JP5334355B2 - Electrical inspection apparatus and electrical inspection method for printed circuit board - Google Patents

Electrical inspection apparatus and electrical inspection method for printed circuit board Download PDF

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JP5334355B2
JP5334355B2 JP2005155377A JP2005155377A JP5334355B2 JP 5334355 B2 JP5334355 B2 JP 5334355B2 JP 2005155377 A JP2005155377 A JP 2005155377A JP 2005155377 A JP2005155377 A JP 2005155377A JP 5334355 B2 JP5334355 B2 JP 5334355B2
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circuit board
printed circuit
reaction force
inspection
probe
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JP2006329861A (en
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憲吾 土田
敬一郎 笹岑
友悟 遠藤
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Yamaha Fine Technologies Co Ltd
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Yamaha Fine Technologies Co Ltd
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Priority to JP2005155381A priority Critical patent/JP4919617B2/en
Priority to JP2005155377A priority patent/JP5334355B2/en
Priority to TW095118425A priority patent/TWI305708B/en
Priority to KR1020060046955A priority patent/KR100816125B1/en
Priority to CN200610084557A priority patent/CN100585415C/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G01R31/2808Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0266Marks, test patterns or identification means
    • H05K1/0268Marks, test patterns or identification means for electrical inspection or testing

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • General Engineering & Computer Science (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)

Description

本発明は、プリント基板に検査用プローブを接触させることによりプリント基板の電気検査を行うプリント基板の電気検査装置および電気検査方法に関する。   The present invention relates to an electrical inspection apparatus and an electrical inspection method for a printed circuit board that performs electrical inspection of a printed circuit board by bringing an inspection probe into contact with the printed circuit board.

従来から、電極パターンを有するプリント基板の回線に生じる導通不良等の欠陥の有無を通電により検査することが行われている。この場合、プリント基板に、検査用プローブを接触させて通電することにより回線における導通の有無を検査可能にする接点を設け、この接点に電気検査装置の検査用プローブを接触させることにより検査を行っている(例えば、特許文献1参照)。また、このような電気検査装置では、検査用プローブの接点に対する押圧力にばらつきが生じると接触不良が生じて精度のよい検査が行えなくなることがある。このため前述した従来の電気検査装置では、検査用プローブに対向する部分に位置する押子(駆動側部分)またはステージ(台側部分)に圧力センサを設けて、検査用プローブの接点に対する押圧力を適正にできるようにしている。
特開平6−268034号公報
Conventionally, the presence or absence of defects such as poor continuity in a circuit board line having an electrode pattern has been inspected by energization. In this case, the printed circuit board is provided with a contact that makes it possible to inspect the presence or absence of continuity in the circuit by bringing the inspection probe into contact with the current and conducting an inspection by bringing the inspection probe into contact with the contact. (For example, refer to Patent Document 1). Further, in such an electrical inspection apparatus, if the pressing force with respect to the contact point of the inspection probe varies, contact failure may occur and accurate inspection may not be performed. For this reason, in the above-described conventional electrical inspection apparatus, a pressure sensor is provided on a pusher (drive side portion) or a stage (base side portion) located in a portion facing the inspection probe, and the pressing force against the contact of the inspection probe. To be able to do it properly.
JP-A-6-268034

しかしながら、前述した電気検査装置では、検査用プローブが取り付けられる場所に応じて圧力センサの取り付け位置も変更しなければならないため、取付操作が面倒になったり、各部材にそれぞれ圧力センサを設ける必要が生じたりするという問題がある。また、検査用プローブが取り付けられる取付部材に圧力センサを設けた電気検査装置もあるが、これによると、複数の検査用プローブを取り替えながら使用する場合には、各取付部材にそれぞれセンサを設けなければならなくなりコストが高くなるという問題が生じる。   However, in the electrical inspection apparatus described above, the mounting position of the pressure sensor has to be changed depending on the location where the inspection probe is mounted. Therefore, the mounting operation becomes troublesome and it is necessary to provide a pressure sensor for each member. There is a problem that occurs. In addition, there is an electrical inspection device in which a pressure sensor is provided on an attachment member to which an inspection probe is attached. According to this, when using a plurality of inspection probes while replacing them, each attachment member must be provided with a sensor. There is a problem that the cost becomes higher due to the necessity.

本発明は、前述した問題に対処するためになされたもので、その目的は、検査用プローブとともに取付部材を取り替えても共通の検出装置を用いることができるため、検出装置の取り替えが不要で安価につくプリント基板の電気検査装置および電気検査方法を提供することである。   The present invention has been made in order to cope with the above-described problems. The object of the present invention is to eliminate the need for replacement of the detection device because the common detection device can be used even if the mounting member is replaced with the inspection probe. It is an object to provide an electrical inspection apparatus and electrical inspection method for printed circuit boards.

前述した目的を達成するため、本発明に係るプリント基板の電気検査装置の構成上の特徴は、設置装置に設置されたプリント基板の接点に検査用プローブを接触させることにより、プリント基板の電気検査を行うプリント基板の電気検査装置であって、検査用プローブが取り付けられる取付部材と、取付部材を設置装置に設置されたプリント基板に対して進退させることにより、検査用プローブをプリント基板に接触させるモータを備えた駆動装置と、駆動装置のモータに接続され、検査用プローブがプリント基板に接触したときに、プリント基板に対する検査用プローブの押圧力を駆動装置に掛かる反力として検出する検出装置と、検査用プローブの種類、個数および配置に基づいて検査用プローブの押圧力の適正値を求め、検出装置が検出した検査用プローブのプリント基板に対する押圧力が適正値になるように駆動装置の駆動を制御する制御装置とを備えたことにある。 In order to achieve the above-mentioned object, the structural feature of the electrical inspection apparatus for a printed circuit board according to the present invention is that electrical inspection of the printed circuit board is performed by bringing an inspection probe into contact with a contact of the printed circuit board installed in the installation apparatus. An electrical inspection device for a printed circuit board, wherein the inspection probe is brought into contact with the printed circuit board by advancing and retracting the mounting member to which the inspection probe is mounted and the printed circuit board installed in the installation device. a drive moving device provided with a motor that is connected to a motor drive equipment, when the inspection probe is brought into contact with the printed circuit board, for detecting the pressing force of the inspection probe to the printed circuit board as a reaction force on the drive unit a detection device, obtains the proper value of the pressing force of the test probe on the basis of the type of test probe, the number number and placement detection devices tested In that a control device for controlling the driving of the driving device so pressing force becomes a proper value for the printed circuit board inspection probe.

前述したように構成した本発明に係るプリント基板の電気検査装置では、プリント基板に対する検査用プローブの押圧力を検出する検出装置が、検査用プローブや検査用プローブが取り付けられる取付部材でなく、駆動装置に掛かる反力として前記押圧力を検出するように構成されている。このため、検出装置は、駆動装置または駆動装置に接続した状態で駆動装置の外部に設置することができる。この結果、電気検査の目的に応じて検査用プローブを取付部材とともに取り替えた場合でも、検出装置は駆動装置に掛かる反力を元の状態のままで検出できるようになり、検出装置の取り替えが不要になる。また、制御装置による駆動装置の駆動制御により、検査用プローブは接点に対して適正な押圧力で接触するようになるため、接触不良がなくなり精度のよい電気検査が行える。 In the electrical inspection apparatus for a printed circuit board according to the present invention configured as described above, the detection device for detecting the pressing force of the inspection probe against the printed circuit board is not a mounting member to which the inspection probe or the inspection probe is attached, but a driving device. The pressing force is detected as a reaction force applied to the moving device. For this reason, a detection apparatus can be installed in the exterior of a drive device in the state connected to the drive device or the drive device. As a result, even when the inspection probe is replaced with the mounting member according to the purpose of the electrical inspection, the detection device can detect the reaction force applied to the drive device as it is, and the detection device does not need to be replaced. become. In addition, since the inspection probe comes into contact with the contact with an appropriate pressing force by the drive control of the drive device by the control device, there is no contact failure, and an accurate electrical inspection can be performed.

本発明に係るプリント基板の電気検査装置の他の構成上の特徴は、駆動装置に掛かる反力が駆動装置の駆動力に対する反力であることにある。この場合、検出装置は、駆動装置の駆動により、取付部材をプリント基板側に移動させ、検査用プローブがプリント基板に接触してプリント基板を押圧したときに、プリント基板から検査用プローブおよび取付部材を介して駆動装置に掛かる反力を検出する。したがって、検出装置は、検査用プローブや取付部材の近傍に設ける必要がなくなり、検出装置の設置位置に自由度が増すようになる。   Another structural feature of the printed circuit board electrical inspection apparatus according to the present invention is that the reaction force applied to the drive device is a reaction force with respect to the drive force of the drive device. In this case, the detection device moves the mounting member to the printed circuit board side by driving the driving device, and when the inspection probe contacts the printed circuit board and presses the printed circuit board, the inspection probe and the mounting member are moved from the printed circuit board. The reaction force applied to the drive device via the is detected. Therefore, it is not necessary to provide the detection device in the vicinity of the inspection probe or the mounting member, and the degree of freedom increases in the installation position of the detection device.

本発明に係るプリント基板の電気検査装置のさらに他の構成上の特徴は、駆動装置が取付部材を駆動装置側に着脱可能に取り付けるための支持部を備え、駆動装置に掛かる反力が支持部に掛かる反力であることにある。この場合、検出装置は、支持部に設けられ、モータの駆動により、取付部材をプリント基板側に移動させ、検査用プローブがプリント基板に接触してプリント基板を押圧したときに、プリント基板から検査用プローブおよび取付部材を介して駆動装置の支持部に掛かる反力を検出する。また、取付部材は、検査用プローブを取り替える際には、支持部側から取り外されるが、検出装置は支持部に設けられているため、そのまま取り替えることなく使用できる。 Further structural features of the electric inspection device of a printed circuit board according to the present invention, the driving device comprises a support portion for detachably attaching the mounting member to the drive device side, a reaction force applied to drive the dynamic device support The reaction force is applied to the part. In this case, the detection device is provided in the support portion, and when the motor is driven, the attachment member is moved to the printed circuit board side, and when the inspection probe contacts the printed circuit board and presses the printed circuit board, the inspection device is inspected from the printed circuit board. The reaction force applied to the support portion of the drive device is detected through the probe and the mounting member. The mounting member is, when replacing the inspection probe is removed support part side or al, the detection device because it is provided in the support portion, can be used without replacing it.

本発明に係るプリント基板の電気検査方法の構成上の特徴は、検査用プローブが取り付けられた取付部材をプリント基板に対して進退させることにより、検査用プローブをプリント基板に所定の押圧力で接触させるモータを備えた駆動装置と、駆動装置のモータに接続された検出装置とを用いて、プリント基板の電気検査を行うプリント基板の電気検査方法であって、検査用プローブをプリント基板に接触させる接触工程と、検査用プローブがプリント基板に接触したときに、検出装置が、プリント基板に対する検査用プローブの押圧力を駆動装置に掛かる反力として検出する反力検出工程と、検査用プローブの種類、個数および配置に基づいて検査用プローブの押圧力の適正値を求め、反力検出工程において検出された検査用プローブのプリント基板に対する押圧力が適正値になるように駆動装置の駆動を制御する押圧力制御工程とを備えたことにある。 The structural feature of the electrical inspection method for a printed circuit board according to the present invention is that the inspection probe is brought into contact with the printed circuit board with a predetermined pressing force by advancing and retracting the mounting member to which the inspection probe is mounted. a drive moving device provided with a motor that causes Ru is, by using the connected detector to a motor drive equipment, an electrical inspection method of a printed circuit board for electrically testing printed circuit board, printed circuit board inspection probe A contact process for contact with the printed circuit board, a reaction force detection process for detecting a pressing force of the test probe against the printed circuit board as a reaction force applied to the drive device when the inspection probe contacts the printed circuit board, types of probes, number count and determine the proper value of the pressing force of the test probe on the basis of the placement, the inspection probe is detected in the reaction force detecting step flop In that a pressing force control step of controlling the driving of the driving device so pressing force becomes a proper value for the cement board.

これによると、検査用プローブを取り替えても検出装置を取り替える必要のないプリント基板の電気検査方法を安価でかつ精度よく実施できる。この場合、反力検出工程において検出される駆動装置に掛かる反力が駆動装置の駆動力に対して掛かる反力であるとすることができる。また、駆動装置が前記取付部材を前記駆動装置側に着脱可能に取り付けるための支持部を備え、反力検出工程において検出される駆動装置に掛かる反力が、支持部に掛かる反力であるとすることもできる。
According to this, even if the inspection probe is replaced, the printed circuit board electrical inspection method that does not require replacement of the detection device can be performed at low cost and with high accuracy. In this case, the reaction force applied to the drive device detected in the reaction force detection step can be regarded as the reaction force applied to the drive force of the drive device. Further , the drive device includes a support portion for detachably attaching the attachment member to the drive device side, and the reaction force applied to the drive device detected in the reaction force detection step is a reaction force applied to the support portion. You can also

以下、本発明の一実施形態を図面を用いて詳しく説明する。図1は同実施形態に係るプリント基板の電気検査装置10の要部を示した概略構成図である。この電気検査装置10は、検査対象物であるプリント基板11に設けられた電極パターン(図示せず)が電気的に適正に導通しているか否かを検査するための装置である。そして、この電気検査装置10は、プリント基板11を所定位置に設置するための設置装置20と、プリント基板11の設置位置の上方に移動可能に設置された上部検出装置30と、プリント基板11の設置位置の下方に移動可能に設置された下部検出装置40とを備えている。   Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 is a schematic configuration diagram illustrating a main part of an electrical inspection apparatus 10 for a printed circuit board according to the embodiment. The electrical inspection apparatus 10 is an apparatus for inspecting whether or not an electrode pattern (not shown) provided on a printed circuit board 11 that is an inspection object is electrically properly conducted. The electrical inspection apparatus 10 includes an installation apparatus 20 for installing the printed circuit board 11 at a predetermined position, an upper detection apparatus 30 installed so as to be movable above the installation position of the printed circuit board 11, and the printed circuit board 11. And a lower detection device 40 movably installed below the installation position.

また、プリント基板11は、可撓性を有する四角形のシートで構成され、その表裏(上下)両面に電極パターンに導通する複数の接点11aが間隔を保って設けられている。そして、設置装置20、上部検出装置30および下部検出装置40は、図2および図3に示した各装置等によって移動可能になった状態で基台12に設置されている。基台12は、上面が枠状に形成された台で構成されており、基台12の上面の左右両側部分には、設置装置20を構成する一対の固定装置20a,20bが間隔を保って対向した状態で設けられている。   Moreover, the printed circuit board 11 is comprised by the square sheet | seat which has flexibility, and the some contact 11a which conducts to an electrode pattern is provided in the front and back (upper and lower) both surfaces at intervals. The installation device 20, the upper detection device 30, and the lower detection device 40 are installed on the base 12 in a state where they can be moved by the devices shown in FIGS. 2 and 3. The base 12 is composed of a base having an upper surface formed in a frame shape, and a pair of fixing devices 20 a and 20 b constituting the installation device 20 are spaced apart from each other on both the left and right sides of the upper surface of the base 12. They are provided facing each other.

