CN202898581U - Electrolytic bath - Google Patents
Electrolytic bath Download PDFInfo
- Publication number
- CN202898581U CN202898581U CN 201220564736 CN201220564736U CN202898581U CN 202898581 U CN202898581 U CN 202898581U CN 201220564736 CN201220564736 CN 201220564736 CN 201220564736 U CN201220564736 U CN 201220564736U CN 202898581 U CN202898581 U CN 202898581U
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- electrolyzer
- vibration probe
- electrolytic solution
- electrolyte
- ultrasonic generator
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Abstract
The utility model provides an electrolytic bath which at least comprises an electrolyte purifying device. The electrolyte purifying device comprises an oscillating probe for stirring an electrolyte in the electrolytic bath and an ultrasonic generator. The oscillating probe is arranged inside the electrolytic bath, and the ultrasonic generator is connected with the oscillating probe. According to the electrolytic bath provided by the utility model, the oscillating probe in the electrolyte vibrates with a certain frequency and drives the electrolyte to form a fine backflow, so that pollutants on the surface of an anode is peeled from the metal surface of the anode and enter the electrolyte, and then filtered through filtering, so that the metal surface of the anode and the electrolyte are cleaned, and the electrolytic process is continued. The electrolytic bath provided by the utility model is simple in structure and convenient to use, and is suitable for industrial production processes.
Description
Technical field
The utility model relates to a kind of field of semiconductor manufacture, relates to a kind of electrolyzer.
Background technology
Along with individual devices becomes more and more less, the travelling speed of unicircuit is more and more higher.Under the speed of hundreds of megahertz, signal must just can prevent the program delay by metal system with enough fast speed.Wish is improved the delay of metal connecting line and can be adopted the lower metal of resistance value as the stray capacitance of dielectric layer between plain conductor or reduction plain conductor.Copper wiring is a feasible program that solves delayed effect, compares with the resistance of aluminium 3.1 m Ω/cm, and the resistance of copper only has 1.7m Ω/cm, and electroconductibility is better than aluminium, and copper itself has deelectric transferred ability simultaneously, and can carry out at low temperatures deposit.At present, the copper film can carry out deposit by physical vapor deposition (PVD), chemical vapor deposition (CVD), electroless plating method, electrochemical plating etc.Wherein, the copper electrochemical plating have that cost is low and the rate of output is high, are widely used in the suitability for industrialized production.
The copper electrochemical plating are the copper in the chemical solution (being also referred to as electroplate liquid or electrolytic solution) to be transferred to the surface of wafer, to form the method for copper layer.But in the process of cupric electrolysis, detrimental impurity can enter electrolytic solution and constantly enrichment by electrochemical dissolution in the blister copper, and this will have a strong impact on the quality of cathode copper layer.And along with further the carrying out of electrolysis, even electrolysis can occur stop.
Existing cell construction schematic diagram as shown in Figure 1.Carrying out along with electrolysis process, foreign-matter contamination 10A concentration in the electrolytic solution constantly increases, and the anode copper metal 6A that is deposited on electrolytic vessel 2A inside is surperficial, can cause like this increase of electrolysis loop resistance, and then meeting is so that the rising of required volts DS, and the voltage that provides is constant, will cause at last being stopped by wafer electroplating copper 5A electrolytic process.
In order to prevent the generation of above-mentioned phenomenon, design real necessity that belongs to of refining plant of electrolytic solution in a kind of electroplating technology.
The utility model content
The shortcoming of prior art in view of the above, the purpose of this utility model is to provide a kind of electrolyzer, is used for solving the problem that prior art anode electrolytic cell metallic surface pollutant sediment causes electrolysis to be ended.
Reach for achieving the above object other relevant purposes, the utility model provides a kind of electrolyzer.
Described electrolyzer comprises an electrolyte purification device at least, and described electrolyte purification device comprises for the vibration probe and the ultrasonic generator that stir electrolyzer electrolytic solution; Described vibration probe is located at electrolyzer inside; Described ultrasonic generator links to each other with the vibration probe.
Preferably, described electrolyzer at least also comprise holding the electrolytic vessel, negative plate, positive plate of electrolytic solution, by wafer electroplating, anode metal, fixed cap, liquid outlet, liquid inlet; Describedly fixed by described fixed cap by wafer electroplating, and contact with electrolytic solution; Described anode metal is positioned at the inside of described electrolytic vessel and contacts with electrolytic solution; Described positive plate and described anode metal are electrically connected, described negative plate and describedly be electrically connected by wafer electroplating; Described liquid outlet and liquid inlet are separately positioned on the sidewall of described electrolytic vessel.
Preferably, described electrolyte purification device also comprises electrolyte circulation means, and described electrolyte circulation means comprises recycle pump, strainer and outlet valve, inlet valve; Described outlet valve is connected with liquid inlet with described liquid outlet respectively with inlet valve; Described recycle pump links to each other with described outlet valve; Described strainer is between described recycle pump and the inlet valve.
Preferably, described vibration probe comprises vibration probe body and positioning element; Described vibration probe is fixed on the described electrolyzer by described positioning element.
