TW357400B - Use of silicon nitride mask in the automated alignment of silicified substance - Google Patents

Use of silicon nitride mask in the automated alignment of silicified substance

Info

Publication number
TW357400B
TW357400B TW084113914A TW84113914A TW357400B TW 357400 B TW357400 B TW 357400B TW 084113914 A TW084113914 A TW 084113914A TW 84113914 A TW84113914 A TW 84113914A TW 357400 B TW357400 B TW 357400B
Authority
TW
Taiwan
Prior art keywords
layer
silicon
silicon nitride
base
substance
Prior art date
Application number
TW084113914A
Other languages
English (en)
Inventor
zhao-jie Wang
Original Assignee
Taiwan Semiconductor Mfg Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg Co Ltd filed Critical Taiwan Semiconductor Mfg Co Ltd
Application granted granted Critical
Publication of TW357400B publication Critical patent/TW357400B/zh

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
TW084113914A 1995-04-27 1995-12-27 Use of silicon nitride mask in the automated alignment of silicified substance TW357400B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US42981095A 1995-04-27 1995-04-27

Publications (1)

Publication Number Publication Date
TW357400B true TW357400B (en) 1999-05-01

Family

ID=57940429

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084113914A TW357400B (en) 1995-04-27 1995-12-27 Use of silicon nitride mask in the automated alignment of silicified substance

Country Status (1)

Country Link
TW (1) TW357400B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8380379B2 (en) 2010-05-17 2013-02-19 National Chiao Tung University Walking assistive system
DE202014105933U1 (de) 2014-10-01 2015-01-26 San Hsin Plastech Co., Ltd. Elektrische Aufwickelvorrichtung mit einem bürstenlosen Gleichstrommotor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8380379B2 (en) 2010-05-17 2013-02-19 National Chiao Tung University Walking assistive system
DE202014105933U1 (de) 2014-10-01 2015-01-26 San Hsin Plastech Co., Ltd. Elektrische Aufwickelvorrichtung mit einem bürstenlosen Gleichstrommotor

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