固定装置20aは、基台12上の一方(図1および図2の左側)の縁部に沿って設けられたレール部21aと、レール部21aに沿って移動可能な状態で設けられた一対の把持機構22a,22aとからなっている。そして、把持機構22a,22aは、それぞれプリント基板11に対して進退する方向(図1および図2の左右方向)に延びるシリンダ装置からなるアクチュエータ23aと、アクチュエータ23aの駆動によってプリント基板11を把持したり、開放したりする把持部24aとからなっている。   The fixing device 20a includes a rail portion 21a provided along one edge (the left side in FIGS. 1 and 2) on the base 12, and a pair of movable devices provided along the rail portion 21a. It consists of gripping mechanisms 22a and 22a. The gripping mechanisms 22a and 22a grip the printed circuit board 11 by driving the actuator 23a, which includes a cylinder device that extends in a direction of moving back and forth with respect to the printed circuit board 11 (left and right directions in FIGS. 1 and 2). Or a holding part 24a that opens or closes.

すなわち、把持部24aの先端部は、それぞれプリント基板11の縁部を表裏から把持して固定できる一対の爪で構成されている。また、把持機構22a,22aは、レール部21aに沿って互いの間隔を広げたり狭めたりするように移動でき、プリント基板11の幅に応じてその間隔を調整できるように構成されている。また、基台12の上面の一方の縁部側部分における固定装置20aの両端側には、レール部21aと直交する方向に延びる一対のレール部25a,25aが設けられており、固定装置20aは、レール部25a,25aに沿って移動可能な状態でレール部25a,25a上に設けられている。そして、固定装置20aは、プリント基板11の左右方向の長さに応じてレール部25a,25a上での位置を調節されその位置に位置決めされる。   That is, the front end portion of the grip portion 24a is composed of a pair of claws that can grip and fix the edge portion of the printed circuit board 11 from the front and the back. The gripping mechanisms 22a and 22a are configured to move along the rail portion 21a so as to widen or narrow each other, and the distance can be adjusted according to the width of the printed circuit board 11. A pair of rail portions 25a and 25a extending in a direction orthogonal to the rail portion 21a are provided on both end sides of the fixing device 20a on one edge side portion of the upper surface of the base 12, and the fixing device 20a The rails 25a and 25a are provided on the rails 25a and 25a so as to be movable along the rails 25a and 25a. The fixing device 20a is positioned at that position by adjusting the position on the rail portions 25a and 25a according to the length of the printed board 11 in the left-right direction.

固定装置20bは、基台12上の他方(図1および図2の右側)の縁部から所定間隔を保った部分に縁部に沿って設けられている。この固定装置20bは、固定装置20aと左右対称に配置された同一構成のものからなっており、レール部21bと、レール部21bに沿って移動可能な状態で設けられた一対の把持機構22b,22bとからなっている。そして、把持機構22b,22bは、それぞれアクチュエータ23bと把持部24bとからなっている。把持機構22b,22bは、レール部21bに沿って互いの間隔を広げたり狭めたりするように移動でき、プリント基板11の幅に応じてその間隔を調整できるように構成されている。   The fixing device 20b is provided along the edge portion at a predetermined distance from the other edge portion (right side in FIGS. 1 and 2) on the base 12. The fixing device 20b is composed of the same configuration arranged symmetrically with the fixing device 20a, and includes a rail portion 21b and a pair of gripping mechanisms 22b provided in a movable state along the rail portion 21b. 22b. Each of the gripping mechanisms 22b and 22b includes an actuator 23b and a gripping portion 24b. The gripping mechanisms 22b and 22b can be moved along the rail portion 21b so as to widen or narrow each other, and can be adjusted according to the width of the printed circuit board 11.

また、基台12上における固定装置20bの両端側部分には、レール部21bと直交する方向に延びる一対のレール部25b,25bが設けられており、固定装置20bは、レール部25b,25bに沿って移動可能な状態で設けられている。そして、固定装置20bは、プリント基板11の長さに応じてその左右方向の位置を決定される。したがって、各把持部24a,24bは、図1における左右方向および前後方向に移動することによって、プリント基板11の各角部に位置決めされ、先端部でプリント基板11の各角部を挟持して、さらに左右方向および前後方向に微調整することによって、プリント基板11をテンションを掛けた状態で支持することができる。   In addition, a pair of rail portions 25b and 25b extending in a direction orthogonal to the rail portion 21b are provided on both ends of the fixing device 20b on the base 12, and the fixing device 20b is provided on the rail portions 25b and 25b. It is provided so that it can move along. And the fixing device 20b is determined in the left-right direction position according to the length of the printed circuit board 11. Therefore, each grip part 24a, 24b is positioned at each corner of the printed circuit board 11 by moving in the left-right direction and the front-rear direction in FIG. 1, and sandwiches each corner of the printed circuit board 11 at the tip, Further, the printed circuit board 11 can be supported in a tensioned state by performing fine adjustment in the left-right direction and the front-rear direction.

また、基台12の上面における前後の縁部の近傍部分には、それぞれレール部13a,13bが縁部に沿って設けられており、レール部13a,13bの上面部に支持台14がレール部13a,13bに沿って移動可能な状態で取り付けられている。この支持台14は、プリント基板11が設置される位置の上方に位置しており、レール部13a,13bに掛け渡された状態で前後に延びている。そして、この支持台14に上部検出装置30が取り付けられている。支持台14は、レール部13a,13bに平行して延びる回転駆動軸15aを備えた移動装置15の駆動によりレール部13a,13bに沿って左右に移動する。このため、上部検出装置30は、支持台14とともにレール部13a,13bに沿って左右に移動可能になっている。   In addition, rail portions 13a and 13b are provided along the edge portions in the vicinity of the front and rear edge portions on the upper surface of the base 12, and the support base 14 is provided on the upper surface of the rail portions 13a and 13b. It is attached so as to be movable along 13a and 13b. The support base 14 is located above the position where the printed circuit board 11 is installed, and extends in the front-rear direction in a state of being hung on the rail portions 13a and 13b. The upper detection device 30 is attached to the support base 14. The support base 14 moves to the left and right along the rail portions 13a and 13b by driving of a moving device 15 having a rotary drive shaft 15a extending in parallel with the rail portions 13a and 13b. For this reason, the upper detection device 30 can move left and right along the rail portions 13a and 13b together with the support base 14.

また、支持台14には、レール部13a,13bと直交する方向に延びる軌道部16aと回転軸部16bとを備えた移動装置16が取り付けられている。また、上部検出装置30は、移動装置16に移動可能に取り付けられた移動部31を介して移動装置16に取り付けられており、移動部31とともに、移動装置16の駆動により移動装置16の長手方向に沿って移動可能になっている。さらに、移動装置31には、2個のモータ32等が設けられており、上部検出装置30は、モータ32の駆動により上下方向に移動するとともに、他のモータ(図示せず)の駆動により垂直軸を中心に回転するように構成されている。   Moreover, the moving device 16 provided with the track | orbit part 16a extended in the direction orthogonal to rail part 13a, 13b and the rotating shaft part 16b is attached to the support stand 14. As shown in FIG. The upper detection device 30 is attached to the moving device 16 via a moving portion 31 that is movably attached to the moving device 16, and the moving device 16 is driven along with the moving portion 31 in the longitudinal direction. It is possible to move along. Further, the moving device 31 is provided with two motors 32 and the like, and the upper detection device 30 moves vertically by driving the motor 32 and is vertically driven by driving another motor (not shown). It is configured to rotate about an axis.

