JP4498725B2 - Levitation transfer device - Google Patents

Description

  The present invention relates to a levitation transport device that places a transported body in a floating state by injecting a pressure gas onto a plate-shaped transported body, and moves, stops, stops, and changes the direction of the transported body in this state.

JP 2000-72250 A

  2. Description of the Related Art Conventionally, a levitation conveyance device that performs plate-like conveyance objects such as a glass plate used for a liquid crystal display or the like in a molding / processing process or a wafer on which a semiconductor device is formed by jetting an air current is known (for example, a patent) Reference 1).

  Such a levitating and conveying device prevents dust attached to the surface of the roller conveyor from adhering to the back surface of the conveyed object, as compared with a configuration in which the conveyed object is placed on the roller conveyor and conveyed. In addition, not only can the speed of the production process associated with the recent increase in the size of the transported body be made possible, but also the rear-end collision with the adjacent next-stage roller due to the thinner transported body. It becomes possible to prevent damage and the like.

  FIG. 16 shows an example of such a levitation conveyance apparatus, FIG. 16A is a plan view of the levitation conveyance apparatus, and FIG. 16B is a cross-sectional view of the main part of the levitation conveyance apparatus.

  In FIG. 16 (A), the levitation conveyance apparatus comprises a levitation conveyance unit 3 by combining a conveyance unit 1 and a control unit 2.

  The transport unit 1 is moved in a predetermined movement direction while blowing a pressure gas from a plurality of nozzles 5 disposed on the bottom surface side of the rectangular plate-shaped transported body 4.

  The control unit 2 stops the transported body 4 in a state where the transported body 4 is floated, and changes the direction in a predetermined direction (including straight travel). And in the conveyance process, the various processes with respect to the to-be-conveyed body 4 are performed by the processing unit.

  The transport unit 1 and the control unit 2 are substantially the same except for the function of stopping and changing the direction of the transported body 4, but as shown in FIG. Are arranged vertically and horizontally. In the injection unit 6, a large number of injection units 6 are held by holding plates 7 that constitute the respective transport units 1 and the control unit 2.

  A pipe 8 (or a hollow casing) is disposed on the back surface of the holding plate 7, and pressurized gas is supplied into the pipe 8.

  FIG. 15 shows an injection unit used in the levitation conveyance apparatus, FIG. 15A is a cross-sectional view of the main part of the levitation conveyance apparatus, and FIG. 15B is a plan view of the main part of the levitation conveyance apparatus.

  The injection unit 6 is a cylindrical body that is held in a holding hole 7a formed in the holding plate 7. A part of the injection unit 6 engages with a recess 7b formed in the holding hole 7a, so that the injection unit 6 is relatively rotated. Protrusions 6a that are impossiblely positioned are formed. The injection unit 6 includes a communication path 6b that opens in a sealed chamber located on the back surface of the holding plate 7, and a nozzle 5 that penetrates in an inclined state from the upper end to the upper end surface of the communication path 6b. .

  Thereby, the pressure gas supplied in the sealed chamber is injected from the nozzle 5 via the communication path 6b.

  The inclination angle of the nozzle 5 is determined by the transport direction of the transported body 4 including vertical.

  By the way, in the levitation transport apparatus configured as described above, a plurality of transport units 1 and control units 2 are combined and arranged adjacent to each other in the same plane. As a result, the transfer unit 1 and the control unit 2 having a size corresponding to the increase in size will be limited because the installation space such as the size of the factory will be limited. There was a problem that it would end up.

  In order to solve the above problems, the present invention provides a levitation transport apparatus that not only can save the installation space of a transported body, but also can ensure the degree of freedom in designing a transport path. For the purpose.

