TW315481B - - Google Patents
Download PDFInfo
- Publication number
- TW315481B TW315481B TW086100165A TW86100165A TW315481B TW 315481 B TW315481 B TW 315481B TW 086100165 A TW086100165 A TW 086100165A TW 86100165 A TW86100165 A TW 86100165A TW 315481 B TW315481 B TW 315481B
- Authority
- TW
- Taiwan
- Prior art keywords
- plates
- filament
- plate
- patent application
- length
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements common to two or more basic types of discharge tubes or lamps
- H01J3/12—Arrangements for controlling cross-section of ray or beam; Arrangements for correcting aberration of beam, e.g. due to lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
- H01J33/02—Details
Landscapes
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/589,265 US5637953A (en) | 1996-01-22 | 1996-01-22 | Cathode assembly for a line focus electron beam device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW315481B true TW315481B (enExample) | 1997-09-11 |
Family
ID=24357302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW086100165A TW315481B (enExample) | 1996-01-22 | 1997-01-09 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US5637953A (enExample) |
| EP (1) | EP0880791B1 (enExample) |
| JP (1) | JP3723577B2 (enExample) |
| KR (1) | KR100488264B1 (enExample) |
| DE (1) | DE69620799T2 (enExample) |
| TW (1) | TW315481B (enExample) |
| WO (1) | WO1997027612A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI466157B (zh) * | 2007-04-20 | 2014-12-21 | Sen Corp | 射束處理裝置 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7264771B2 (en) * | 1999-04-20 | 2007-09-04 | Baxter International Inc. | Method and apparatus for manipulating pre-sterilized components in an active sterile field |
| US6239543B1 (en) * | 1999-08-23 | 2001-05-29 | American International Technologies, Inc. | Electron beam plasma formation for surface chemistry |
| US6785359B2 (en) * | 2002-07-30 | 2004-08-31 | Ge Medical Systems Global Technology Company, Llc | Cathode for high emission x-ray tube |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE359165A (enExample) * | 1928-04-14 | |||
| NL149610B (nl) * | 1967-10-03 | 1976-05-17 | Matsushita Electric Industrial Co Ltd | Elektrostatische registratie-inrichting. |
| US3609401A (en) * | 1970-03-09 | 1971-09-28 | Gen Electric | Line focus electron gun |
| US3788892A (en) * | 1970-05-01 | 1974-01-29 | Rca Corp | Method of producing a window device |
| US4468282A (en) * | 1982-11-22 | 1984-08-28 | Hewlett-Packard Company | Method of making an electron beam window |
| ATE49322T1 (de) * | 1983-08-26 | 1990-01-15 | Feinfocus Verwaltung | Roentgenlithographiegeraet. |
| US4764947A (en) * | 1985-12-04 | 1988-08-16 | The Machlett Laboratories, Incorporated | Cathode focusing arrangement |
| NL8700834A (nl) * | 1987-04-09 | 1988-11-01 | Philips Nv | Diodekanon met samengestelde anode. |
| FR2633773B1 (fr) * | 1988-07-01 | 1991-02-08 | Gen Electric Cgr | Tube radiogene a auto-limitation du flux electronique par saturation |
| US5414267A (en) * | 1993-05-26 | 1995-05-09 | American International Technologies, Inc. | Electron beam array for surface treatment |
-
1996
- 1996-01-22 US US08/589,265 patent/US5637953A/en not_active Expired - Lifetime
- 1996-12-26 WO PCT/US1996/020703 patent/WO1997027612A1/en not_active Ceased
- 1996-12-26 EP EP96945292A patent/EP0880791B1/en not_active Expired - Lifetime
- 1996-12-26 DE DE69620799T patent/DE69620799T2/de not_active Expired - Lifetime
- 1996-12-26 JP JP52684697A patent/JP3723577B2/ja not_active Expired - Lifetime
- 1996-12-26 KR KR10-1998-0705537A patent/KR100488264B1/ko not_active Expired - Fee Related
-
1997
- 1997-01-09 TW TW086100165A patent/TW315481B/zh not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI466157B (zh) * | 2007-04-20 | 2014-12-21 | Sen Corp | 射束處理裝置 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP0880791A4 (enExample) | 1998-12-09 |
| KR19990081835A (ko) | 1999-11-15 |
| DE69620799D1 (de) | 2002-05-23 |
| EP0880791B1 (en) | 2002-04-17 |
| WO1997027612A1 (en) | 1997-07-31 |
| JP3723577B2 (ja) | 2005-12-07 |
| KR100488264B1 (ko) | 2005-09-02 |
| DE69620799T2 (de) | 2002-11-28 |
| US5637953A (en) | 1997-06-10 |
| EP0880791A1 (en) | 1998-12-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4174508B2 (ja) | 荷電粒子加速器 | |
| KR900008793B1 (ko) | 마스크형 이온 비임 석판인쇄 시스템 및 방법 | |
| JP5822767B2 (ja) | イオン源装置及びイオンビーム生成方法 | |
| TW401592B (en) | Cathode mounting for ion source with indirectly heated cathode | |
| JP4771230B2 (ja) | イオンビーム引出加速方法及び装置 | |
| JP2004063415A (ja) | イオン注入方法及びsoiウエハの製造方法、並びにイオン注入装置 | |
| JPH0740462B2 (ja) | 電子ビーム装置 | |
| TW315481B (enExample) | ||
| CN101689488A (zh) | 具有电子生成与聚焦沟的阴极、离子源及其方法 | |
| JPH01501353A (ja) | 動電子放出装置 | |
| TW385477B (en) | Filament for ion implanter plasma shower | |
| JPS6345740A (ja) | イオンビ−ム装置 | |
| JPS62103951A (ja) | イオン注入装置 | |
| JP3766763B2 (ja) | 電界放射電子銃 | |
| US3816790A (en) | Linear cathode high-energy electron beam apparatus | |
| KR20010080286A (ko) | 열전계 방출 정렬 방법 및 장치 | |
| JPH0692638B2 (ja) | 薄膜装置 | |
| US3914637A (en) | Method and apparatus for focusing an electron beam | |
| JP2000504143A (ja) | 線状焦点電子ビームデバイスのための陰極アセンブリ | |
| CN104658841A (zh) | X射线管 | |
| JPH077639B2 (ja) | イオン源 | |
| JPH07211494A (ja) | 小型電子銃 | |
| JPH0556000B2 (enExample) | ||
| CN101911244A (zh) | X射线管 | |
| JPS5960853A (ja) | 電子銃アセンブリ |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |