r P43240 0 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（丨） [技術領域] 本發明係有關用於高壓電源' τ V受像機、C R T顯 示器等之高電壓電路之高壓用電阻器。 [習知技術] 習知，高壓用電阻器係在氧化鋁等絕緣性基板形成複 數之端子電極，並在這些端子電極間形成以印刷、燒成所 形成之電阻體膜。其次，爲獲得所欲之電阻値，將以噴砂 (sand blast)法或雷射微調（laser trimming)法除去在電阻體 膜所形成之電阻値調整部的一部份，並調整電阻値。 噴砂法係以高壓力吹著氧化鋁粉而除去電阻體膜的一 部份之方法，可形成寬度較大之除去溝。習知之雷射微調 法係一邊測定電阻値，一邊將雷射光線照射於電阻體膜而 除去電阻體膜的一部份之方法，在獲得所欲之電阻値後結 束除去工程。依此雷射微調所形成之除去溝的寬度爲 0.05〜0.3mm，在形成複數之除去溝之場合，除去溝的長度 係彼此互異。 [發明欲解決之課題] 此種高壓用電阻器因係用於數K V-數十K V之高電 壓，因此，加於電阻値調整部之電位差(電壓)亦爲數百 數KV之高値，施於電阻値調整部之除去工程，必須具有 耐高電壓之高絕緣性。因此，在此種高壓用電阻器可形成 寬度較大之除去溝，而且大部份係使用可獲得咼絕緣性之 3 本紙張尺度適用中國固家標準（CNS)A4規格（2】0 X 297公釐） I-------I---^ ϋ I--—訂----I I---線 <請先閱讀背面之注意事項再填寫本頁) B4324 0 0 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（y) 噴砂法而進行除去工程。但，由於噴砂法其除去工程時間 較長’且於除去工程後必須有洗淨作業等，因此，導致製 造成本提高’及無法以高精確度來調整電阻値之問題。 另一方面’習知之雷射微調法，雖可使除去工程之時 間縮短’亦可高精確度地調整電阻値，但以雷射微調法而 調整電阻値之習知高魅用電阻器，由於除去溝之寬度較窄 ’導致無法獲得高絕緣性之問題。即，藉由習知之雷射微 調法形成1個除去溝之場合，於實際使用時施加高電壓之 狀態，會有在除去溝流出漏電流，電阻値大幅降低，而造 成特性不良之問題。又，在形成複數之除去溝之場合，亦 如圖3所示，由於除去溝13之長度不同，在長度較長的除 去溝之終點部份(圖3之A部份)因高電壓集中，在此部份 流出漏電流而造成特性不良。又，在圖3中，11爲基板， 12爲電阻體膜之電阻値調整部，13爲除去溝。 此處’本發明之目的，係提供藉由雷射微調法，而可 以短時間進行高精確度之電阻値調整，並可獲得在電阻値 調整部之高絕緣性的高壓用電阻器及其電阻値調整方法。 [解決課題之手段] 爲達成上述目的，申請專利範圍第1項之高壓用電阻 器，其特徵係：具有基板及在該基板所形成之電阻體膜， 自基板上之電阻體膜非形成部至電阻體膜，藉由雷射微調 所形成之複數之直線狀的除去溝係平行，並且使位於電阻 體膜內之一端定位於與除去溝垂直方向之同一線上。 4 本張尺度適用中函國家標準(CNS)A4規格（2】0 x 297公釐) ' " ------------裝，------—訂-------- (請先閱讀背面之注意事項典填寫本頁〕 靨4324〇 〇 A7 _____ B7 五、發明說明（今） 申請專利範圍第2項之高壓用電阻器之電阻値調整方 法，具有基板及在該基板所形成之電阻體膜，其特徵係： 自基板上之電阻體膜非形成部至電阻體膜，藉由雷射微調 ’根據由初期電阻値所算出之除去長度，而以同一長度形 成複數之除去溝。 依上述之構成，藉由雷射微調所形成之除去溝係使各 端分別與電阻體膜內之除去溝垂直方向之同一線上，形成 複數之直線狀1在特定之除去溝施加之高電壓不會集中， 並可降低施加於各除去溝之電壓，及獲得在電阻値調整部 之高絕緣性。除去溝之數量可依施加於電阻値調整部之電 壓而定。即，施加於電阻値調整部之電壓若越高，則形成 越多之除去溝。即，在施加高電壓之高壓用電阻器，亦可 藉由可於短時間且高精確度地調整電阻値之雷射微調法， 進行耐高壓之電阻値調整。 [發明之實施形態] 以下，以圖1及圖2說明本發明之一實施型態之高壓 用電阻器。圖1係高壓用電阻器之平面圖，圖2係電阻値 調整部之部份放大平面圖。 本實施型態之高壓用電阻器，具有由氧化鋁等之陶瓷 所形成之矩形絕緣性基板1。於基板1之兩端部，將Ag系 導體漿加以印刷、燒成而形成端子電極2，在端子電極2 間*印刷、燒成以氧化釕爲主體之電阻體漿而形成電阻體 膜3，於電阻體膜3之形成領域被覆玻璃塗層4以覆蓋電 5 (請先閱讀背面之注意事項再填寫本頁) --------訂---------錄 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國®家標準（CNS)A4規格（210 X 297公釐) P4 32 4 〇 〇 A7 _____ B7 五、發明說明（ 阻體膜3 ’在端子電極2上焊接引線端子5而固定。又， 玻璃塗層4係依需要所形成，於不形成之場合亦可。又， 通常被覆外裝樹脂（圖示省略)以覆蓋基板1全體。其次， 此高壓用電阻器係以可於短時間且高精確度之電阻値調整 之雷射微調’而調整其電阻値。 電阻體膜3係由寬度較窄之蛇行狀部份及略矩形之較 大面積的電阻値調整部所構成。在電阻値調整部3a，用以 調整電阻値’藉由雷射微調以直線狀除去電阻體膜3，形 成複數(本實施型態爲4個)之除去溝7。各除去溝7係自坡 璃塗層4到達基板1之基部所形成。 各除去溝7係與基板1之短邊平行且一端定位於電阻 體膜3之非形成部，兩端分別自基板1之長邊於同一位置 形成同一之長度。即’定位於各除去溝7之電阻體膜3之 一端，係定位於與除去溝7垂直之同一線上。 於此構成，以雷射微調所形成之除去溝，係使每一端 形成於電阻體膜內之同一位置，而形成複數之直線狀，由 於在特定之除去溝高電壓不會集中增加，且施加於各除去 溝之電壓降低，因此可獲得在電阻値調整部之高絕緣性。 以本實施型態之高壓用電阻器之雷射微調的電阻値調 整方法係如下所述而進行。首先，使電阻値測定用之探針 與端子電極2接觸，測定全體之電阻値。其次，若由設定 後之電阻値設定幾個除去數及除去長度，則算出是否可獲 得所欲之電阻値。此時，除去數係依設定施加於電阻値調 整部之電壓及雷射微調裝置之除去寬度，事先設定其最小 6 本紙張尺度適用中國國家標準（CNS)A4規格（2〗0 X 297公釐） (請先閱讀背面之注t事項再填寫本頁) i 教--------訂----------续 經濟部智慧財產局員工消費合作社印製 Γ ΙΤ4 32 4 0 〇 Α7 ________ Β7 五、發明說明（<) 之數（兩個以上）。其次，以所算出之除去數及除去長度， 將電阻體膜3雷射微調爲直線狀，電阻體膜3形成同—長 度之複數之除去溝7。雷射微調之起點係分別定位於由基 板1之一側之長邊同一位置之電阻體膜3之未形成部份， 而其終點則定位於電阻體膜3內。又，除去溝間之間距係 以高壓用電阻器之種類別事先設定。 如此，於本實施型態，其並非如習知邊測定電阻値邊 進行微調’於電阻値至所定値時結束微調之方法，而係於 開始進行微調之前測定其初期電阻値，根據該初期電阻値 決定除去數及除去長度而進行雷射微調。 又，高壓用電阻器之構成並未限於上述實施型態，亦 可爲例如形成3個以上之端子電極，或加於上述實施型態 之電阻値調整部，在電阻體膜之一部份形成梯子狀之短軸 ，切斷該短軸，而粗調整電阻値之構成。 [發明之效果] 如以上說明，依本發明之高壓用電阻器，藉由雷射微 調所形成之除去溝係使各端分別與電阻體膜內之除去溝垂 直方向之同一線上，形成複數之直線狀，在特定之除去溝 施加之高電壓不會集中，並可降低施加於各除去溝之電壓 ，及獲得在電阻値調整部έ高絕緣性。 又，依本發明之高壓用電阻器之電阻値調整方法，可 藉由可於短時間且高精確度地調整電阻値之雷射微調法， 進行耐高壓之電阻値調整。 7 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） <請先閲讀背面之注意事項再填寫本頁) 氣--------訂·---I----结 經濟部智慧財產局炅工消費合作杜印製 Γ 14 32 4 ο Ο Α7 五、發明說明（（） [圖式之簡單說明] 圖1係本發明之一實施型態之高壓用電阻器之平面圖 ΰ 圖2係本發明之一實施型態之高壓用電阻器之電阻値 調整部之平面圖。 圖3係習知之高壓用電阻器之電阻値調整部之平面圖 [符號說明] 1 基板 2 端子電極 3 電阻體膜 3a 電阻値調整部 4 玻璃塗層 5 引線端子 7 除去溝 (請先閱讀背面之注意事項再填寫本頁) ^--I-----訂---I-----綠 經濟部智慧財產局員工消費合作杜印製 本紙張尺度適用中圉國家標準（CNS)A4規格（2〗0 X 297公釐）r P43240 0 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the Invention (丨) [Technical Field] The present invention relates to high-voltage circuits used in high-voltage circuits such as high-voltage power supplies' τ V receivers, CRT displays, etc. Resistor. [Known Technology] Conventionally, a high-voltage resistor is formed by forming a plurality of terminal electrodes on an insulating substrate such as alumina, and forming a resistor film formed by printing and firing between these terminal electrodes. Secondly, in order to obtain a desired resistance 値, a part of the resistance 値 adjusting portion formed on the resistor body film is removed by sand blasting or laser trimming, and the resistance 调整 is adjusted. The sand blasting method is a method in which a part of the resistor film is removed by blowing alumina powder under high pressure, and a removal groove having a large width can be formed. The conventional laser trimming method is a method of measuring a resistor 値 while irradiating laser light to the resistor body film to remove a part of the resistor body film. After the desired resistor 値 is obtained, the removal process is completed. According to the laser trimming, the width of the removal grooves is 0.05 to 0.3 mm. When plural removal grooves are formed, the lengths of the removal grooves are different from each other. [Problems to be Solved by the Invention] Since this type of high-voltage resistor is used for high voltages of several KV to several tens of KV, the potential difference (voltage) applied to the resistance adjustment section is also as high as several hundreds of KV. The removal process applied to the resistance / adjustment part must have high insulation resistance against high voltage. Therefore, in this kind of high-voltage resistors, a wide width can be formed, and most of them can be used to obtain 咼 insulation. This paper size is applicable to the Chinese solid standard (CNS) A4 specification (2) 0 X 297 (Mm) I ------- I --- ^ ϋ I --- order ---- I I --- line < Please read the notes on the back before filling this page) B4324 0 0 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of Invention (y) Sand blasting method for removal. However, the sand blasting method has a long removal time and requires a cleaning operation after the removal process. Therefore, the manufacturing cost is increased and the resistance 无法 cannot be adjusted with high accuracy. On the other hand, although the conventional laser trimming method can shorten the time for removing the project, it is also possible to adjust the resistance 高 with high accuracy, but the conventional high-performance resistor with the laser trimming method to adjust the resistance 由于The narrow width of the removal grooves causes a problem that high insulation cannot be obtained. That is, in the case where one trench is formed by the conventional laser trimming method, when a high voltage is applied in actual use, there is a problem that the leakage current flowing out of the trench is removed, the resistance 値 is greatly reduced, and the characteristics are not good. In the case where a plurality of removal grooves are formed, as shown in FIG. 3, because the length of the removal grooves 13 is different, the end portion (part A in FIG. 3) of the longer removal grooves is concentrated due to high voltage. Leakage current flows in this part and causes poor characteristics. In addition, in FIG. 3, 11 is a substrate, 12 is a resistance adjustment section of the resistor film, and 13 is a groove removal. Here, the purpose of the present invention is to provide a high-precision resistor and its resistance that can achieve high-accuracy resistance / adjustment in a short time by laser trimming, and obtain high insulation in the resistance / adjustment section.値 Adjustment method. [Means for Solving the Problem] In order to achieve the above-mentioned object, the high-voltage resistor for patent application No. 1 is characterized by having a substrate and a resistor body film formed on the substrate, and a non-forming portion of the resistor body film on the substrate. To the resistor body film, a plurality of linear removal grooves formed by laser trimming are parallel, and one end located in the resistor body film is positioned on the same line as the removal groove vertical direction. 4 This standard is applicable to the China National Standard (CNS) A4 specification (2) 0 x 297 mm) '" ------ (Please read the note on the back to fill in this page first) 靥 4324〇〇A7 _____ B7 V. Explanation of the invention (today) The method of adjusting the resistance and resistance of the high-voltage resistor in the scope of the patent application No. 2 A substrate and a resistor body film formed on the substrate are characterized in that: from the non-formation part of the resistor body film to the resistor body film on the substrate, the laser trimming is performed based on the removal length calculated from the initial resistance 値, and A plurality of removal grooves are formed with the same length. According to the above-mentioned structure, the removal grooves formed by laser trimming are such that each end is on the same line as the removal grooves in the resistor film in the vertical direction, forming a plurality of straight lines 1 The high voltage applied to a specific removal groove will not be concentrated, and the voltage applied to each removal groove can be reduced, and high insulation properties can be obtained in the resistance adjustment section. The number of removal grooves can be determined by the voltage applied to the resistance adjustment section. That is, the higher the voltage applied to the resistance / adjustment section, the Many grooves can be removed. That is, high-voltage resistors can be adjusted with a laser trimming method that can adjust the resistance 短 in a short time and with high accuracy. Embodiment] Hereinafter, a high-voltage resistor according to an embodiment of the present invention will be described with reference to Figs. 1 and 2. Fig. 1 is a plan view of the high-voltage resistor, and Fig. 2 is an enlarged plan view of a part of the resistance 値 adjusting section. A type of high-voltage resistor has a rectangular insulating substrate 1 formed of ceramic such as alumina. Ag-based conductor paste is printed and fired on both ends of the substrate 1 to form a terminal electrode 2. Between electrodes 2 * Printing and firing a resistor body paste with ruthenium oxide as the main body to form a resistor body film 3, covering the area where the resistor body film 3 is formed with a glass coating 4 to cover the electricity 5 (Please read the precautions on the back before (Fill in this page) -------- Order --------- Recorded by the Intellectual Property Bureau of the Ministry of Economy, Employees' Cooperatives. This paper is printed in accordance with China® Standard (CNS) A4 (210 X 297) Mm) P4 32 4 〇〇A7 _____ B7 V. Description of the invention (resistance The film 3 'is fixed by welding the lead terminal 5 to the terminal electrode 2. The glass coating layer 4 is formed as required, and may be formed when it is not formed. In addition, an external resin (not shown) is usually covered to cover the substrate. 1. The whole. Secondly, this high-voltage resistor is adjusted with a laser trimming that can adjust the resistance 値 in a short time and with high accuracy 而 to adjust its resistance 値. The resistor body film 3 is composed of a narrow serpentine portion and It is composed of a relatively rectangular and large-area resistor 値 adjusting section. The resistor 値 adjusting section 3a is used to adjust the resistor 値 ′, and the resistor body film 3 is linearly removed by laser trimming to form a complex number (in this embodiment, 4个 的。 Remove the groove 7. Each of the removal grooves 7 is formed from the glass coating layer 4 to the base of the substrate 1. Each of the removal grooves 7 is parallel to the short side of the substrate 1 and one end is positioned at the non-formed portion of the resistor film 3, and both ends are formed at the same position from the long side of the substrate 1 at the same position. That is, it is positioned at one end of the resistor body film 3 of each removal groove 7, and is positioned on the same line perpendicular to the removal groove 7. In this structure, the removal groove formed by laser trimming is such that each end is formed at the same position in the resistor body film to form a plurality of straight lines. Since the high voltage is not concentratedly increased in a specific removal groove, and applied Since the voltage at each of the removal grooves is reduced, high insulation properties can be obtained in the resistance adjustment section. The method of adjusting the resistance of the laser trimming of the high-voltage resistor of the present embodiment is performed as follows. First, a probe for measuring resistance 値 is brought into contact with the terminal electrode 2 to measure the resistance 全体 as a whole. Secondly, if the number of removals and the removal length are set from the set resistance 値, it is calculated whether the desired resistance 可 can be obtained. At this time, the removal number is set according to the voltage applied to the resistance and adjustment unit and the removal width of the laser trimming device, and the minimum 6 is set in advance. The paper size applies the Chinese National Standard (CNS) A4 specification (2) 0 X 297 mm. ) (Please read the note t on the back before filling out this page) i teach -------- order ------------ printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Γ ΙΤ4 32 4 0 〇Α7 ________ Β7 5. The number of invention descriptions (& more than two). Next, based on the calculated removal number and removal length, the resistor film 3 is laser-trimmed into a straight line, and the resistor film 3 forms a plurality of removal grooves 7 of the same length. The starting points of the laser trimming are respectively located on the unformed portion of the resistor body film 3 at the same position from the long side of one side of the substrate 1, and the end points thereof are located in the resistor body film 3. The distance between the grooves is set in advance by the type of the high-voltage resistor. As such, in this embodiment, it is not a conventional method to fine-tune the resistance 値 while measuring the resistance 结束, and the trimming is terminated when the resistance 値 reaches a predetermined value. Instead, the initial resistance 测定 is measured before the fine-tuning starts.値 Decide on the number of removals and length to perform laser trimming. In addition, the configuration of the high-voltage resistor is not limited to the above-mentioned embodiment. For example, three or more terminal electrodes may be formed, or the resistor 値 adjusting section added to the above-mentioned embodiment may be formed on a part of the resistor film. The ladder-shaped minor axis cuts the minor axis and coarsely adjusts the structure of the resistor 値. [Effects of the Invention] As described above, according to the high-voltage resistor of the present invention, the removal grooves formed by laser trimming make each end on the same line as the removal grooves in the resistor film in the vertical direction, forming a plurality of Straight line, high voltage applied to specific removal grooves will not be concentrated, and the voltage applied to each removal groove can be reduced, and high insulation performance can be obtained in the resistance adjustment section. In addition, according to the method of adjusting the resistance of the high-voltage resistor of the present invention, the resistance of the high voltage can be adjusted by the laser trimming method that can adjust the resistance of the high voltage in a short time and with high accuracy. 7 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) < Please read the precautions on the back before filling this page) Gas -------- Order · --- I- --- Industrial and consumer cooperation with the Intellectual Property Bureau of the Ministry of Economic Affairs, printed by Γ 14 32 4 ο 〇 Α7 V. Description of the invention (() [Simplified description of the drawing] Figure 1 is a high-voltage application of one embodiment of the present invention. Plane view of the resistorΰ Figure 2 is a plan view of the resistance and adjustment section of a high-voltage resistor according to an embodiment of the present invention. Figure 3 is a plan view of the resistance and adjustment section of a conventional high-voltage resistor. 2 Terminal electrode 3 Resistor film 3a Resistor adjustment unit 4 Glass coating 5 Lead terminal 7 Remove the groove (Please read the precautions on the back before filling this page) ^-I ----- Order --- I- ---- Consumption cooperation between employees of the Intellectual Property Bureau of the Ministry of Green Economy Du printed paper sizes are applicable to the China National Standard (CNS) A4 specification (2〗 0 X 297 mm)