41597 A7 B7 經满部中央標隼局貝工消费合作社印製 五、發明説明（ 1 ) 1 1 發明所匾之技術領域 1 1 本 發 明 係 闞 於 —* 種 輋 合 於 對 具 有 微 细 孔 之 被 電 鍍 物 實 1 1 行 電 鍍 之 新 穎 電 鑲 方 法 〇 本 發 明 係 闞 於 對 周 知 的 電 箱 浴 之 1 I 請 1 1 振 動 攪 拌 裝 置 通 氣 及 被 鍍 物 之 摄 動 裝 置 之 外 1 新 併 用 先 W I I 讀 1 對 被 霣 鍍 物 給 予 10 60Hz振動 之 装 置 的 新 _ 連 續 電 鍍 方 法 背' 面 1 I 之 1 〇 本 發 明 之 m 鍍 方 法 為 可 遘 用 於 電 解 電 鍍 t η 解 電 鍍 與 注 意· 1 無 電 解 霣 鍍 併 用 >λ 及 無 η 解 霣 鍍 之 任 何 方 法 者 0 項 再 1 填 1 Ά. 前 Μ. 寫 本 策 I 印 刷 霣 路 基 板 為 在 收 音 m 電 視 檐 及 電 臞 等 之 所 有 頁 、«_<·· 1 電 子 檐 器 中 用 Μ 插 裝 各 種 元 件 並 互 栢 布 嬢 之 基 板 0 在 該 1 m 對 基 板 表 面 安 裝 構 件 並 連 接 之 表 面 插 裝 方 式 中 近 年 來 1 一 直 進 行 著 多 插 m 化 及 小 間 距 化 而 技 術 是 不 停 地 進 步 » 訂 | 從60支插W /1 .0 證1 間距或400支插躑/0 . 3 9 B 間 距 的 水 準 來 1 | 到 400 支插 ISI /0 · 25 0 . 3 m m 間 距 之 水 準 然 後 再 進 到 下 —k 1 1 I 個 新 的 水 準 0 - 1 丄 隨 著 該 技 術 的 進 步 有 小 型 化 及 高 性 能 化 的 要 求 曰 益 * i 增 加 叠 層 基 板 中 之 不 同 層 間 之 布 線 所 必 要 的 微 细 貧 穿 孔 1 1 及 官 孔 等 之 口 徑 為 愈 來 愈 小 最 近 是 從 〇. 2 η a >x 下 進 步 至 1 0 . 0 5 η 以 下 再 進 到 0 . 03 9 a Μ 下 的 狀 態 〇 1 瑄 種 微 细 孔 不 容 易 除 去 其 內 部 的 空 氣 塵 埃 或 處 理 液 1 I 等 因 此 有 空 氣 或 臛 埃 存 在 的 部 分 無 法 進 行 電 嫌 而 成 為 1 1 | 發 生 導 η 不 良 的 原 因 或 電 鍍 液 進 入 微 细 孔 内 的 置 不 夠 t 1 1 在 孔 之 内 外 之 窜 鍍 膜 厚 度 不 同 或 在 孔 内 發 生 有 未 電 鍍 的 1 1 部 分 釀 然 能 導 電 但 電 阻 值 憾 高 等 之 缺 點 發 生 0 1 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210x297公釐） 】 3 9638 經濟部中央標率局員工消費合作社印製 415977 A7 B7 五、發明説明\2 ) 另一方面，本發明人在以鲔開發逢的日本専利申講特 公平6-7 1 544 »公轘記載之専利技術，包含有將霣嫌浴權 中的振動板Μ振幅8〜20·· »搋ft數200〜600次/分鐘振動 來攫拌霣鍍浴而實行電鍍的技術。尤其是在申請專利範· 第3項中提鱅併用通氣輿被«理物之握動装置。本發明人 »為將觭述之日本専利申臃特公平6-71544 »之技衡靡用 於具有這種微緬孔之物品之對擻细孔之電鍍•即可殲免先 鳙霣鍍遢程中不良部分之發生•而實旛該方法的結果發現 不良寒*然有滅少，然而《未Η達充分滿意的地步。 又》在日本«利申請特開昭62 -32690號中•有提議擬 動被電鍍物之同時使其振動之狀戆下實行電鍍的方法。然 而•該振_僳只是對振動器送空氣而使其振動而已•羼於 怎麽樣的振動即完全沒有交代*而且該技術完全未實用化 來判蹶，很明顯是完全沒有實效。 另一方面，本發明者為*種種地改變吹氣及擾動的各 條件來重禊實行各種组合及條件下之試《，但無法得到滿 意的结果。最後的手段tt是賻振動攪拌中給予水癢液的振 動手段轼用於被電鍍物的结果，驚奇地發現可«著地滅低 不良率•而终於完成本«明。 磨明欲«決，纓黷 本«明之目的·在於»供一種罨饋法•其為•在印» 鬣路基板，1C基板零之撇细布鐮中不可缺的0.2·» Μ下， 成0.1··以下，成it 一步在0.05uJW下，成更進一步0.03 以下之口檯之》细孔確實且均匀地實行電鍍，鶫以消除 n ^^1 ^^1 - - ! - - ^^1 I..... · 1 m - -I-1'· ---- 1 ~» 、1' , - , (請先閲讀"面之注_意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 2 39638 415977 經濟部中央標準局員工消費合作社印製 A7 B7五、發明説明（3 ) 布繡不完善所致不良品之發生者。 用以解決ϋ匾之手》 本發明為* Η於將被電鍍物在從前處雄步鼸至竃鏤步 鼸為止，依次處理的霣鍍方法為·賻使 (Α>對處理浴的摄動攪拌裝置， (Β)厨處理浴的通氣裝1， (C) 使«吊被電鑲«之It植棒握醣之裝置> 以及 (D) «由懸吊被電鍍物的電極棒，使用由反相器 (inverter)_節成為10〜60Hz之振動鵰達來饔生振輟0.5 〜1·0··範·之振動用裝置（中5> 14等）· 在電鍵之前處理步鼸Μ及《鏟步朦之至少涛瀠槽*無電解 «鍍權及/或霣解電鍍槽中_作為其特微之建讀電鍍方法 者。 本9明中之觭逋（Α)對II理浴的振ft攪捽裝置Μ包括 包含振動馬璿之振動發生裝置；使固定於連接該振動發生 装置而在攪拌稽內摄動之搋動棒之一段成多段振動葉片， Μ振幅0.5〜3.0··振動數200〜8 00次/分鏞振動之擬動攪 拌装置；HI振動禺逹控制成苟發生10〜500Hz間之任ft振齡 *較佳為30〜60Hz，更佳為30〜40Hz之任意飫頻振動之反 相罌；K及在振動發生裝置輿舫述摄_攪拌装置之建接部 之振動應力分敝裝置而構成者為佳。 前述對ϋ理浴之澹氣裝置為述無特拥的眼Μ，然而· 要设置可用氣泡充分地攪拌有被電鍍物存在部分之敝氣管 -1 HI - - - Jn -i I m ----,,'- — ^IJ. 、T - . · (請先閱讀背面之注^事項再填寫本頁) 本紙張尺度適用中國國家標準i CNS ) A4規格（210X297公釐） 3 39638 415977 經濟部中央標準局員工消費合作社印製 A7 B7五、發明説明（4 ) 使用對PVC等合成樹膳等設有孔S1*·左右之多數氣孔 之歉氣管畤•因為空氣粒子縵大而無法有效地除去電解热 ，而且產生霣阻不均勻規象*本發明所使用之蠼氣装置振 採用Μ瓷製多孔質管之散氣管來消除前迷之問颶。前述Μ 瓷製多孔質管為》以例如其商品名叫做阏爾達姆之氧化明 霣粒子為脅材之高潘燒成Μ瓷管為宜•而败氣管之氣孔» 係以200〜400微米為宜·氣孔率（對表面積的比率）為30〜 40)(左右為宜。散氣管之外徑通常是50〜100··，S度係按 處理槽之畏度而定 > 但通常是100〜200··左右。設置方法 並無特別的》制•但使用複數支持，賻被爾鐮物夾在散氣 管之閬之狀《[来安裝》各敎氣管閬之閜ffiftMlOO〜200·· 為宜。敗氣管與被電皺物聞之垂直方向之間隔通常是Μ 100〜300*·為宜》 鶼由戆吊被«I鍍«之電棒而給予之癱動係MS繭钃度 10〜100··為宜*而M20〜60··為佳，攝動數係以10〜30 次/分鐘左右為宜。 使前逋罨籩棒摄動之搋動馬達之Hz數為（A)之撕動馬 達之Η z數之5 0〜6 5 X為宜•而其Η z敝為1 0〜6 0 H z，而Μ 2 0 〜35Hz為較佳•振幅為0.5〜該振動舍使被霣鍍糌 蟹動 > 但不會使«理液流動。 本發明之電鎪方法對具有微緬孔之物品，尤其對具有 微细孔之印刷電路基板及1C基板等之具有醒膠表面之叠雇 板·是極有败的爾錶方法。尤其是對微緬孔之孔垤為0.2 下*或0.1··以下*或0.05··Μ下•或0.03·· Μ下的 (請先閱讀背面之注意事項再填寫本頁) 装· 丁 --β 本紙張尺度適用中國國家標準（CNS ) Α4規格（21〇Χ297公釐） 4 39638 經漓部中央標準局員工消費合作社印製 415977 at B7五、發明説明（5 ) 微细孔之印刷«路基板· ic基板，金颺板·塑膠板等之電 «非常有用。再者•本發明之無電解罨鍍/或爾解竃峨之 例，可舉齩鑭，鍍鍊，鍍銀•鍍餳，鍍金，鍍《，《!焊明 等為例。 本璉明之前逋觭處理係意味著在日本«和46年7月25 日由日刊工秦新«社發行之「《鍍技術便*j第117頁〜 第148頁記載之酸洗，說鼸•各被電鏟»之舫處理· Μ及 第655頁〜665頁紀載之涛潔，鍤刻·觸媒化，化學鍍法， 活性化，鋦觸擊竃鍍等射塑謬之前處理；而霪鍍步驟除了 各種電鍵步臟之外•也包含無電解電鑲步驟。 在本發明中（A)> (B)，<C)，（D}之裝置係在連纊霣鍍 方法中至少於主賣步鼸之全部過程中所使用者*然而，在 所有的步驟中使用為佳。 (使用裝置A之優黏} 在電鍍液之電解中•在績極面（被«理體）會發生氫氣 而在液中成為微》氣泡•該氣泡覆釐被處理Η之表面全體 •蝤加爾阻•障低爾蠊的速度*再者翕妨害均勻鍍着性。 然而，如前述用柢鳍振醣使處理液發生流醣時，可顏蕃地 降抵液中之表面灞力•其鱸果·可將被《理鑛表面發生的 大部分氣鱧排出於系统外面。因此•可使電流分布更為均 勻·而且降低爾阻的醐係•坷Μ數倍於以往裝置的畜速得 到更均勻的錶著性。 被電鍵獬之微緬孔為20〜50 Λ米之非常微_尺寸畤* 只靠鲔述之流動則必績加長處理畤間*杏則難Μ達成所期 (請先閱讀背面之注意事項再填寫本頁) 裝1 本紙乐尺度適用中國國家標準（CNS ) Α4规格（21〇Χ；297公釐） 5 39638 415977 A7 B7 經濟部中央標準局貝工消費合作社印紫 五、發明説明 ( 6 ) 1 I 待 之 百 的 0 於 是 f 對 裱 電 鍍 m 給 予 10 〜 30次 / 分 鐘 之 擓 動 1 I 之 闻 時 • 對 被 電 鍍 m 本 身 也 給 予 10 60Hz » 而 Μ 20〜 35Hz 1 1 為 佳 之 振 m t 即 在 極 短 m 間 内 可 使 鹰 理 液 對 微 観 孔 內 之 流 1 I 請 1 I 通 均 勻 化 0 先 閱 [ I 讀 1 本 明 使 用 散 氣 管 的 錶 果 f 使 從 該 散 氣 管 發 生 之 微 细 背· 1 I 而 多 噩 氣 淮 包 _ 被 轚 鍍 m 全 髓 而 上 墀 1 放 出 於 H 理 浴 的 外 之 注 意· I 面 因 此 有 效 地 奪 去 從 被 鬌 鍍 m 所 發 生 的 電 解 熱 而 迅 速 地 項 i 1 1 填 冷 却 被 霣 m 物 闻 畤 可 有 效 地 除 去 從 被 電 鍍 物 之 微 m 孔 所 寫 本 裝 除 去 的 空 氣 及 臞 埃 * 在 對 被 電 鍍 m 不 致 發 生 供 損 或 供 焦 之 頁 1 狀 » 下 可 均 勻 地 霣 績 0 1 併 用 補 逋 A B C D之 各 裝 置 之 结 果 在 處 理 液 尤 1 其 是 在 霉 饋 液 中 被 霣 鍍 曆 與 電 鍍 浴 之 間 所 形 成 之 瀵 界 蹰 訂 非 常 容 易 被 破 壞 參 使 處 理 浴 對 被 電 鍵 物 表 面 之 供 給 植 為 圓 1 I 滑 埴 對 處 理 之 均 勻 化 電 鍍 物 表 面 之 平 滑 化 光 m 之 良 好 1 1 t 有 很 大 的 貢 獻 1 1 印 刷 η 路 基 板 之 建 鑛 霣 鍍 中 之 代 表 性 步 臟 如 下 0 - 1 (以對霪膠之電鍍步_為準） [ ! 〇 淸 m — 水 洗 鼬 m — 水 洗 觸 m 化 水 洗 〇 無 鬣 解 鍍 .1 m 水 洙 疏 酸 洗 -> 〇 m m m 電 鍍 水 洗 (乾燥） 1 在 孩 等 步 驟 中 各 水 洗 步 驟 僳 分 為 兩 槽 來 實 者 居 多 » 1 1 I 商 無 爾 解 竃 鍍 成 解 電 鍍 也 分 為 兩 權 實 行 者 居 多 0 要 簡 單 1 1 地 實 行 癦 鑛 電 鑛 時 > 被 電 m m 鋟 ϋ 一 定 時 間 之 後 予 Μ 拿 起 1 1 來 而 移 動 至 下 一 倾 檷 的 % 统 為 最 籣 單 t 但 資 m 該 糸 銃 畤 * 1 1 需 饔 畏 時 間 處 理 的 * 理 浴 或 需 m 短 時 間 的 H 理 浴 % 只 要 是 1 1 本紙張尺度適用中國國家標準（cns ) A4規格（2iox 297公釐） 6 39638 415977 經滴部中央標隼局員工消費合作社印製 A7 B7五、發明説明（7 ) 其《理權之數量相同的_均成為同檬的«理畤閬。因此需 要畏時閭«理的槽可使成為兩個κ上的槽來加摄處理時間 。又加水洙等需鬟完全除去觭一步之附蕃液時•更操《之 後其水洙效率較佳*因此從疽一貼也可了解到設置複數β 水槽是有意義的》 在該缠鱭爾鍍步_中，本發明之前述（Α>〜（D)之裝置 *至少在上逋附有〇符虢的步驟中使用。然而，再在水洗 步驟Κ外的所有之步驟中使用為佳•而可旌的括，在包括 水洙步驊的所有步鼸中使用更佳。 前述濟潔步朦係可能是所緬說鼸步朦·或說膳加上使 1謬鼸調之步»者。 觭逋酏期步驟Μ往是用《砂成液讎珩磨法，機檐性地 在表面上形成凹凸•但最近一般是用藥液之化學處理來形 成凹凸。例如，用雄酸-络黢灞合液及無機黢、灞鑛之溶 液在鼸謬之表面形成凹凸的步》。 觸钂化步朦供在Mt錮後之裹面上，植設鈀等觸孅曆* 做為無霣解罨鍍之基礙準儋的步»之觸媒附予法中，使用 敏感化-> 澹活化法及特性化—加*法等之方法。前者係膊 塑謬浸漬於通原力強的鐳雛子溶液而在表面配蕃媒，接著 浸漬於具有觸媒麄力之魍雛子癢液•在謳膠表面引起氣化 18原作用（redox)反應來固定觸嫌靥的方法而後者是將繼 隳浸濱於潘合鍚離子輿鈀艟子之漕液内*在表面£蕃隳質 狀之鈀»或舾鎇錯臞化合物，接蓍除去鐳而使鈀活性化的 方法（請參考1992年9月20日大日本_害株式会社發行， (#先閱讀背面之注意事項再填寫本頁) 装. *-β 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） 39638 41597 A7 B7 五、發明説明（8 ) 財團法人日本化畢畲«輯，「一值人的化學·ΙΙ«鍍輿尖 *科技j第92〜97頁）。 在第1匾〜第3·顯示本發明中之前處理槽及電鏟權投 置前述（A)* (B)，（C)* (»)裝置之一具《例。第1圏係平 面_ •第2_係正面_，而第3麵係其§1面_。在第4 _及 第5鼸中顯示該第1·〜第3_之包含有振動馬連4之搋動攪 拌裝置之鄯分。第4·係第2·中鐮Χ-Χ剖面，第5·搡第 3_中鎳Υ~Υ拥面_。 在第1〜3_中，鮪述（Β)之蠼氣裝置係由_支散《(管 12» 12及對該等送入壓钂空氣用之壓鏽空氣入口 10所溝成 〇 在第1〜3·中>握動裝置镍包括攞動用馬達3 ，藉擓 動馬達之動作而播動之攥動用接受框2 · Μ及由_極棒接 受部13固定的離極兼用懸吊具5而被爾鍍物係輿前述險幢 兼蠹吊具5不論電性Μ及物理性均確實連接固定之》 然後•為了使該攥動用接受框2振動*在摄動用接受 框之繡當部位囿定振動馬達14·該振動馬達14之振鎗會使 攤勤用癢受框2振動，並將該振動傳至1C基板等被電鎪物 之狀戆構成。該畤之攝動係10〜60··，而Μ20〜50η為宜 之振幅* Κ10〜30次/分》之比率來鑲慢地攝動者。 在該具黼例中，攝動方向係第1·及第2·之左右方向 •而摄醣用接受柩2之振動為0.5〜1.0··振幢之振動•該 時所使用之振動馬達保鞴反相器來發生10〜60Hz，較佳為 20〜35 Hz的振動。 (讀先閲讀背面之注意事項再填寫本頁) 裝· 經漪部中央標準局員工消費合作社印^ 本紙張尺度適用中國國家標準（CNS ) A4規格（2丨OX297公釐） 8 39638 經滴部中央標準局員工消費合作社印" 415977 A7 B7 五、發明説明（9 ) 第4> 5_係_示射《鍍浴的振醣攪拌装置的一例*然 而*振動攪拌裝置本身並非受限於該例•可使用本發明人 所提出申_之日本專利申請特開平6-33 0 395號*特閭平 6 - 3 1 2 1 2 4 »，特 Μ 平 6 - 3 3 0 3 9 5 驢 * 特開平 8 - 1 7 3 7 8 5 號，特 闋平9-40482號公報及特公平6-71 544臚公報£載之振動攪 拌裝«者。 舫述振動應力分敎裝置·例如在振動發生裝置輿振動 櫸之達接部 > 設在振動箨周_之嫌腰霣瓖，其長度比振動 幛之亶檯更摄·通常為振動1>直涇之3〜8倍。其直徑為比 振動_之直徑大1.3〜3.0倍*而以大1.5〜2.5倍大為宜。 從別的見解來講•振動_之樓癱10〜16··之圓形棒時•嫌 _質之壁厚為10〜15··為宜•而當振動棒（圓形棒）之直擭 為20〜25··時*镰謬質瓖之壁厚镞Μ20〜30··為宜。 未使用懞Bff瓖的情形中，振動應力集中在振動傳達 構件與振ft櫸之接合部分附近，有振動棒容易折睛的冊題 點*將橡謬質環插裝於該部位而可完全消除該問匾。 前述振動繁片之材質•以使用薄金靥·有彌性的合成 樹B6 *橡腰等為宜。其厚度可為至少使葉片先蟠部分由於 振動馬達之上下振動而里液動現象的厚度•鞴Μ對条統旛 加振動而使發生流動。可使用之金鼷振動_片材質鈦•鋁 *銅，網鐵，不锈_ ·及該等之合金。可使用之合成樹脂 振動葉片為聚磧酸醱，氯乙烯樹瞄，聚丙烯等。 為了要傳達振動能量而提昇振動之效果，厚度並無特 別限刺，但一般而言•使用金臛葉Η時其厚度為0.2〜2*« I : I---1 -I - ' - - 1·1---- «9. 、τ L . (請先閱讀背面之注意事項4填寫本頁) 本紙張尺度適用中國國家標準（CNS } A4規格（210X297公釐） 9 39638 415977 B7 經濟部中央標準局貝工消費合作社印衆 五、發明説明 ( 10 ) 1 I 尤 其 是 不 綉 m 畤 為 0 . 2〜1 1« * 而 例 如 Μ 0 . 5· 羼 之 度 為 1 1 宜 0 1 1 使 用 具 有 m 性 的 合 成 樹 m f 檐 腰 等 作 為 摄 動 絮 Η 之 材 1 I 請 1 1 質 時 其 厚 度 m 常 是 0 . 5 〜1 0 1 |尤其是Κ 1 ·**χ» 5ι 為佳 0 先 閱 I I 讀， 1 1 振 動 椴 之 振 « 僳 2- ~ 30·· •而W 5 10 1 1 Ά 宜 〇 背· iEj 1 I 之 1 振 動 葉 片 為 可 以 — 段 成 多 段 狀 鼸 安 裝 於 振 動 输 ο m 合 注 素， 1 處 理 液 之 深 度 而 可 使 用 複 數 枚 振 動 葉 Η 〇 為 使 用 多 段 而 壜 項 再 1 填 加 段 數 時 可 m 因 為 加 大 攞 動 禺 雄 之 負 稱 而 發 生 振 動 m 度 窍 裝 頁 1 減 少 及 纖 動 馬 逮 發 熱 的 情 形 0 又 振 動 葉 片 可 對 振 動 櫸 全 部 安 装 成 為 垂 直 的 狀 戆 * 1 然 而 Μ 振 動 棒 之 直 角 方 向 為 0度時向（ 〇 或 (-) 之 方 向 1 傾 斜 5〜3 0度 尤K 10〜20度的狀«安装為佳（ 請 參 考 第 4 訂 | 國 及 第 6Η ) 〇 又 搋 動 m 片 固 定 構 件 輿 振 動 蔞 Η 從 振 動 _ 1 I 之 側 面 所 視 » 可 全 艚 圼 傾 斜 及 / 或 曲 的 狀 m 〇 在 彎 曲 的 1 1 1 吠 戆 時 全 霸 而 言 t 應 具 有 5 Λ -30 度. 而以10〜20 度 的 供 1 1 斜 為 尤 佳 0 ί 振 動 藿 Η 镞 由 振 動 綦 Η _ 定 構 伴 ， 從 上 下 兩 面 夾 緊 而 1 1 固 定 在 振 動 棒 來 形 成 振 動 葉 片 部 〇 1 具 臛 而 官 舱 述 振 動 m 片 為 對 振 m m 切 嫌 紋 t 可 用 蠼 1 絲 績 緊 來 囲 定 然 而 如 第 6 所 示 * 使 用 振 動 綦 片 固 定 1 | 構 件 18 » 18從 上 下 夾 緊 振 動 綦 Η 17的 狀 % 來 m 緊 » 用 蠘 嫌 I 1 | 24 * 24來 嫌 緊 該 振 動 葉 Η 固 定 櫞 件 18 18來 固 定 振 動 葉 片 1 1 17為 宜 〇 1 1 使 振 動 X Η 部 傾 斜 及 / 或 * 曲 時 * 多 數 之 搋 動 篥 片 部 1 1 本紙張尺度適用中國國家標準（CMS ) A4規格（2]0X297公釐） j 〇 39638 41597? A7 B7 經滴部中央標準局負工消费合作社印聚 五、發明説明（ 11 ) 1 I 當 中 可 將 下 位 之 1 Λ -2 枚成為向下方傾斜及/或彎曲 » 其 1 1 他 的 葉 片 構 成 為 向 上 傾 斜 / 或 彎 曲 0 如 此 m 成 時 » 可 充 分 ί 1 地 實 行 攪 拌 樓 底 部 之 攪 拌 可 防 止 在 下 部 發 生 積 留 規 象 〇 1 I 又 不 想 m 拌 攪 拌 槽 底 部 時 » 可 卸 下 前 述 向 下 方 彎 曲 的 請 先 8S 1 1 | 振 醣 Μ 板 來 處 理 0 舉 例 來 m 將 沉 m 物 等 不 餐 成 分 稹 留 在 讀-背. 