TW358386U - Exhaust gas treatment unit - Google Patents

Exhaust gas treatment unit

Info

Publication number
TW358386U
TW358386U TW086216723U TW86216723U TW358386U TW 358386 U TW358386 U TW 358386U TW 086216723 U TW086216723 U TW 086216723U TW 86216723 U TW86216723 U TW 86216723U TW 358386 U TW358386 U TW 358386U
Authority
TW
Taiwan
Prior art keywords
exhaust gas
gas treatment
treatment unit
unit
exhaust
Prior art date
Application number
TW086216723U
Other languages
English (en)
Inventor
Yoshihiro Ibaraki
Hidekazu Ina
Hideji Kawanaka
Original Assignee
Chiyama Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chiyama Kk filed Critical Chiyama Kk
Publication of TW358386U publication Critical patent/TW358386U/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/063—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating electric heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • F23J15/022—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material for removing solid particulate material from the gasflow
    • F23J15/025—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material for removing solid particulate material from the gasflow using filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/06—Arrangements of devices for treating smoke or fumes of coolers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2207/00—Control
    • F23G2207/10—Arrangement of sensing devices
    • F23G2207/101—Arrangement of sensing devices for temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2207/00—Control
    • F23G2207/30—Oxidant supply
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2207/00—Control
    • F23G2207/40—Supplementary heat supply
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2208/00—Safety aspects
    • F23G2208/10—Preventing or abating fire or explosion, e.g. by purging
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2219/00—Treatment devices
    • F23J2219/60—Sorption with dry devices, e.g. beds

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)
TW086216723U 1994-11-29 1995-11-28 Exhaust gas treatment unit TW358386U (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29465194A JP3280173B2 (ja) 1994-11-29 1994-11-29 排ガス処理装置

Publications (1)

Publication Number Publication Date
TW358386U true TW358386U (en) 1999-05-11

Family

ID=17810533

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086216723U TW358386U (en) 1994-11-29 1995-11-28 Exhaust gas treatment unit

Country Status (5)

Country Link
US (1) US5800792A (zh)
EP (1) EP0741601A1 (zh)
JP (1) JP3280173B2 (zh)
TW (1) TW358386U (zh)
WO (1) WO1996016720A1 (zh)

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US6322756B1 (en) * 1996-12-31 2001-11-27 Advanced Technology And Materials, Inc. Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
US5955037A (en) * 1996-12-31 1999-09-21 Atmi Ecosys Corporation Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
GB2323312B (en) * 1997-03-21 2001-08-08 Korea M A T Co Ltd Gas scrubber and methods of disposing a gas using the same
KR100237835B1 (ko) * 1997-05-26 2000-01-15 김경균 밀폐형 폐가스 처리장치
DE19831615B4 (de) * 1997-07-14 2004-09-02 Kiersch, Walter, Dipl.-Ing. Verfahren und Vorrichtung zum Entfernen von brennbaren Schadstoffen aus Abluft
KR100225591B1 (ko) * 1997-10-08 1999-10-15 김경균 폐가스 처리 방법 및 장치
US5910294A (en) * 1997-11-17 1999-06-08 Air Products And Chemicals, Inc. Abatement of NF3 with metal oxalates
US6153150A (en) * 1998-01-12 2000-11-28 Advanced Technology Materials, Inc. Apparatus and method for controlled decomposition oxidation of gaseous pollutants
US6224834B1 (en) 1998-04-16 2001-05-01 International Business Machines Corporation Silane oxidation exhaust trap
DE19854235A1 (de) * 1998-11-24 2000-05-25 Wacker Siltronic Halbleitermat Oxidationsvorrichtung und Verfahren zur Passivierung von Stäuben
US6641625B1 (en) 1999-05-03 2003-11-04 Nuvera Fuel Cells, Inc. Integrated hydrocarbon reforming system and controls
US6423284B1 (en) * 1999-10-18 2002-07-23 Advanced Technology Materials, Inc. Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases
GB0005231D0 (en) * 2000-03-03 2000-04-26 Boc Group Plc Abatement of semiconductor processing gases
US20030049182A1 (en) * 2000-05-01 2003-03-13 Christopher Hertzler System and method for abatement of dangerous substances from a waste gas stream
US20010048902A1 (en) * 2000-05-01 2001-12-06 Christopher Hertzler Treatment system for removing hazardous substances from a semiconductor process waste gas stream
KR100418365B1 (ko) * 2001-05-11 2004-02-11 주식회사 태양테크 듀얼 가스 스크러버 시스템
US6527828B2 (en) * 2001-03-19 2003-03-04 Advanced Technology Materials, Inc. Oxygen enhanced CDA modification to a CDO integrated scrubber
JP4454176B2 (ja) * 2001-04-20 2010-04-21 Ｎｅｃ液晶テクノロジー株式会社 Ｐｆｃガス燃焼除害装置及びｐｆｃガス燃焼除害方法
KR100465523B1 (ko) * 2002-04-26 2005-01-13 유니셈 주식회사 냉각구조가 개선된 폐가스처리장치
JP4214717B2 (ja) * 2002-05-31 2009-01-28 株式会社日立製作所 過弗化物処理装置
JP2004162963A (ja) * 2002-11-12 2004-06-10 Sumitomo Electric Ind Ltd ガス加熱方法及び加熱装置
US7736599B2 (en) 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
JP2006150260A (ja) * 2004-11-30 2006-06-15 Iwatani Internatl Corp 半導体製造ラインにおける排ガス処理装置
WO2007053626A2 (en) 2005-10-31 2007-05-10 Applied Materials, Inc. Process abatement reactor
KR100634173B1 (ko) * 2006-06-23 2006-10-16 주식회사 이즈컨텍 폐가스 처리장치
JP2009109138A (ja) * 2007-10-31 2009-05-21 Sumitomo Electric Ind Ltd 排ガス処理装置および排ガス処理方法
US8143074B2 (en) * 2007-11-16 2012-03-27 Freescale Semiconductor, Inc. Semiconductor processing system and method of processing a semiconductor wafer
TWI355964B (en) * 2007-12-05 2012-01-11 Ind Tech Res Inst Method for catalytic treating perfluorocompound ga
KR101581673B1 (ko) * 2008-02-05 2015-12-31 어플라이드 머티어리얼스, 인코포레이티드 제조 프로세스들로부터의 가연성 폐기물 가스들을 처리하기 위한 시스템 및 방법
JPWO2009125457A1 (ja) * 2008-04-11 2011-07-28 カンケンテクノ株式会社 シラン系ガス及びフッ素系ガス含有排ガスの処理方法及び該方法を用いた排ガス処理装置
CN101417803B (zh) * 2008-11-24 2010-11-17 四川永祥多晶硅有限公司 空气冷却多晶硅氢还原炉出气管的方法
JP5479756B2 (ja) * 2009-02-20 2014-04-23 カンケンテクノ株式会社 熱処理炉およびこれを用いた排ガス処理装置
US20110212010A1 (en) * 2009-09-02 2011-09-01 Despatch Industries Limited Partnership Apparatus and Method for Thermal Destruction of Volatile Organic Compounds
KR101376238B1 (ko) * 2013-04-30 2014-03-27 주식회사 지앤비에스엔지니어링 공정 폐가스 처리용 스크러버
WO2018005545A1 (en) * 2016-06-27 2018-01-04 Combustion Systems Company, Inc. Thermal oxidization systems and methods
CN106621689B (zh) * 2017-02-23 2022-10-18 深圳市星特烁科技有限公司 一种用于步进梁式连续排胶烧结炉的气体净化分离装置
WO2019180772A1 (ja) * 2018-03-19 2019-09-26 カンケンテクノ株式会社 排ガスの減圧除害方法及びその装置
KR101972934B1 (ko) * 2018-07-31 2019-04-26 장영선 반도체 또는 실리콘 제조 공정에서 생성되는 모노실란에 의한 배관 막힘 및 화재를 방지하는 장치
CN109134917A (zh) * 2018-09-26 2019-01-04 福建远东技术服务有限公司 一种去除eva/pe发泡材料中甲酰胺的装置及方法
CN115233187B (zh) * 2022-07-22 2023-09-08 北京北方华创微电子装备有限公司 气体处理装置和半导体工艺设备

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US3052105A (en) * 1960-06-15 1962-09-04 Carrier Corp Heat exchanger
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US5417948A (en) * 1992-11-09 1995-05-23 Japan Pionics Co., Ltd. Process for cleaning harmful gas
US5538702A (en) * 1993-02-11 1996-07-23 The Boc Group Plc Gas stream purification apparatus

Also Published As

Publication number Publication date
JP3280173B2 (ja) 2002-04-30
EP0741601A1 (en) 1996-11-13
WO1996016720A1 (en) 1996-06-06
US5800792A (en) 1998-09-01
JPH08150317A (ja) 1996-06-11

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