また、上部検出装置30は、図1および図4に示した支持基板33を介して移動部31に取り付けられている。この支持基板33の下面には、モータ32の作動によって上下方向に移動する昇降装置34が設けられ、昇降装置34の下面には本発明の支持部を構成する支持部材35が設けられている。そして、支持部材35の下面に、検査用プローブ36と本発明に係る取付部材39と検出部37とが取り付けられている。検出部37には、取付部材39と検査用プローブ36とが着脱可能に取り付けられる。検出部37はモータ32の駆動により昇降装置34とともに上下に移動する。   The upper detection device 30 is attached to the moving unit 31 via the support substrate 33 shown in FIGS. 1 and 4. The lower surface of the support substrate 33 is provided with an elevating device 34 that moves up and down by the operation of the motor 32, and the lower surface of the elevating device 34 is provided with a support member 35 that constitutes a support portion of the present invention. The inspection probe 36, the attachment member 39 according to the present invention, and the detection unit 37 are attached to the lower surface of the support member 35. An attachment member 39 and an inspection probe 36 are detachably attached to the detection unit 37. The detection unit 37 moves up and down together with the lifting device 34 by driving the motor 32.

また、モータ32には、モータ32の駆動力に対する反力を検出するための反力検出センサ38が接続されている。この反力検出センサ38は、モータ32の駆動により、検出部37が下降して、検査用プローブ36の先端部がプリント基板11に接触したときに、プリント基板11に対する検査用プローブ36の押圧力をモータ32が受ける反力として検出する。なお、この反力検出センサ38は、後述する制御装置50の近傍に設置されている。また、移動部31、支持基板33、昇降装置34、支持部材35およびモータ32で本発明に係る駆動装置が構成される。   The motor 32 is connected to a reaction force detection sensor 38 for detecting a reaction force against the driving force of the motor 32. The reaction force detection sensor 38 is configured such that when the detection unit 37 is lowered by the driving of the motor 32 and the tip of the inspection probe 36 contacts the printed circuit board 11, the pressing force of the inspection probe 36 against the printed circuit board 11. Is detected as a reaction force received by the motor 32. The reaction force detection sensor 38 is installed in the vicinity of a control device 50 described later. Further, the moving unit 31, the support substrate 33, the lifting device 34, the support member 35, and the motor 32 constitute a drive device according to the present invention.

下部検出装置40は、基台12の上面の前後部にそれぞれ設けられた一対のレール部13a,13bの下面部に沿って移動可能な支持台17に取り付けられている。この支持台17は、プリント基板11が設置される位置の下方に位置しており、レール部13a,13bに平行して延びる回転駆動軸18aを備えた移動装置18の駆動によりレール部13a,13bに沿って左右に移動する。このため、下部検出装置40は、支持台17とともにレール部13a,13bに沿って左右に移動可能になっている。また、支持台17には軌道部と回転軸部とで構成された移動装置19が取り付けられている。   The lower detection device 40 is attached to a support base 17 that is movable along the lower surface portions of a pair of rail portions 13 a and 13 b provided on the front and rear portions of the upper surface of the base 12. The support base 17 is located below the position where the printed circuit board 11 is installed, and the rail portions 13a and 13b are driven by a moving device 18 having a rotary drive shaft 18a extending in parallel with the rail portions 13a and 13b. Move left and right along For this reason, the lower detection device 40 is movable to the left and right along the rail portions 13 a and 13 b together with the support base 17. Further, a moving device 19 composed of a track portion and a rotating shaft portion is attached to the support base 17.

下部検出装置40は、移動装置19に移動可能に取り付けられた移動部41に取り付けられており、移動部41とともに、移動装置19の駆動により移動装置19の長手方向に沿って移動可能になっている。また、移動装置41には、2個のモータ42等が設けられており、下部検出装置40は、モータ42の駆動により上下方向に移動するとともに、他のモータ(図示せず)の駆動により垂直軸を中心に回転するように構成されている。   The lower detection device 40 is attached to a moving unit 41 that is movably attached to the moving device 19, and can move along the longitudinal direction of the moving device 19 together with the moving unit 41 by driving the moving device 19. Yes. Further, the moving device 41 is provided with two motors 42 and the like, and the lower detection device 40 moves in the vertical direction by driving the motor 42 and is vertically driven by driving another motor (not shown). It is configured to rotate about an axis.

また、下部検出装置40は、支持基板43を介して移動部41に取り付けられている。そして、支持基板43の上面には、モータ42の作動により上下方向に移動する昇降装置44が設けられ、昇降装置44の上端には本発明の支持部を構成する支持部材45が設けられている。そして、支持部材45の上面に、検査用プローブ46と本発明に係る取付部材49と検出部47とが取り付けられている。検出部47には、取付部材49と検査用プローブ46とが着脱可能に取り付けられる。検出部47はモータ42の駆動により昇降装置44とともに上下に移動する。   The lower detection device 40 is attached to the moving unit 41 via the support substrate 43. An elevating device 44 that moves up and down by the operation of the motor 42 is provided on the upper surface of the support substrate 43, and a support member 45 that constitutes a support portion of the present invention is provided at the upper end of the elevating device 44. . The inspection probe 46, the attachment member 49 according to the present invention, and the detection unit 47 are attached to the upper surface of the support member 45. An attachment member 49 and an inspection probe 46 are detachably attached to the detection unit 47. The detection unit 47 moves up and down together with the lifting device 44 by driving the motor 42.

また、モータ42には、モータ42の駆動力に対する反力を検出するための反力検出センサ48が設けられている。この反力検出センサ48は、モータ42の駆動により、検出部47が上昇して、検査用プローブ46の先端部がプリント基板11に接触したときに、プリント基板11に対する検査用プローブ46の押圧力をモータ42が受ける反力として検出する。この反力検出センサ48も反力検出センサ38とともに、制御装置50の近傍に設置されている。   The motor 42 is provided with a reaction force detection sensor 48 for detecting a reaction force with respect to the driving force of the motor 42. The reaction force detection sensor 48 is driven by the motor 42, and when the detection unit 47 is raised and the tip of the inspection probe 46 comes into contact with the printed circuit board 11, the pressing force of the inspection probe 46 against the printed circuit board 11 is detected. Is detected as a reaction force received by the motor 42. The reaction force detection sensor 48 is also installed in the vicinity of the control device 50 together with the reaction force detection sensor 38.

なお、検査用プローブ36,46は、例えば、幅が0.025mm、厚みが0.02mm、長さが1.2mmに設定された微細な材料で構成されている。そして、検査用プローブ36,46の変形可能な量は、例えば、0.2mm程度であり、検査用プローブ36,46は座屈したり、衝撃により破損したりし易い構造になっている。また、この電気検査装置10には、前述した各装置等の他に、図5に示したCPU51,ROM52,RAM53を備えた制御装置50、検査回路54および操作盤(図示せず)が設けられている。   The inspection probes 36 and 46 are made of a fine material having a width of 0.025 mm, a thickness of 0.02 mm, and a length of 1.2 mm, for example. The deformable amount of the inspection probes 36 and 46 is, for example, about 0.2 mm, and the inspection probes 36 and 46 are structured to be easily buckled or damaged by impact. In addition to the above-described devices, the electrical inspection device 10 is provided with a control device 50 including a CPU 51, a ROM 52, and a RAM 53, an inspection circuit 54, and an operation panel (not shown) shown in FIG. ing.

