TW369465B - Method of manufacturing semiconductor wafers - Google Patents

Method of manufacturing semiconductor wafers

Info

Publication number
TW369465B
TW369465B TW086118508A TW86118508A TW369465B TW 369465 B TW369465 B TW 369465B TW 086118508 A TW086118508 A TW 086118508A TW 86118508 A TW86118508 A TW 86118508A TW 369465 B TW369465 B TW 369465B
Authority
TW
Taiwan
Prior art keywords
slicing
semiconductor wafer
diameter
monocrystalline ingot
sliced
Prior art date
Application number
TW086118508A
Other languages
English (en)
Inventor
Kohei Toyama
Shoichi Takamizawa
Kaneyoshi Aramaki
Original Assignee
Shinetsu Handotai Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinetsu Handotai Kk filed Critical Shinetsu Handotai Kk
Application granted granted Critical
Publication of TW369465B publication Critical patent/TW369465B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02002—Preparing wafers
    • H01L21/02005—Preparing bulk and homogeneous wafers
    • H01L21/02008—Multistep processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
TW086118508A 1996-12-27 1997-12-09 Method of manufacturing semiconductor wafers TW369465B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35798296A JP3620683B2 (ja) 1996-12-27 1996-12-27 半導体ウエーハの製造方法

Publications (1)

Publication Number Publication Date
TW369465B true TW369465B (en) 1999-09-11

Family

ID=18456948

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086118508A TW369465B (en) 1996-12-27 1997-12-09 Method of manufacturing semiconductor wafers

Country Status (4)

Country Link
US (1) US5899744A (zh)
EP (1) EP0850737A3 (zh)
JP (1) JP3620683B2 (zh)
TW (1) TW369465B (zh)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1564796A1 (en) * 1997-12-09 2005-08-17 Shin-Etsu Handotai Company Limited Semiconductor wafer processing method and semiconductor wafers produced by the same
JP3358549B2 (ja) * 1998-07-08 2002-12-24 信越半導体株式会社 半導体ウエーハの製造方法ならびにウエーハチャック
JP3664593B2 (ja) * 1998-11-06 2005-06-29 信越半導体株式会社 半導体ウエーハおよびその製造方法
US6214704B1 (en) 1998-12-16 2001-04-10 Memc Electronic Materials, Inc. Method of processing semiconductor wafers to build in back surface damage
US6596079B1 (en) * 2000-03-13 2003-07-22 Advanced Technology Materials, Inc. III-V nitride substrate boule and method of making and using the same
DE10064081C2 (de) * 2000-12-21 2002-06-06 Wacker Siltronic Halbleitermat Verfahren zur Herstellung einer Halbleiterscheibe
DE10159832A1 (de) * 2001-12-06 2003-06-26 Wacker Siltronic Halbleitermat Halbleiterscheibe aus Silicium und Verfahren zu deren Herstellung
DE10229499B4 (de) * 2002-04-23 2007-05-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Bearbeiten eines Wafers
DE102005046726B4 (de) * 2005-09-29 2012-02-02 Siltronic Ag Nichtpolierte monokristalline Siliziumscheibe und Verfahren zu ihrer Herstellung
JP2007204286A (ja) * 2006-01-31 2007-08-16 Sumco Corp エピタキシャルウェーハの製造方法
JP2008028259A (ja) * 2006-07-24 2008-02-07 Mitsubishi Chemicals Corp 単結晶ＧａＮ基板の製造方法
JP2008166805A (ja) * 2006-12-29 2008-07-17 Siltron Inc 高平坦度シリコンウェハーの製造方法
JP6032590B2 (ja) * 2012-04-04 2016-11-30 株式会社福田結晶技術研究所 酸化亜鉛単結晶の製造方法
CN109290874B (zh) * 2017-07-25 2021-02-02 北京通美晶体技术有限公司 背面有橄榄形凹坑的磷化铟晶片、制法及所用腐蚀液
JP2020188103A (ja) * 2019-05-14 2020-11-19 株式会社ディスコ ウェーハの製造方法
JP7472546B2 (ja) * 2020-03-03 2024-04-23 住友金属鉱山株式会社 圧電性酸化物単結晶基板の製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1206371A (en) * 1968-03-21 1970-09-23 Westinghouse Brake & Signal The etching of silicon semiconductor wafers and semiconductor devices incorporating such wafers
JPS54110783A (en) * 1978-02-20 1979-08-30 Hitachi Ltd Semiconductor substrate and its manufacture
DE4304849C2 (de) * 1992-02-21 2000-01-27 Mitsubishi Electric Corp Halbleitervorrichtung und Verfahren zur Herstellung einer Halbleitervorrichtung
JP2853506B2 (ja) * 1993-03-24 1999-02-03 信越半導体株式会社 ウエーハの製造方法
JP2910507B2 (ja) * 1993-06-08 1999-06-23 信越半導体株式会社 半導体ウエーハの製造方法
JPH0945643A (ja) * 1995-07-31 1997-02-14 Komatsu Electron Metals Co Ltd 半導体ウェハ及びその製造方法
JPH09270400A (ja) * 1996-01-31 1997-10-14 Shin Etsu Handotai Co Ltd 半導体ウェーハの製造方法

Also Published As

Publication number Publication date
EP0850737A3 (en) 1999-12-15
JP3620683B2 (ja) 2005-02-16
JPH10189502A (ja) 1998-07-21
EP0850737A2 (en) 1998-07-01
US5899744A (en) 1999-05-04

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