  In order to achieve the object, the levitation transport apparatus according to claim 1 is configured to float a plate-shaped transported body by a pressure gas ejected from each tip of a nozzle formed on a plurality of nozzle members. A plurality of lower conveyance units arranged adjacent to each other in the same plane so as to convey in the direction, and a plate-like object to be conveyed by pressure gas ejected from the tip of each nozzle formed on the plurality of arranged nozzle members. While being transported in a predetermined direction, a plurality of upper transport units arranged adjacent to each other in the same plane above the lower transport unit, and pressure gas ejected from each tip of nozzles formed on the plurality of nozzle members disposed And a lift transport unit that lifts and lowers the plate-shaped transported body and transfers the transported body between the lower transport unit and the upper unit. It is the gist of.

  Further, the levitation conveyance apparatus according to claim 2, wherein a plurality of the lower conveyance units are arranged adjacent to each other in a state where the plurality of lower conveyance units are bent or branched, and the plurality of upper conveyance units are above at least a part of the lower conveyance unit. The gist is that they are opposed to each other.

  According to a third aspect of the present invention, there is provided a levitation conveyance apparatus in which the ejection direction of the nozzle is variably controlled.

  According to the levitation transport apparatus of the present invention, a plurality of lower-stage transports that transport the plate-shaped transported object in a predetermined direction while being levitated by the pressure gas ejected from the tips of the nozzles formed on the plurality of nozzle members arranged A plurality of upper stages in which a plurality of units are arranged adjacent to each other in the same plane, and are conveyed in a predetermined direction while floating a plate-like object by pressure gas ejected from each nozzle tip formed on a plurality of arranged nozzle members A plurality of conveyance units are arranged adjacent to each other in the same plane above the lower conveyance unit, and the plate-shaped object to be conveyed is levitated by the pressure gas ejected from each tip of the nozzle formed on the plurality of arranged nozzle members. The transported object is transferred between the lower transport unit and the upper unit by the lift transport unit that moves up and down.

  As a result, if the upper transport unit is arranged above the lower transport unit, the installation space can be saved while keeping the transport path long, and the degree of freedom in designing the transport path can be expanded. it can.

  According to the levitation conveyance apparatus of the second aspect, a plurality of lower conveyance units are arranged adjacent to each other in a bent or branched state, and the plurality of upper conveyance units are arranged to face each other above at least a part of the lower conveyance unit. As a result, installation space can be saved while securing a long transport path while securing a transport path according to the processing environment of the transported object, and the design flexibility of the transport path is expanded. can do.

  According to the levitation conveyance apparatus according to claim 3, the injection direction of the pressure gas is finely adjusted and the injection direction of the pressure gas according to the conveyance environment of the transported body is controlled by variably controlling the injection direction of the nozzle. be able to.

  Next, the levitation transport apparatus and the levitation transport method of the present invention will be described with reference to the drawings.

  FIG. 1 is a perspective view of a main part of the levitation conveyance apparatus of the present invention, FIG. 2A is a plan view of a base part of the levitation conveyance apparatus of the present invention, and FIG. 2B is a base part of the levitation conveyance apparatus of the present invention. 3A is a side view of the nozzle member of the levitation transport apparatus of the present invention, FIG. 3B is a sectional view of the nozzle member of the levitation transport apparatus of the present invention, and FIG. 3C is the present invention. FIG. 4 is a perspective view of a solenoid valve, FIG. 5 is a perspective view of a supply pipe holding bracket, FIG. 6 is a bottom view of the main part of the levitation transport apparatus of the present invention, and FIG. FIG. 8 is a cross-sectional view of an essential part of a modification of the levitating and conveying apparatus of the present invention, and FIG. 9 is a conveying unit or a control unit in which the levitating and conveying apparatus is arranged vertically and horizontally. FIG. 10 is a side view of the levitation transport apparatus of the present invention, FIG. 11 is a plan view of the levitation transport apparatus of the present invention, and FIG. FIG. 13A is a perspective view of a transported object supply cassette, FIG. 13B is an explanatory view when the transported object is supplied by the transported object supply cassette, and FIG. It is a top view of the levitation conveyance system using the levitation conveyance apparatus of the invention.