面 I 1 1 下 部 使 其 不 擴 散 的 狀 戆 下 從 下 部 取 出 相 當 方 便 〇 冬 ί' 1 | 播 動 攪 拌 装 置 如 第 9 及 第 10· 中 所 示 可 以 只 設 在 事 項 再 填 寫 本 1 1 處 理 槽 之 一 皤 然 而 如 第 1_及第2匾所示 也 可 JW 設 在 裝 處 理 檐 之 兩 m 來 配 合 大 型 的 榷 〇 又 所 酾 示 之 振 動 攪 拌 装 頁 1 置 係 均 為 上 下 方 向 振 動 据 動 葉 片 之 形 式 者 * 然 而 也 有 如 1 本 申 嫌 人 所 搛 出 申 嫌 之 Β 本 * 利 串 嫌 特 開 平 6- 3 0 4 4 6 1號公 1 報及如第7匾 >第8·所 示 水 平 方 向 為 振 動 的 方 向 將 訂 I 振 動 鷲 片 17附設在處理槽 1 底 部 的 方 法 〇 該 時 » 為 了 要 m 1 1 I 設 置 在 第 8 _ 左 供 之 振 動 馬達27為 中 心 之 左 邊 簠 ft 與 右 邊 1 1 I 重 最 予 Μ 平 衡 起 見 * 以 設 置 可 輿 左 邊 之 里 量 平 衡 的 平 衡 器 - 1 1 26為宜 Q - 1 振 動 棒 可 直 接 與 振 ft 馬 達 邃 接 使 用 但 如 本 發 明 人 之 1 1 曰 本 專 利 甲 請 特 開 平 6 - 30446 1 號 公 银 成 特 開 平 6- 330395H 1 ! 公 報 所 述 也 可 採 用 將 振 豳 馬 達 之 振 動 m 由 振 動 框 而 傳 達 1 至 振 勤 捧 的 形 式 〇 1 1 I 又 t 振 動 葉 片 17輿振動禁 片 固 定 構 件 18 » 18之間介装 1 1 I 集 糸 聚 合 物 薄 m 23 23時 可 大 m 滅 低 振 動 葉 片 之 破 損 率 1 i 而 較 佳 〇 氰 聚 合 物 之 例 有 聚 四 氟 乙 烯 (PTFF) » 四 氟 乙 1 1 /六氟丙烯共聚物（FEP) 四氟乙烯/遢氟烷基乙 烯 基 m 共 1 1 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 1 1 39638 經濟部中央標準局貝工消費合作社印架 415977 A7 B7 五、發明説明（12) 聚物（FPA)*聚氯三氟乙烯（PCTFE)·聚氟亞乙烯基（PVDP) 聚氟乙烯基•乙》/四«乙烯共聚物（FTPE)，乙烯/ «三鎮 乙》共聚物*丙烯/四鎮乙烯共聚物等；但尤其是Μ氣系橡 膠為佳》 * m镇 茲《實豳例來說明本發明•然而•本鼉明並非受其限 Μ。 奮m m ί 如第1〜5_所示·對處理檷安裝（A)振動攪拌裝置· (B)通氣裝置* (C)對被電鍍物之》吊具》予擓動之裝置· 及<D)鞴由»吊具而對被爾鍍物賦予振動之裝置•以下述 之條件來實行前處理及竃鍍«理》 (1)被電酸物： JP度0.5"之340 X 340··之玻鶄環氣之覆钃叠板所 設之微细貢穿孔之直《有下迷之®種： 四、0 . 0 5 (2)處理槽之£置 脫_槽（0>~>热水洙權—水洗槽餺槽—水洗槽— 水洗槽—第1觸嫌權（Ο) —第2*嫌榷（0)4水洙楢4水洗 楢->加速謂播（0)4水洗檑>水洗樓4無霣解鍍鑭槽（0) •^無《解鍍嗣樓（0)4水洙權4水洗槽^疏酸槽—碴酸鋦 I ^ϋ. - - - - --- I ^^1 -I— ^^1 ^^1---- f^i 、T i . - . (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS > A4規格（2丨0 X 297公釐） 12 39638 415977 at B7 五、發明説明（13 ) 霣鍍榷（〇)>臃酸钃竃鍍槽（〇) —水洗榷—水洗槽乾嫌 镏，IK理時間均為5分鏟，罨潦密度均為2A/d«2。 對附有（0)標誌之槽安装前述4種（A)〜（D)之裝置。 (3) 振動攪拌裝置： 振醣鱒達：250V X 200V X 3相 振動藿片：有效面積300X 150··者，厚度0.6·· ，共βΗ · α =15度（均為向上） 振動綦片之振_ :1.5·· 振動頻率：40 Hz(用反相器來_節） (4) 通氣装置 Ρ»瓷霣散氣管係使用_支外連為75·· *內徑為50··， 長度為500··氣孔徑約200/i 者。每一支之氣孔率為40X* 空氣量約為40公升/分鐮。 (5) 擬動裝置 由齒輪羼邃成活塞馬達來厲予20次/分鏞•前後摄》 轜度40>«之攝動。 (6) 附設於擬動裝置之振動装置 經漪部中央標準局員工消費合作社印製 (請先閱讀背面之注意事項再填寫本頁) 在擓動用接受框架2之竈當部位固定振動馬達（40 V)14 ，藉由反相器，M30Hz，振幡0.8·»的條件使振動馬達14 振動。 (7) 脫膽浴（樓之内部尺寸： 450X350X650··，寬度X畏 度X高度） 碾酸納 40g/公升 «酸三»! 20g/公升 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） 13 3 9638 415977 A7 B7 經濟部中央標準局貝工消費合作社印製 五、發明説明（Η ) 籯氧化納 界面活化劑 浴醞輿時間 (8) 触刻浴（榷之内部尺寸： 醸酸（s.g · 1·84) 磷酸（s.8.1.74) 路酸舒 浴潘與時間 (9) 第一觴媒浴（補之内部尺 氣化亞錫 壤Μ馥 浴霣與時閏 (10) 第二觴媒浴（榷之内部尺 氣化鈀 塩酸 浴湛與時間 (11) 加速_浴（權之内部尺寸 繚酸 浴1輿時間 (12) 無罨解醣酸鋦霣鍍浴（槽 硪酸銅（CuS04 · 5H20) 5g/公升 1 g /公升 60 t： · 5分鐘 5 0 0 1 /公升 1 0 0 · 1 /公升 30β/公升 65 υ，10分鐘 ^ ：450 X 200 X 65 0 ) l〇g/公升 4 0 1 /公升 室溫，5分鑪 寸：450 X 350 X 650) 0. lg/公升 1鼸1 /公升 室灌· 5分鐘 ：4 50 X 1 80 X 6 5 0 ) 7 5 1 /公升 50t： · 5分鐘 之内部尺寸：450 X 35 0 X 650 450 X 180 X 650 ) 酒石酸鉀 MUNaC4H406· 4H20> 氫氧化納 甲醱（37X) 10g/公升 3 5g/公升 8g/公升 2〇g/公升 (請先鬩讀背面之注意事項再填寫本頁} 本紙張尺度適用中國國家標準（CNS ) A4規格（2!ΟΧ297公釐〉 14 39638 A7 B7 五、發明説明（15 ) 安定繭 少量 pH 12. 5〜13 浴瀣與時間 401 · 10分鐮 (13)碕酸緬電鍍浴（檐之内部尺寸：45〇x 450X 650> 碗酸鋦（C u S 0 4 · 5 ϋ 2 0 ) 疏酸 導電性賦予_ 光潭鬵 浴濡與時間 75g/公升 190“公升 5 0 g /公升 1 /公升 40 t： · 10分》 經濟部中央標準局員工消費合作社印製 以上述之條件實行罨鍍處理，其结果為如表1所示。 比較例1 只設置前述（B)之通氣裝置及前述（C)之攞動裝置•用 資旆例1之各浴對實豳例1之被爾鍍物實行電鍍處理。其结 果如表1所示。 比較....例2 設置前述（B)之通氣裝置•前述（C)之握動裝置•及（ D)之對摄動裝置之振動裝置，用實豳例1之各浴對實旛例 1之被霣鍍物實行霣鎪處理。其结果如表1所示。 比 IOL.3 設置前述（A)之振動攪拌裝置•舫述（B>之通氣装置及 舫述（C)之擬動裝置 > 用實胞例1之各浴對實施例1之被電 鍍物實行《鍍«理。其结果如表1所示。 -----------.---'订------0 *, - , (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標隼（CNS ) A4規格（2丨0 X 297公釐） 15 39638 41597741597 A7 B7 Printed by the Central Bureau of Standards, Shellfish and Consumer Cooperatives V. Description of the Invention (1) 1 1 Technical Field of the Plaque of the Invention 1 1 The present invention is applied to-* species combined with a quilt with fine holes Electroplating 1 1 new electroplating method for electroplating. The present invention is based on the well-known electric box bath 1 I. Please 1 1 Vibration stirring device ventilation and the perturbation device of the object to be plated 1 New and used before WII read 1 A new device that gives 10 to 60 Hz vibration to the substrate to be plated_ Continuous plating method Back surface 1 I 1 〇 The m plating method of the present invention can be used for electrolytic plating t η Deplating and attention · 1 no electrolysis Plating and using any method of > λ and η-free solution plating 0 items and 1 fill in 1 Ά. Before M. Write this policy I print The circuit board is a substrate on which all components of the radio m TV eaves, electric appliances, etc., «_ < 1 are inserted in the electronic eaves and various components are interposed, and the components are mounted on the surface of the 1 m pair substrate. In the connection surface insertion method, in recent years, 1 has been carrying out multi-insertion and small-pitch, and the technology is constantly improving »Order | From 60 plugs W / 1.0 card 1 pitch or 400 plugs / 0 The level of 3 9 B spacing comes from 1 | to 400 plug ISI / 0 · 25 0. The level of 3 mm spacing then goes down—k 1 1 I new level 0-1 丄 as the technology advances There are requirements for miniaturization and high performance. * I The diameter of the micro-poor holes 1 1 and official holes required to increase the wiring between different layers in the laminated substrate is getting smaller and smaller recently. a > x progresses to below 10. 0 5 η and then advances to 0.03 9 a Μ. 1 It is not easy to remove the air dust or treatment liquid inside the micropores. 1 I, etc. Therefore, the part with air or maggots cannot be detected by electricity and becomes 1 1 | Cause of poor conduction or plating solution enters the micropores. Insufficient t 1 1 The thickness of the channeling film inside or outside the hole is different or there is an unplated 1 1 in the hole. 1 The part that can conduct electricity but has a high resistance value occurs. 0 1 1 This paper applies Chinese national standards ( CNS) A4 specification (210x297 mm)】 3 9638 Printed by the Consumer Standards Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 415977 A7 B7 V. Description of the invention \ 2) On the other hand, the present inventor made a presentation in Japanese development JP 6-7 1 544 »The public technology described in the public document includes the vibration plate 振幅 amplitude 8 ～ 20 ·· in the right of the bath, and the 搋 ft 200 ~ 600 vibrations per minute to mix the plated bath. And the implementation of electroplating technology. In particular, in the patent application, item 3 is mentioned and the device is held by a physical device. The present inventor »is to apply the techniques described in Japanese Patent Application 6-71544» for the electroplating of fine pores in articles with such micro-burmese holes. The occurrence of the bad part in the process. However, the results of this method found that the bad cold is less likely to disappear, but "We have not reached a point of full satisfaction. Also, in Japanese «Li application No. 62-32690, there is a proposal for a method of electroplating under the condition that the object to be plated is vibrated while being vibrated. However, • This vibration is just sending air to the vibrator to make it vibrate. • What kind of vibration is completely unexplained *, and the technology is completely unpractical to judge it, it is obviously completely ineffective. On the other hand, the present inventors have tried to implement various combinations and conditions in order to change the conditions of blowing and disturbance in various ways. However, they cannot obtain satisfactory results. The last method tt is the vibration method of giving water itching solution during vibration stirring. As a result, it was surprisingly found that «landing destroys low defect rate. Grinding for «Decision, transcript« Ming purpose · is »to provide a method of feeding • which is • in India» 0.2, indispensable in the cypress substrate, 1C substrate zero skimming, becomes 0.1 ·· In the following, it becomes one step at 0.05uJW, and it becomes one step below 0.03. The pores are accurately and uniformly plated to eliminate n ^^ 1 ^^ 1--!--^^ 1 I ..... · 1 m--I-1 '· ---- 1 ~ », 1',-, (please read " Analytical Notes_Implementation before filling out this page) This paper size applies to China National Standard (CNS) A4 specification (210X 297 mm) 2 39638 415977 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Invention Description (3) Occurrence of defective products caused by imperfect cloth embroidery. The hand to solve the plaque "The present invention is * * The method of 将 plating in order to process the object to be electroplated from the former step to the 鼸 鼸 step, is: 赙 make (Α > perturbation of the treatment bath Stirring device, (B) aeration device for kitchen treatment bath 1, (C) It is a device for planting sugar by «hanging electric quilts» and (D) «electrode rods suspended by plating Inverter (inverter) section becomes 10 ~ 60Hz vibration vibration dalai to generate vibration from 0.5 to 1 · 0 ·· Fan · vibration device (medium 5 > 14 etc.) · Processing step before the key And "Shovel step at least in the tank * non-electrolytic« plating rights and / or disintegration in the plating tank _ as its special construction reading method of electroplating. (9) in the Ming Dynasty (A) of the II bath The vibration vibration stirring device M includes a vibration generating device including a vibration horse; a segment of a vibration rod fixed to the vibration rod connected to the vibration generating device and perturbed in the stirring chamber is formed into a plurality of vibration blades, and the amplitude of the vibration is 0.5 to 3.0. Pseudo-motion stirring device with vibration of 200 ~ 800 times / minute; HI vibration control to generate any ft vibration age between 10 ~ 500Hz *, preferably 30 ~ 60Hz, more It is an inverting opium with arbitrary frequency vibration of 30 ~ 40Hz; K and a vibration stress analysis device at the connection part of the vibration generating device, which is described in the photo-stirring device, are preferable. The air device is described as having no special eyes. However, it is necessary to set up a gas tube with sufficient air bubbles to stir the part where the object to be plated -1 HI---Jn -i I m ---- ,, '-— ^ IJ., T-. · (Please read the notes on the back ^ before filling in this page) This paper size applies to the Chinese national standard i CNS) A4 size (210X297 mm) 3 39638 415977 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Preparation of A7 B7 V. Description of the invention (4) Use of a large number of stomata with holes S1 * · for PVC and other synthetic tree meals, etc. 畤 • It is impossible to effectively remove the heat of electrolysis due to the large air particles, and it will cause obstruction Non-uniformity pattern * The radon gas device used in the present invention uses a diffuser tube made of M porcelain porous tube to eliminate the mystery. The aforementioned Porcelain Porous Tubes are made from Gaopan sintered Porcelain Tubes, whose brand name is, for example, oxidized osmium particles of 阏 ldam, and the pores of the failed gas tubes are 200 to 400 microns. The porosity (the ratio to the surface area) is preferably 30 to 40) (approximately. The outer diameter of the air diffuser is usually 50 to 100. S degree is determined by the degree of fear of the treatment tank. But usually it is About 100 ~ 200 ··. There is no special setting method for the installation method. But using multiple support, it is sandwiched between the air ducts by the sickle. [[Installation]》 ffiftM100 ~ 200 of each air duct.] It ’s better. The vertical distance between the gas tube and the electric wrinkle is usually M 100 ~ 300 *. It is advisable. 鹣 The paralysis system MS cocoon degree given by hanging the «I plated» electric rod is 10 ~ 100 ·· is better * and M20 ~ 60 ·· is better. The perturbation number is preferably about 10 ~ 30 times / minute. The Hz of the motor of the perturbation of the front stick is (A) The Η z number of the tearing motor is 5 0 ~ 6 5 X is appropriate. The Η z 敝 is 1 0 ~ 6 0 H z, and the M 2 0 ～ 35 Hz is better. The amplitude is 0.5 ~.霣 plated crab move > But it will not make «liquid flow. The electric method of the present invention is extremely unsuccessful for articles with micro-membrane holes, especially for printed circuit boards and 1C substrates with micro-holes. The method of measuring table. Especially for the holes of micro-membrane holes, 0.2 under * or 0.1 · · below * or 0.05 · · M under • or 0.03 · · M (Please read the precautions on the back before filling this page ) Packing · Ding-β This paper size applies to Chinese National Standard (CNS) A4 specification (21 × 297 mm) 4 39638 Printed by the Consumers Cooperative of the Central Bureau of Standards of the Ministry of Lithuania 415977 at B7 V. Invention Description (5) Fine Printing of holes «Electric substrates for road substrates, ic substrates, gold plates, plastic plates, etc.» is very useful. Furthermore, the electroless sacrificial plating and / or decomposing Saga of the present invention can be exemplified by samarium lanthanum, chain plating, and silver plating. • Sugar plating, gold plating, plating ","! Welding, etc. as examples. The previous processing of this book means that in Japan «and the" plating technology "issued by the Japanese journalist Qin Xin« on July 25, 46 * J Pickling described in pages 117 to 148, each of them is treated by an electric shovel »及 and 655 ~ 665 pages of pre-treatment such as Tao Jie, engraving, catalyst, electroless plating, activation, 鋦 touch 竃 plating, etc .; and the 霪 plating step is not only dirty with various key steps, but also contains no Electrolytic step. In the present invention, the devices of (A) > (B), < C), (D) are used in the process of galvanizing at least less than the entire process of the main selling step * However, it is better to use it in all steps. (Using the stickiness of device A) In electrolysis of electroplating solution • Hydrogen will be generated on the electrode surface (by the body) and become microscopic in the liquid. Covering the entire surface of the treated 蝤 蝤 蝤 阻 • • 障 障 蠊 蠊 蠊 蠊 蠊 速度 * speed * Furthermore 再 hinder uniform plating. However, as mentioned above, when the treatment fluid is subjected to sugar flow with oscillating fins, the surface force in the fluid can be reduced to a certain extent. Its seabass can discharge most of the air entrapment that occurs on the surface of the mineral deposits into the system. outside. Therefore, • the current distribution can be made more uniform, and the system of reducing the resistance is reduced. • The number of times that the conventional device is used to achieve a more uniform appearance. The micro-holes that are pressed by the key are 20 ~ 50 Λ meters of very small size. * Only by the flow of the description, it will take longer to process. * Apricot is difficult to achieve the expected (please read the precautions on the back before Fill in this page) Pack 1 This paper scale is applicable to the Chinese National Standard (CNS) A4 specification (21〇 ×; 297 mm) 5 39638 415977 A7 B7 Printed by the Bayer Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (6) 1 I waits for a hundred of 0, so f gives 10 to 30 times per minute of movement to the plated plating m. When I hear about it, I also give 10 60 Hz to the plated m itself »and M 20 to 35 Hz 1 1 is the best vibration mt That is, within a very short m, the eagle fluid can flow to the micropores. 1 I Please 1 I pass uniform 0 Read first [I read 1 The use of the fruit of the air diffuser f makes it happen from the air diffuser Slim back · 1 I and bad news Huai Bao _ was plated m whole pith and sacral 1 put out of the H bath The Italian side effectively removes the electrolytic heat generated from the plated m and quickly removes the item i 1 1 Filling and cooling the plated material can effectively remove the writing from the microm hole of the plated object. Removed air and maggots * In the case of page 1 that does not cause damage or coke supply to the plated m, it can achieve 0 1 evenly, and the results of using the devices that supplement ABCD are in the treatment solution, especially in mold. The boundary between the plating calendar and the plating bath in the feed solution is very easy to be destroyed. The supply of the treatment bath to the surface of the keyed object is planted in a circle. 1 I The smoothing light m is good 1 1 t has a great contribution 1 1 The representative steps in the construction of the printed circuit board substrate are as follows: 0-1 (based on the plating step of the rubber) _ [〇 〇 m — Washed ferret m — Washed with water m Washed with water 〇No dehydration plating. 1 m Water sparse pickling-> 〇 mmm Electroplated water washing (drying) 1 In each step, each water washing step is divided into two tanks to implement Most of the people are »1 1 I Shang Wuer 竃 竃 成 电镀 也 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 电镀 where the electroplating is also divided into two right implementers. 0 To simply 1 1 when the ore mine is implemented > be charged mm 锓 ϋ after a certain period of time to Μ pick up 1 The% that moves from 1 to the next dump is the most simple t, but the price is * 1 1 * The bath that requires a lot of time to process * or the bath that needs to be m for a short time, as long as it is 1 1 This paper size applies the Chinese National Standard (cns) A4 specification (2iox 297 mm) 6 39638 415977 Printed by the Consumers Cooperative of the Central Bureau of Standards, A7 B7 V. Description of the invention (7) _ Have become «reasons" with the same lemon. Therefore, a time-consuming slot is needed to make two slots on κ to increase the processing time. When adding water, etc., it is necessary to completely remove the attached liquid. • More "The water eel is more efficient in the future. * So you can also understand that it is meaningful to set a plurality of β water tanks." In step _, the aforementioned (A > ~ (D) device * of the present invention * is used at least in the step with 虢 symbol attached to the upper part. However, it is better to use it in all steps except the water washing step K.) However, it is better to use it in all steps including the water step. The aforementioned clean step step may be the step step or the step plus step that makes the error. In step Μ, the surface is irregularly formed on the surface by