TW279242B - The wasted-gas processing method & device for CVD apparatus - Google Patents

The wasted-gas processing method & device for CVD apparatus

Info

Publication number
TW279242B
TW279242B TW084112327A TW84112327A TW279242B TW 279242 B TW279242 B TW 279242B TW 084112327 A TW084112327 A TW 084112327A TW 84112327 A TW84112327 A TW 84112327A TW 279242 B TW279242 B TW 279242B
Authority
TW
Taiwan
Prior art keywords
cvd apparatus
wasted
processing method
gas processing
dust
Prior art date
Application number
TW084112327A
Other languages
English (en)
Inventor
Ariyasu Kurita
Takayoshi Asumi
Kazuhisa Onozawa
Yamada Naoki
Original Assignee
Asahi Denka Kogyo Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP29515894A external-priority patent/JP3688742B2/ja
Priority claimed from JP10969695A external-priority patent/JP3442190B2/ja
Application filed by Asahi Denka Kogyo Kk filed Critical Asahi Denka Kogyo Kk
Application granted granted Critical
Publication of TW279242B publication Critical patent/TW279242B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
    • B01D46/003—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions including coalescing means for the separation of liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/02—Particle separators, e.g. dust precipitators, having hollow filters made of flexible material
    • B01D46/04—Cleaning filters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/66—Regeneration of the filtering material or filter elements inside the filter
    • B01D46/70—Regeneration of the filtering material or filter elements inside the filter by acting counter-currently on the filtering surface, e.g. by flushing on the non-cake side of the filter
    • B01D46/71—Regeneration of the filtering material or filter elements inside the filter by acting counter-currently on the filtering surface, e.g. by flushing on the non-cake side of the filter with pressurised gas, e.g. pulsed air
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D51/00—Auxiliary pretreatment of gases or vapours to be cleaned
    • B01D51/02—Amassing the particles, e.g. by flocculation
    • B01D51/04—Amassing the particles, e.g. by flocculation by seeding, e.g. by adding particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2273/00—Operation of filters specially adapted for separating dispersed particles from gases or vapours
    • B01D2273/12—Influencing the filter cake during filtration using filter aids
TW084112327A 1994-11-29 1995-11-20 The wasted-gas processing method & device for CVD apparatus TW279242B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP29515894A JP3688742B2 (ja) 1994-11-29 1994-11-29 化学的気相成長装置排ガス処理装置
JP10969695A JP3442190B2 (ja) 1995-05-08 1995-05-08 化学的気相成長装置排ガス処理方法及び装置

Publications (1)

Publication Number Publication Date
TW279242B true TW279242B (en) 1996-06-21

Family

ID=27311532

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084112327A TW279242B (en) 1994-11-29 1995-11-20 The wasted-gas processing method & device for CVD apparatus

Country Status (3)

Country Link
US (1) US5855651A (zh)
KR (1) KR100377605B1 (zh)
TW (1) TW279242B (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE505579C2 (sv) * 1995-12-20 1997-09-15 Flaekt Ab Sätt att avskilja stoft från varma processgaser
KR100242956B1 (ko) * 1997-06-03 2000-02-01 윤종용 가스 배기 시스템의 잔류물 제거 및 차단장치
SE512227C2 (sv) * 1998-06-24 2000-02-14 Flaekt Ab Sätt att rena rökgaser under uppstart av en panna
US6197119B1 (en) * 1999-02-18 2001-03-06 Mks Instruments, Inc. Method and apparatus for controlling polymerized teos build-up in vacuum pump lines
US6238514B1 (en) * 1999-02-18 2001-05-29 Mks Instruments, Inc. Apparatus and method for removing condensable aluminum vapor from aluminum etch effluent
US6488745B2 (en) 2001-03-23 2002-12-03 Mks Instruments, Inc. Trap apparatus and method for condensable by-products of deposition reactions
US6562109B2 (en) * 2001-03-28 2003-05-13 Mks Instruments, Inc. Acceleration assisted particle/gas separation system
DE10355991A1 (de) * 2003-11-27 2005-06-30 Basf Drucksysteme Gmbh Verfahren zur Herstellung von Flexodruckplatten mittels Lasergravur
CN1321717C (zh) * 2004-03-25 2007-06-20 力晶半导体股份有限公司 过滤装置
KR102457227B1 (ko) * 2022-08-26 2022-10-20 주식회사 에코에이블 반도체 생산설비에서 배출되는 오염물질 처리장치

