JPH102931A - Inspection apparatus for burn-in board - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an inspection apparatus which prevents the connection defect or the damage of a burn-in board due to an irregularity in the height of a socket by a method wherein a contact-force measuring means is installed and the contact force of a pin at a checker probe with a contact pin at the socket is set arbitrarily. SOLUTION: A chuck 31 is installed vertically at a chuck mounting part which is installed on the front side of a driving head 8, and a checker probe 9 is chucked. A plurality of pins 12 are arranged and installed at the probe 9 so as to correspond to contact pins 10a at a socket 10. At this time, a gap is formed on the rear surface of the chuck mounting part, a pressure sensor 32 at a contact-force measuring means is fixed, and its cable is connected to a control device. When the probe 9 comes into contact with the socket 10, the control device stops the movement to the lower direction in the Z-axis of the head 8 when data obtained by A/D-converting the output voltage of the sensor 32 reaches a preset definite value. The definite value is the value of the optimum contact force of the probe 9 with the socket 10. Thereby, the pins 12 and the contact pins 10a can be touched soft at a definite contact force.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a burn-in board inspection apparatus for inspecting a burn-in board for checking the quality of an IC and a contact head in the inspection apparatus.

[0002]

2. Description of the Related Art In recent years, semiconductor devices have rapidly increased in density and speed, and accordingly, for example, high quality and high reliability of ICs and the like have been required.

Therefore, as a semiconductor test, burn-in is performed to check the quality of a semiconductor component such as an IC in a furnace at a temperature of several hundred degrees. This burn-in
Form a burn-in board in which a large number of IC sockets are arranged on the board for burn-in, mount semiconductor components to be inspected on the burn-in board, and operate each semiconductor component while maintaining stresses such as high temperature and high voltage within the rated range. For a certain period of time.

In such burn-in, an IC for operating a semiconductor component to be inspected is also provided on the burn-in board.
Since sockets and printed circuit boards etc. are arranged,
The quality of the burn-in board itself must be checked in advance.

Therefore, conventionally, as shown in FIG. 7, for example, as a burn-in board inspection apparatus (hereinafter referred to as a burn-in board tester) 1, a guide serving as a guide when the burn-in board 3 is carried into the base 2 is provided. A rail 4, a guide edge connector 6 for connecting the terminal section 5 of the burn-in board 3, an XY robot 7, and the XY robot 7
Is moved in two directions on the burn-in board 3 by Z
It comprises a drive head 8 which is moved up and down in the axial direction, and a checker probe 9 which is detachably mounted in a lower end portion of the drive head 8 in a socket type.

[0008] As shown in FIGS. 8 and 9, the checker probe 9 is positioned and abutted on a number of sockets 10 provided on the burn-in board 3. Or frames 11a, 11
a and a number of pins 12 for contact.

The vertical movement of the drive head 8 in the Z-axis can be performed, for example, by rotating a servo motor a predetermined number of pulses as a conventional example, so that a worm gear or pulley fixed to the drive shaft of the servo motor is used. The rotation is performed by rotating a ball screw and vertically moving a rack meshing with the ball screw.

Further, as a conventional example, there is also known an apparatus in which a drive head 8 is vertically moved in the Z-axis direction by an air cylinder.

[0009]

However, in the case of the conventional example, since the vertical movement amount of the drive head 8 is controlled with high accuracy by the servomotor, the height of the socket 10 on the burn-in board 3 is reduced. For example, if it fluctuates due to the sled of the burn-in board itself,
If the distance is longer than the set distance, poor contact between the pin 12 of the checker probe 9 in the drive head 8 and the contact pin of the socket 10 may occur. Conversely, if the distance is shorter than the set distance, high pressure is applied and the socket 10 is damaged. There is a problem that there is a risk of inviting

As described above, the conventional burn-in board tester has a problem to be solved in the method of moving the drive head to be brought into contact with the socket of the burn-in board.

[0011]

The gist of the present invention for solving the above-mentioned problems of the burn-in board inspection apparatus according to the present invention is that at least a plurality of sockets provided on the burn-in board are driven to move up and down in the Z-axis direction. A burn-in board inspection device for abutting a checker probe mounted on a head and inspecting each of the sockets by control means, wherein a contact force measuring means for measuring a contact force between the checker probe and the socket is provided. It is.

When the contact force measured by the contact force measuring means reaches a predetermined constant value, at least the movement of the drive head is stopped by the control means electrically connected to the contact force measuring means. That the contact force measuring means is provided in a mounting portion between the drive head and the checker probe; and that the checker probe is detachably mounted on the drive head. That is.

According to the burn-in board inspection apparatus of the present invention, the contact between the pin of the checker probe on which the drive head is mounted and the contact pin of the socket on the burn-in board is controlled to a fixed contact force. Being in contact at best always. Therefore, unlike the related art, when the checker probe is moved downward by a fixed amount, the possibility that the contact failure or the contact force becomes excessive due to the variation in the height of the socket of the burn-in board is eliminated.

