TW202412595A - Package module with electromagnetic shielding structure and manufacturing method thereof - Google Patents

Package module with electromagnetic shielding structure and manufacturing method thereof Download PDF

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TW202412595A
TW202412595A TW111139072A TW111139072A TW202412595A TW 202412595 A TW202412595 A TW 202412595A TW 111139072 A TW111139072 A TW 111139072A TW 111139072 A TW111139072 A TW 111139072A TW 202412595 A TW202412595 A TW 202412595A
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layer
circuit layer
electronic component
circuit
insulating layer
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TW111139072A
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TWI830436B (en
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胡先欽
周婧
王斐
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大陸商鵬鼎控股(深圳)股份有限公司
大陸商慶鼎精密電子(淮安)有限公司
鵬鼎科技股份有限公司
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Abstract

The invention discloses a package module with an electromagnetic shielding structure, including a circuit substrate, an adhesive layer, an insulating layer, a connecting circuit layer, an electronic component, an outer circuit layer and an electromagnetic shielding shell. The adhesive layer is arranged on the circuit substrate, the insulating layer is arranged on the adhesive layer, the connecting circuit layer is buried in the insulating layer, the outer circuit layer is arranged on the insulating layer, the electronic component is connected to the connecting circuit layer, the electromagnetic shielding shell covers the electronic component. The outer circuit layer includes signal circuits, the electromagnetic shielding shell is electrically connected to the signal circuit, the connecting circuit layer includes grounding pads arranged at intervals, and the grounding is electrically connected to the signal circuit, and the electromagnetic shielding shell, the signal circuit and the connecting circuit layer are sequentially connected to form an electromagnetic shielding structure surrounding the electronic component. The invention also discloses a manufacturing method of a package module with an electromagnetic shielding structure.

Description

具有電磁遮罩結構的封裝模組及其製作方法Packaging module with electromagnetic shield structure and manufacturing method thereof

本申請涉及線路板製造技術領域,尤其涉及一種具有電磁遮罩結構的封裝模組及其製作方法。The present application relates to the field of circuit board manufacturing technology, and more particularly to a packaging module with an electromagnetic shield structure and a manufacturing method thereof.

一般情況下,高密度封裝模組既要符合電子產品輕薄化、小型化、結構靈活的趨勢,減小封裝基板上的線寬/線距、製作更加精細的線路,又要同時滿足晶片細引腳的可焊接性。Generally speaking, high-density packaging modules must not only meet the trend of electronic products becoming thinner, smaller, and more flexible in structure, but also reduce the line width/line spacing on the packaging substrate, make finer circuits, and at the same time meet the solderability of the chip's fine pins.

然而,高密度整合構裝相對地也會使得電路板上的電磁波干擾問題愈來愈嚴重,一般解決電磁波干擾問題是在元件周圍設置遮罩金屬層以降低信號之間的干擾,但現有技術中的遮罩金屬層並沒有全方位地包圍晶片,可靠性不足,且更無法保證在設置細線路與晶片細引腳焊接的同時實現對晶片全方位的電磁遮罩。However, high-density integrated packaging will also make the electromagnetic interference problem on the circuit board more and more serious. The general solution to the electromagnetic interference problem is to set a shielding metal layer around the component to reduce the interference between signals. However, the shielding metal layer in the existing technology does not surround the chip in all directions, and the reliability is insufficient. It is even more impossible to ensure that the electromagnetic shielding of the chip is achieved in all directions while setting up fine circuits and welding the fine pins of the chip.

有鑑於此,有必要提供一種能解決上述問題的具有電磁遮罩結構的封裝模組的製作方法。In view of this, it is necessary to provide a method for manufacturing a packaging module with an electromagnetic shield structure that can solve the above problems.

另外,本申請還提供一種由上述製作方法製作的具有電磁遮罩結構的封裝模組。In addition, the present application also provides a packaging module having an electromagnetic shield structure manufactured by the above-mentioned manufacturing method.

本申請一實施例提供一種具有電磁遮罩結構的封裝模組,包括線路基板、膠粘層、絕緣層、連接線路層、電子元件、外側線路層以及電磁遮罩殼; 所述膠粘層設於所述線路基板,所述絕緣層設於所述膠粘層,所述連接線層路埋設所述絕緣層,所述外側線路層設於所述絕緣層,所述電子元件連接所述連接線路層,所述電磁遮罩殼蓋設於所述電子元件; 所述外側線路層包括信號線路,所述電磁遮罩殼電性連接所述信號線路,所述連接線路層包括間隔設置的接地墊,所述接地墊電性連接所述信號線路,所述電磁遮罩殼、所述信號線路和所述連接線路層依次連接以形成包圍所述電子元件的電磁遮罩結構。 An embodiment of the present application provides a packaging module with an electromagnetic shielding structure, including a circuit substrate, an adhesive layer, an insulating layer, a connecting circuit layer, an electronic component, an external circuit layer, and an electromagnetic shielding shell; The adhesive layer is arranged on the circuit substrate, the insulating layer is arranged on the adhesive layer, the connecting circuit layer is buried in the insulating layer, the external circuit layer is arranged on the insulating layer, the electronic component is connected to the connecting circuit layer, and the electromagnetic shielding shell is arranged on the electronic component; The outer circuit layer includes a signal circuit, the electromagnetic shield shell is electrically connected to the signal circuit, the connecting circuit layer includes spaced ground pads, the ground pads are electrically connected to the signal circuit, and the electromagnetic shield shell, the signal circuit and the connecting circuit layer are sequentially connected to form an electromagnetic shield structure surrounding the electronic component.

