrate as described in the scope of the patent application No. 1 '2' 3 or 4 further includes: The first fitting portion is located at the periphery of the holding portion and is provided on the upper surface of the base portion. A protruding portion or a recessed portion is formed; and a second fitting portion 'is provided on the lower surface of the main body portion at the same position as the first fitting portion and fits in the first fitting portion. 6. —A kind of plate-shaped substrate storage device. When the plate-shaped substrate is stored and processed, the plate-shaped substrate can be sent out to the carrying-in part of the processing device. It is characterized by: Containment unit in the scope of patent application No. 3, 4 or 5; Lifting device, placing the aforementioned carrier, and moving the placed carrier up and down, so that the designated position of the aforementioned receiving unit coincides with the aforementioned moving in And a supply device for supplying gas to the storage unit located in the loading section after the alignment of the lifting device is completed. For example, the apparatus for accommodating a plate-shaped substrate in the scope of the patent application No. 6 further includes a sealing device for blocking the aforementioned carrier from outside air. Chapter 46