  In FIG. 14, the levitation conveyance system 40 includes a levitation conveyance apparatus 10 for levitation conveyance of the conveyance object 7, a movable conveyance object supply cassette 41 disposed at the conveyance start end of the levitation conveyance apparatus 10, And a processing stage 42 disposed at an arbitrary position of the transfer device 10.

  The processing stage 42 depends on the type (for example, semiconductor chip, wafer, liquid crystal, glass substrate, display device panel, etc.) of the transported body 7 (for example, film formation, resist coating, exposure, development, edging). , Resist stripping, cleaning, inspection, etc.). At this time, the transfer height of the transported body 7 of the processing stage 42 is set to a height corresponding to a transport unit 41 described later.

  Further, as shown in FIG. 13A, the transported object supply cassette 41 has a plurality of stages that can be moved up and down independently along a casing 41a and a guide rail 41b provided on the inner wall surface of the casing 41a. Tray 41c. The tray 41c is lifted and lowered by a driving device (not shown).

  Each tray 41c accommodates the substrate 7 in a substrate state when it is delivered from a manufacturer (for example, a glass manufacturer) to an apparatus manufacturer. In this way, the transported body 7 in the base state is transported and delivered between the manufacturer (for example, glass manufacturer) and the apparatus manufacturer together with the transported object supply cassette 41, so that the transported body 7 There is no need to interpose a protective sheet, and dust or the like on the protective sheet does not adhere to the transported body 7. Further, in the tray 41c, there is provided an extrusion pin 41d for supplying the transported body 7 to the levitation transport apparatus 10 in a state where the transported body 7 is floated by the pressure gas. In addition, since the structure which floats the to-be-conveyed body 7 is the same as the levitation conveyance mentioned later, the description is abbreviate | omitted here.

  As shown in FIGS. 10 to 12, the levitation transfer apparatus 10 corresponds to the transfer unit 1 or the control unit 2 described above, and a plurality of lower transfer units 43 and a lower transfer unit 43 arranged adjacent to each other in the same plane. A plurality of upper transport units 44 disposed adjacent to each other in the same plane above the upper transport unit 44 and a lift transport unit 45 that transfers the transported body between the lower transport unit 43 and the upper unit 44.

  The lower transport unit 43 and the upper transport unit 44 are arranged in a straight line, bent, or branched according to the work process associated with the type of the transported body 7 or the installation space of the manufacturing factory, and at least a part thereof is vertically opposed. In this way, the installation space is effectively utilized. In addition, when the processing stages 42 are overlapped with each other when they are arranged opposite to each other, they are arranged on the left and right sides. At this time, the height of the processing stage is set to a height corresponding to the lower transport unit 43 or the upper transport unit 44. It is also possible to provide a guide wall 46 that prevents the transported body 7 from falling off according to the presence or absence of the processing stage 42 and the floating transport direction.

  The lift transport unit 45 is disposed adjacent to the end portions of the lower transport unit 43 and the upper transport unit 44, and ascends while the transported body 7 floated and transported from the lower transport unit 43 is lifted to transport the upper transport. The product is transferred to the unit 44, and the transported body 7 that is lifted and transported from the upper transport unit 44 is lowered and handed over to the lower transport unit 43. Note that a parallel link mechanism 47, a solenoid (not shown), and the like are used to raise and lower the lift transport unit 45.

  As shown in FIG. 9, each unit 43, 44, 45 (hereinafter referred to as the levitation conveyance device 10) and the tray 41c are connected to a pressure gas supply source (not shown) such as a compressor via a pipe 11a. A control valve 11, a supply pipe 12 to which the control valve 11 is fixed at one end, and a plurality of transfer units 20 fixed to the side wall of the supply pipe 12 are provided.

  As shown in FIGS. 6 and 7, the control valve 11 controls the flow rate of the pressure gas to the pipe 12 (for example, PNEUTRONICS of Parker Hannifin Corporation). 13 is disposed near one end of a long frame 14 having an L-shaped cross section fixed through 13, and is fixed to one end of the supply pipe 12.