制御装置50のROM52には、導通検査を実施するための所定のプログラムが記憶されており、CPU51は、そのプログラムを順次実行する。このCPU51のプログラム実行による各種の制御により移動装置15,18、移動装置16,19およびモータ32,42等の各装置が制御され、この制御によって、検出部37,47は所定の位置に移動する。また、RAM53には、図6に示した押圧力算出用データ53aが予め記憶されている。この押圧力算出用データ53aは、検査用プローブ36,46の先端部をプリント基板11に接触させる際の押圧力の適正値を求めるために作成したもので、検査用プローブ36,46の種類、個数、配置の各データに基づいて押圧力の適正値が求められるように構成されている。   The ROM 52 of the control device 50 stores a predetermined program for conducting the continuity test, and the CPU 51 sequentially executes the program. Various devices such as the moving devices 15 and 18, the moving devices 16 and 19, and the motors 32 and 42 are controlled by various controls by the program execution of the CPU 51, and the detection units 37 and 47 are moved to predetermined positions by this control. . Further, the RAM 53 stores the pressure calculation data 53a shown in FIG. 6 in advance. The pressing force calculation data 53a is created in order to obtain an appropriate value of the pressing force when the tip portions of the inspection probes 36 and 46 are brought into contact with the printed circuit board 11. The types of the inspection probes 36 and 46, An appropriate value of the pressing force is obtained based on the number and arrangement data.

押圧力算出用データ53aにおける検査用プローブ36,46の種類は、検査用プローブ36,46が変形したときのばね定数に基づいて、A,B,Cの3段階の値に設定され、例えば、Aは10g/2mm、Bは20g/2mm、Cは30g/2mm等と設定しておく。また、個数は、検出部37,47に取り付けられる検査用プローブ36,46の数であり、検査用プローブ36,46の種類A,B,Cの各段階について、それぞれ、例えば100,150,200,500の4段階として設定する。   The types of the inspection probes 36 and 46 in the pressing force calculation data 53a are set to three values of A, B, and C based on the spring constant when the inspection probes 36 and 46 are deformed. A is set to 10 g / 2 mm, B is set to 20 g / 2 mm, C is set to 30 g / 2 mm, and the like. The number is the number of inspection probes 36 and 46 attached to the detectors 37 and 47. For each stage of the types A, B and C of the inspection probes 36 and 46, for example, 100, 150 and 200, respectively. , 500.

さらに、配置については、本実施形態では、検査用プローブ36,46の分布状態に応じて、例えば、Pa、Pb、Pcの3パターンとしておく。この場合の分布としては、例えば、Paは、各検査用プローブ36,46が全体に略均等な間隔を保って検出部37,47に配置された分布状態、Pbは、検査用プローブ36,46が検出部37,47の中央部に多く配置され、外周側部分には少なく配置された分布状態、Pcは、検査用プローブ36,46が検出部37,47の中央部に少なく配置され、外周側部分に多く配置された分布状態とする。   Furthermore, regarding the arrangement, in this embodiment, for example, three patterns of Pa, Pb, and Pc are set according to the distribution state of the inspection probes 36 and 46. As a distribution in this case, for example, Pa is a distribution state in which the inspection probes 36 and 46 are arranged in the detection units 37 and 47 with substantially equal intervals, and Pb is an inspection probe 36 or 46. Is distributed in a large amount in the central portion of the detection units 37 and 47 and is disposed in a small amount in the outer peripheral portion, and Pc is a small number of inspection probes 36 and 46 are disposed in the central portion of the detection units 37 and 47. It is assumed that there are many distributed states on the side portion.

そして、これらの各データから押圧力の適正値を求め、その押圧力を出力するために必要なモータ電流値を決定できるようにした。また、検査回路54は、検査用プローブ36,46とプリント基板11の接点11aとの導通状態を検出してその検出結果を信号として制御装置50に送信する。さらに、操作盤には、電気検査装置10をオンオフするためのスイッチや各種のデータを入力するための操作キー等が設けられている。   Then, an appropriate value of the pressing force is obtained from each of these data, and the motor current value necessary for outputting the pressing force can be determined. Further, the inspection circuit 54 detects the conduction state between the inspection probes 36 and 46 and the contact 11a of the printed circuit board 11, and transmits the detection result to the control device 50 as a signal. Further, the operation panel is provided with a switch for turning on and off the electrical inspection apparatus 10, operation keys for inputting various data, and the like.

この構成において、電気検査装置10を用いてプリント基板11の導通検査を行う場合には、まず、操作盤の操作キーを操作して、使用する検査用プローブ36,46に関するデータを入力する。そして、プリント基板11を、設置装置20に設置する。この場合、一対の把持部24aと一対の把持部24bとの対向する部分の間隔がプリント基板11の長さと同じ長さになるように固定装置20a,20bを移動させる。ついで、把持部24a,24aの間隔および把持部24b,24bの間隔がプリント基板11の幅方向の長さと同じになるように把持機構22a,22aと把持機構22b,22bをそれぞれ移動させる。そして、各把持部24a,24bでプリント基板11の対応する角部を挟むことにより、プリント基板11を張った状態で設置する。   In this configuration, when conducting the continuity test of the printed circuit board 11 using the electrical test apparatus 10, first, the operation keys on the operation panel are operated to input data relating to the test probes 36 and 46 to be used. Then, the printed circuit board 11 is installed on the installation device 20. In this case, the fixing devices 20 a and 20 b are moved so that the distance between the opposing portions of the pair of gripping portions 24 a and the pair of gripping portions 24 b is the same as the length of the printed circuit board 11. Next, the gripping mechanisms 22a and 22a and the gripping mechanisms 22b and 22b are moved so that the distance between the gripping parts 24a and 24a and the distance between the gripping parts 24b and 24b are the same as the length in the width direction of the printed board 11. Then, the printed circuit board 11 is installed in a stretched state by sandwiching the corresponding corners of the printed circuit board 11 between the gripping portions 24a and 24b.

つぎに、移動装置15、移動装置16および移動部31のモータ32を駆動させることにより検出部37をプリント基板11における所定の接点11aの上方に移動させる。ついで、移動装置18、移動装置19および移動部41のモータ42を駆動させることにより検出部47をプリント基板11における所定の接点11aの下方に移動させる。そして、さらにモータ42を駆動させて、検出部47を上昇させて検査用プローブ46を、プリント基板11の接点11aに接触させる。ついで、モータ32を駆動させることにより、検出部37を下降させて検査用プローブ36を、プリント基板11の接点11aに接触させる。   Next, the detection unit 37 is moved above a predetermined contact 11 a on the printed circuit board 11 by driving the motor 32 of the movement device 15, the movement device 16, and the movement unit 31. Next, by driving the motor 42 of the moving device 18, the moving device 19, and the moving unit 41, the detection unit 47 is moved below the predetermined contact 11 a on the printed board 11. Then, the motor 42 is further driven to raise the detection unit 47 and bring the inspection probe 46 into contact with the contact 11 a of the printed circuit board 11. Next, by driving the motor 32, the detection unit 37 is lowered to bring the inspection probe 36 into contact with the contact 11 a of the printed board 11.