Preferably, the material of described vibration probe is pure titanium material.
Preferably, described vibration probe is cross shape.
Preferably, described positioning element comprises set screw.
Preferably, described ultrasonic generator comprises that output rating is the ultrasonic generator of 200 ~ 300W.
Preferably, described electrolytic solution is copper-bath.
As mentioned above, electrolyzer of the present utility model, have following beneficial effect: electrolyzer of the present utility model pops one's head in the certain frequency vibration-generating vibration in the electrolytic solution by ultrasonic generator, the vibration probe drives electrolytic solution and forms trickle backflow, thereby the pollutent that makes the anode metal surface is peeled off and is entered electrolytic solution, by filtering the pollutent in the electrolytic solution is filtered, it is clean that anode surface and electrolytic solution recover again, and electrolytic process can be proceeded; And electrolyzer ultra-sonic oscillation of the present utility model are simple in structure, easy to use, are applicable to Industrial processes.
Description of drawings
Fig. 1 is shown as electrolyzer schematic diagram of the prior art.
Fig. 2 is shown as electrolyzer schematic diagram of the present utility model.
The element numbers explanation
Embodiment
Below by specific specific examples embodiment of the present utility model is described, those skilled in the art can understand other advantages of the present utility model and effect easily by the disclosed content of this specification sheets.The utility model can also be implemented or be used by other different embodiment, and the every details in this specification sheets also can be based on different viewpoints and application, carries out various modifications or change under the spirit of the present utility model not deviating from.
See also Fig. 2.Need to prove, the diagram that provides in the present embodiment only illustrates basic conception of the present utility model in a schematic way, satisfy only show in graphic with the utility model in relevant assembly but not component count, shape and size drafting when implementing according to reality, kenel, quantity and the ratio of each assembly can be a kind of random change during its actual enforcement, and its assembly layout kenel also may be more complicated.
As shown in Figure 2, the utility model provides a kind of electrolyzer, and described electrolyzer comprises an electrolyte purification device 1 at least, and described electrolyte purification device 1 comprises vibration probe 11 and ultrasonic generator 12.
Described vibration probe 11 is located at that electrolyzer is inner and be used for stirring the electrolytic solution of electrolyzer, and this vibration probe 11 comprises vibration probe body and positioning element 111, and the vibration body of popping one's head in is fixed on the described electrolyzer by described positioning element 111.The shape of described vibration probe 11 is not limit, and preferably, includes but not limited to cross shape, T font etc.The material of described vibration probe 11 is not limit, and comprises pure titanium, stainless steel etc.In the present embodiment, be preferably pure titanium material.Described positioning element 111 is preferably set screw, and quantity is 2.
Described ultrasonic generator 12 links to each other with described vibration probe 11, is used for providing the 11 required vibrational frequencies of popping one's head in of vibrating, and preferably, it comprises that output rating is the ultrasonic generator of 200 ~ 300W.
In addition, described electrolyzer at least also comprise holding the electrolytic vessel 2, negative plate 3, positive plate 4 of electrolytic solution, by wafer electroplating 5, anode metal 6, fixed cap 7, liquid outlet 8 and liquid inlet 9.
Wherein, described fixing by described fixed cap 7 by wafer electroplating 5, be convenient to pick and place, and avoid in the electrolytic process wafer 5 surfaces to be polluted, contacted with electrolytic solution by wafer electroplating 5, so that by required metal level on wafer electroplating 5 plated surfaces.
Described anode metal 6 is positioned at the inside of described electrolytic vessel 2 and contacts with electrolytic solution.In the present embodiment, as shown in Figure 2, anode metal 6 is positioned at the bottom of described electrolytic vessel 2.Anode metal 6 comprises copper metal, aluminum metal and aluminum-copper alloy etc.The present embodiment is the copper metal.And aforementioned vibration probe 11 is dismountable, is convenient to like this replacing of anode metal 6.
Described positive plate 4 is electrically connected with described anode metal 6, and described negative plate 3 is electrically connected by wafer electroplating 5 with described.
The selection of described electrolytic solution is determined based on the material of anode metal 6.For example, if anode metal 6 is copper, then electrolytic solution is chosen as copper-bath; If anode metal 6 is aluminium, then electrolytic solution is chosen as aluminum ions salt compounds.Therefore the present embodiment electrolytic solution is copper-bath.
Described liquid outlet 8 and liquid inlet 9 are separately positioned on the sidewall of described electrolytic vessel 2, are used for output and the input of electrolytic solution.
In addition, described electrolyte purification device 1 also comprises electrolyte circulation means 13, and this circulation device 13 comprises recycle pump 131, strainer 132, outlet valve 133 and inlet valve 134.
Described outlet valve 133 is connected with liquid inlet 9 with described liquid outlet 8 respectively with inlet valve 134; Described recycle pump 131 links to each other with described outlet valve 133; Described strainer 132 is between described recycle pump 131 and the inlet valve 134.
