TW227546B - - Google Patents
Info
- Publication number
- TW227546B TW227546B TW082100103A TW82100103A TW227546B TW 227546 B TW227546 B TW 227546B TW 082100103 A TW082100103 A TW 082100103A TW 82100103 A TW82100103 A TW 82100103A TW 227546 B TW227546 B TW 227546B
- Authority
- TW
- Taiwan
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
- H10P72/3212—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips or lead frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/08—Cleaning containers, e.g. tanks
- B08B9/093—Cleaning containers, e.g. tanks by the force of jets or sprays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H10P72/3404—Storage means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/12—Storage devices mechanical with separate article supports or holders movable in a closed circuit to facilitate insertion or removal of articles the articles being books, documents, forms or the like
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4008663A JP2982461B2 (ja) | 1992-01-21 | 1992-01-21 | クリーンルーム用保管庫 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW227546B true TW227546B (index.php) | 1994-08-01 |
Family
ID=11699175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW082100103A TW227546B (index.php) | 1992-01-21 | 1993-01-09 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2982461B2 (index.php) |
| KR (1) | KR100236272B1 (index.php) |
| TW (1) | TW227546B (index.php) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103193052A (zh) * | 2012-01-04 | 2013-07-10 | 株式会社大福 | 物品保管设备及物品保管方法 |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3519212B2 (ja) * | 1995-06-13 | 2004-04-12 | 高砂熱学工業株式会社 | 清浄な資材用保管庫 |
| KR101474572B1 (ko) * | 2006-06-19 | 2014-12-18 | 엔테그리스, 아이엔씨. | 레티클 스토리지 정화시스템 |
| JP5236518B2 (ja) * | 2009-02-03 | 2013-07-17 | 株式会社ダン・タクマ | 保管システムおよび保管方法 |
| JP5440871B2 (ja) | 2010-08-20 | 2014-03-12 | 株式会社ダイフク | 容器保管設備 |
| JP6106501B2 (ja) * | 2013-04-12 | 2017-04-05 | 東京エレクトロン株式会社 | 収納容器内の雰囲気管理方法 |
| CN111365957B (zh) * | 2020-04-16 | 2023-05-09 | 重庆电力高等专科学校 | 镀铬管清洗烘干生产线 |
| CN115649719B (zh) * | 2022-12-13 | 2023-03-10 | 中科摩通(常州)智能制造股份有限公司 | 一种智能仓储巷道机器人及其智能仓储系统 |
| EP4443236A1 (en) * | 2023-04-05 | 2024-10-09 | Brooks Automation (Germany) GmbH | Stocker compartment |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6036205A (ja) * | 1983-08-08 | 1985-02-25 | Hitachi Ltd | 収納装置 |
| JPS63262310A (ja) * | 1986-12-27 | 1988-10-28 | Shinkawa Ltd | キユア用ワーク収納箱 |
| US4995430A (en) | 1989-05-19 | 1991-02-26 | Asyst Technologies, Inc. | Sealable transportable container having improved latch mechanism |
-
1992
- 1992-01-21 JP JP4008663A patent/JP2982461B2/ja not_active Expired - Lifetime
-
1993
- 1993-01-09 TW TW082100103A patent/TW227546B/zh active
- 1993-01-20 KR KR1019930000636A patent/KR100236272B1/ko not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103193052A (zh) * | 2012-01-04 | 2013-07-10 | 株式会社大福 | 物品保管设备及物品保管方法 |
| CN103193052B (zh) * | 2012-01-04 | 2016-07-06 | 株式会社大福 | 物品保管设备及物品保管方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2982461B2 (ja) | 1999-11-22 |
| JPH06156622A (ja) | 1994-06-03 |
| KR100236272B1 (ko) | 1999-12-15 |
| KR930016325A (ko) | 1993-08-26 |