  The supply pipe 12 is held in the air by a supply pipe holding bracket 16 fixed to the frame 14 via screws 15. As shown in FIG. 5, the supply pipe holding bracket 16 is formed with a tongue piece 16b for fixing by cutting and raising a metal frame having a U-shaped cross section so as to form a holding portion 16a. A screw insertion hole 16c into which the screw 15 is inserted is formed in 16b.

  The transport unit 20 is sandwiched between the substrate 9 and the frame 14 and fixed to the substrate 9 with bolts 17, the nozzle member 22 held on each base unit 21 rotatably in a horizontal plane, An electromagnetic valve 23 fixed to the base portion 21 and an annular packing 24 interposed between the outer wall of the supply pipe 12 and the outer wall of the base member 21 are provided.

  As shown in FIG. 2, the base portion 21 includes a substantially crank-shaped communication path 21a, a shaft holding hole 21b, a supply hole 21c communicating with the shaft holding hole 21b, and a normally open port insertion hole 21d. ing. Further, the hole 21e on the extension of the inclined portion of the communication passage 21a is formed at the time of formation and is normally closed by the packing 25. Furthermore, the front end of the bolt-shaped port member 18 faces the upstream end of the communication passage 21 a in a state of being fixed to the supply pipe 12 and passing through the annular packing 24. A through hole (not shown) that connects the supply pipe 12 and the communication path 21 a is formed in the axis of the port member 18. Further, the base member 21 is formed with a female screw hole 21f that is screwed into the screw portion of the bolt 17.

  As shown in FIG. 3, the entire outer periphery of the nozzle member 22 is recessed in an annular shape and forms an annular supply path 26 (shown only in FIG. 7) in cooperation with the inner wall of the shaft holding hole 21b. A communication hole 22b penetrating between the inner wall surfaces of the annular recess 22a via an axis, a shaft hole 22c formed on the axis of the nozzle member 22 and communicating with the communication hole 22b, and an upper end of the shaft hole 22c A nozzle 22 d that communicates and opens at the upper end surface of the nozzle member 22. The nozzle 22d is formed vertically or inclined with respect to the nozzle member 22 as necessary (depending on the installation location). The nozzle member 22 is formed by casting or injection molding, and then formed with a communication hole 22b so as to penetrate between the inner wall surfaces of the annular recess 22a. After forming 22c, the nozzle 22d is perforated. Accordingly, the packing hole 27 is sealed below the communication hole 22b of the shaft hole 22c. Furthermore, the lower end surface of the nozzle member 22 is formed with a slit 22e into which a tool tip is inserted when the nozzle member 22 is rotated manually or automatically within a horizontal plane. For this reason, the upper end and the lower end of the nozzle member 22 face the plates 7 and 9 so as to be flush with the upper surface of the holding plate 7 and the bottom surface of the substrate 9.

  As shown in FIG. 4, the solenoid valve 23 is connected to a common port 23a connected to the other end of the communication path 21a, a normally closed port 23b connected to the supply hole 21c, and a normally open port insertion hole 21d. And a normally open port 23c.

  By the way, as shown in FIG. 8, the nozzle member 22 eliminates the annular recess 22a to form a communication path 22b, and the annular recess 21g communicating with the communication path 22b is replaced with the inner wall surface of the shaft holding hole 21b of the base member 21. The supply path 26 may be formed in cooperation with the outer periphery of the nozzle member 22 and the annular recess 21g at a portion not directly connected to the communication path 22b.

  In the above configuration, when the control valve 11 such as a compressor is driven, the pressurized gas is supplied to the base member 21 via the supply pipe 12 and the port member 18, and the communication path 21a, the common port 23a, the electromagnetic valve 23, The nozzle 22d is sprayed through the closed port 23b, the supply hole 21c, the supply path 26 (annular recess 22a), the communication hole 22b, and the shaft hole 22c in this order.

