GB9903309D0 - Probe card - Google Patents
Probe cardInfo
- Publication number
- GB9903309D0 GB9903309D0 GBGB9903309.4A GB9903309A GB9903309D0 GB 9903309 D0 GB9903309 D0 GB 9903309D0 GB 9903309 A GB9903309 A GB 9903309A GB 9903309 D0 GB9903309 D0 GB 9903309D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- probe card
- probe
- card
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16009997 | 1997-06-17 | ||
PCT/JP1998/002669 WO1998058266A1 (en) | 1997-06-17 | 1998-06-17 | Probe card |
Publications (2)
Publication Number | Publication Date |
---|---|
GB9903309D0 true GB9903309D0 (en) | 1999-04-07 |
GB2331877A GB2331877A (en) | 1999-06-02 |
Family
ID=15707837
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB9903309A Withdrawn GB2331877A (en) | 1997-06-17 | 1998-06-17 | Probe card |
Country Status (6)
Country | Link |
---|---|
KR (1) | KR20000068145A (en) |
CN (1) | CN1228160A (en) |
DE (1) | DE19881035T1 (en) |
GB (1) | GB2331877A (en) |
TW (1) | TW369601B (en) |
WO (1) | WO1998058266A1 (en) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002098736A (en) | 2000-09-26 | 2002-04-05 | Nec Corp | Semiconductor device testing device |
US7700379B2 (en) | 2001-08-13 | 2010-04-20 | Finisar Corporation | Methods of conducting wafer level burn-in of electronic devices |
CN1568432A (en) | 2001-08-13 | 2005-01-19 | 霍尼韦尔国际公司 | Providing current control over wafer borne semiconductor devices using trenches |
US8039277B2 (en) | 2001-08-13 | 2011-10-18 | Finisar Corporation | Providing current control over wafer borne semiconductor devices using overlayer patterns |
JP4134289B2 (en) * | 2002-05-29 | 2008-08-20 | 東京エレクトロン株式会社 | Probe card transport device and adapter |
JP2004205487A (en) | 2002-11-01 | 2004-07-22 | Tokyo Electron Ltd | Probe card fixing mechanism |
JP2004185208A (en) * | 2002-12-02 | 2004-07-02 | Sony Corp | Ic card |
US7202682B2 (en) * | 2002-12-20 | 2007-04-10 | Formfactor, Inc. | Composite motion probing |
US7057404B2 (en) * | 2003-05-23 | 2006-06-06 | Sharp Laboratories Of America, Inc. | Shielded probe for testing a device under test |
US7084651B2 (en) * | 2004-07-28 | 2006-08-01 | International Business Machines Corporation | Probe card assembly |
CN100508154C (en) * | 2004-11-18 | 2009-07-01 | 株式会社瑞萨科技 | Semiconductor IC device manufacturing method |
JP4769474B2 (en) * | 2005-04-06 | 2011-09-07 | ルネサスエレクトロニクス株式会社 | Manufacturing method of semiconductor integrated circuit device |
JP5334355B2 (en) * | 2005-05-27 | 2013-11-06 | ヤマハファインテック株式会社 | Electrical inspection apparatus and electrical inspection method for printed circuit board |
JPWO2007029422A1 (en) | 2005-09-07 | 2009-03-12 | 日本電気株式会社 | Semiconductor device inspection device and power supply unit |
JP4518041B2 (en) * | 2006-05-19 | 2010-08-04 | エルピーダメモリ株式会社 | Probe card |
JP5138615B2 (en) * | 2008-02-15 | 2013-02-06 | シャープ株式会社 | Semiconductor function test electrical connection device |
JP5406464B2 (en) * | 2008-04-17 | 2014-02-05 | 日本電子材料株式会社 | Probe card |
KR101583000B1 (en) | 2009-03-09 | 2016-01-19 | 삼성전자주식회사 | Apparatus and method for testing semiconductor device |
CN102914673B (en) * | 2011-08-03 | 2015-09-30 | 旺矽科技股份有限公司 | Probe testing device |
JP2017194388A (en) * | 2016-04-21 | 2017-10-26 | 日本電子材料株式会社 | Probe card |
CN108427021B (en) | 2017-02-13 | 2020-08-21 | 华邦电子股份有限公司 | Probe head, probe module and manufacturing method thereof |
TWI619948B (en) * | 2017-02-13 | 2018-04-01 | 華邦電子股份有限公司 | Probe module, probe head and manufacturing method thereof |
IT201700017037A1 (en) * | 2017-02-15 | 2018-08-15 | Technoprobe Spa | Measurement board for high frequency applications |
JP2019109103A (en) * | 2017-12-18 | 2019-07-04 | 株式会社ヨコオ | Inspection jig |
PH12020050134A1 (en) * | 2019-06-12 | 2021-09-01 | Jf Microtechnology Sdn Bhd | Wedged contact fingers for integrated circuit testing apparatus |
TWI711824B (en) * | 2019-10-02 | 2020-12-01 | 銳捷科技股份有限公司 | Adjustable probe supporting device |
TWI784439B (en) * | 2021-03-12 | 2022-11-21 | 冠銓科技實業股份有限公司 | Test needle seat structure for high frequency measurement |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61129501A (en) * | 1984-11-28 | 1986-06-17 | Olympus Optical Co Ltd | Measuring instrument for movement extent of camera lens |
JPH0524064Y2 (en) * | 1986-03-20 | 1993-06-18 | ||
JPH01128381A (en) * | 1987-11-12 | 1989-05-22 | Fujitsu Ltd | Examining method for lsi wafer |
US5264787A (en) * | 1991-08-30 | 1993-11-23 | Hughes Aircraft Company | Rigid-flex circuits with raised features as IC test probes |
US5355079A (en) * | 1993-01-07 | 1994-10-11 | Wentworth Laboratories, Inc. | Probe assembly for testing integrated circuit devices |
US5461326A (en) * | 1993-02-25 | 1995-10-24 | Hughes Aircraft Company | Self leveling and self tensioning membrane test probe |
JP2978720B2 (en) * | 1994-09-09 | 1999-11-15 | 東京エレクトロン株式会社 | Probe device |
-
1998
- 1998-06-16 TW TW087109551A patent/TW369601B/en active
- 1998-06-17 KR KR1019997001209A patent/KR20000068145A/en not_active Application Discontinuation
- 1998-06-17 GB GB9903309A patent/GB2331877A/en not_active Withdrawn
- 1998-06-17 WO PCT/JP1998/002669 patent/WO1998058266A1/en not_active Application Discontinuation
- 1998-06-17 CN CN98800779A patent/CN1228160A/en active Pending
- 1998-06-17 DE DE19881035T patent/DE19881035T1/en not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
DE19881035T1 (en) | 1999-07-15 |
TW369601B (en) | 1999-09-11 |
KR20000068145A (en) | 2000-11-25 |
CN1228160A (en) | 1999-09-08 |
WO1998058266A1 (en) | 1998-12-23 |
GB2331877A (en) | 1999-06-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
789A | Request for publication of translation (sect. 89(a)/1977) | ||
WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |