TW202413911A - 以質譜逆流洩漏偵測裝置判斷輕質氣體周遭濃度的方法 - Google Patents
以質譜逆流洩漏偵測裝置判斷輕質氣體周遭濃度的方法 Download PDFInfo
- Publication number
- TW202413911A TW202413911A TW112123447A TW112123447A TW202413911A TW 202413911 A TW202413911 A TW 202413911A TW 112123447 A TW112123447 A TW 112123447A TW 112123447 A TW112123447 A TW 112123447A TW 202413911 A TW202413911 A TW 202413911A
- Authority
- TW
- Taiwan
- Prior art keywords
- vacuum pump
- gas
- fore
- air
- mass spectrometer
- Prior art date
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 title claims abstract description 16
- 239000000203 mixture Substances 0.000 claims abstract description 7
- 239000007789 gas Substances 0.000 claims description 103
- 238000012360 testing method Methods 0.000 claims description 20
- 239000001307 helium Substances 0.000 claims description 15
- 229910052734 helium Inorganic materials 0.000 claims description 15
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 15
- 238000005259 measurement Methods 0.000 claims description 6
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 claims 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 229910052805 deuterium Inorganic materials 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 229910052754 neon Inorganic materials 0.000 claims 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical group [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 239000003570 air Substances 0.000 description 21
- 239000012080 ambient air Substances 0.000 description 10
- 238000004949 mass spectrometry Methods 0.000 description 7
- 101100012902 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) FIG2 gene Proteins 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102022115562.5A DE102022115562A1 (de) | 2022-06-22 | 2022-06-22 | Verfahren zur Messung der Umgebungskonzentration eines leichten Gases mit einer massenspektrometrischen Gegenstrom-Lecksuchvorrichtung |
| DE102022115562.5 | 2022-06-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW202413911A true TW202413911A (zh) | 2024-04-01 |
Family
ID=86657751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW112123447A TW202413911A (zh) | 2022-06-22 | 2023-06-21 | 以質譜逆流洩漏偵測裝置判斷輕質氣體周遭濃度的方法 |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP4544280A1 (enExample) |
| JP (1) | JP2025519694A (enExample) |
| CN (1) | CN119256215A (enExample) |
| DE (1) | DE102022115562A1 (enExample) |
| TW (1) | TW202413911A (enExample) |
| WO (1) | WO2023247132A1 (enExample) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19522466A1 (de) | 1995-06-21 | 1997-01-02 | Leybold Ag | Lecksuchgerät mit Vorvakuumpumpe |
| DE19846800A1 (de) * | 1998-10-10 | 2000-04-13 | Leybold Vakuum Gmbh | Folien-Lecksucher |
| DE19846799A1 (de) | 1998-10-10 | 2000-04-13 | Leybold Vakuum Gmbh | Verfahren zum Betrieb eines Folien-Lecksuchers sowie für die Durchführung dieses Verfahrens geeigneter Folien-Lecksucher |
| DE10319633A1 (de) * | 2003-05-02 | 2004-11-18 | Inficon Gmbh | Lecksuchgerät |
| DE102015222213A1 (de) * | 2015-11-11 | 2017-05-11 | Inficon Gmbh | Druckmessung am Prüfgaseinlass |
-
2022
- 2022-06-22 DE DE102022115562.5A patent/DE102022115562A1/de active Pending
-
2023
- 2023-05-25 WO PCT/EP2023/064001 patent/WO2023247132A1/de not_active Ceased
- 2023-05-25 JP JP2024573578A patent/JP2025519694A/ja active Pending
- 2023-05-25 CN CN202380042061.1A patent/CN119256215A/zh active Pending
- 2023-05-25 EP EP23728063.1A patent/EP4544280A1/de active Pending
- 2023-06-21 TW TW112123447A patent/TW202413911A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JP2025519694A (ja) | 2025-06-26 |
| DE102022115562A1 (de) | 2023-12-28 |
| WO2023247132A1 (de) | 2023-12-28 |
| CN119256215A (zh) | 2025-01-03 |
| EP4544280A1 (de) | 2025-04-30 |
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