  At this time, since the nozzle member 22 is rotatable in a horizontal plane with respect to the base portion 21, the injection direction of the pressure gas injected from the nozzle 22d can be adjusted.

  The pressurized gas supplied from the supply hole 21c can be supplied regardless of the rotational position of the nozzle member 22 in the horizontal plane by the annular recess 22a.

  Thus, the adjustment can be easily performed by inserting the tip of the adjustment tool manually or automatically into the slit 22e and rotating the nozzle member 22 in a horizontal plane.

  Furthermore, since the electromagnetic valves 23 are individually provided in the base portion 22, the supply amount and timing of the pressure gas can be controlled independently.

  In addition, a guide wall may be provided at the edge of each transport unit 1 and control unit 2 to prevent unintentional dropout of the transported body.

  Further, the transported object supply cassette 41 may abolish the raising / lowering of each tray 41 c by using the lift transport unit 45. Furthermore, the tray 41c may be a roller system instead of the floating system.

It is a perspective view of the principal part of the levitation conveyance apparatus of this invention. (A) is a top view of the base part of the levitation conveyance apparatus of this invention, (B) is a side view of the base part of the levitation conveyance apparatus of this invention. (A) is a side view of the nozzle member of the levitation conveyance apparatus of the present invention, (B) is a cross-sectional view of the nozzle member of the levitation conveyance apparatus of the present invention, and (C) is a plan view of the nozzle member of the levitation conveyance apparatus of the present invention. It is. It is a perspective view of a solenoid valve of a common line system. It is a perspective view of a supply pipe holding bracket. It is a bottom view of the principal part of the levitation conveyance apparatus of this invention. It is sectional drawing of the principal part of the levitation conveyance apparatus of this invention. It is sectional drawing of the principal part which shows the modification of the levitation conveyance apparatus of this invention. It is a perspective view of the principal part of the top view of the conveyance unit or control unit which arranged the levitation conveyance apparatus vertically and horizontally. It is a side view of the levitating conveyance apparatus of this invention. It is a top view of the levitation conveyance device of the present invention. It is a perspective view of the levitation conveyance device of the present invention. 2A and 2B show a transported object supply cassette according to the present invention, in which FIG. 1A is a perspective view of the transported object supply cassette, and FIG. It is a top view of the levitation conveyance system using the levitation conveyance apparatus of the present invention. (A) is sectional drawing of the principal part of the conventional levitation conveyance apparatus, (B) is a top view of the principal part of the conventional levitation conveyance apparatus. (A) is explanatory drawing of the unit arrangement example of the conventional levitation conveyance apparatus, (B) is sectional drawing of the principal part of the conventional levitation conveyance apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Levitation conveyance apparatus 12 ... Supply pipe 20 ... Conveyance part 21 ... Base part 22 ... Nozzle member 22d ... Nozzle 41 ... Conveyed object supply cassette 42 ... Processing stage 43 ... Lower stage conveyance unit 44 ... Upper stage conveyance unit 45 ... Lift conveyance unit

Claims (3)

Lower conveyance units arranged adjacent to each other in the same plane so as to convey a plate-like object to be conveyed in a predetermined direction with the pressure gas jetted from the nozzle tips formed on the plurality of arranged nozzle members. And the same plane above the lower conveyance unit so as to convey the plate-shaped object to be conveyed in a predetermined direction while being floated by the pressure gas ejected from each tip of the nozzle formed on the plurality of nozzle members arranged A plurality of upper transport units arranged adjacent to each other, and the lower transport unit that lifts and lowers the plate-shaped transported body by the pressure gas ejected from the respective tips of the nozzles formed on the plurality of nozzle members. And a lift transport unit that delivers a transported object to and from the upper unit. The plurality of lower transport units are arranged adjacent to each other in a bent or branched state, and the plurality of upper transport units are disposed to face each other above at least a part of the lower transport unit. The levitation conveyance apparatus described. The levitation conveyance apparatus according to claim 1 or 2, wherein the ejection direction of the nozzle is variably controlled.

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