TW350970B - Wafer transfer apparatus - Google Patents
Wafer transfer apparatusInfo
- Publication number
- TW350970B TW350970B TW084111195A TW84111195A TW350970B TW 350970 B TW350970 B TW 350970B TW 084111195 A TW084111195 A TW 084111195A TW 84111195 A TW84111195 A TW 84111195A TW 350970 B TW350970 B TW 350970B
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer
- master
- chip
- proximity
- sustaining
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/322,754 US5590996A (en) | 1994-10-13 | 1994-10-13 | Wafer transfer apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
TW350970B true TW350970B (en) | 1999-01-21 |
Family
ID=23256255
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW084111195A TW350970B (en) | 1994-10-13 | 1995-10-23 | Wafer transfer apparatus |
Country Status (7)
Country | Link |
---|---|
US (2) | US5590996A (zh) |
EP (1) | EP0786146A1 (zh) |
JP (1) | JP2925329B2 (zh) |
AU (1) | AU3889495A (zh) |
DE (1) | DE786146T1 (zh) |
TW (1) | TW350970B (zh) |
WO (1) | WO1996012294A1 (zh) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2429395A (en) * | 1994-04-28 | 1995-11-29 | Semitool, Incorporated | Semiconductor processing systems |
US6833035B1 (en) * | 1994-04-28 | 2004-12-21 | Semitool, Inc. | Semiconductor processing system with wafer container docking and loading station |
US6712577B2 (en) * | 1994-04-28 | 2004-03-30 | Semitool, Inc. | Automated semiconductor processing system |
US5664925A (en) * | 1995-07-06 | 1997-09-09 | Brooks Automation, Inc. | Batchloader for load lock |
US6091498A (en) * | 1996-07-15 | 2000-07-18 | Semitool, Inc. | Semiconductor processing apparatus having lift and tilt mechanism |
US6203582B1 (en) * | 1996-07-15 | 2001-03-20 | Semitool, Inc. | Modular semiconductor workpiece processing tool |
US6645355B2 (en) | 1996-07-15 | 2003-11-11 | Semitool, Inc. | Semiconductor processing apparatus having lift and tilt mechanism |
US6672820B1 (en) | 1996-07-15 | 2004-01-06 | Semitool, Inc. | Semiconductor processing apparatus having linear conveyer system |
JP3570827B2 (ja) * | 1996-09-13 | 2004-09-29 | 東京エレクトロン株式会社 | 処理装置 |
CH697146A5 (de) * | 1996-10-09 | 2008-05-15 | Tec Sem Ag | Greifvorrichtung zur Handhabung von Wafern. |
US6213708B1 (en) * | 1997-03-12 | 2001-04-10 | Advanced Micro Devices, Inc. | System for sorting multiple semiconductor wafers |
US5980187A (en) * | 1997-04-16 | 1999-11-09 | Kla-Tencor Corporation | Mechanism for transporting semiconductor-process masks |
US6572320B2 (en) | 1997-05-05 | 2003-06-03 | Semitool, Inc. | Robot for handling workpieces in an automated processing system |
GB2343672B (en) * | 1997-08-28 | 2001-04-04 | Cvc Products Inc | Wafer Handler and Multi-Station Processing System and Method for Handling Wafers |
US6168697B1 (en) | 1998-03-10 | 2001-01-02 | Trusi Technologies Llc | Holders suitable to hold articles during processing and article processing methods |
US6095582A (en) * | 1998-03-11 | 2000-08-01 | Trusi Technologies, Llc | Article holders and holding methods |
US6457929B2 (en) | 1998-11-03 | 2002-10-01 | Seh America, Inc. | Apparatus and method for automatically transferring wafers between wafer holders in a liquid environment |
US6120229A (en) * | 1999-02-01 | 2000-09-19 | Brooks Automation Inc. | Substrate carrier as batchloader |
