TW278199B - - Google Patents

Info

Publication number
TW278199B
TW278199B TW084108906A TW84108906A TW278199B TW 278199 B TW278199 B TW 278199B TW 084108906 A TW084108906 A TW 084108906A TW 84108906 A TW84108906 A TW 84108906A TW 278199 B TW278199 B TW 278199B
Authority
TW
Taiwan
Application number
TW084108906A
Original Assignee
Mitsubishi Materials Corp
Mitsubishi Materials Silicon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Materials Corp, Mitsubishi Materials Silicon Kk filed Critical Mitsubishi Materials Corp
Application granted granted Critical
Publication of TW278199B publication Critical patent/TW278199B/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C30B15/12—Double crucible methods
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1052—Seed pulling including a sectioned crucible [e.g., double crucible, baffle]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1084—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone having details of a stabilizing feature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
TW084108906A 1994-08-22 1995-08-26 TW278199B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6196617A JPH0859386A (ja) 1994-08-22 1994-08-22 半導体単結晶育成装置

Publications (1)

Publication Number Publication Date
TW278199B true TW278199B (zh) 1996-06-11

Family

ID=16360739

Family Applications (1)

Application Number Title Priority Date Filing Date
TW084108906A TW278199B (zh) 1994-08-22 1995-08-26

Country Status (4)

Country Link
US (3) US5720810A (zh)
JP (1) JPH0859386A (zh)
KR (1) KR100220613B1 (zh)
TW (1) TW278199B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9063752B2 (en) 2008-09-30 2015-06-23 Aristocrat Technologies Australia Pty Limited Security method
CN109898133A (zh) * 2017-12-11 2019-06-18 有研半导体材料有限公司 一种用于高掺杂硅单晶生长的气体导引装置

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JPH0859386A (ja) * 1994-08-22 1996-03-05 Mitsubishi Materials Corp 半導体単結晶育成装置
KR100415860B1 (ko) * 1995-12-08 2004-06-04 신에쯔 한도타이 가부시키가이샤 단결정제조장치및제조방법
JPH10101482A (ja) * 1996-10-01 1998-04-21 Komatsu Electron Metals Co Ltd 単結晶シリコンの製造装置および製造方法
US5904768A (en) * 1996-10-15 1999-05-18 Memc Electronic Materials, Inc. Process for controlling the oxygen content in silicon wafers heavily doped with antimony or arsenic
JPH10152389A (ja) * 1996-11-21 1998-06-09 Komatsu Electron Metals Co Ltd 半導体単結晶の製造装置および製造方法
JP3913309B2 (ja) * 1997-03-07 2007-05-09 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 半導体単結晶製造方法および単結晶引上装置の整流筒の装着用治具
US5942032A (en) * 1997-08-01 1999-08-24 Memc Electronic Materials, Inc. Heat shield assembly and method of growing vacancy rich single crystal silicon
JP3267225B2 (ja) * 1997-12-26 2002-03-18 住友金属工業株式会社 単結晶引き上げ方法、及び単結晶引き上げ装置
DE10007179B4 (de) * 2000-02-17 2004-08-19 Siltronic Ag Verfahren und Vorrichtung zum Dotieren einer Schmelze mit einem Dotierstoff
KR100411571B1 (ko) * 2000-11-27 2003-12-18 주식회사 실트론 단결정 잉곳의 제조장치
JP3698080B2 (ja) * 2001-09-11 2005-09-21 三菱住友シリコン株式会社 単結晶引上げ方法
US7211146B2 (en) * 2001-09-21 2007-05-01 Crystal Is, Inc. Powder metallurgy crucible for aluminum nitride crystal growth
US8545629B2 (en) * 2001-12-24 2013-10-01 Crystal Is, Inc. Method and apparatus for producing large, single-crystals of aluminum nitride
US7638346B2 (en) * 2001-12-24 2009-12-29 Crystal Is, Inc. Nitride semiconductor heterostructures and related methods
US20060005763A1 (en) * 2001-12-24 2006-01-12 Crystal Is, Inc. Method and apparatus for producing large, single-crystals of aluminum nitride
US6770135B2 (en) * 2001-12-24 2004-08-03 Crystal Is, Inc. Method and apparatus for producing large, single-crystals of aluminum nitride
TWI298752B (en) * 2004-08-02 2008-07-11 Univ Nat Taiwan Method and apparatus for forming long single crystals with good uniformity
CN101415864B (zh) 2005-11-28 2014-01-08 晶体公司 具有减少缺陷的大的氮化铝晶体及其制造方法
TW200720495A (en) * 2005-11-28 2007-06-01 Sino American Silicon Prod Inc Section forming method of ingot growth and structure thereof
US7641735B2 (en) * 2005-12-02 2010-01-05 Crystal Is, Inc. Doped aluminum nitride crystals and methods of making them
US9034103B2 (en) * 2006-03-30 2015-05-19 Crystal Is, Inc. Aluminum nitride bulk crystals having high transparency to ultraviolet light and methods of forming them
EP2007933B1 (en) * 2006-03-30 2017-05-10 Crystal Is, Inc. Methods for controllable doping of aluminum nitride bulk crystals
JP2007314375A (ja) * 2006-05-26 2007-12-06 Shin Etsu Handotai Co Ltd 単結晶製造装置
CN107059116B (zh) 2007-01-17 2019-12-31 晶体公司 引晶的氮化铝晶体生长中的缺陷减少
US9771666B2 (en) 2007-01-17 2017-09-26 Crystal Is, Inc. Defect reduction in seeded aluminum nitride crystal growth
JP5730484B2 (ja) * 2007-01-26 2015-06-10 クリスタル アイエス インコーポレイテッド 厚みのある擬似格子整合型の窒化物エピタキシャル層
US8080833B2 (en) * 2007-01-26 2011-12-20 Crystal Is, Inc. Thick pseudomorphic nitride epitaxial layers
US8262797B1 (en) * 2007-03-13 2012-09-11 Solaicx, Inc. Weir design providing optimal purge gas flow, melt control, and temperature stabilization for improved single crystal growth in a continuous Czochralski process
US20080276860A1 (en) * 2007-05-10 2008-11-13 Burrows Brian H Cross flow apparatus and method for hydride vapor phase deposition
US20080289575A1 (en) * 2007-05-24 2008-11-27 Burrows Brian H Methods and apparatus for depositing a group iii-v film using a hydride vapor phase epitaxy process
US8088220B2 (en) * 2007-05-24 2012-01-03 Crystal Is, Inc. Deep-eutectic melt growth of nitride crystals
CN101148777B (zh) * 2007-07-19 2011-03-23 任丙彦 直拉法生长掺镓硅单晶的方法和装置
JP5092940B2 (ja) * 2008-07-01 2012-12-05 信越半導体株式会社 単結晶製造装置及び単結晶の製造方法
EP2588651B1 (en) 2010-06-30 2020-01-08 Crystal Is, Inc. Growth of large aluminum nitride single crystals with thermal-gradient control
US8784559B2 (en) 2010-09-09 2014-07-22 Siemens Medical Solutions Usa, Inc. Method and apparatus for continuous crystal growth
CN102146584B (zh) * 2011-04-20 2012-08-22 宁夏日晶新能源装备股份有限公司 单晶炉热屏升降装置
US8962359B2 (en) 2011-07-19 2015-02-24 Crystal Is, Inc. Photon extraction from nitride ultraviolet light-emitting devices
KR101477163B1 (ko) * 2011-12-23 2014-12-30 (주)기술과가치 단결정 실리콘 잉곳 제조장치
CN102672799B (zh) * 2012-05-14 2014-04-02 甘肃郝氏炭纤维有限公司 一种单晶炉导流筒的制作方法
US9745666B2 (en) * 2012-09-10 2017-08-29 Gtat Ip Holding Llc Continuous czochralski method and apparatus
US20140144371A1 (en) * 2012-11-29 2014-05-29 Solaicx, Inc. Heat Shield For Improved Continuous Czochralski Process
US9376762B2 (en) * 2012-11-29 2016-06-28 Solaicx Weir for improved crystal growth in a continuous Czochralski process
US20140261155A1 (en) * 2013-03-15 2014-09-18 Memc Electronic Materials, Inc. Crucible for controlling oxygen and related methods
US9863062B2 (en) 2013-03-14 2018-01-09 Corner Star Limited Czochralski crucible for controlling oxygen and related methods
JP6275817B2 (ja) 2013-03-15 2018-02-07 クリスタル アイエス, インコーポレーテッドCrystal Is, Inc. 仮像電子及び光学電子装置に対する平面コンタクト
KR20150107540A (ko) * 2014-03-14 2015-09-23 (주)기술과가치 잉곳 제조 장치
KR20150107541A (ko) * 2014-03-14 2015-09-23 (주)기술과가치 잉곳 제조 장치
US10358740B2 (en) * 2014-07-25 2019-07-23 Corner Star Limited Crystal growing systems and methods including a passive heater
US9476141B2 (en) 2014-07-25 2016-10-25 Sunedison, Inc. Weir for inhibiting melt contamination
US10060046B2 (en) * 2014-09-19 2018-08-28 Corner Star Limited Crystal puller for inhibiting melt contamination
KR101871059B1 (ko) * 2016-11-17 2018-07-20 에스케이실트론 주식회사 단결정 잉곳 성장장치
US10631928B2 (en) 2017-03-24 2020-04-28 Biosense Webster (Israel) Ltd. Catheter with deformable distal electrode
JP6593401B2 (ja) * 2017-08-07 2019-10-23 株式会社Ｓｕｍｃｏ シリコン単結晶の製造方法
CN107779944A (zh) * 2017-10-20 2018-03-09 南京泰祺瑞新材料科技有限公司 一种物料导流筒
CN111962140A (zh) 2020-08-28 2020-11-20 晶科绿能(上海)管理有限公司 连续拉晶装置和连续拉制晶棒的方法

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9063752B2 (en) 2008-09-30 2015-06-23 Aristocrat Technologies Australia Pty Limited Security method
CN109898133A (zh) * 2017-12-11 2019-06-18 有研半导体材料有限公司 一种用于高掺杂硅单晶生长的气体导引装置

Also Published As

Publication number Publication date
US5858085A (en) 1999-01-12
JPH0859386A (ja) 1996-03-05
US6261364B1 (en) 2001-07-17
US5720810A (en) 1998-02-24
KR960007832A (ko) 1996-03-22
KR100220613B1 (ko) 1999-09-15

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