TW202532835A - 氣體濃度測定器及氣體濃度測定方法 - Google Patents

氣體濃度測定器及氣體濃度測定方法

Info

Publication number
TW202532835A
TW202532835A TW113138720A TW113138720A TW202532835A TW 202532835 A TW202532835 A TW 202532835A TW 113138720 A TW113138720 A TW 113138720A TW 113138720 A TW113138720 A TW 113138720A TW 202532835 A TW202532835 A TW 202532835A
Authority
TW
Taiwan
Prior art keywords
gas
light
ultraviolet light
measured
gas concentration
Prior art date
Application number
TW113138720A
Other languages
English (en)
Chinese (zh)
Inventor
髙洋志
Original Assignee
日商大陽日酸股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商大陽日酸股份有限公司 filed Critical 日商大陽日酸股份有限公司
Publication of TW202532835A publication Critical patent/TW202532835A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59—Transmissivity
    • G01N21/61—Non-dispersive gas analysers

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
TW113138720A 2023-10-13 2024-10-11 氣體濃度測定器及氣體濃度測定方法 TW202532835A (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2023-177817 2023-10-13
JP2023177817 2023-10-13
JP2023-218578 2023-12-25
JP2023218578 2023-12-25
WOPCT/JP2024/028493 2024-08-08
PCT/JP2024/028493 WO2025079327A1 (ja) 2023-10-13 2024-08-08 ガス濃度測定器及びガス濃度測定方法

Publications (1)

Publication Number Publication Date
TW202532835A true TW202532835A (zh) 2025-08-16

Family

ID=95395340

Family Applications (2)

Application Number Title Priority Date Filing Date
TW113138720A TW202532835A (zh) 2023-10-13 2024-10-11 氣體濃度測定器及氣體濃度測定方法
TW113138706A TW202526294A (zh) 2023-10-13 2024-10-11 氣體濃度測定器及氣體濃度測定方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW113138706A TW202526294A (zh) 2023-10-13 2024-10-11 氣體濃度測定器及氣體濃度測定方法

Country Status (4)

Country Link
JP (1) JPWO2025079328A1 (https=)
CN (2) CN121889660A (https=)
TW (2) TW202532835A (https=)
WO (2) WO2025079328A1 (https=)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5563744A (en) * 1978-11-06 1980-05-14 Keiichiro Fuwa Non-dispersion type vacuum ultraviolet ray mercury analyzer
JPH07128229A (ja) * 1993-11-04 1995-05-19 Mitsubishi Heavy Ind Ltd 有機溶剤ガス濃度測定方法及び装置並びにドライクリーニング機械
US6368560B1 (en) * 1999-03-06 2002-04-09 Trace Analytical, Inc. Photometric gas detection system and method
WO2001053806A1 (en) * 2000-01-18 2001-07-26 Radiometer Medical A/S Apparatus, sample cuvette and method for optical measurements
JP4211983B2 (ja) * 2004-02-24 2009-01-21 セントラル硝子株式会社 Ｆ２ガス濃度の測定方法並びに測定装置
JP6035628B2 (ja) 2012-10-03 2016-11-30 株式会社チノー ガスセンサ
US9116158B2 (en) * 2012-10-18 2015-08-25 Vuv Analytics, Inc. Vacuum ultraviolet absorption spectroscopy system and method
SG11202112241QA (en) * 2019-11-27 2021-12-30 Showa Denko Kk Method for measuring concentration of fluorine gas contained in halogen fluoride-containing gas by ultraviolet spectroscopy
GB2589367B (en) * 2019-11-29 2022-01-12 Thermo Fisher Scient Ecublens Sarl Improvements in optical emission spectrometry
KR102733863B1 (ko) * 2020-03-13 2024-11-26 가부시키가이샤 후지킨 농도 측정 방법 및 농도 측정 장치

Also Published As

Publication number Publication date
CN121889659A (zh) 2026-04-17
WO2025079327A1 (ja) 2025-04-17
JPWO2025079328A1 (https=) 2025-04-17
WO2025079328A1 (ja) 2025-04-17
TW202526294A (zh) 2025-07-01
CN121889660A (zh) 2026-04-17

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