using the sand-forming liquid honing method. However, in recent times, the surface is generally formed by chemical treatment with a chemical solution. For example, androic acid-complexation The step of forming bumps on the surface of the absurdity of the liquid and the inorganic osmium and osmium ore solution. The contact step is provided on the coated surface after Mt, and a contact calendar such as palladium is planted * as a non-solvent solution The basic method that hinders accurate steps »In the catalyst attachment method, use the method of sensitization-> activation method and characterization-addition method .The former is immersed in a radium solution with strong Tongyuan force and mixed with a medium on the surface, and then immersed in the itch liquid with a catalyst force. • It causes gasification on the surface of the gum. 18 redox. The reaction method is to fix the tentacles, and the latter is to immerse the substrate in the solution of palladium ions and palladium on the surface of the ions. On the surface, the quality palladium or the compound is removed, and then radium is removed. Method for activating palladium (please refer to issue by Dainippon_Hazard Co., Ltd. on September 20, 1992, (#read the precautions on the back before filling this page). * -Β This paper size applies Chinese National Standard (CNS ) Α4 specification (210X297 mm) 39638 41597 A7 B7 V. Description of the invention (8) The Japanese version of the consortium corp. «Edition," A valuable chemistry · Ι «Ping Yu Jian * Science and Technology j pages 92 ~ 97）. The first plaque to the third · show that one of the aforementioned (A) * (B), (C) * (») devices in the pre-treatment tank and the power shovel is placed in the present invention. The first example is the first plane. • The 2nd face is the front face, and the 3rd face is the §1 face_. The 4th and 5th faces show that the 1st to 3rd ones include the vibrating horse company. 4 points of the automatic stirring device. Section 4 is the second section of the middle sickle XX-X cross section, section 5 is the third section of the middle nickel Υ ~ embracing surface _. In sections 1 to 3_, the description (B) The radon device is formed by _ Zhisan << (pipe 12 »12 and the rust-proof air inlet 10 for feeding the pressurized air into the groove. In the 1st ~ 3rd · middle > holding device Nickel includes a motor 3 for actuation, a motor receiving frame 2 · M that is propagated by the action of the motor, and an off-pole dual-use hanger 5 fixed by the _pole rod receiving part 13 and is subject to the foregoing risks. The building sling 5 is securely connected and fixed regardless of its electrical and physical properties. Then • In order to vibrate the automatic receiving frame 2 * A vibration motor 14 is set at the embroidery position of the perceptual receiving frame. The vibration motor 14 The vibrating gun causes the booth 2 to vibrate the itchy receiving frame 2 and transmits the vibration to the electric object such as the 1C substrate. The perturbation system of this 畤 is 10 ~ 60 ··, and the appropriate amplitude of M20 ~ 50η is the ratio of κ10 ~ 30 times / min. In this example, the perturbation direction is the left and right directions of the 1st and 2nd. • The vibration of the sugar-receiving receiver 2 is 0.5 to 1.0. The vibration of the vibration building.鞴 An inverter generates vibration of 10 to 60 Hz, preferably 20 to 35 Hz. (Read the precautions on the back before you fill in this page.) Printed by the Consumers' Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs ^ This paper size applies to China National Standard (CNS) A4 (2 丨 OX297 mm) 8 39638 Jing Di Department Printed by the Consumer Standards Cooperative of the Central Bureau of Standards " 415977 A7 B7 V. Description of the Invention (9) Section 4 > 5_ 系 _ 示 射 "An example of a vibrating sugar stirring device for a plating bath * However, the vibrating stirring device itself is not limited to this Example • Japanese Patent Application Laid-open No. 6-33 0 395 filed by the present inventor can be used. 闾 平 6-3 1 2 1 2 4 », Μ 平 6-3 3 0 3 9 5 donkey * Japanese Patent Application Laid-Open No. 8-1 7 3 7 8 5, Japanese Patent Application No. 9-40482 and Japanese Patent Application No. 6-71 544 published in Japanese Patent Application No. 001. Description of the vibration stress separation device · For example, the vibration generating device vibrates the beech reach section > The lumbosacral lumbosacralis located in the vibration perimeter is longer in length than the vibrating cymbal. It is usually a vibration 1 > Straight 3 to 8 times. The diameter is preferably 1.3 to 3.0 times larger than the diameter of the vibration, and 1.5 to 2.5 times larger. From other perspectives • When vibrating _ the floor is paralyzed 10 ~ 16 ·· when it is a round rod • Suspect _ the wall thickness of the substance is 10-15… is appropriate • When the vibrating rod (round rod) is straight It is 20 ~ 25 ·· * wall thickness of sickle 瓖 瓖 20 ～ 30 ··. In the case of not using Mongolian Bff 振动, the vibration stress is concentrated near the joint between the vibration transmission member and the vibration beech, and there is a book point where the vibration rod is easy to get an eye. The question plaque. The material of the aforementioned vibrating fan sheet is preferably made of thin gold tincture or a synthetic synthetic tree B6 * oak waist. The thickness may be such that at least the first part of the blade is hydrodynamically caused by the vibration of the vibration motor up and down. • The vibration is generated by adding vibration to the strip. Usable vibrating _ sheet material titanium • aluminum * copper, mesh iron, stainless _ and alloys of these. Synthetic resins that can be used The vibrating blades are polyacrylic acid, vinyl chloride, polypropylene, etc. In order to convey the vibration energy and enhance the effect of vibration, the thickness is not particularly limited. Generally speaking, the thickness is 0.2 ~ 2 when using the golden leaf 臛. «I: I --- 1 -I-'-- 1 · 1 ---- «9., τ L. (Please read the note on the back 4 to fill out this page) This paper size is applicable to Chinese national standard (CNS) A4 specification (210X297 mm) 9 39638 415977 B7 Ministry of Economic Affairs Central Standards Bureau, Shellfish Consumer Cooperatives, Yin Zhong V. Description of Invention (10) 1 I In particular, non-embroidered m 畤 is 0.2 ~ 1 1 «* and, for example, M 0 .5 · 羼 degree is 1 1 preferably 0 1 1 Use m-like synthetic trees mf eaves, etc. as the material for perturbation. 1 I Please 1 1 The thickness m is usually 0. 5 ~ 1 0 1 | Especially Κ 1 · ** χ »5ι is better 0 Read II Read, 1 1 Vibration 椴 之 振 «僳 2- ~ 30 ·· • W 5 10 1 1 Ά 〇 〇Back · iEj 1 I -1 Vibration blade is possible — segment into multiple segments Installed on vibrating transmission ο m injection, 1 depth of treatment liquid can use multiple vibrating leaves 〇 for the use of multiple sections and the next item 1 can be added when the number of sections can be increased m because of the increase in the negative of the dynamic Occurrence of vibration m-degree tips Installation page 1 Reduced and fibrillated horses catching heat 0 And the vibration blades can be installed on the vibration beech to become vertical 戆 * 1 However, when the right-angle direction of the M vibration rod is 0 degrees, (〇 or ( -) Direction 1 incline 5 ~ 3 0 degrees, especially K 10 ~ 20 degrees «Installation is better (please refer to the 4th order | country and 6th) 〇 搋 also move m pieces of fixed members to vibrate 蒌 Η from vibration_ View from the side of 1 I »Can be tilted and / or curved m 〇 When bending 1 1 1 bar, t should have 5 Λ -30 degrees. 1 1 It is better to be inclined 0 ί Vibration 镞 镞 is composed of vibrating _ _ fixed structure partners, clamped from the upper and lower sides and 1 1 is fixed to the vibrating rod to form the vibration blade part 〇1 with 臛, and the vibration m piece in the official cabin is opposite to the mm mm. It can be fixed with 1, but as shown in Figure 6 * Use the vibrating cymbal to fix 1 | the member 18 »18 clamp the vibration from the top and bottom 綦 Η the shape of 17 to m tight» use 蠘 I 1 | 24 * 24 is too tight to fix the vibrating blade 18 18 to fix the vibrating blade 1 1 17 is appropriate 〇 1 1 tilt the vibration X Η part and / or * bend time * most of the moving blade part 1 1 paper size Applicable to China National Standard (CMS) A4 specification (2) 0X297 mm) j 〇39638 41597? A7 B7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Div. 5. Description of the invention (11) 1 I Λ -2 pieces become downward and / or curved »its 1 1 other blade composition For tilting up / or bending 0 so when it is complete »You can fully stir the bottom of the mixing building to prevent the accumulation of irregularities in the lower part 〇1 I when you do not want to mix the bottom of the mixing tank» You can remove the aforementioned downward Bend first 8S 1 1 | Vibrating sugar M plate to deal with 0 For example, to m to leave the rest of the meal and other food ingredients on the read-back. Surface I 1 1 The lower part makes it non-diffusive. It is quite convenient to remove it from the bottom. 