TW270239B - Read only memory cell process - Google Patents

Read only memory cell process

Info

Publication number
TW270239B
TW270239B TW84108269A TW84108269A TW270239B TW 270239 B TW270239 B TW 270239B TW 84108269 A TW84108269 A TW 84108269A TW 84108269 A TW84108269 A TW 84108269A TW 270239 B TW270239 B TW 270239B
Authority
TW
Taiwan
Prior art keywords
gate electrode
forming
semiconductor substrate
read
memory cell
Prior art date
Application number
TW84108269A
Other languages
Chinese (zh)
Inventor
Shan-Jye Jean
Cherng-Hann Hwang
Guan-Cherng Su
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW84108269A priority Critical patent/TW270239B/en
Application granted granted Critical
Publication of TW270239B publication Critical patent/TW270239B/en

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Abstract

A multi-level read only memory process, that is applicable to one semiconductor substrate, comprises the steps of: forming gate oxide on the semiconductor substrate; forming gate electrode on the gate oxide; forming one mask, and according default coding rules defining the mask to be one the following three cases: (1) completely covering the gate electrode; (2) exposing portions of the gate electrode; (3) completely exposing the gate electrode; and forming coding diffusion area in the semiconductor substrate by large-angle-tilt ion implantation.
TW84108269A 1995-08-08 1995-08-08 Read only memory cell process TW270239B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW84108269A TW270239B (en) 1995-08-08 1995-08-08 Read only memory cell process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW84108269A TW270239B (en) 1995-08-08 1995-08-08 Read only memory cell process

Publications (1)

Publication Number Publication Date
TW270239B true TW270239B (en) 1996-02-11

Family

ID=51396997

Family Applications (1)

Application Number Title Priority Date Filing Date
TW84108269A TW270239B (en) 1995-08-08 1995-08-08 Read only memory cell process

Country Status (1)

Country Link
TW (1) TW270239B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19617646A1 (en) * 1996-05-02 1997-11-13 Siemens Ag Memory cell arrangement and method for its production

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19617646A1 (en) * 1996-05-02 1997-11-13 Siemens Ag Memory cell arrangement and method for its production
DE19617646C2 (en) * 1996-05-02 1998-07-09 Siemens Ag Memory cell arrangement and a method for the production thereof

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