TW270239B - Read only memory cell process - Google Patents
Read only memory cell processInfo
- Publication number
- TW270239B TW270239B TW84108269A TW84108269A TW270239B TW 270239 B TW270239 B TW 270239B TW 84108269 A TW84108269 A TW 84108269A TW 84108269 A TW84108269 A TW 84108269A TW 270239 B TW270239 B TW 270239B
- Authority
- TW
- Taiwan
- Prior art keywords
- gate electrode
- forming
- semiconductor substrate
- read
- memory cell
- Prior art date
Links
Landscapes
- Semiconductor Memories (AREA)
Abstract
A multi-level read only memory process, that is applicable to one semiconductor substrate, comprises the steps of: forming gate oxide on the semiconductor substrate; forming gate electrode on the gate oxide; forming one mask, and according default coding rules defining the mask to be one the following three cases: (1) completely covering the gate electrode; (2) exposing portions of the gate electrode; (3) completely exposing the gate electrode; and forming coding diffusion area in the semiconductor substrate by large-angle-tilt ion implantation.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW84108269A TW270239B (en) | 1995-08-08 | 1995-08-08 | Read only memory cell process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW84108269A TW270239B (en) | 1995-08-08 | 1995-08-08 | Read only memory cell process |
Publications (1)
Publication Number | Publication Date |
---|---|
TW270239B true TW270239B (en) | 1996-02-11 |
Family
ID=51396997
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW84108269A TW270239B (en) | 1995-08-08 | 1995-08-08 | Read only memory cell process |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW270239B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19617646A1 (en) * | 1996-05-02 | 1997-11-13 | Siemens Ag | Memory cell arrangement and method for its production |
-
1995
- 1995-08-08 TW TW84108269A patent/TW270239B/en active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19617646A1 (en) * | 1996-05-02 | 1997-11-13 | Siemens Ag | Memory cell arrangement and method for its production |
DE19617646C2 (en) * | 1996-05-02 | 1998-07-09 | Siemens Ag | Memory cell arrangement and a method for the production thereof |
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