CN121889660A - 气体浓度测量器及气体浓度测量方法 - Google Patents

气体浓度测量器及气体浓度测量方法

Info

Publication number
CN121889660A
CN121889660A CN202480059525.4A CN202480059525A CN121889660A CN 121889660 A CN121889660 A CN 121889660A CN 202480059525 A CN202480059525 A CN 202480059525A CN 121889660 A CN121889660 A CN 121889660A
Authority
CN
China
Prior art keywords
gas
light
ultraviolet light
gas concentration
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202480059525.4A
Other languages
English (en)
Chinese (zh)
Inventor
高洋志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Nippon Sanso Corp
Original Assignee
Taiyo Nippon Sanso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyo Nippon Sanso Corp filed Critical Taiyo Nippon Sanso Corp
Publication of CN121889660A publication Critical patent/CN121889660A/zh
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/33Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59Transmissivity
    • G01N21/61Non-dispersive gas analysers

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CN202480059525.4A 2023-10-13 2024-08-08 气体浓度测量器及气体浓度测量方法 Pending CN121889660A (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2023-177817 2023-10-13
JP2023177817 2023-10-13
JP2023-218578 2023-12-25
JP2023218578 2023-12-25
PCT/JP2024/028495 WO2025079328A1 (ja) 2023-10-13 2024-08-08 ガス濃度測定器及びガス濃度測定方法

Publications (1)

Publication Number Publication Date
CN121889660A true CN121889660A (zh) 2026-04-17

Family

ID=95395340

Family Applications (2)

Application Number Title Priority Date Filing Date
CN202480059525.4A Pending CN121889660A (zh) 2023-10-13 2024-08-08 气体浓度测量器及气体浓度测量方法
CN202480059517.XA Pending CN121889659A (zh) 2023-10-13 2024-08-08 气体浓度测量器及气体浓度测量方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN202480059517.XA Pending CN121889659A (zh) 2023-10-13 2024-08-08 气体浓度测量器及气体浓度测量方法

Country Status (4)

Country Link
JP (1) JPWO2025079328A1 (https=)
CN (2) CN121889660A (https=)
TW (2) TW202532835A (https=)
WO (2) WO2025079328A1 (https=)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5563744A (en) * 1978-11-06 1980-05-14 Keiichiro Fuwa Non-dispersion type vacuum ultraviolet ray mercury analyzer
JPH07128229A (ja) * 1993-11-04 1995-05-19 Mitsubishi Heavy Ind Ltd 有機溶剤ガス濃度測定方法及び装置並びにドライクリーニング機械
US6368560B1 (en) * 1999-03-06 2002-04-09 Trace Analytical, Inc. Photometric gas detection system and method
WO2001053806A1 (en) * 2000-01-18 2001-07-26 Radiometer Medical A/S Apparatus, sample cuvette and method for optical measurements
JP4211983B2 (ja) * 2004-02-24 2009-01-21 セントラル硝子株式会社 F2ガス濃度の測定方法並びに測定装置
JP6035628B2 (ja) 2012-10-03 2016-11-30 株式会社チノー ガスセンサ
US9116158B2 (en) * 2012-10-18 2015-08-25 Vuv Analytics, Inc. Vacuum ultraviolet absorption spectroscopy system and method
SG11202112241QA (en) * 2019-11-27 2021-12-30 Showa Denko Kk Method for measuring concentration of fluorine gas contained in halogen fluoride-containing gas by ultraviolet spectroscopy
GB2589367B (en) * 2019-11-29 2022-01-12 Thermo Fisher Scient Ecublens Sarl Improvements in optical emission spectrometry
KR102733863B1 (ko) * 2020-03-13 2024-11-26 가부시키가이샤 후지킨 농도 측정 방법 및 농도 측정 장치

Also Published As

Publication number Publication date
CN121889659A (zh) 2026-04-17
WO2025079327A1 (ja) 2025-04-17
JPWO2025079328A1 (https=) 2025-04-17
WO2025079328A1 (ja) 2025-04-17
TW202526294A (zh) 2025-07-01
TW202532835A (zh) 2025-08-16

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