〇 冬 ί '1 | As shown in the 9th and 10th, the stirring device can be set only in the matter and then fill in one of the 1 1 processing tanks. However, as shown in the 1st and 2nd plaques, it can also be set by JW. Install the two m of the eaves to match the large-scale question. The vibration stirring installation page 1 shown is also in the form of a vertical moving blade according to the vibration. * However, there is also a suspected case as stated by the suspect. B version * Lee Chuan Sui Kaiping 6- 3 0 4 4 6 No. 1 Public 1 As shown in the seventh plaque > 8th, the horizontal direction is the direction of vibration. The method of attaching the oscillating diaphragm 17 to the bottom of the processing tank 1 at this time »In order to set m 1 1 I on the 8th _ left side Vibration motor 27 is the center of the left 簠 ft and the right 1 1 I. For the sake of balance, it is necessary to set a balancer that can be balanced on the left side-1 1 26 is appropriate. Q-1 The vibrating rod can directly connect with the vibration ft. The motor is used in conjunction, but as described in the inventor's 1 1 patent, please refer to Japanese Patent Application Laid-open No. 6-30446 No. 1 public silver into Japanese Patent Application Laid-open No. 6-330395H 1! The bulletin can also use the vibration m of the vibrating motor from the vibration frame The form of communication from 1 to Zhen Qin is as follows: 0 1 1 I t t Vibrating blades 17 and 1 ”I interposed between the vibrating forbidden piece fixing member 18» 18 1 1 I polymer polymer thin m 23 23 can be large m to eliminate low vibration blades The damage rate is 1 i. Fluoroethylene (PTFF) »Tetrafluoroethylene 1 1 / hexafluoropropylene copolymer (FEP) Tetrafluoroethylene / fluorinated alkyl vinyl m total 1 1 This paper size applies to China National Standard (CNS) A4 specifications (210X297 mm) ) 1 1 39638 Ink stand of Shellfisher Consumer Cooperative, Central Standards Bureau, Ministry of Economic Affairs 415977 A7 B7 V. Description of the invention (12) Polymer (FPA) * Polychlorotrifluoroethylene (PCTFE) · Polyfluorovinylidene (PVDP) Polyfluoride Vinyl • B "/ Tetra« Ethylene Copolymer (FTPE), Ethylene / «Tri-Town B» Copolymer * Propylene / Tetra-Ethylene Copolymer; etc .; but especially M gas-based rubber is better "* m Zhenzi" Real Examples are provided to illustrate the present invention. However, the present invention is not limited by this. Fen mm ί As shown in Sections 1 to 5_, install (A) a vibrating agitator on the treatment unit (B) aeration device * (C) a device that moves the "spreader" of the object to be plated, and < D) 鞴 Apparatus for imparting vibration to the object to be plated by a »slinger. Pretreatment and plate plating are performed under the following conditions. (1) The object to be electrolyzed: JP degree 0.5 " of 340 X 340 · · The straight and fine perforation of the glass-covered ring-covered stacking plate "The Types of the Underlying Miscellaneous: Four. 0. 0 5 (2) The treatment tank's placement_slot (0 > ~ > Right to hot water—washing tanks—washing tanks—washing tanks—the first suspicion (0) —the second * doubt (0) 4 water 洙 楢 4 water washing 楢-> speed up sowing (0) 4 Washing 檑 &水; Water-washing Tower 4 without lanthanum plating bath (0) • ^ No "Solution-plating lounge (0) 4 Water 洙 Right 4 Water-washing tank ^ Acid tank-碴 酸 鋦 I ^ ϋ.---- --- I ^^ 1 -I— ^^ 1 ^^ 1 ---- f ^ i 、 T i.-. (Please read the precautions on the back before filling this page) This paper size applies Chinese national standards ( CNS > A4 specifications (2 丨 0 X 297 mm) 12 39638 415977 at B7 V. Description of the invention (13) 霣 Plating (（) > 臃 Ac 钃 竃 plating bath (〇) —Water Washing—The washing tank is too dry, the IK time is 5 minutes, and the density is 2A / d «2. Install the above 4 kinds (A) ~ (D) to the tank with the (0) mark. (3) Vibrating stirring device: Vibrating sugar trout: 250V X 200V X 3-phase vibrating cymbal: effective area 300X 150 ··, thickness 0.6 ··, total β = · α = 15 degrees (both upward) Vibration of vibrating diaphragm _: 1.5 ·· Vibration frequency: 40 Hz (inverter _ knots) (4) Ventilation device P »Porcelain 霣 diffuser system use _ branch external connection is 75 · * * Inner diameter is 50 ·· ， The length is 500 ·· The air porosity is about 200 / i. The porosity of each branch is 40X * The air volume is about 40 liters / minute sickle. (5) The moving device is driven by a gear and a piston motor. 20 times per minute • Front and rear shots with a perturbation of 轜 40 > «. (6) The vibration device attached to the pseudo-movement device is printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Education (please read the precautions on the back first) (Fill in this page) Fix the vibration motor (40 V) 14 at the position of the receiving frame 2 of the automatic operation, and make the vibration motor 14 vibrate under the conditions of inverter, M30Hz, and vibration 0.8 · ». (7) Debilitating bath The internal dimensions of the building: 450X350X650 ··, width X degree X height X) Sodium glutamate 40g / L «Acid Tri»! 20g / L This paper size applies Chinese National Standard (CNS) A4 (210 X 297 mm) 13 3 9638 415977 A7 B7 Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (Η) 酝 Sodium oxide interface activator bath preparation time (8) Touch bath (internal dimensions: osmic acid (sg · 1.84) Phosphoric acid (s.8.1.74) Sour bath and time (9) The first media bath (Buichi internal ruler gasification stannous soil M 馥 bath and time 闰 (10) second 觞Medium bath (with internal ruler gasification palladium-acid bath and time (11) accelerated _ bath (internal dimensions of right bath acid bath 1 time (12) non-decomposing sugar acid bath plating bath (slot copper acid ( CuS04 5H20) 5g / liter 1g / liter 60t: 5 minutes 5 0 0 1 / liter 1 0 0 · 1 / liter 30β / liter 65 υ, 10 minutes ^: 450 X 200 X 65 0) l〇g / L 4 0 1 / L room temperature, 5 minutes furnace inch: 450 X 350 X 650) 0. lg / L 1 公 1 / L chamber filling 5 minutes: 4 50 X 1 80 X 6 5 0) 7 5 1 / Liter 50t · 5 minutes internal size: 450 X 35 0 X 650 450 X 180 X 650) Potassium tartrate MUNAC4H406 4H20 > Natramium hydroxide (37X) 10g / liter 3 5g / liter 8g / liter 20g / liter (please Read the precautions on the back before filling out this page} This paper size applies Chinese National Standard (CNS) A4 specification (2! 〇 × 297 mm> 14 39638 A7 B7 V. Description of the invention (15) A small amount of stable cocoon pH 12. 5 ~ 13 bath time and time 401 · 10 minutes Sickle (13) 碕 acid-Burma plating bath (inner dimensions of the eaves: 45 × 450X 650 > bowl acid 鋦 (C u S 0 4 · 5 ϋ 2 0) _ Gwangtan bathing time and time 75g / litre 190 "litre 50 g / litre 1 / litre 40 t: · 10 minutes" Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs on the above conditions, the results are as follows: As shown in Table 1. Comparative Example 1 Only the aeration device (B) and the agitator device (C) described above were provided. The baths of Example 1 were plated with the baths of Example 1. The results are shown in Table 1. Comparison .... Example 2 Set the ventilation device of (B) above, the holding device of (C) above, and the vibration device of (D) on the perturbation device, and use each of the baths in Example 1 as a practical example. The substrate to be plated is treated with a plateau. The results are shown in Table 1. Than IOL.3, install the vibration stirring device (A) described above (B), the ventilation device and the pseudo-movement device (C), and use the baths in Cell Example 1 to apply the plated material of Example The "plating" principle is implemented. The results are shown in Table 1. -----------.--- 'order ------ 0 *,-, (Please read the precautions on the back first (Fill in this page again) The paper size is applicable to China National Standard (CNS) A4 (2 丨 0 X 297 mm) 15 39638 415977