DE10121499B4 (de) * | 2001-05-03 | 2007-08-02 | Campus Technologies Ag | Vorrichtung und Verfahren zur optischen Spektroskopie und optischen Sensorik sowie Verwendung der Vorrichtung |
US7114903B2 (en) | 2002-07-16 | 2006-10-03 | Semitool, Inc. | Apparatuses and method for transferring and/or pre-processing microelectronic workpieces |
US7785573B2 (en) * | 2006-01-23 | 2010-08-31 | Isp Investments Inc. | Solubilizing agents for active or functional organic compounds |
US7371998B2 (en) * | 2006-07-05 | 2008-05-13 | Semitool, Inc. | Thermal wafer processor |
US8801069B2 (en) * | 2010-02-26 | 2014-08-12 | Brooks Automation, Inc. | Robot edge contact gripper |
US8673783B2 (en) | 2010-07-02 | 2014-03-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Metal conductor chemical mechanical polish |
WO2013021645A1 (ja) | 2011-08-10 | 2013-02-14 | 川崎重工業株式会社 | エンドエフェクタ装置及び該エンドエフェクタ装置を備える基板搬送用ロボット |
JP6309756B2 (ja) | 2013-12-26 | 2018-04-11 | 川崎重工業株式会社 | エンドエフェクタ装置 |
US10483143B2 (en) | 2013-12-26 | 2019-11-19 | Kawasaki Jukogyo Kabushiki Kaisha | End effector and substrate conveying robot |
EP3101684B1 (en) | 2014-01-28 | 2023-08-16 | Kawasaki Jukogyo Kabushiki Kaisha | Substrate conveying system and method |
US10943805B2 (en) | 2018-05-18 | 2021-03-09 | Applied Materials, Inc. | Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4813732A (en) * | 1985-03-07 | 1989-03-21 | Epsilon Technology, Inc. | Apparatus and method for automated wafer handling |
FR2624839B1 (fr) * | 1987-12-22 | 1990-06-01 | Recif Sa | Appareil pour le transfert horizontal de plaquettes de silicium notamment |
US4875824A (en) * | 1988-02-01 | 1989-10-24 | Biorne Enterprises, Inc. | Wafer transfer apparatus |
JPH01239865A (ja) * | 1988-03-19 | 1989-09-25 | Teru Yamanashi Kk | 半導体ウエハの移載装置 |
US4900214A (en) * | 1988-05-25 | 1990-02-13 | American Telephone And Telegraph Company | Method and apparatus for transporting semiconductor wafers |
US5054988A (en) * | 1988-07-13 | 1991-10-08 | Tel Sagami Limited | Apparatus for transferring semiconductor wafers |
US5022695A (en) * | 1989-01-30 | 1991-06-11 | Texas Instruments Incorporated | Semiconductor slice holder |
CH680275A5 (zh) * | 1990-03-05 | 1992-07-31 | Tet Techno Investment Trust | |
US5404894A (en) * | 1992-05-20 | 1995-04-11 | Tokyo Electron Kabushiki Kaisha | Conveyor apparatus |
EP0686303B1 (de) * | 1993-02-26 | 2000-12-13 | MAYER, Herbert E. | Vorrichtung und verfahren zum transportieren von flachen gegenständen, insbesondere von substraten |
-
1994
- 1994-10-13 US US08/322,754 patent/US5590996A/en not_active Expired - Lifetime
-
1995
- 1995-10-13 JP JP8513293A patent/JP2925329B2/ja not_active Expired - Lifetime
- 1995-10-13 EP EP95938154A patent/EP0786146A1/en not_active Withdrawn
- 1995-10-13 AU AU38894/95A patent/AU3889495A/en not_active Abandoned
- 1995-10-13 WO PCT/US1995/012769 patent/WO1996012294A1/en not_active Application Discontinuation
- 1995-10-13 DE DE0786146T patent/DE786146T1/de active Pending
- 1995-10-23 TW TW084111195A patent/TW350970B/zh active
-
1996
- 1996-03-07 US US08/614,826 patent/US5575611A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0786146A1 (en) | 1997-07-30 |
AU3889495A (en) | 1996-05-06 |
WO1996012294A1 (en) | 1996-04-25 |
US5590996A (en) | 1997-01-07 |
JP2925329B2 (ja) | 1999-07-28 |
DE786146T1 (de) | 1998-01-29 |
US5575611A (en) | 1996-11-19 |
JPH10506757A (ja) | 1998-06-30 |
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