[0014]

Next, an embodiment according to the present invention will be described in detail with reference to the drawings. For easy understanding, portions corresponding to the conventional example are denoted by the same reference numerals as those in the conventional example. As shown in FIGS. 1 to 3, the embodiment of the present invention relates to a moving body 1 that is moved by a ball screw 15 and a guide rail 16 in two directions XY by an XY robot.
The head block 20 is fixed to 7 by screws 18 and 19.

A support block 21 which is long in the vertical direction along the Z-axis is fixed to the head block 20 by screws, and the support block 21 has pulleys 22, 23 on its upper and lower parts.
And a belt 24 is wound between the pulleys 22 and 23.

A motor mounting frame 25 is fixed to the lower portion of the support block 21 with screws, and a motor 26 is fixed to the motor mounting frame 25.

The motor shaft of the motor 26 is connected coaxially with the shaft of the pulley 24 below the support block 21.

Further, Z is provided on both sides of the support block 21.
The drive head 8 is slidably guided by rectangular guide rails 27 and 28 provided along the vertical direction of the shaft, and is partially fixed to one side of the belt 24 and slid in the vertical direction. Is provided.

A photosensor 29 is provided above the support block 21, while a sensor rod 30 is mounted above the drive head 8. The photo sensor 29 and the sensor rod 30 serve as stop positioning at the upper position when the drive head 8 is raised.

A chuck mounting portion 34 is provided in front of the drive head 8, and a chuck portion 31 is vertically provided below the chuck mounting portion 34. Further, the checker probe 9 is detachably chucked to the chuck portion 31. As shown in FIG. 4, the checker probe 9 is provided with a plurality of pins 12 corresponding to the contact pins 10a of the socket 10, and a positioning reference pin 1 corresponding to a reference hole of the socket 10 on a diagonal line.
1, 11 are vertically provided.

A gap is partially provided on the lower surface of the chuck mounting section 34 of the drive head 8, and a pressure sensor 32 as a contact force measuring means is fixed to the gap with an adhesive, and a cable 33 of the pressure sensor 32 is fixed. Are electrically connected to a control device (not shown) which is a control means of the burn-in board inspection device.

The pressure sensor 32 as the contact force measuring means is not limited to the above position, but may be any place where the checker probe 9 can measure the contact force that presses the socket 10 on the burn-in board 3. For example, it may be attached to a chucking portion between the chuck portion 31 and the checker probe 9.

FIG. 5 shows an example of an electric circuit configuration of the pressure sensor 32. As shown in FIG. The applied voltage is DC 9 (± 0.05) V from a DC constant voltage power supply. In the pressure sensor 32, when the drive head 8 and the chuck portion 31 are fastened with the screws 8a and 8b, a pressure is applied to the pressure sensor 32 and an output voltage is measured. To output 0 points.

In the control device, when the checker probe 9 comes into contact with the socket 10, the output voltage output from the pressure sensor 32 is A / D converted, and the obtained data is set in advance with the obtained data. Constant value (threshold)
When the constant value is reached, the drive head 8
There is provided a determination means (determination routine) for at least stopping the downward movement of the Z axis in the downward direction.

When the determination means determines that the output voltage of the pressure sensor 32 has reached a predetermined value, the control device controls the rotation of the motor 26 that raises and lowers the drive head 8 via a motor driver. It is to stop.

The above-mentioned constant value is set in advance in the controller as a numerical value obtained by A / D converting the output voltage of the pressure sensor 32 when the most appropriate contact force between the checker probe 9 and the socket 10 is obtained. To set.

In addition, a lead wire from each pin 12 of the checker probe 9 is electrically connected to the control device, and a monitor cable is also electrically connected to the control device. The quality of each contact pin 10a is displayed in a list on a monitor.

A method for using the burn-in board inspection apparatus of the present invention configured as described above will be described. As shown in FIG. 7, the burn-in board 3 is carried in along the guide rails 4 and 4 of the base 2. Then, the terminal 5 of the burn-in board 3 is pressed against the guide edge connector 6 and mounted.

Next, in the control device, the pressure sensor 3
2 is reset to 0 V, and the XY robot 7 moves the drive head 8 to a desired position on the burn-in board 3.

Then, as shown in FIG. 6, the control device rotates the motor 26 in a predetermined direction via a motor driver to lower the drive head 8 and the checker probe 9 downward in the Z axis.

In the control device, the output voltage from the pressure sensor 32 as the contact force measuring means is always A / D converted, and the numerical data is monitored by the judging means.

Then, the checker probe 9 comes into contact with the socket 10 on the burn-in board 3, and the pin 12 of the checker probe 9 and the contact pin 10 of the socket 10 are connected.
When a is abutted and is further pushed in, a repulsive force is generated,
Pressure is applied to the pressure sensor 32.

When the output voltage from the pressure sensor 32 increases and the A / D-converted numerical data reaches a predetermined value, the control device receives a signal from the judging means and controls the rotation of the motor 26 to a motor driver. To stop through.
As a result, the pin 12 of the checker probe 9 and the contact pin 10a of the socket 10 are soft-touched with a constant contact force.

Next, inspection of the socket 10 is started with the checker probe 9 in a state where the contact is made soft and conductive with a constant contact force. The inspection result is displayed on the monitor from the control device. Then, when a predetermined inspection relating to a disconnection, a resistance value, or the like at the contact pin 10a of the socket 10 is completed, and the quality of the burn-in board 3 is determined, the control device lowers the motor and lowers the drive head 8. Is rotated in the opposite direction, and checker probe 9
Is separated from the socket 10.

After the drive head 8 and the checker probe 9 are raised, as shown in FIG. 3, when the sensor rod 30 that rises together with the drive head 8 reaches the photo sensor 29 on the support block 21 side, the photo sensor 29 The infrared rays are blocked by the sensor rod 30, whereby the control device stops the rotation of the motor 26. This is,
This is one step in the inspection of the socket 10.

Thereafter, the drive head 8 is moved by the XY robot 7.
Is moved to a desired position, each socket 10 is inspected according to the work flow shown in FIG. 6, the burn-in board 3 after the inspection is carried out, and sent out to the next step.

In this way, the contact force measuring means and the control device move the drive head 8 in the Z-axis direction so that the checker probe 9 contacts the sockets 10 on the burn-in board 3 with a constant contact force. Because the descent is controlled,
The contact pins 10a of the socket 10 and the pins 12 of the checker probe 9 are securely contacted. As another embodiment of the present invention, a sliding means such as a ball screw may be employed as the means for raising and lowering the drive head 8 in the Z-axis direction, in addition to the method using the belt 24.

When there are a plurality of types of burn-in boards 3, the checker probe 9 is
The checker probe 9 corresponding to the burn-in board 3 to be inspected is attached to and detached from the chuck unit 31.

[0039]

As described above, the burn-in board inspection apparatus according to the present invention has at least a checker probe mounted on a drive head moving up and down in the Z-axis direction at a plurality of sockets provided on the burn-in board. The checker probe and the socket are provided with a contact force measuring means for measuring the contact force between the checker probe and the socket. The contact force can be set arbitrarily, and the best contact force is always maintained, and the conventional drive head is lowered by a fixed amount such as a contact failure or damage due to a variation in socket height on the burn-in board. The present invention has an excellent effect that the inconvenience at the time can be solved by the present invention. Furthermore,
This not only prolongs the life of the pins of the checker probe or the contact pins of the socket, but also provides an excellent effect that a highly reliable burn-in board inspection apparatus can be provided.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a main part of a burn-in board inspection apparatus according to the present invention.

FIG. 2 is a front view of a main part of the burn-in board inspection apparatus according to the present invention.

FIG. 3 is a sectional view taken along line AA in FIG. 2;

FIG. 4 is an explanatory view showing a state in which a checker probe of the burn-in board inspection apparatus according to the present invention descends toward the socket.

FIG. 5 is an explanatory diagram showing an example of a circuit configuration of a pressure sensor as a contact force measuring means in the burn-in board inspection device according to the present invention.

FIG. 6 is an explanatory diagram showing a work flow when the drive head of the burn-in board inspection apparatus according to the present invention is lowered in the Z-axis direction.

FIG. 7 is a partial schematic configuration diagram of a conventional burn-in board inspection apparatus.

FIG. 8 is a perspective view of a checker probe according to the conventional example.

FIG. 9 is a perspective view of another example of the checker probe in the conventional example.

FIG. 10 is an explanatory diagram showing a work flow when the drive head of the burn-in board inspection apparatus according to the conventional example is lowered in the Z-axis direction.

[Explanation of symbols]

 1 burn-in board inspection device, 2 bases, 3 burn-in board, 4 guide rail, 5 terminal section, 6 guide edge connector, 7 XY robot, 8 drive head, 9 checker probe, 10 socket, 10a socket contact pin, 12 Checker probe pins, 22, 23 pulleys, 24 belts, 26 motors, 27, 28 guide rails, 31 chucks, 32 pressure sensors, 33 cables.

Claims (4)

[Claims] 1. A burn-in board for inspecting each of said sockets by a control means by bringing at least a checker probe mounted on a drive head moving up and down in the Z-axis direction into contact with a plurality of sockets provided on the burn-in board. A burn-in board inspection device, comprising: an inspection device, wherein a contact force measuring means for measuring a contact force between the checker probe and the socket is provided. 2. A control unit electrically connected to the contact force measuring means, at least stopping the movement of the drive head when the contact force measured by the contact force measuring means reaches a predetermined constant value. The burn-in board inspection apparatus according to claim 1, further comprising: a determination unit configured to perform the determination. 3. The burn-in board inspection apparatus according to claim 1, wherein the contact force measuring means is provided on a mounting portion between the drive head and the checker probe. 4. The burn-in board inspection apparatus according to claim 1, wherein the checker probe is detachably mounted on the drive head.