7 B 五、發明説明（W) 表1 經满部中央標率局員工消費合作社印聚 例 使用裝置 微细 最高霣流 貢通孔之 禰準 氣坑不 孔徑 密度 霣鍍附著 鴒差 良率*5 (>) (A/d·2) 性 *2(X) σ ¢4 (* ) 比 (B) - (C) 0.5 3 42 4.5 較 0.2 3 40 4.5 20 例 0.1 3 14 4.5 30 1 0.05 3 X «3 4.5 - 比 (B) * (C) 0.5 3.5 52 4.0 - 較 •(D) 0.2 3.5 38 4.0 10 例 0.1 3.5 20 4.0 20 2 0.05 3.5 X 4.0 比 (A)，（B) 0.5 4.0 60 3.5 較 * (C) 0.2 4.0 53 3.5 5 例 0.1 4,0 42 3.5 10 3 0.05 4.0 18 3.5 實 (A) - (B) 0.5 12.0 95 1.2 嫌 * {〇 * 0.2 12.0 92 1.2 0 例 (D) 0.1 12.0 90 1.2 0 1 0.05 12,0 86 1.2 - 本紙張尺細中關家標準（峰4規格（2獻酬 16 39638 (讀先閱讀背面之注意事項再填寫本頁) 眾- I' Γ 經漓部中央標隼局員工消費合作社印製 415977 A7 B7五、發明説明（17 ) «1最高電流密度係指逐_地提离霄涑密度•尚未發生埔 焦之陏段之最高罨流密度而言。 *2 (貢穿孔中央部之平均電《厚度）+(基板平坦》之平 均電鍵厚度）X 100 *3 )(表示貢穿孔内未被電鍍。 *4 σ表示«鍍厚度不均勻性之禰準餳差。 *5氣坑不良率（Χ)係將霣鍍之導《試驗及格的試驗品· 用放大鏡檢査外觀以及用X光檢査等發現不良品的方 法，找出由於氣β等之附着所致之不良品之方法來求 得。 奮Μι供I 2 U)，（B)> (C)> (D)各装置之配置•如同第1實施例 ，但處理榷之配置變更成為如下述•而資行鍍練。霣流密 度均設定成為2A/di2。 (1) 處理槽之配S 膨澗榴（Ο) —水洗槽->触刻槽（0)4水洗權中和槽 —水洗播—鼸媒槽4水洙槽加速_榷4水洗槽4無《解 鍊霄《播（0)4水洙榷―活性tt檷水洙權—觸擊電鍍榷 —水洗樓4醸酸緬爾鍍懵4水洗槽·》«電鍍榷4水洗楢 對附有（Ο) «(誌之懵有安裝前述4種（A)〜（D)之装置 〇 (2) 臃調浴 碾黻納 9〇g/公升 «酸三» 20s/公升 I-1 I -- -- I. i^i I - -- 1*5^. I 1^1 - -. I .1 ^IJ 0¾. 、-=s (請先閱讀背面之，t意事項再填寫本頁) 本纸張尺度適用中國國家標準{ CNS ) A4規格（210XM7公釐） 17 39638 經濟部中央標牟局員工消費合作社印製 415977五、發明説明（18 ) 氫氧化納 界面活化Μ 水溶性溶劃 浴灌與時間 (3) 触刻浴 鉻酸 蘢酸 浴灌輿時間 (4) 中和浴 邈酸 (5) 觴媒浴 氦化絕 氱化亞鑤 溻塲酸 浴灌與時間 (6) 加速HI浴 «酸 浴潘輿時間 (7) 無電解辣《鍍浴 雄酸鐮 次亞磷酸納 _嫌酸餿 浴濃輿時間 A7 B7 5g/公升 Is/公升 8 0 g /公升 80V * 5分鑪 40 0“公升 400S/公升 65 t：，5分鏞 5 0 1 /公升 0.2g/公升 20g/公升 2 0 0 丨/公升 室瀑下5分鐘 100隱1/公升 5010 · 5分鐘 30g/公升 20s/公升 5(U/公升 40 t：，10分鐘 (請先閱讀背面之注意事項再填寫本頁) 裝' 訂 (8)活性化浴 本紙張尺度適用中國國家標準（CNS ) A4規格（21〇X297公釐） 18 3ΘΘ38 41597' A7 B7 經滴部中央標準局貝工消費合作社印^7 B V. Description of the invention (W) Table 1 The printed samples of the Consumer Cooperatives of the Central Standards Bureau of Manchuria are used. The device used is the finest, with the highest pore density, quasi-air hole density, plating adhesion, and poor yield. * 5 (>) (A / d · 2) Property * 2 (X) σ ¢ 4 (*) Ratio (B)-(C) 0.5 3 42 4.5 More than 0.2 3 40 4.5 20 Case 0.1 3 14 4.5 30 1 0.05 3 X «3 4.5-ratio (B) * (C) 0.5 3.5 52 4.0-ratio • (D) 0.2 3.5 38 4.0 10 cases 0.1 3.5 20 4.0 20 2 0.05 3.5 X 4.0 ratio (A), (B) 0.5 4.0 60 3.5 Compared with (C) 0.2 4.0 53 3.5 5 cases 0.1 4, 0 42 3.5 10 3 0.05 4.0 18 3.5 Real (A)-(B) 0.5 12.0 95 1.2 Suspect * (〇 * 0.2 12.0 92 1.2 0 cases (D) 0.1 12.0 90 1.2 0 1 0.05 12,0 86 1.2-The paper ruler in the family standard (peak 4 specifications (2 donations 16 39638 (read the precautions on the back before filling out this page))-I 'Γ Jing Printed by the Liberal Central Standards Bureau Employee Consumer Cooperative 415977 A7 B7 V. Description of the invention (17) «1 The highest current density refers to the density of the peaks and valleys that have been lifted from place to place. The highest flow density has not yet occurred in the Pujiao section. Words. * 2 (Gong The average electric thickness of the center of the hole + (the average key thickness of the flat substrate) X 100 * 3) (indicated that the plating is not plated in the hole. * 4 σ represents the quasi-sugar difference of uneven plating thickness. * 5 Air pit defect rate (X) refers to the method of testing the passable test product of 霣 plating, using a magnifying glass to check the appearance, and using X-ray inspection to find defective products, and to find defective products caused by the adhesion of gas β, etc. (I) 2 U), (B) > (C) > (D) The configuration of each device is the same as the first embodiment, but the configuration changes to be processed are as follows: Line plating practice. The flow density is set to 2A / di2. (1) The processing tank is equipped with S expanded gluten (0) —washing tank —> contact engraving tank (0) 4 water washing right neutralization tank — water washing broadcast — Media tank 4 water tank acceleration _ 4 water wash tank 4 no "solution chain Xiao" broadcast (0) 4 water question-active tt water right-strike electroplating-water wash building 4 acid acid Burr plating 4 water wash Tank "" «Electroplating 4 water washing 楢 attached with (〇)« (Shi Zhi 懵 has a device to install the aforementioned 4 (A) ~ (D) 〇 (2) 臃 adjust the bath mill to accept 90 g / liter « Acid Tri »20s / L I-1 I--I. i ^ i I--1 * 5 ^. I 1 ^ 1--. I .1 ^ IJ 0¾. 、-= S (Please read the notice on the back first, t notice (Fill in this page again) This paper size applies Chinese national standard {CNS) A4 specification (210XM7 mm) 17 39638 Printed by the Consumers' Cooperative of the Central Standardization Bureau of the Ministry of Economic Affairs 415977 V. Description of the invention (18) Sodium hydroxide interface activation Μ Water-soluble immersion bath and time (3) Touch bath chromate bath time (4) Neutralization bath bath (5) Solvent bath helium ablative sulfite bath bath and time (6) Accelerating HI bath «Acid bath Panyu time (7) Non-electrolytic spicy" Plating bath androgen falciphosphite_Sodium acid bath bath Ayu time A7 B7 5g / litre Is / litre 80g / litre 80V * 5 minutes furnace 400 0 liters 400S / litre 65 t: 5 minutes 镛 5 0 1 / liter 0.2g / liter 20g / liter 2 0 0 丨 / liter chamber 5 minutes under the waterfall 100 hidden 1 / liter 5010 · 5 minutes 30g / litre 20s / litre 5 (U / litre 40 t :, 10 minutes (please read the precautions on the back before filling out this page) Packing (book) (8) Activated bath The paper size applies Chinese National Standard (CNS) A4 Specifications (21〇X297 mm) 18 3ΘΘ38 41597 'A7 B7 Printed by the Shellfish Consumer Cooperative of the Central Bureau of Standards of the Ministry of Digestion ^
五、發明説明（19)釀酸 浴瀵輿時閾 (9>觸擊爾鍍浴 磙酸_ 氩化鎳 钃酸浴覼輿畤間 U0)味酸銅竃鍍浴 贜酸鋼（C u S 0 4 · 5 Η 2 0 )鐮酸導鬣性賦予鋼 浴a輿時間 (11}_霱鍍浴 磙酸鏡 氯化鍊 羅酸 光潭_ 浴瀵與時間 ίΗ » « 4只設置舫述（Β)之通氣装置及前述（C>之擓動裝置•用 實拖例2之各浴對寅施例2之被霣鍍物實行«鏟處理。其结 果為如表2所示。 fch » W B 50g/公升 室瀣下1分鐘 200g/公升 40g/公升 4 0 g /公升 50 υ * 5分鏟 7 5g/公升 19〇β/公升 5 0 g /公升 401D，10分鐘 200g/公升 40g/公升 30g/公升 少量 50X：，10分鏞 設置前述（B)之繼氣装置•前述（C>之攞動裝置*及 本紙張尺度適用中國國家標準（CNS > A4規格（210X297公釐） 19 39638 I 11- 1 —^1· - - ^^1 - - ^TJ ，1· (請先閱讀背面之注意事項再填寫本頁) 經滴部中央標準局貝工消費合作杜印^ 41597-, A7 B7 五、發明説明（2〇 ) (D)之對摄動装置之振動襞置*用實MB例2之各浴酎實嫌例 2之裱電鍍物實行電鍵處理。其踣果如表2所示。 出齣俐fi 設置前述（A)之振動撕_裝置，前述（B)之蠕氣裝置及 前述（C)之摄動裝置，用實施例2之各浴對實施例2之被霣 鍍物實行電錶*理。其鏑果如表2所示。 表2 HSBV ^^^^1 V i _ (請先閱讀背面之注意事項再填寫本f ) 例 使用裝置 微细 孔》 (·) 最离爾潦 密度*1 (A / d 2 ) 貢通孔之 電饋附蕃 性 *2(* ) 撕準 «差 σ ¢4 比 ⑴，（C) 0.5 3 . 5 45 4.7 較 0.2 3.5 40 4.7 例 0.1 3 . 5 25 4.7 4 0.05 3.5 X ¢3 4.7 比 (B) (C) 0.5 4.0 55 4.5 較 ，⑻ 0.2 4 . 0 40 4 . 5 例 0.1 4.0 30 4 . 5 5 0.05 4.0 X 4.5 比 (A) * (B) 0.5 6 65 4.0 較 ，（C) 0.2 6 55 4.0 例 0,1 6 45 4.0 6 0 .05 6 35 4.0 實 (A) * (B) 0.5 14 98 1.5 譫 • (C)， 0,2 14 90 1.5 例 (D) 0.1 14 88 1.5 2 0 .05 14 84 1.5 本紙張尺度適用中國國家標準（CNS ) A4規格（2丨〇X 297公釐） 20 3963$ 經濟部中央標隼局員工消費合作社印絜 415977 A7 B7 五、發明説明（21) 最离電潦密度係指逐灌地提离霄潦密度，崗未發生熵 焦之陏段之最离罨流密度而言。 *2 (貢穿孔中央部之平均電鍍厚度）+(基板平坦部之平 均霣鍍厚度）X 100 *3 X表示貢穿孔内未被*鍍。 *4 σ表示電鍍厚度不均勻性之禰準儀差。 *5氣坑不良幸（X)係將電鍍之導鬌轼驗及格的轼驗品， 用放大鏡檢査外觀Μ及用X光檢資等«規不良品的方 法，找出由於氣鼉等之附蕃所致之不良品之方法來求 得。 奮iite例3 將印靥電路基板之厚度設定為0.8·· ·貢穿孔之直徑 设定為0.1··以外，其餘均重複實豳例1的搡作。該畤，其 厚度為資豳例1之1.6倍，且 (厚度）+ (直徑）=0 . 8+ 0 · 1=8 也魷是說，是在厚度直棰比為8的極离厚度直棰比之條件 下的實陳狀況。其结果如表3所示。 H； » fft 7 如鲔述，除了將其厚度直欞比設定為8 Μ外，對資施 例3之印刷霣路基板重禊輿比較例1阗樣的ft理。其结果如 表3所示。 比較例8 如筋述*除了將其厚度直檯比設定為8 Μ外，對實旛 例3之印刷爾路基板簠複與比較例2同樣的處理。其结果如 (請先閱讀背面之注意事項再填寫本頁) 笨.V. Description of the invention (19) Time threshold of acid brewing bath (9 > Strike bath plating acid _ nickel argon bath acid bath 覼 U0) sour copper 竃 plating bath 贜 acid steel (C u S 0 4 · 5 Η 2 0) Siphonic acid imparts time to the steel bath (11) _ 霱 plating bath 磙 acid mirror chlorinated chain rosanoic acid Guangtan _ bath 瀵 and time ίΗ »« 4 set description ( Β) Ventilation device and the above-mentioned (C > moving device) «Shovel treatment is performed on the substrate to be coated in Example 2 using the baths in Example 2; the results are shown in Table 2. fch» WB 50g / litre room for 1 minute 200g / litre 40g / litre 40 g / litre 50 υ * 5 minute shovel 7 5g / litre 19〇β / litre 50 g / litre 401D, 10 minutes 200g / litre 40g / litre 30g A small amount of 50X per liter: 10 minutes, the relay device of the aforementioned (B) • The aforementioned (C > moving device *) and this paper size are applicable to Chinese national standards (CNS > A4 specification (210X297 mm) 19 39638 I 11- 1 — ^ 1 ·--^^ 1--^ TJ ， 1 · (Please read the notes on the back before filling out this page) The Central Bureau of Standards of the Ministry of Industry and Technology Cooperative Consumption Du Yin ^ 41597-, A7 B7 V. Description of the invention (20 ) (D) Vibration setup of the perturbation device * The electroplating of the mounting plating of the actual case 2 of the actual MB example 2 is performed with electric key processing. The results are shown in Table 2. The vibration tearing device of (A), the peristaltic device of (B) above and the perturbation device of (C) above, use the baths of Example 2 to perform the metering operation on the substrate to be plated in Example 2. The results are shown in Table 2. Table 2 HSBV ^^^^ 1 V i _ (Please read the precautions on the back before filling in this f) Example of the use of the device's fine pores "(·) The maximum separation density * 1 (A / d 2) The electric feed of the Gongtong hole is attached to the nature * 2 (*) Tear accuracy «Difference σ ¢ 4 Ratio, (C) 0.5 3. 5 45 4.7 Compared with 0.2 3.5 40 4.7 Example 0.1 3. 5 25 4.7 4 0.05 3.5 X ¢ 3 4.7 than (B) (C) 0.5 4.0 55 4.5 compared with ⑻ 0.2 4. 0 40 4. 5 cases 0.1 4.0 30 4. 5 5 0.05 4.0 X 4.5 ratio (A) * (B) 0.5 6 65 4.0 compared with (C) 0.2 6 55 4.0 cases 0,1 6 45 4.0 6 0.05 6 35 4.0 (A) * (B) 0.5 14 98 1.5 谵 • (C), 0,2 14 90 1.5 cases ( D) 0.1 14 88 1.5 2 0.05 14 84 1.5 This paper size applies to China National Standard (CNS) A4 specifications ( 2 丨 〇X 297 mm) 20 3963 $ Employee Consumer Cooperative Cooperative Seal of the Central Bureau of Standards of the Ministry of Economic Affairs 415977 A7 B7 V. Description of the invention (21) The density of the most ionized electricity refers to the density of the water from the irrigation area, which has not yet been established. In terms of the maximum away-flow density at which the entropy-coke segment occurs. * 2 (Average plated thickness at the center of the hole) + (Average plated thickness at the flat portion of the substrate) X 100 * 3 X indicates that * is not plated in the hole. * 4 σ indicates the difference in collimation of the unevenness of plating thickness. * 5 Air pit failure (X) is a method of inspecting the appearance of electroplating with a magnifying glass and inspecting the appearance of the product with a magnifying glass. To find the bad products caused by the fan. Example 3 Set the thickness of the printed circuit board to 0.8 ... The diameter of the perforations is set to 0.1 and the rest are repeated as in Example 1. The thickness of this ball is 1.6 times that of Example 1, and (thickness) + (diameter) = 0.8 + 0 · 1 = 8 It is also said that it is at a thickness away from the thickness of 8 The actual situation under the conditions of the ratio. The results are shown in Table 3. H; »fft 7 As described above, except that the thickness-to-width ratio is set to 8 μM, the printed circuit board of Example 3 is weighted to the same ft mechanism as that of Comparative Example 1. The results are shown in Table 3. Comparative Example 8 As described above, the printed circuit board of Example 3 was treated in the same manner as in Comparative Example 2 except that the thickness-to-straightness ratio was set to 8 M. The result is like (please read the notes on the back before filling this page).
