TW223697B - Process of making thin film magnetic head - Google Patents

Process of making thin film magnetic head

Info

Publication number
TW223697B
TW223697B TW082105613A TW82105613A TW223697B TW 223697 B TW223697 B TW 223697B TW 082105613 A TW082105613 A TW 082105613A TW 82105613 A TW82105613 A TW 82105613A TW 223697 B TW223697 B TW 223697B
Authority
TW
Taiwan
Prior art keywords
photoresist
thin film
layer
pattern
photoresist layer
Prior art date
Application number
TW082105613A
Other languages
English (en)
Inventor
A Barr Ronald
Original Assignee
Read Rite Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Read Rite Corp filed Critical Read Rite Corp
Application granted granted Critical
Publication of TW223697B publication Critical patent/TW223697B/zh

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)
TW082105613A 1993-04-19 1993-07-14 Process of making thin film magnetic head TW223697B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/047,497 US5254373A (en) 1993-04-19 1993-04-19 Process of making thin film magnetic head

Publications (1)

Publication Number Publication Date
TW223697B true TW223697B (en) 1994-05-11

Family

ID=21949316

Family Applications (1)

Application Number Title Priority Date Filing Date
TW082105613A TW223697B (en) 1993-04-19 1993-07-14 Process of making thin film magnetic head

Country Status (4)

Country Link
US (1) US5254373A (zh)
EP (1) EP0621583A3 (zh)
JP (1) JPH07105507A (zh)
TW (1) TW223697B (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6118627A (en) * 1994-10-31 2000-09-12 Seagate Technology Llc Thin film head design improving top pole width control
US5843537A (en) * 1997-03-07 1998-12-01 Quantum Corporation Insulator cure process for giant magnetoresistive heads
US7365408B2 (en) * 2002-04-30 2008-04-29 International Business Machines Corporation Structure for photolithographic applications using a multi-layer anti-reflection coating
CN116213218B (zh) * 2023-01-31 2024-08-27 广东利元亨智能装备股份有限公司 一种极片固定装置、极片烘干设备及方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0810483B2 (ja) * 1988-09-07 1996-01-31 株式会社日立製作所 薄膜磁気ヘッドの製造方法
US4971896A (en) * 1987-12-08 1990-11-20 Hitachi, Ltd. Method for forming thin film pattern and method for fabricating thin film magnetic head using the same
JPH01227211A (ja) * 1988-03-07 1989-09-11 Hitachi Ltd 薄膜磁気ヘツドの製造方法
US4878290A (en) * 1989-02-13 1989-11-07 International Business Machines Corporation Method for making thin film magnetic head

Also Published As

Publication number Publication date
JPH07105507A (ja) 1995-04-21
EP0621583A2 (en) 1994-10-26
US5254373A (en) 1993-10-19
EP0621583A3 (en) 1995-11-15

Similar Documents

Publication Publication Date Title
EP0399800A3 (en) Thin film magnetic head manufacturing method
US5245470A (en) Polarizing exposure apparatus using a polarizer and method for fabrication of a polarizing mask by using a polarizing exposure apparatus
EP0341843A3 (en) A process of forming a conductor pattern
FR2444988A1 (fr) Tete de transducteur magnetique et procede de fabrication
JPS57189320A (en) Thin film magnetic head
JPS62245509A (ja) 薄膜磁気ヘツドの製造方法
TW223697B (en) Process of making thin film magnetic head
MY104214A (en) A thin film magnetic read/write head and method of forming the same.
ATE369620T1 (de) Verfahren zur herstellung einer elektronenemittierende vorrichtung, einer elektronenquelle, und eines bilderzeugungsgerätes
JPS5399949A (en) Latent image recording method for magnetic printer
JPS56156636A (en) Mask nega pattern
JPS6484406A (en) Manufacture of thin film magnetic head
JPS57183618A (en) Thin film magnetic head
JPS6424425A (en) Formation of tapered pattern
JPS5376837A (en) Recording system for electrostatic recorder
JPS53118044A (en) Electrostatic printing process
KR970009975B1 (en) Patterning method of photoresist for charge storage electrode in the semiconductor device
JPS57146271A (en) Recording method
JPS61237217A (ja) 薄膜磁気ヘツドの製造方法
JPH0644526A (ja) 薄膜磁気ヘッドの製造方法
JPS57113410A (en) Thin-film head
JPS6439614A (en) Production of thin film magnetic head
JPS5527639A (en) Photo-resist pattern forming method
JPS52151014A (en) Thin film magnetic head
JPS5495132A (en) Production of magnetic bubble memory unit