これによって、モータ32には、プリント基板11に対する検査用プローブ36の押圧力の反力が検出部37を介して伝わる。この反力を反力検出センサ38が検出し、その検出信号を制御装置50のRAM53に送る。CPU51はROM52に記憶されたプログラムにしたがってデータ処理を行い、押圧力算出用データ53aから適正な押圧力を算出するとともに、その算出値と反力検出センサ38の検出値との比較を行う。そして、モータ32にその押圧力を出力させるための電流値を算出する。そして、CPU51は算出した電流値によりモータ32を駆動させて検査用プローブ36によるプリント基板11の押圧力が算出値になるようにする。   As a result, the reaction force of the pressing force of the inspection probe 36 against the printed circuit board 11 is transmitted to the motor 32 via the detection unit 37. This reaction force is detected by the reaction force detection sensor 38, and the detection signal is sent to the RAM 53 of the control device 50. The CPU 51 performs data processing according to the program stored in the ROM 52, calculates an appropriate pressing force from the pressing force calculation data 53a, and compares the calculated value with the detection value of the reaction force detection sensor 38. Then, a current value for causing the motor 32 to output the pressing force is calculated. Then, the CPU 51 drives the motor 32 with the calculated current value so that the pressing force of the printed circuit board 11 by the inspection probe 36 becomes the calculated value.

これによって、検査用プローブ36は、適正な押圧力でプリント基板11の接点11aに接触する。その状態で検査用プローブ36に通電することにより導通検査を行う。導通検査が終了すると、前述した各装置を駆動させることにより、検出部47を下降させるとともに検出部37を上昇させて元の状態に戻す。そして、前述した操作を再度行うことにより、プリント基板11における次の検査位置に、検出部37を移動させてその部分の導通検査を行う。これを順次繰り返すことにより、プリント基板11における全ての部分の検査が行われる。   As a result, the inspection probe 36 contacts the contact 11a of the printed circuit board 11 with an appropriate pressing force. In this state, continuity inspection is performed by energizing the inspection probe 36. When the continuity test is completed, the above-described devices are driven to lower the detection unit 47 and raise the detection unit 37 to return to the original state. Then, by performing the above-described operation again, the detection unit 37 is moved to the next inspection position on the printed circuit board 11, and the continuity inspection of that portion is performed. By repeating this in sequence, all parts of the printed circuit board 11 are inspected.

また、下部検出装置40を用いて、プリント基板11に対する検査用プローブ46の押圧力が算出値になるようにしてプリント基板11の導通検査を行う場合には、検出部37を下降させて検査用プローブ36を、プリント基板11の接点11aに接触させた状態で、検出部47を上昇させて検査用プローブ46を、プリント基板11の接点11aに接触させる。これによって、モータ42には、プリント基板11に対する検査用プローブ46の押圧力の反力が検出部47を介して伝わる。この反力を反力検出センサ48が検出し、その検出信号をRAM53に送る。 Further, when conducting the continuity inspection of the printed circuit board 11 using the lower detection device 40 so that the pressing force of the inspection probe 46 against the printed circuit board 11 becomes a calculated value, the detection unit 37 is lowered to perform the inspection. In a state where the probe 36 is in contact with the contact 11 a of the printed circuit board 11, the detection unit 47 is raised to bring the inspection probe 46 into contact with the contact 11 a of the printed circuit board 11. As a result, the reaction force of the pressing force of the inspection probe 46 against the printed circuit board 11 is transmitted to the motor 42 via the detection unit 47. This reaction force is detected by the reaction force detection sensor 48, and the detection signal is sent to the RAM 53.

検出信号が送られたCPU51は、押圧力算出用データ53aから適正な押圧力を算出するとともに、その算出値と反力検出センサ48の検出値との比較を行う。そして、モータ42にその押圧力を出力させるための電流値を算出する。そして、CPU51は算出した電流値によりモータ42を駆動させて検査用プローブ46によるプリント基板11の押圧力が算出値になるようにし、その状態で検査用プローブ46に通電することにより導通検査を行う。   The CPU 51 to which the detection signal is sent calculates an appropriate pressing force from the pressing force calculation data 53 a and compares the calculated value with the detection value of the reaction force detection sensor 48. Then, a current value for causing the motor 42 to output the pressing force is calculated. Then, the CPU 51 drives the motor 42 with the calculated current value so that the pressing force of the printed circuit board 11 by the inspection probe 46 becomes the calculated value, and conducts the continuity test by energizing the inspection probe 46 in that state. .

また、大きさの異なる別のプリント基板の導通検査を行う場合には、検査済みのプリント基板11の各角部を、把持部24a,24bから外して、プリント基板11を電気検査装置10から取り出し、つぎのプリント基板を設置装置20に設置する。この場合、前述した操作を行うことにより、把持部24a,24bの位置をプリント基板の四隅に対応する間隔に位置決めする。そして、そのプリント基板の各角部を把持部24a,24bで挟んで固定することによりプリント基板の設置を行う。導通検査は、前述した操作にしたがって行われる。また、板状のプリント基板の導通検査を行う場合には、上部検出装置30と下部検出装置40とを同時に作動させながら導通検査を行うこともできる。   When conducting a continuity test of different printed circuit boards having different sizes, the corners of the inspected printed circuit board 11 are removed from the gripping parts 24a and 24b, and the printed circuit board 11 is taken out from the electrical inspection apparatus 10. Then, the next printed circuit board is installed in the installation apparatus 20. In this case, by performing the above-described operation, the positions of the grip portions 24a and 24b are positioned at intervals corresponding to the four corners of the printed circuit board. Then, the printed circuit board is installed by fixing each corner of the printed circuit board with the gripping parts 24a and 24b. The continuity test is performed according to the operation described above. Further, when conducting a continuity test on a plate-like printed circuit board, the continuity test can be performed while simultaneously operating the upper detection device 30 and the lower detection device 40.

このように、本発明に係る電気検査装置10では、プリント基板11から検査用プローブ36,46に掛かる反力を検出する反力検出センサ38,48が、検出部37,47でなく、制御装置50の近傍に取り付けられている。そして、反力検出センサ38,48は、プリント基板11に対する検査用プローブ36,46の押圧力を検出部37,47を介してモータ32,42に掛かる反力として検出するように構成されている。このため、検査用プローブ36,46を検出部37,47とともに取り替えても、反力検出センサ38,48は取り替えることなくそのまま使用できるようになる。   As described above, in the electrical inspection apparatus 10 according to the present invention, the reaction force detection sensors 38 and 48 for detecting the reaction force applied to the inspection probes 36 and 46 from the printed circuit board 11 are not the detection units 37 and 47 but the control device. It is attached in the vicinity of 50. The reaction force detection sensors 38 and 48 are configured to detect the pressing force of the inspection probes 36 and 46 against the printed circuit board 11 as the reaction force applied to the motors 32 and 42 via the detection units 37 and 47. . Therefore, even if the inspection probes 36 and 46 are replaced together with the detection units 37 and 47, the reaction force detection sensors 38 and 48 can be used as they are without replacement.