Jls 本紙張尺度適用中國國家標準（CNS ) A4規格（2Ι〇Χ297公釐） 21 39638 經濟部中央標_局員工消費合作社印製 415977 A7 B7 五、發明説明（22 ) 表3所示。Jls This paper size is in accordance with Chinese National Standard (CNS) A4 specification (2 10 × 297 mm) 21 39638 Printed by the Central Bureau of the Ministry of Economic Affairs _ Bureau of Consumer Cooperatives 415977 A7 B7 V. Description of the invention (22) Table 3 shows.
比較_例S 如前述•除了將其厚度直後比設定為8 Μ外》對實施 例3之印賙鬌路基板簠複與比較例3同嫌的處理。其结果如 表3所示。 表3 ^^^1 ^^^^1 ^^—^1 ^^^^1 m^i ^^^^1 λϋ— ^ J . · -、 > (請先閲讀背面之注意事項再填寫本頁) 例 使用裝置 厚度 (>) 乳裡 () 厚度直徭 比 貢通孔之 竃鑲附著 性（》> fcfc 較 例 7 (B) * (C) 0 . 8 0.1 8 20 比 較 例 8 (B) * (C) * (D) 0.8 0.1 8 30 比 較 例 9 (A) * (B) •(C) 0.8 0.1 8 46 實 例 3 (A) ， （B) ，（C)， (D) 0.8 0,1 8 86 本紙張尺度適用中國國家標準（CNS ) Α4規格（210><297公嫠） 22 39638 415977 A7 B7 經漪部中央標羋局員工消費合作社印製 五、發明説明（23) 1 1 Μ 上 鎵 合 表 1〜表3之資 料*可 以 看 出相 較於 只 併 用 1 1 裝 置 Β _ (：的 情 形 併 用 裝 置B ，C，&時或併用装置A Β 1 1 1 C 時 對 貢 穿 孔 之 霣 m 附 蓍性 輿1鍍 厚 度 不均 勻性 之 樣 準 1 [ 請 1 | 偏 差 多 少 有 所 改 菩 〇 先 閱 1 I 讀 1 I 然 而 併 用 A · Β ψ C .D之 四種装 置 之 本發 明， 在 貢 穿 背· 1 I 之 1 孔 之 罨 鍍 附 著 性 » 檷 準 m 差及 氣坑不 良 率 中 · 有ϋ 蕃 的 改 注. 意 I 善 該 效 果 之 顧 蕃 性 只 要掄 視比較 例 2及比較洌3輿 實 豳 事 項 真 1 1 -ΓΤ 填 例 1 ； 比較例5及 比 較 例 8與實旛例2; 以 及 比較 例8 及 比 較 寫 裝 頁 1 例 9輿實旛例3 之 賁 科 即 當 可明 白0 >_-· 奮 m 例 丄 1 使 用 第 9麵〜第11_所示之裝置( 1 被 霄 JL 物 訂 將 枚 厚 度 8· 鼸1 A4版尺寸大小 具有竄樓0. 05· 1 之 1 ί I 微 m 貢 穿 孔 之 玻 璃 環 氣 覆 緬叠 曆板， 平 行 懸吊 進行 霣 m 0 1 1 I 振 動 携 拌 装 置 係 使 用 與實 施例〗相阳的裝置。 1 1 通 氣 裝 置 馀 使 用 兩 支 外徑 75·· * 内 播 50·· *氣 孔 直 徑 - 1 200 i t m 氣 孔 率 40 % 之 散 氣管 0 1 1 擬 動 裝 置 係 賦 予 20次 /分鐘之± 15騰 幅度之攝動< > 1 I 1 . 脫 腰 * m 濶 步 釀 ( 使 用 含有 由乙基 溶 蠼 繭所 成之 水 m 性 1 溶 供 輿 m 成 分 之 商 品 名 恩布 列德M L B - 496之製劑> 1 1 I 禳 之 内 部 尺 寸 1 80 X 750 X 500鼸職( 寬 度 X « 度X 离 度 ) 1 1 處 理 條 件 (A) (Β) t (C) ⑻之 四 種 裝置 予Μ 動 作 » 1 1 於 βου 處 理 5分鑣。 1 1 2 . 水 洙 步 驟 1 1 本紙張尺度適用中國國家標準（cns) A4規格（2iox 297公釐） 2 3 39638 經漪部中央標隼局員工消費合作社印製 415977 A7 B7五、發明説明（24 ) 處理條件：開動（B)的裝置，在室滇下水洗5分鐘。 3. 触刻步鼸（使用含有邊錳酸鉀之商品名恩布列德MLB-497 之製劑） 權之内部尺寸：1 80 X 450 X 500 處理條件：（A)· (B)* (C)* (D>之四種裝置予以ft作， 於7 0 t處理5〜1 0分鑪。 4. 水洗步臟 播之内部尺寸：1 80 X 450 X 500 處理條件：使（Β)之装置動作•於室*下處理5分瞳。 5. 水洗步鼸 權之內部尺寸：180 X 450 X 500 處理條件：使（Β)之装置動作，於室溫下處理5分鐮。 6. «原步鼸（使用含有*酸的商品名恩布列雒MLB-791之製m ) 槽之内部尺寸：1 80 X 450 X 500 處理條件：（A)，（B)，（C)，（D)之四種装置予以》作* 於60*C處理5分鐮。 7. 水洗步驟 槽之內部尺寸：1 80 X 45 0 X 500 處理絛件：使（B)之裝置動作，於室灌下處理5分縷。 8. 調節步驟（使用含有界面活化莆之商品名美霣布列德PC- 321之製_ ) 槽之内部尺寸：180 X 45 0 X 500 處理條件：使（B)之装置動作，在處理5分鐘。 - - *^ϋ - - I I - I ml -- . - _ I I 1 i 、T , f (#先閱讀背面之注意事項再填寫本頁} 本紙張尺度適用中國國家標率（CNS ) A4規格（2】〇X 297公釐） 24 39Θ38 經滴部中央標準局貝工消費合作社印製 415977 A7 B7五、發明説明（25) 9. 水洗步骤 槽之内部尺寸：1 80 X 450 X500 處理條件：使（B)之裝置動作*在室»下處理5分鐘。 10. 微触刻步驪（使用含有邊碓酸墉之商品名美露布列籌 AD-331之製贿} 槽之内部尺寸：180X 450X500 處理條件：使（B)之裝置動作•在處理5分瞳。 11. 水洗步驟 權之內部尺寸：1 80 X 450 X 500 處理條件：使（Β)之裝置動作*在室溫下處理5分鐘。 12. 稀磧駿洗步驟（10 %雄酸} 權之内部尺寸：180 X 450 X 500 處理條件：使（Β)之装置動作*在室湩下處理5分鐘。 13. 水洗步臟 槽之内部尺寸：1 80 X 450 X 500 處理條件：使（Β)之裝置動作·在室瀑下處理5分鐘。 14. 頊洩瀆步鳜（使用含有氯酸堪之商品名恩布列德PC-236之製麵 ） 權之内部尺寸：1 8 0 X 4 5 0 X 5 0 0 處理條件：使（B)之裝置動作，在室*下處理5分鐘。 15. 活性化步驟（使用含有Sn,Pd各麵子的鏐》液之商品名 恩布列德活化劑444之製劑） 榷之内部尺寸·· 180X 450X 500 處理條件：使（B)之装置動作·在室瀣下處理5分瞳。 --------裝-- (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS > A4規格（2丨OX297公釐） 25 39638 經濟部中央標隼局員工消費合作社印嚷 415977 A7 B7五、發明説明（26) 16. 水洙步鼸 镄之内部尺寸：1 80 X 450 X 500 處理條件：使（B)之裝置動作·在室灌下處理5分鐘。 17. 加速步驊（使用含有界面活性劑之商品名美霱布列德 PA-360之製繭） 權之内部尺寸：180X 450X 500 «理條件：使（B)之裝置動作·在室暹下處理5分鏟。 18. 水洗步_ 槽之内部尺寸：180 X 450 X 500 處理條件：使（B)之裝置動作，在室漘下處理5分》。 19. 無霣解麵霱鍍步鼸（使用按照實嫌例1之姐成之商品名 美露布列itCu-390之製 權之内部尺寸：1 80 X 750 X 500 處理條件：（A)，（B)，（C)，（D)之四種裝置予以動作 •在室溫下處理20分鐘。 20. 水洗步鼸 槽之内部尺寸：180 X 750 X 500 處理條件：使（B)之裝置醣作，在室灌下廪理5分鐮。 21. 稀磙酸洗步朦（l〇x硫酸） 槽之内部尺寸：180 X 7 50 X500 «理條件：在萤滬下處理1分鐘。 22. 霄鍍步朦（按照實嫌例1之姐成之鋦霣鍍浴） 權之内部尺寸：180 X 7 50 X 500 處理條件：（A) · (B) · (C) · (D>之四種装置予以動作 -i *nl —^1— —^― in I- -- ^^^1 —^ϋ ^—J 、1' « . .. (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 26 3Θ638 415977 經滴部中央標準局員工消費合作社印衆 A7 B7五、發明説明（27 ) *在3 0 1C «理2 0分鐮。 23.水洗步》 槽之内部尺寸：1 8 Ο X 7 5 Ο X 5 0 0 處理條件：使（B)之裝置動作·在室»下處理5分鐘。 第1· 3< 19· 22之權•由於設置（A)装置的Η像而成 為較大的權。 评估 最离[流密度： 12.0A/d·2 II穿孔之霣鍍附蓍性： 90XM上 σ 1.2 氣坑不良率 0 * 祓奥 (1 )由於本發明的（《係•對0 . 0 3〜0 . 0 5 之微细孔内面也 可均勻霣鍍•因此可大幅度降低1C·層基板及印觸鼋 路基板之不良寒》 (2) 由於本發明的鼷係 > 可大幅度地提高霣績之嶸開始發 生熝焦現象之爾流密度阪界值*因此可大幅地提高霣 錶败率。 (3) 貢穿孔之霣鍍附蕃性（《)及由<r表示之霣鼸顏均勻性 有顯着的提高。 (4) 可大幅地降低氣坑不良率（*> (5) 厚度直徑比高而小孔用印雇|電路基板的植優異的爾鍍 方法。 (6) 能构以比Μ注更短的時間製得比Μ往更優良的製品。 n^· 1^1^1 ί ^^^1 n 1 - - - ^1.^1 、T (請先閱讀背面之;1-意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 27 39638 經满部中央標準局員工消費合作社印製 415977 A7 B7五、發明説明（28 ) _式夕μ簠銳明 第1國係顬示本發明所使用裝置之一具《例之平面圈 〇 第2 係顯示第1 之裝置之正面鼸。 第3 _侏顧示第1匾之裝置之側面圓。 第4 HI係顧示第2 之嬢X-X剖面_。 第5画傈顯示第3匪之嫌Y-Y剖面匾。 第6 _係顏示將振動葉片固定在振動櫸之一黴《之放 大局部剖面。 第7 _係顯示横振動攢拌裝置之一例之平面_。 第8 _係顯示第7 _之剌面_。 第9 係顯示本發明所使用裝置之其他具藿例之平面 第10疆係ff示第9 _之裝置之正面_。 第11画係顏示第9鼸之装置之側面_。 符號之..銳厢 1 處理榷（前λ理槽或電鍍播） 2 攝動用接受框架 3 使握tt用接受框摄_r之攫動馬達 4 振動攪拌裝置用之振動馬達 5 播極 6 播罹 7 潸動式電極接受部 8 擬_框用接受台 ^^1 —^ϋ ^^^1 \ 1 -5 - -- , (諳先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 28 39638 經濟部中央標隼局貝工消費合作杜印髮 415977 A7 B7 五、發明説明（29) 9 裝置接受台 10 送氣至散氣管用之應繕空氣入口 11 加热器 12 敢氣管 13 焓極棒捿受部 14 擬動用接受框架振動禺達 16 振動棒 17 振動蔞Η 18 振動蔞片固定部件 19 振動應力分敢裝置 20 彌簧 21 上部支持框架 22 下部支持框架 23 氟糸聚合物薄膜 24 螵嫌 25 振動傳達框架 26 平衡器 27 附有彌簧之支持樺 28 加热器 29 通氣用空氣鼷縮機 30 陰極檷棒接受部 —1 -I I -- ! I - - - — —- - I— I- I H II Τ» -5 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CMS ) A4規格（210X29?公釐） 29 39638Comparative example is as described above, except that the thickness-to-rear ratio is set to 8 μm. The printed circuit board of Example 3 is treated in the same way as Comparative Example 3. The results are shown in Table 3. Table 3 ^^^ 1 ^^^^ 1 ^^ — ^ 1 ^^^^ 1 m ^ i ^^^^ 1 λϋ— ^ J. ·-, ≫ (Please read the notes on the back before filling in this Page) For example, the thickness of the device (>) The thickness of the breast () The thickness of the inlay is higher than the adhesion of the through hole (>>) fcfc Comparative example 7 (B) * (C) 0. 8 0.1 8 20 Comparative example 8 (B) * (C) * (D) 0.8 0.1 8 30 Comparative Example 9 (A) * (B) • (C) 0.8 0.1 8 46 Example 3 (A), (B), (C), (D) 0.8 0,1 8 86 This paper size applies Chinese National Standard (CNS) A4 specification (210 > < 297 gong) 22 39638 415977 A7 B7 Printed by the Consumers' Cooperative of the Central Bureau of Standards, Ministry of Economic Affairs 5. Description of the invention (23 ) 1 1 Μ on the gallium table 1 ~ Table 3 * It can be seen that compared to using only 1 1 device B _ (: in the case of combined device B, C, & or combined device A Β 1 1 1 C对 m of the perforation of the tribute perforated 舆 1 attached to the thickness of the plate 1 non-uniformity of the thickness of the plate 1 [please 1 | the deviation has changed somewhat. Read first 1 I read 1 I however The present invention using four types of A · B ψ C .D devices has a modified rewrite in the Gong Chuanbei · 1 I 1 hole 罨 plating adhesion »檷 standard m difference and air hole defect rate. I want to consider the nature of this effect as long as I despise Comparative Example 2 and Comparative Example 3 Matters of Reality 1 1-Γ Fill in Example 1; Comparative Example 5 and Comparative Example 8 and Practical Example 2; and Comparative Example 8 and Comparing the writing page 1 Example 9 The facts of Example 3 can be understood immediately 0 > _- · Fen m Example 1 Use the device shown on the 9th to 11th (1 by Xiao JL A thickness of 8 · 鼸 1 A4 version has a floor space of 0. 05 · 1 to 1 ί I microm tribute perforated glass ring-covered overlay calendar plate, suspended in parallel for 霣 m 0 1 1 I vibration carrying mixing device The system is the same as in the embodiment. 1 1 Ventilation device with two outer diameters of 75 ·· * Inner seeding 50 ·· * Stomatal diameter-1 200 itm Diffuser with 40% porosity 0 1 1 The pseudo-actuating device gives a range of ± 15 ton 20 times per minute Perturbation < > 1 I 1. Waist-down * m 濶 Step brewing (using water containing ethyl cocoon to make the cocoon m sex 1 to dissolve the constituents of the trade name Embryl MLB-496 of Preparations> 1 1 Internal dimensions of I 禳 1 80 X 750 X 500 鼸 (Width X «Degree X Departure) 1 1 Processing conditions (A) (B) t (C) ⑻ four devices to M operation» 1 1 Process 5 minutes at βου. 1 1 2. Water Margin Step 1 1 This paper size applies Chinese National Standard (cns) A4 (2iox 297 mm) 2 3 39638 Printed by the Consumers' Cooperative of the Central Bureau of Standards, Ministry of Yiping System 415977 A7 B7 V. Description of the invention (24) Processing conditions: Operate the device (B) and wash it in the room for 5 minutes. 