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Publication number Priority date Publication date Assignee Title
NO126628B (zh) * 1971-07-22 1973-03-05 Ardal Og Sunndal Verk
GB1501866A (en) * 1974-04-10 1978-02-22 Alcan Res & Dev Dry scrubbing waste gases
US3969482A (en) * 1974-04-25 1976-07-13 Teller Environmental Systems, Inc. Abatement of high concentrations of acid gas emissions
JPS51117373A (en) * 1975-04-08 1976-10-15 Taisei Corp Tar mist contained waste gas purifying device
FR2326964A1 (fr) * 1975-10-10 1977-05-06 Air Ind Procede de captation d'un produit visqueux condensable ou divise entraine par un courant gazeux
JPS6056530B2 (ja) * 1976-04-14 1985-12-10 大成建設株式会社 粘稠物質含有廃ギスの処理方法
US4070162A (en) * 1976-08-02 1978-01-24 Apollo Chemical Corporation Method of agglomerating particles in gas stream
US4319890A (en) * 1978-04-05 1982-03-16 Teller Environmental Systems, Inc. Dry impact capture of aerosol particulates
JPS54156274A (en) * 1978-05-31 1979-12-10 Mitsubishi Heavy Ind Ltd Powder supply of bag filters
US4273750A (en) * 1979-04-24 1981-06-16 Energy And Pollution Controls, Inc. Flue gas desulfurization apparatus and method
SE453964B (sv) * 1986-01-29 1988-03-21 Jan Johan Viktor Abom Forfarande vid avseparering fran luft och/eller gasblandningar av derav burna emnen i forangat tillstand, sasom losningsmedel
JPS62291625A (ja) * 1986-06-11 1987-12-18 Minolta Camera Co Ltd エレクトロクロミツク表示素子
JPS62294416A (ja) * 1986-06-13 1987-12-21 Mitsubishi Gas Chem Co Inc サブミクロン微粉末の捕集・回収方法
JPS63291625A (ja) * 1987-05-25 1988-11-29 Toyo Sanso Kk 排ガス処理方法及び該処理方法に使用される流動層式吸着塔
JP2567862B2 (ja) * 1987-07-20 1996-12-25 富士通株式会社 抵抗値の測定方法
JPH01258718A (ja) * 1988-04-08 1989-10-16 Koujiyundo Kagaku Kenkyusho:Kk 反応粉塵および粘性物質の除去方法とその装置
US4865629A (en) * 1988-07-05 1989-09-12 Industrial Filter & Pump Mfg. Co. Control of particle size distribution in gas filtration
US5022897A (en) * 1989-11-22 1991-06-11 Potters Industries, Inc. Method for hazardous waste removal and neutralization
JPH03229609A (ja) * 1990-02-01 1991-10-11 Dan Sangyo Kk 乾式ｃｖｄ廃ガス処理装置
JPH04180568A (ja) * 1990-11-14 1992-06-26 Mitsubishi Electric Corp Ｃｖｄ装置用集塵装置
JPH0763583B2 (ja) * 1992-01-21 1995-07-12 カンケンテクノ株式会社 半導体排ガス除害方法とその装置
JPH05263248A (ja) * 1992-03-16 1993-10-12 Hitachi Electron Eng Co Ltd 配管クリーニング機構
JP3318340B2 (ja) * 1992-03-19 2002-08-26 日立電子エンジニアリング株式会社 スクラバ
JP3238204B2 (ja) * 1992-08-06 2001-12-10 川研ファインケミカル株式会社 改良された固形洗剤
JP2558048B2 (ja) * 1993-02-03 1996-11-27 株式会社プランテック プレコート式バグフィルタ装置における薬剤供給方法

Also Published As

Publication number Publication date
KR960016950A (ko) 1996-06-17
US5855651A (en) 1999-01-05
KR100377605B1 (ko) 2003-06-11

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