また、検査用プローブ36,46によるプリント基板11への押圧力を適正な値に制御できるため、検査用プローブ36,46とプリント基板11の接点11aとの接触不良がなくなり精度のよい電気検査が行える。さらに、検査用プローブ36,46と接点11aとの接触が適正状態で行われるため、検査用プローブ36,46が破損することも防止される。また、反力検出センサ38,48が、モータ32,42に掛かる反力を検出するように構成されているため、制御装置50の近傍だけでなく、移動部31,41等任意の部分に設けることもできる。これによって、反力検出センサ38,48の設置位置に自由度が増すようになる。   In addition, since the pressing force applied to the printed circuit board 11 by the inspection probes 36 and 46 can be controlled to an appropriate value, there is no contact failure between the inspection probes 36 and 46 and the contact 11a of the printed circuit board 11, and an accurate electrical inspection can be performed. Yes. Furthermore, since the inspection probes 36 and 46 and the contact point 11a are contacted in an appropriate state, the inspection probes 36 and 46 are prevented from being damaged. Further, since the reaction force detection sensors 38 and 48 are configured to detect the reaction force applied to the motors 32 and 42, the reaction force detection sensors 38 and 48 are provided not only in the vicinity of the control device 50 but also in any part such as the moving parts 31 and 41. You can also. This increases the degree of freedom in the installation positions of the reaction force detection sensors 38 and 48.

また、本発明に係るプリント基板の電気検査装置の他の実施形態として、反力検出センサ38,48を支持部材35,45に設けることもできる。この場合、反力検出センサ38,48は、検査用プローブ36,46がプリント基板11を押圧したときに、プリント基板11から検出部37,47を介して反力検出センサ38,48または支持部材35,45に掛かる反力を検出する。これによっても、検査用プローブ36,46を取り替えても、反力検出センサ38,48は取り替えることなくそのまま使用することができる。   In addition, as another embodiment of the printed circuit board electrical inspection apparatus according to the present invention, reaction force detection sensors 38 and 48 may be provided on the support members 35 and 45. In this case, the reaction force detection sensors 38, 48 are the reaction force detection sensors 38, 48 or support members from the printed circuit board 11 via the detection units 37, 47 when the inspection probes 36, 46 press the printed circuit board 11. The reaction force applied to 35 and 45 is detected. Also by this, even if the inspection probes 36 and 46 are replaced, the reaction force detection sensors 38 and 48 can be used as they are without replacement.

また、本発明は、前述した実施形態に限定するものでなく、本発明の技術的範囲において適宜変更実施が可能である。例えば、前述した実施形態では、プリント基板11の上方と下方にそれぞれ上部検出装置30と下部検出装置40を設けたが、この検出装置は、どちらか一方だけに設けてもよい。また、図6に示した項目についても、これに限るものでなく、適正な押圧力を求めることのできるデータであれば他の特性に基づく項目を用いることもできる。   Further, the present invention is not limited to the above-described embodiments, and can be appropriately modified within the technical scope of the present invention. For example, in the above-described embodiment, the upper detection device 30 and the lower detection device 40 are provided above and below the printed circuit board 11, respectively. However, this detection device may be provided in only one of them. Also, the items shown in FIG. 6 are not limited to this, and items based on other characteristics can be used as long as the data can obtain an appropriate pressing force.

さらに、前述した実施形態では、プリント基板11を水平に設置しているが、プリント基板11の設置の向きは、任意の向きにすることができる。例えば、プリント基板11を傾斜させて設置したり、垂直に設置したりすることができる。また、前述した実施形態では、駆動装置をモータ32,42で構成したが、この駆動装置としてはエアシリンダー等の装置を用いることができる。さらに、本発明に係る電気検査は、導通検査に限らず、絶縁検査等の電気的な検査を含むものとする。   Furthermore, in the above-described embodiment, the printed circuit board 11 is installed horizontally, but the installation direction of the printed circuit board 11 can be set to an arbitrary direction. For example, the printed circuit board 11 can be installed in an inclined state or installed vertically. In the above-described embodiment, the drive device is configured by the motors 32 and 42. However, a device such as an air cylinder can be used as the drive device. Furthermore, the electrical inspection according to the present invention is not limited to the continuity inspection, but includes an electrical inspection such as an insulation inspection.

本発明の一実施形態による電気検査装置の要部を示した概略図である。It is the schematic which showed the principal part of the electrical inspection apparatus by one Embodiment of this invention. 電気検査装置の平面図である。It is a top view of an electrical inspection apparatus. 電気検査装置の正面図である。It is a front view of an electrical inspection apparatus. 図3の二点鎖線で囲んだ部分の拡大図である。FIG. 4 is an enlarged view of a portion surrounded by a two-dot chain line in FIG. 3. 電気検査装置の構成図である。It is a block diagram of an electrical inspection apparatus. 押圧力を算出するための押圧力算出用データが記載された表である。It is the table | surface in which the data for calculation of pressing force for calculating pressing force were described.

符号の説明Explanation of symbols

10…電気検査装置、11…プリント基板、11a…接点、20…設置装置、30…上部検出装置、31,41…移動部、32,42…モータ、34,44…昇降装置、35,45…支持部材、36,46…検査用プローブ、37,47…検出部、38,48…反力検出センサ、40…下部検出装置、50…制御装置
DESCRIPTION OF SYMBOLS 10 ... Electrical test | inspection apparatus, 11 ... Printed circuit board, 11a ... Contact, 20 ... Installation apparatus, 30 ... Upper detection apparatus, 31, 41 ... Moving part, 32, 42 ... Motor, 34, 44 ... Lifting device, 35, 45 ... Support member, 36, 46 ... inspection probe, 37, 47 ... detection unit, 38, 48 ... reaction force detection sensor, 40 ... lower detection device, 50 ... control device

Claims (6)

設置装置に設置されたプリント基板の接点に検査用プローブを接触させることにより、前記プリント基板の電気検査を行うプリント基板の電気検査装置であって、
前記検査用プローブが取り付けられる取付部材と、
前記取付部材を前記設置装置に設置されたプリント基板に対して進退させることにより、前記検査用プローブを前記プリント基板に接触させるモータを備えた駆動装置と、
前記駆動装置のモータに接続され、前記検査用プローブが前記プリント基板に接触したときに、前記プリント基板に対する検査用プローブの押圧力を前記駆動装置に掛かる反力として検出する検出装置と、
前記検査用プローブの種類、個数および配置に基づいて前記検査用プローブの押圧力の適正値を求め、前記検出装置が検出した前記検査用プローブの前記プリント基板に対する押圧力が前記適正値になるように前記駆動装置の駆動を制御する制御装置と
を備えたことを特徴とするプリント基板の電気検査装置。
An electrical inspection device for a printed circuit board that performs electrical inspection of the printed circuit board by bringing an inspection probe into contact with a contact point of the printed circuit board installed in the installation device,
An attachment member to which the inspection probe is attached;
By advancing and retracting the attachment member with respect to the installed PCB in the installation device, a drive operated device comprising a motor Ru contacting the testing probe to the printed circuit board,
Is connected to a motor of the drive equipment, when the inspection probe is brought into contact with the said printed circuit board, a detection device for detecting the pressing force of the test probe relative to the printed circuit board as a reaction force applied to the drive device,
Type of the test probe determines the appropriate value of the pressing force of the test probe on the basis of the number count and placed in the appropriate value pressing force with respect to the printed circuit board of the inspection probe the detecting device detects A printed circuit board electrical inspection apparatus, comprising: a control device that controls the drive of the drive device.
前記駆動装置に掛かる反力が前記駆動装置の駆動力に対する反力である請求項1に記載のプリント基板の電気検査装置。   The printed circuit board electrical inspection apparatus according to claim 1, wherein a reaction force applied to the drive device is a reaction force with respect to the drive force of the drive device. 前記駆動装置が前記取付部材を前記駆動装置側に着脱可能に取り付けるための支持部を備え、前記駆動装置に掛かる反力が前記支持部に掛かる反力である請求項1に記載のプリント基板の電気検査装置。   The printed circuit board according to claim 1, wherein the driving device includes a support portion for detachably attaching the mounting member to the driving device side, and a reaction force applied to the drive device is a reaction force applied to the support portion. Electrical inspection device. 検査用プローブが取り付けられた取付部材をプリント基板に対して進退させることにより、前記検査用プローブを前記プリント基板に所定の押圧力で接触させるモータを備えた駆動装置と、前記駆動装置のモータに接続された検出装置とを用いて、前記プリント基板の電気検査を行うプリント基板の電気検査方法であって、
前記検査用プローブを前記プリント基板に接触させる接触工程と、
前記検査用プローブが前記プリント基板に接触したときに、前記検出装置が、前記プリント基板に対する検査用プローブの押圧力を前記駆動装置に掛かる反力として検出する反力検出工程と、
前記検査用プローブの種類、個数および配置に基づいて前記検査用プローブの押圧力の適正値を求め、前記反力検出工程において検出された前記検査用プローブの前記プリント基板に対する押圧力が前記適正値になるように前記駆動装置の駆動を制御する押圧力制御工程と
を備えたことを特徴とするプリント基板の電気検査方法。
By advancing and retracting the attachment member inspection probe is attached to the printed board, and the drive movement device provided with a motor for the inspection probe Ru is contacted with a predetermined pressing force to the printed circuit board, said drive equipment A printed circuit board electrical inspection method for performing electrical inspection of the printed circuit board using a detection device connected to the motor of
Contacting the inspection probe with the printed circuit board; and
A reaction force detection step in which when the inspection probe comes into contact with the printed circuit board, the detection device detects a pressing force of the inspection probe against the printed circuit board as a reaction force applied to the drive device;
Type of the test probe determines the appropriate value of the pressing force of the test probe on the basis of the number count and placement, the pressing force with respect to the printed circuit board of the reaction force detected in the detection step was the testing probe the A printed circuit board electrical inspection method, comprising: a pressing force control step for controlling driving of the driving device so as to have an appropriate value.
前記反力検出工程において検出される前記駆動装置に掛かる反力が前記駆動装置の駆動力に対する反力である請求項4に記載のプリント基板の電気検査方法。   The printed circuit board electrical inspection method according to claim 4, wherein the reaction force applied to the drive device detected in the reaction force detection step is a reaction force with respect to the drive force of the drive device. 前記駆動装置が前記取付部材を前記駆動装置側に着脱可能に取り付けるための支持部を備え、前記反力検出工程において検出される前記駆動装置に掛かる反力が、前記支持部に掛かる反力である請求項4に記載のプリント基板の電気検査方法。   The drive device includes a support portion for detachably attaching the attachment member to the drive device side, and a reaction force applied to the drive device detected in the reaction force detection step is a reaction force applied to the support portion. The electrical inspection method for a printed circuit board according to claim 4.
JP2005155377A 2005-05-27 2005-05-27 Electrical inspection apparatus and electrical inspection method for printed circuit board Active JP5334355B2 (en)

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JP2005155381A JP4919617B2 (en) 2005-05-27 2005-05-27 Electrical inspection apparatus and electrical inspection method for printed circuit board
JP2005155377A JP5334355B2 (en) 2005-05-27 2005-05-27 Electrical inspection apparatus and electrical inspection method for printed circuit board
TW095118425A TWI305708B (en) 2005-05-27 2006-05-24 Electric inspection apparatus and method for printed board
KR1020060046955A KR100816125B1 (en) 2005-05-27 2006-05-25 Electric inspection apparatus and method for printed board
CN200610084557A CN100585415C (en) 2005-05-27 2006-05-25 Device and method for electrically inspecting printed circuit board

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Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4461159B2 (en) * 2007-06-14 2010-05-12 ヤマハファインテック株式会社 Printed circuit board inspection apparatus and inspection method
KR101049396B1 (en) * 2010-06-11 2011-07-15 한국기계연구원 Apparatus and method for simulating printing process
CN104155600A (en) * 2014-08-15 2014-11-19 宁波昌隆机电有限公司 High-efficiency electrical switch squeezing test method
JP6726077B2 (en) 2016-10-13 2020-07-22 ヤマハファインテック株式会社 Processor
CN109212273A (en) * 2017-07-07 2019-01-15 南京泊纳莱电子科技有限公司 Flying probe tester
CN108525895B (en) * 2018-04-17 2019-08-27 京东方科技集团股份有限公司 A kind of control method of alignment films print system and printing equipment
JP7310345B2 (en) * 2019-06-17 2023-07-19 ニデックアドバンステクノロジー株式会社 inspection equipment
JP7371885B2 (en) * 2019-07-08 2023-10-31 ヤマハファインテック株式会社 Electrical inspection equipment and holding unit

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL9001478A (en) * 1990-06-28 1992-01-16 Philips Nv TESTING DEVICE FOR ELECTRICAL SWITCHES ON PANELS.
KR0138754B1 (en) 1990-08-06 1998-06-15 이노우에 아키라 Touch sensor unit of probe for testing electric circuit and electric circuit testing apparatus using the touch sensor unit
JPH06140479A (en) * 1992-10-23 1994-05-20 Mitsubishi Denki Eng Kk Device for testing semiconductor integrated circuit
JPH0792479B2 (en) * 1993-03-18 1995-10-09 東京エレクトロン株式会社 Parallelism adjustment method for probe device
JP3099596B2 (en) * 1993-08-26 2000-10-16 トヨタ自動車株式会社 Probe pin arrangement determination device for in-circuit test
JPH0772218A (en) * 1993-08-31 1995-03-17 Azusa Denshi Kk Method and apparatus for inspection of printed-wiring board
JP2963828B2 (en) * 1993-09-24 1999-10-18 東京エレクトロン株式会社 Probe device
JPH0855883A (en) * 1994-08-15 1996-02-27 Hitachi Ltd Method and device for inspecting circuit element
KR0163688B1 (en) * 1995-07-28 1999-03-20 전주범 Internal circuit measuring device
JPH0989983A (en) * 1995-09-25 1997-04-04 Ando Electric Co Ltd Ic carrying device making changeable contact pressure of ic by data
JPH102931A (en) * 1996-06-17 1998-01-06 Tescon:Kk Inspection apparatus for burn-in board
TW369601B (en) * 1997-06-17 1999-09-11 Advantest Corp Probe card
JP3028095B2 (en) * 1998-03-04 2000-04-04 日本電気株式会社 Probing apparatus and method
JP3397713B2 (en) * 1999-03-10 2003-04-21 キヤノン株式会社 Electrical connection device
JP2000284019A (en) * 1999-03-30 2000-10-13 Seiko Epson Corp Pressing device for ic device inspecting device and ic device inspecting device with the same
JP2002082144A (en) * 2000-09-06 2002-03-22 Toshiba Microelectronics Corp Measuring method for electrical characteristics of semiconductor package, and test handler for the same
JP2003066097A (en) * 2001-08-27 2003-03-05 Toshiba Corp Testing device for semiconductor device
JP2003185704A (en) * 2001-12-17 2003-07-03 Seiko Epson Corp Electrode inspecting device
JP2003202359A (en) * 2001-12-28 2003-07-18 Fujitsu Ltd Contact-pressure controller for contactor
JP2004228332A (en) * 2003-01-23 2004-08-12 Yamaha Fine Technologies Co Ltd Electrical inspection apparatus

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JP2006329861A (en) 2006-12-07
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JP4919617B2 (en) 2012-04-18
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KR100816125B1 (en) 2008-03-21
CN1916649A (en) 2007-02-21

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