Need to prove, the structure that it should be appreciated by those skilled in the art that electrolyzer is not as limit, and for example, electrolyzer inside can also comprise scatterer, makes the film of electrolyte stratification, additive entrance etc.Again for example, electrolyte circulation means can also comprise under meter and some other pipeline and unit that specific function is arranged.
The implementation step of the electrolyzer that the utility model provides in the actual process process comprises following at least:
At first, at electrolyzer ultrasonic generator 12 and vibration probe 11 are installed;
Secondly, open ultrasonic generator 12, vibration probe 11 beginnings in the electrolytic solution are with the certain frequency vibration-generating, and vibration probe 11 drives electrolytic solution and forms trickle backflow, enter electrolytic solution thereby make the pollutent 10 of anode copper metal 6 peel off anode metal 6 surfaces;
Again, open outlet valve 133 and inlet valve 134, ON cycle pump 131 enters circulation passage with the electrolytic solution of pollutent 10, by strainer 132 pollutent 10 in the electrolytic solution is filtered out, and clean electrolytic solution then enters electrolyzer;
At last, close outlet valve 133 and inlet valve 134.
In sum, the utility model provides a kind of electrolyzer, install a ultrasonic generator additional at electrolyzer, the pollutent that is attached to anode surface is peeled off, solved the problem that causes electrolysis to be ended because of anode electrolytic cell metallic surface pollutant sediment in the prior art.And electrolyzer ultra-sonic oscillation of the present utility model are simple in structure, easy to use, are applicable to Industrial processes.
So the utility model has effectively overcome various shortcoming of the prior art and the tool high industrial utilization.
Above-described embodiment is illustrative principle of the present utility model and effect thereof only, but not is used for restriction the utility model.Any person skilled in the art scholar all can be under spirit of the present utility model and category, and above-described embodiment is modified or changed.Therefore, have in the technical field under such as and know that usually the knowledgeable modifies or changes not breaking away from all equivalences of finishing under spirit that the utility model discloses and the technological thought, must be contained by claim of the present utility model.
Claims (9)
1. electrolyzer, it is characterized in that: described electrolyzer comprises an electrolyte purification device at least, described electrolyte purification device comprises for the vibration probe and the ultrasonic generator that stir electrolyzer electrolytic solution; Described vibration probe is located at electrolyzer inside; Described ultrasonic generator links to each other with the vibration probe.
2. electrolyzer according to claim 1 is characterized in that: described electrolyzer at least also comprises holding the electrolytic vessel, negative plate, positive plate of electrolytic solution, by wafer electroplating, anode metal, fixed cap, liquid outlet, liquid inlet; Describedly fixed by described fixed cap by wafer electroplating, and contact with electrolytic solution; Described anode metal is positioned at the inside of described electrolytic vessel and contacts with electrolytic solution; Described positive plate and described anode metal are electrically connected, described negative plate and describedly be electrically connected by wafer electroplating; Described liquid outlet and liquid inlet are separately positioned on the sidewall of described electrolytic vessel.
3. electrolyzer according to claim 1, it is characterized in that: described electrolyte purification device also comprises electrolyte circulation means, described electrolyte circulation means comprises recycle pump, strainer and outlet valve, inlet valve; Described outlet valve is connected with liquid inlet with described liquid outlet respectively with inlet valve; Described recycle pump links to each other with described outlet valve; Described strainer is between described recycle pump and the inlet valve.
4. electrolyzer according to claim 1 is characterized in that: described vibration probe comprises vibration probe body and positioning element; Described vibration probe is fixed on the described electrolyzer by described positioning element.
5. electrolyzer according to claim 4 is characterized in that: the material of described vibration probe is pure titanium material.
6. it is characterized in that according to claim 4 or 5 described electrolyzers: described vibration probe is cross shape.
7. electrolyzer according to claim 4, it is characterized in that: described positioning element comprises set screw.
8. electrolyzer according to claim 1, it is characterized in that: described ultrasonic generator comprises that output rating is the ultrasonic generator of 200 ~ 300W.
9. electrolyzer according to claim 1, it is characterized in that: described electrolytic solution is copper-bath.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220564736 CN202898581U (en) | 2012-10-30 | 2012-10-30 | Electrolytic bath |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220564736 CN202898581U (en) | 2012-10-30 | 2012-10-30 | Electrolytic bath |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202898581U true CN202898581U (en) | 2013-04-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220564736 Expired - Fee Related CN202898581U (en) | 2012-10-30 | 2012-10-30 | Electrolytic bath |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202898581U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107119312A (en) * | 2017-06-20 | 2017-09-01 | 安徽吉乃尔电器科技有限公司 | A kind of hardware plate derusting device |
-
2012
- 2012-10-30 CN CN 201220564736 patent/CN202898581U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107119312A (en) * | 2017-06-20 | 2017-09-01 | 安徽吉乃尔电器科技有限公司 | A kind of hardware plate derusting device |
| CN107119312B (en) * | 2017-06-20 | 2019-06-18 | 安徽吉乃尔电器科技有限公司 | A kind of hardware plate derusting device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130424 Termination date: 20181030 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |