TW365051B - Manufacturing method for shallow trench isolation area of semiconductor component - Google Patents

Manufacturing method for shallow trench isolation area of semiconductor component

Info

Publication number
TW365051B
TW365051B TW087104235A TW87104235A TW365051B TW 365051 B TW365051 B TW 365051B TW 087104235 A TW087104235 A TW 087104235A TW 87104235 A TW87104235 A TW 87104235A TW 365051 B TW365051 B TW 365051B
Authority
TW
Taiwan
Prior art keywords
silicon nitride
etching
oxide
substrate
manufacturing
Prior art date
Application number
TW087104235A
Other languages
English (en)
Inventor
Syun-Ming Jang
Original Assignee
Taiwan Semiconductor Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg Co Ltd filed Critical Taiwan Semiconductor Mfg Co Ltd
Priority to TW087104235A priority Critical patent/TW365051B/zh
Application granted granted Critical
Publication of TW365051B publication Critical patent/TW365051B/zh

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  • Element Separation (AREA)
TW087104235A 1998-03-21 1998-03-21 Manufacturing method for shallow trench isolation area of semiconductor component TW365051B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW087104235A TW365051B (en) 1998-03-21 1998-03-21 Manufacturing method for shallow trench isolation area of semiconductor component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW087104235A TW365051B (en) 1998-03-21 1998-03-21 Manufacturing method for shallow trench isolation area of semiconductor component

Publications (1)

Publication Number Publication Date
TW365051B true TW365051B (en) 1999-07-21

Family

ID=57941028

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087104235A TW365051B (en) 1998-03-21 1998-03-21 Manufacturing method for shallow trench isolation area of semiconductor component

Country Status (1)

Country Link
TW (1) TW365051B (zh)

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