3. Touch the step (use the brand name Enbride MLB containing potassium manganate). -497 preparation) Internal dimensions of weight: 1 80 X 450 X 500 Processing conditions: (A) · (B) * (C) * (D >) Four types of devices are made to ft, and 5 to 10 minutes of furnace are processed at 70 t. 4 Internal dimensions of the dirty step of washing step: 1 80 X 450 X 500 Processing conditions: The device of (B) is operated • 5 minutes of pupils are processed under the room *. 5. Internal dimensions of the step of washing step: 180 X 450 X 500 Processing conditions: The device of (B) is operated, and the sickle is processed for 5 minutes at room temperature. 6. «Original step 鼸 (using the brand name of the acid containing EMBR 雒 雒 MLB-791 m) Internal dimensions of the tank: 1 80 X 450 X 500 Processing conditions: (A), (B), (C), (D) The four devices shall be treated as * treated at 60 * C for 5 minutes. 7. The internal dimensions of the washing step tank: 1 80 X 45 0 X 500 Handle the file: Operate the device of (B) and process it for 5 minutes under the chamber. 8. Adjustment steps (using the brand name PC-321 containing interface-activated concrete) _) Internal dimensions of the tank: 180 X 45 0 X 500 Processing conditions: The device of (B) is operated, and it is processed for 5 minutes. --* ^ ϋ--II-I ml-.-_ II 1 i, T, f (#Please read the notes on the back before filling out this page} This paper size applies to China National Standard (CNS) A4 specifications ( 2] 〇X 297mm) 24 39Θ38 Printed by the Central Standards Bureau of the Ministry of Standards, printed by the Shellfish Consumer Cooperative 415977 A7 B7 V. Description of the invention (25) 9. Internal dimensions of the washing step tank: 1 80 X 450 X500 Processing conditions: make (B) Operation of the device * Processing under the room »for 5 minutes. 10. Micro-touch engraved step (using the brand name Meilubuchi AD-331 containing bridle acid) 墉 Internal dimensions of the tank: 180X 450X500 Processing conditions: The device of (B) is operated • The pupil is processed at 5 minutes. 11. Internal dimensions of the washing step right: 1 80 X 450 X 500 Processing conditions: The device of (B) is operated * Processed for 5 minutes at room temperature . 12. Thin washing step (10% androic acid) The internal dimensions of the weight: 180 X 450 X 500 Processing conditions: The device of (B) is operated * Processed under the chamber for 5 minutes. 13. Washing the dirty tank Internal dimensions: 1 80 X 450 X 500 Processing conditions: Operate the device of (B) • Process under a room waterfall for 5 minutes. Use the surface name of the product containing chloric acid (Embride PC-236). The inner dimensions of the weight: 1 8 0 X 4 5 0 X 5 0 0. Processing conditions: The device of (B) is operated, under the room * Treatment for 5 minutes. 15. Activation step (using the formulation of the product name Enbride Activator 444 containing 镠 solution of Sn and Pd), internal dimensions of 180X 450X 500 processing conditions: make (B) Device operation: Handle 5 minutes of pupils under the chamber. -------- Equipment-(Please read the precautions on the back before filling this page) This paper size applies to Chinese national standards (CNS > A4 specifications (2 丨 OX297 mm) 25 39638 Employees' Cooperative Cooperative Seal of the Central Bureau of Standards of the Ministry of Economic Affairs 415977 A7 B7 V. Description of Invention (26) 16. Internal dimensions of Water Margin: 1 80 X 450 X 500 Processing conditions: Operate the device of (B) and treat it in the chamber for 5 minutes. 17. Speed up the step (use cocoon made of surfactant-containing brand name Mibride PA-360) Weight inside dimensions: 180X 450X 500 «Conditions: Operate the device of (B) · Handle a 5-minute shovel under the room. 18. Washing step_ Internal dimensions of the tank: 180 X 4 50 X 500 Processing conditions: Operate the device of (B), and process 5 minutes under the room temperature. 19. Non-decomposition surface (plating step) (using the product name Merlot, which is based on the sister of case 1, itCu Internal dimensions of the -390 power: 1 80 X 750 X 500 Processing conditions: (A), (B), (C), (D) Four types of devices will operate • Process at room temperature for 20 minutes. 20. Washing step tank internal dimensions: 180 X 750 X 500 Processing conditions: make the device of (B) sugar, and irrigate for 5 minutes in the room. 21. Dilute acid pickling step (10x sulfuric acid) Internal dimensions of the tank: 180 X 7 50 X500 «Physical conditions: processing for 1 minute under the firefly. 22. Xiao Pingbu Hao (according to Sister Cheng's bath of actual case 1) Internal dimensions of weight: 180 X 7 50 X 500 Processing conditions: (A) · (B) · (C) · (D > The four devices are actuated -i * nl — ^ 1— — ^ ― in I--^^^ 1 — ^ ϋ ^ —J, 1 '«. .. (Please read the precautions on the back before filling in this (Page) This paper size is in accordance with Chinese National Standard (CNS) A4 (210X297 mm) 26 3Θ638 415977 by the Consumer Standards Cooperative of the Central Bureau of Standards of the People's Republic of China A7 B7 5. Description of the invention (27) * In 3 0 1C «Management 2 0 minute sickle. 23. Washing step "Internal dimensions of the tank: 1 8 〇 X 7 5 Ο X 5 0 0 Processing conditions: The device of (B) is operated and processed under the room» for 5 minutes. Section 1 · 3 < 19 · Right of 22 • Larger right due to the artifact of the installation (A). Assess the closest [flow density: 12.0A / d · 2 II perforated metal plating adhesion: 90xM σ 1.2 air pocket defect Rate 0 * * 奥 (1) As the present invention ("•• 0. 0 ~ 3. 0 5 can also be uniformly plated on the inner surface of the micropores, it can significantly reduce 1C · layer substrate and printed circuit The bad cold of the substrate '' (2) by The system of the present invention can greatly increase the threshold value of the Seoul current density where the scorch phenomenon starts to occur *, and thus can greatly improve the failure rate. (") And the uniformity of the color represented by < r has been significantly improved. (4) Can significantly reduce the rate of air pocket defects (* > (5) High thickness-diameter ratio and small holes used for printing | circuits Excellent plating method for substrates. (6) It is possible to fabricate better products than M in a shorter time than M injection. N ^ · 1 ^ 1 ^ 1 ί ^^^ 1 n 1--- ^ 1. ^ 1, T (Please read the back; 1-Issue before filling out this page) This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 27 39638 Consumption by employees of the Central Bureau of Standards Cooperative printed 415977 A7 B7 V. Description of the invention (28) _ Shi Xi μ 簠 Sharp 1st country shows one of the devices used in the present invention with the plane circle of the example. The 2nd line shows the front of the first device鼸. 3rd _ Gu Gu shows the side circle of the device of the 1st plaque. 4th HI is Gu Xi 2nd XX section _. The 5th display shows the 3rd band suspected YY section plaque. 6_ _ Yan The vibration vane fixing one mold vibration beech "large cross-sectional partial discharge. _ 7 lines showed one case of cross-plane vibration means to save the mix _. _ 8 based on the display surface of the first punching of 7 _ _. The 9th line shows other exemplary planes of the device used in the present invention. The 10th line ff shows the 9th front side of the device. The 11th painting shows the side of the device of the 9th frame. Symbols: sharp box 1 processing (front lambda slot or electroplating broadcast) 2 perceptual receiving frame 3 receiving frame for grip tt_r swing motor 4 vibration motor for vibration stirring device 5 broadcast pole 6 broadcast Suffering 7 潸 Electrode receiving section 8 Pseudo_frame receiving table ^^ 1 — ^ ϋ ^^^ 1 \ 1 -5--, (谙 Please read the precautions on the back before filling this page) This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 28 39638 Cooperating with shelling and consumerism of the Central Bureau of Standards of the Ministry of Economic Affairs Du Yinfa 415977 A7 B7 V. Description of the invention (29) 9 Device receiving table 10 Application of air supply to diffuser缮 Air inlet 11 Heater 12 Dare gas pipe 13 Enthalpy pole 捿 Receiving part 14 Vibration receiving frame for vibration 禺 Up to 16 Vibration bar 17 Vibration 蒌 Η 18 Vibration cymbal fixing part 19 Vibration stress separating device 20 Mi spring 21 Upper support frame 22 Lower support frame 23 Fluorofluorene polymer film 24 No. 25 Vibration transmission frame 26 Balancer 27 Support birch with Mi spring 28 Heater 29 Air shrinking machine for ventilation 30 Cathode rod receiving section—1 -II- ! I---— —--I— I- IH II Τ »-5 ( Please read the notes on the back before filling out this page) This paper size is applicable to the Chinese National Standard (CMS) A4 specification (210X29? Mm) 29 39638