JP2025519694A - 質量分析型カウンターフロー式リーク検知装置を用いて軽量ガスの周囲濃度を測定する方法 - Google Patents

質量分析型カウンターフロー式リーク検知装置を用いて軽量ガスの周囲濃度を測定する方法 Download PDF

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Publication number
JP2025519694A
JP2025519694A JP2024573578A JP2024573578A JP2025519694A JP 2025519694 A JP2025519694 A JP 2025519694A JP 2024573578 A JP2024573578 A JP 2024573578A JP 2024573578 A JP2024573578 A JP 2024573578A JP 2025519694 A JP2025519694 A JP 2025519694A
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Japan
Prior art keywords
vacuum pump
gas
air
pump
high vacuum
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Pending
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JP2024573578A
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English (en)
Japanese (ja)
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JP2025519694A5 (enExample
Inventor
マティオダキス・シモン
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Inficon GmbH Deutschland
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Inficon GmbH Deutschland
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Publication of JP2025519694A publication Critical patent/JP2025519694A/ja
Publication of JP2025519694A5 publication Critical patent/JP2025519694A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2024573578A 2022-06-22 2023-05-25 質量分析型カウンターフロー式リーク検知装置を用いて軽量ガスの周囲濃度を測定する方法 Pending JP2025519694A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102022115562.5A DE102022115562A1 (de) 2022-06-22 2022-06-22 Verfahren zur Messung der Umgebungskonzentration eines leichten Gases mit einer massenspektrometrischen Gegenstrom-Lecksuchvorrichtung
DE102022115562.5 2022-06-22
PCT/EP2023/064001 WO2023247132A1 (de) 2022-06-22 2023-05-25 Verfahren zur messung der umgebungskonzentration eines leichten gases mit einer massenspektrometrischen gegenstrom-lecksuchvorrichtung

Publications (2)

Publication Number Publication Date
JP2025519694A true JP2025519694A (ja) 2025-06-26
JP2025519694A5 JP2025519694A5 (enExample) 2025-12-15

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ID=86657751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024573578A Pending JP2025519694A (ja) 2022-06-22 2023-05-25 質量分析型カウンターフロー式リーク検知装置を用いて軽量ガスの周囲濃度を測定する方法

Country Status (6)

Country Link
EP (1) EP4544280A1 (enExample)
JP (1) JP2025519694A (enExample)
CN (1) CN119256215A (enExample)
DE (1) DE102022115562A1 (enExample)
TW (1) TW202413911A (enExample)
WO (1) WO2023247132A1 (enExample)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19522466A1 (de) 1995-06-21 1997-01-02 Leybold Ag Lecksuchgerät mit Vorvakuumpumpe
DE19846800A1 (de) * 1998-10-10 2000-04-13 Leybold Vakuum Gmbh Folien-Lecksucher
DE19846799A1 (de) 1998-10-10 2000-04-13 Leybold Vakuum Gmbh Verfahren zum Betrieb eines Folien-Lecksuchers sowie für die Durchführung dieses Verfahrens geeigneter Folien-Lecksucher
DE10319633A1 (de) * 2003-05-02 2004-11-18 Inficon Gmbh Lecksuchgerät
DE102015222213A1 (de) * 2015-11-11 2017-05-11 Inficon Gmbh Druckmessung am Prüfgaseinlass

Also Published As

Publication number Publication date
TW202413911A (zh) 2024-04-01
DE102022115562A1 (de) 2023-12-28
WO2023247132A1 (de) 2023-12-28
CN119256215A (zh) 2025-01-03
EP4544280A1 (de) 2025-04-30

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JP2025519694A5 (enExample)

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