在一些實施方式中,所述電子元件包括本體和電性連接於所述本體的引腳,所述連接線路層還包括設於所述接地墊之間的連接墊,所述引腳連接於所述接地墊與所述連接墊; 所述電子元件表面設有一塑封層,所述電磁遮罩殼包覆所述塑封層。 In some embodiments, the electronic component includes a body and pins electrically connected to the body, the connection circuit layer further includes a connection pad disposed between the ground pads, and the pins are connected to the ground pad and the connection pad; A plastic sealing layer is disposed on the surface of the electronic component, and the electromagnetic shielding shell covers the plastic sealing layer.

在一些實施方式中,所述外側線路層具有一開口,所述連接線路層和部分所述絕緣層由所述開口露出,所述引腳收容於所述開口,所述本體突出於所述外側線路層背離所述絕緣層的表面。In some embodiments, the outer circuit layer has an opening, the connecting circuit layer and a portion of the insulating layer are exposed from the opening, the pin is received in the opening, and the body protrudes from a surface of the outer circuit layer away from the insulating layer.

在一些實施方式中,所述封裝模組還包括膠體,所述膠體設於所述本體和所述連接線路層之間,所述膠體包覆所述引腳,所述膠體背離所述絕緣層的表面不高於所述外側線路層背離所述絕緣層的表面。In some embodiments, the packaging module further includes a gel, the gel is disposed between the body and the connecting circuit layer, the gel covers the pins, and a surface of the gel facing away from the insulating layer is not higher than a surface of the outer circuit layer facing away from the insulating layer.

在一些實施方式中,所述連接線路層背離所述絕緣層的表面設有焊料,所述焊料連接所述電子元件和所述連接線路。In some embodiments, a surface of the connection circuit layer facing away from the insulation layer is provided with solder, and the solder connects the electronic component and the connection circuit.

本申請還提供一種具有電磁遮罩結構的封裝模組的製作方法,包括以下步驟: 提供一載板,所述載板包括依次疊設的線路基板、膠粘層、絕緣層和外側銅箔層; 於所述載板開設多個間隔設置的盲孔,所述盲孔貫穿所述外側銅箔層和部分所述絕緣層; 於所述外側銅箔層背離所述絕緣層一側形成金屬層,部分所述金屬層填充入所述盲孔以形成連接線路層,所述連接線路層包括間隔設置的接地墊; 蝕刻所述金屬層和外側銅箔層形成外側線路層,所述外側線路層包括信號線路,所述信號線路電性連接所述接地墊,所述外側線路層具有一開口,所述連接電路層由所述開口露出; 於所述電子元件週邊設置電磁遮罩殼,所述電磁遮罩殼電性連接所述信號線路,所述電磁遮罩殼、信號線路與所述連接線路層形成包覆所述電子元件的電磁遮罩結構。 The present application also provides a method for manufacturing a package module with an electromagnetic shield structure, comprising the following steps: Providing a carrier board, the carrier board comprising a circuit substrate, an adhesive layer, an insulating layer and an outer copper foil layer stacked in sequence; Opening a plurality of blind holes arranged at intervals in the carrier board, the blind holes penetrating the outer copper foil layer and part of the insulating layer; Forming a metal layer on the side of the outer copper foil layer away from the insulating layer, part of the metal layer is filled into the blind hole to form a connecting circuit layer, the connecting circuit layer comprising ground pads arranged at intervals; Etching the metal layer and the outer copper foil layer to form an outer circuit layer, the outer circuit layer includes a signal line, the signal line is electrically connected to the ground pad, the outer circuit layer has an opening, and the connection circuit layer is exposed from the opening; An electromagnetic shielding shell is arranged around the electronic component, the electromagnetic shielding shell is electrically connected to the signal line, and the electromagnetic shielding shell, the signal line and the connection circuit layer form an electromagnetic shielding structure covering the electronic component.

在一些實施方式中,所述電子元件包括本體和與所述本體電性連接的多個引腳,所述連接電路層還包括設於所述接地墊之間的連接墊; 步驟“將電子元件焊接於所述連接線路層”包括: 於所述連接線路層背離所述絕緣層的表面設置焊料,所述多個引腳通過所述焊料焊接於所述接地墊和所述連接墊。 In some embodiments, the electronic component includes a body and a plurality of pins electrically connected to the body, and the connection circuit layer further includes a connection pad disposed between the ground pads; The step of "soldering the electronic component to the connection circuit layer" includes: Solder is provided on the surface of the connection circuit layer away from the insulating layer, and the plurality of pins are soldered to the ground pad and the connection pad through the solder.

