TW428095B - IC testing apparatus - Google Patents

IC testing apparatus

Info

Publication number
TW428095B
TW428095B TW088103095A TW88103095A TW428095B TW 428095 B TW428095 B TW 428095B TW 088103095 A TW088103095 A TW 088103095A TW 88103095 A TW88103095 A TW 88103095A TW 428095 B TW428095 B TW 428095B
Authority
TW
Taiwan
Prior art keywords
low
thermostat tank
testing apparatus
temperature thermostat
temperature
Prior art date
Application number
TW088103095A
Other languages
Chinese (zh)
Inventor
Tsuyoshi Yamashita
Akihiko Ito
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Application granted granted Critical
Publication of TW428095B publication Critical patent/TW428095B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

This invention relates to an IC testing apparatus that has a low-temperature and thermostat tank. For the part of low-temperature thermostat tank that has dew formation, the sealing cap is covered. Or, for the IC testing apparatus that has low-temperature thermostat tank and high-temperature thermostat tank, high-temperature thermostat tank is distributed around the circumference face of low-temperature thermostat tank so as to prevent dew formation on the circumference face of low-temperature thermostat tank.
TW088103095A 1998-03-02 1999-03-01 IC testing apparatus TW428095B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10049523A JPH11248787A (en) 1998-03-02 1998-03-02 Ic testing apparatus

Publications (1)

Publication Number Publication Date
TW428095B true TW428095B (en) 2001-04-01

Family

ID=12833509

Family Applications (1)

Application Number Title Priority Date Filing Date
TW088103095A TW428095B (en) 1998-03-02 1999-03-01 IC testing apparatus

Country Status (5)

Country Link
JP (1) JPH11248787A (en)
KR (1) KR20010020333A (en)
DE (1) DE19980524T1 (en)
TW (1) TW428095B (en)
WO (1) WO1999045403A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5348731B2 (en) * 2007-12-26 2013-11-20 ホシザキ電機株式会社 Refrigerator unit
KR102179036B1 (en) * 2019-07-02 2020-11-16 세메스 주식회사 Chamber wall structure of test handler

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2915969B2 (en) * 1990-07-06 1999-07-05 株式会社アドバンテスト Constant temperature bath for IC testing
JP2540703Y2 (en) * 1990-10-19 1997-07-09 株式会社アドバンテスト IC test equipment
JP2561115Y2 (en) * 1991-09-13 1998-01-28 安藤電気株式会社 Driving mechanism of fan in low temperature chamber

Also Published As

Publication number Publication date
JPH11248787A (en) 1999-09-17
WO1999045403A1 (en) 1999-09-10
DE19980524T1 (en) 2000-05-25
KR20010020333A (en) 2001-03-15

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Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees