TW369601B - Probe card - Google Patents

Probe card

Info

Publication number
TW369601B
TW369601B TW087109551A TW87109551A TW369601B TW 369601 B TW369601 B TW 369601B TW 087109551 A TW087109551 A TW 087109551A TW 87109551 A TW87109551 A TW 87109551A TW 369601 B TW369601 B TW 369601B
Authority
TW
Taiwan
Prior art keywords
film
printed substrate
probe
center
load rod
Prior art date
Application number
TW087109551A
Other languages
English (en)
Inventor
Akio Kojima
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Application granted granted Critical
Publication of TW369601B publication Critical patent/TW369601B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
TW087109551A 1997-06-17 1998-06-16 Probe card TW369601B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16009997 1997-06-17

Publications (1)

Publication Number Publication Date
TW369601B true TW369601B (en) 1999-09-11

Family

ID=15707837

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087109551A TW369601B (en) 1997-06-17 1998-06-16 Probe card

Country Status (6)

Country Link
KR (1) KR20000068145A (zh)
CN (1) CN1228160A (zh)
DE (1) DE19881035T1 (zh)
GB (1) GB2331877A (zh)
TW (1) TW369601B (zh)
WO (1) WO1998058266A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI784439B (zh) * 2021-03-12 2022-11-21 冠銓科技實業股份有限公司 應用於高頻量測之測試針座構造

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002098736A (ja) 2000-09-26 2002-04-05 Nec Corp 半導体デバイス試験装置
US7190184B2 (en) 2001-08-13 2007-03-13 Finisar Corporation Systems for wafer level burn-in of electronic devices
US8039277B2 (en) 2001-08-13 2011-10-18 Finisar Corporation Providing current control over wafer borne semiconductor devices using overlayer patterns
US7700379B2 (en) 2001-08-13 2010-04-20 Finisar Corporation Methods of conducting wafer level burn-in of electronic devices
JP4134289B2 (ja) * 2002-05-29 2008-08-20 東京エレクトロン株式会社 プローブカード搬送装置及びアダプタ
JP2004205487A (ja) 2002-11-01 2004-07-22 Tokyo Electron Ltd プローブカードの固定機構
JP2004185208A (ja) * 2002-12-02 2004-07-02 Sony Corp Ｉｃカード
US7202682B2 (en) * 2002-12-20 2007-04-10 Formfactor, Inc. Composite motion probing
US7057404B2 (en) * 2003-05-23 2006-06-06 Sharp Laboratories Of America, Inc. Shielded probe for testing a device under test
US7084651B2 (en) * 2004-07-28 2006-08-01 International Business Machines Corporation Probe card assembly
US7598100B2 (en) * 2004-11-18 2009-10-06 Renesas Technology Corp. Manufacturing method of semiconductor integrated circuit device
JP4769474B2 (ja) * 2005-04-06 2011-09-07 ルネサスエレクトロニクス株式会社 半導体集積回路装置の製造方法
JP4919617B2 (ja) * 2005-05-27 2012-04-18 ヤマハファインテック株式会社 プリント基板の電気検査装置および電気検査方法
CN101258416A (zh) 2005-09-07 2008-09-03 日本电气株式会社 半导体器件测试装置以及供电单元
JP4518041B2 (ja) * 2006-05-19 2010-08-04 エルピーダメモリ株式会社 プローブカード
JP5138615B2 (ja) * 2008-02-15 2013-02-06 シャープ株式会社 半導体機能試験電気接続装置
JP5406464B2 (ja) * 2008-04-17 2014-02-05 日本電子材料株式会社 プローブカード
KR101583000B1 (ko) 2009-03-09 2016-01-19 삼성전자주식회사 반도체 디바이스 테스트 장치 및 방법
CN102914673B (zh) * 2011-08-03 2015-09-30 旺矽科技股份有限公司 探针测试装置
JP2017194388A (ja) * 2016-04-21 2017-10-26 日本電子材料株式会社 プローブカード
CN108427021B (zh) 2017-02-13 2020-08-21 华邦电子股份有限公司 探针头、探针模块及其制作方法
TWI619948B (zh) * 2017-02-13 2018-04-01 華邦電子股份有限公司 探針頭、探針模組及其製作方法
IT201700017037A1 (it) * 2017-02-15 2018-08-15 Technoprobe Spa Scheda di misura per applicazioni ad alta frequenza
JP2019109103A (ja) * 2017-12-18 2019-07-04 株式会社ヨコオ 検査治具
PH12020050134A1 (en) * 2019-06-12 2021-09-01 Jf Microtechnology Sdn Bhd Wedged contact fingers for integrated circuit testing apparatus
TWI711824B (zh) * 2019-10-02 2020-12-01 銳捷科技股份有限公司 可調式探針承載裝置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61129501A (ja) * 1984-11-28 1986-06-17 Olympus Optical Co Ltd カメラレンズの移動量測定装置
JPH0524064Y2 (zh) * 1986-03-20 1993-06-18
JPH01128381A (ja) * 1987-11-12 1989-05-22 Fujitsu Ltd Ｌｓｉウエハの試験方法
US5264787A (en) * 1991-08-30 1993-11-23 Hughes Aircraft Company Rigid-flex circuits with raised features as IC test probes
US5355079A (en) * 1993-01-07 1994-10-11 Wentworth Laboratories, Inc. Probe assembly for testing integrated circuit devices
US5461326A (en) * 1993-02-25 1995-10-24 Hughes Aircraft Company Self leveling and self tensioning membrane test probe
JP2978720B2 (ja) * 1994-09-09 1999-11-15 東京エレクトロン株式会社 プローブ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI784439B (zh) * 2021-03-12 2022-11-21 冠銓科技實業股份有限公司 應用於高頻量測之測試針座構造

Also Published As

Publication number Publication date
GB9903309D0 (en) 1999-04-07
CN1228160A (zh) 1999-09-08
GB2331877A (en) 1999-06-02
WO1998058266A1 (fr) 1998-12-23
DE19881035T1 (de) 1999-07-15
KR20000068145A (ko) 2000-11-25

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