TW429555B - Method for making poly-spacer word line in the high density memory cell - Google Patents

Method for making poly-spacer word line in the high density memory cell

Info

Publication number
TW429555B
TW429555B TW88119814A TW88119814A TW429555B TW 429555 B TW429555 B TW 429555B TW 88119814 A TW88119814 A TW 88119814A TW 88119814 A TW88119814 A TW 88119814A TW 429555 B TW429555 B TW 429555B
Authority
TW
Taiwan
Prior art keywords
polysilicon layer
memory cell
word line
high density
density memory
Prior art date
Application number
TW88119814A
Other languages
English (en)
Inventor
Shiou-Han Liau
Yau-Feng Luo
Bo-Lung Juang
Jia-Ren Chen
Yan-Hung Lai
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW88119814A priority Critical patent/TW429555B/zh
Application granted granted Critical
Publication of TW429555B publication Critical patent/TW429555B/zh

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  • Semiconductor Memories (AREA)
TW88119814A 1999-11-10 1999-11-10 Method for making poly-spacer word line in the high density memory cell TW429555B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW88119814A TW429555B (en) 1999-11-10 1999-11-10 Method for making poly-spacer word line in the high density memory cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW88119814A TW429555B (en) 1999-11-10 1999-11-10 Method for making poly-spacer word line in the high density memory cell

Publications (1)

Publication Number Publication Date
TW429555B true TW429555B (en) 2001-04-11

Family

ID=21643022

Family Applications (1)

Application Number Title Priority Date Filing Date
TW88119814A TW429555B (en) 1999-11-10 1999-11-10 Method for making poly-spacer word line in the high density memory cell

Country Status (1)

Country Link
TW (1) TW429555B (zh)

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Legal Events

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