在一些實施方式中,步驟“蝕刻所述金屬層和外側銅箔層形成外側線路層”後,還包括: 蝕刻所述連接線路層,以使得所述連接線路層背離所述絕緣層的表面與所述絕緣層朝向所述外側線路層的表面錯開以形成安裝槽;以及 於所述安裝槽內設置所述焊料。 In some embodiments, after the step of "etching the metal layer and the outer copper foil layer to form an outer circuit layer", it also includes: Etching the connecting circuit layer so that the surface of the connecting circuit layer facing away from the insulating layer and the surface of the insulating layer facing the outer circuit layer are offset to form a mounting groove; and Placing the solder in the mounting groove.

在一些實施方式中,所述引腳收容於所述開口,所述本體突出於所述外側線路層背離所述絕緣層的表面; 步驟“將電子元件焊接於所述連接線路層”後,還包括: 於所述本體和所述連接線路層之間設置膠體,所述膠體包覆所述引腳,所述膠體背離所述絕緣層的表面不高於所述外側線路層背離所述絕緣層的表面。 In some embodiments, the pin is received in the opening, and the body protrudes from the surface of the outer circuit layer away from the insulating layer; After the step of "welding the electronic component to the connecting circuit layer", it also includes: Placing a gel between the body and the connecting circuit layer, the gel covers the pin, and the surface of the gel away from the insulating layer is not higher than the surface of the outer circuit layer away from the insulating layer.

在一些實施方式中,所述電子元件表面設有一塑封層; 步驟“於所述電子元件周圍設置電磁遮罩殼”包括: 於所述塑封層濺射金屬材料形成所述電磁遮罩殼。 In some embodiments, a plastic layer is provided on the surface of the electronic component; The step of "providing an electromagnetic shielding shell around the electronic component" includes: Sputtering a metal material on the plastic layer to form the electromagnetic shielding shell.

相較於現有技術,本申請提供的具有電磁遮罩結構的內埋式電路板具有以下優勢:(1)通過在所述電子元件四周設置所述電磁遮罩殼,並且所述電磁遮罩殼電性連接所述接地墊實現接地,所述電磁遮罩殼、信號線路以及所述連接線路層連接形成全方位包覆所述電子元件的電磁遮罩結構,可實現最大程度的信號遮罩,增加抗信號干擾的可靠性。Compared with the prior art, the embedded circuit board with an electromagnetic shielding structure provided by the present application has the following advantages: (1) by arranging the electromagnetic shielding shell around the electronic component, and the electromagnetic shielding shell being electrically connected to the grounding pad to achieve grounding, the electromagnetic shielding shell, the signal line and the connecting line layer are connected to form an electromagnetic shielding structure that fully covers the electronic component, thereby achieving the maximum degree of signal shielding and increasing the reliability of anti-signal interference.

(2)通過將連接線路層內埋於所述絕緣層,可使得所述接地墊和所述連接墊的線寬以及間距最小化,最小可達2μm,能夠實現與具有密集引腳的電子元件實現邦定,有利於高密度封裝,從而減少導電離子遷移的問題。(2) By burying the connection line layer in the insulating layer, the line width and spacing between the ground pad and the connection pad can be minimized to a minimum of 2 μm, which can achieve bonding with electronic components with dense pins, is conducive to high-density packaging, and thus reduces the problem of conductive ion migration.

(3)通過將所述連接線路層內埋於所述絕緣層,並在表面設置所述膠體,使得所述連接線路層四周均有保護,可最大程度實現高的剝離強度,保證封裝可靠性。(3) By burying the connection line layer in the insulation layer and providing the colloid on the surface, the connection line layer is protected all around, and the high peeling strength can be achieved to the greatest extent, thereby ensuring the packaging reliability.

(4)通過將所述膠體設於所述第二開口內,且所述膠體背離所述絕緣層的表面不高於所述外側線路層背離所述絕緣層的表面,保證了封裝最小尺寸。(4) By placing the colloid in the second opening and ensuring that the surface of the colloid facing away from the insulating layer is not higher than the surface of the outer circuit layer facing away from the insulating layer, the minimum package size is ensured.

(5)所述電磁遮罩殼與所述電子元件之間僅保留所述塑封層,可實現最小型化遮罩設計,有利於電子產品的輕薄化和小型化。(5) Only the plastic sealing layer is retained between the electromagnetic shield shell and the electronic component, so as to realize the most miniaturized shield design, which is beneficial to the lightness, thinness and miniaturization of electronic products.

(6)通過將所述電子元件的所述引腳收容於所述第二開口,所述本體突出於所述外側線路層背離所述絕緣層的表面,使得所述封裝模組的結構設計靈活,良率高,適用於大部分產品設計,能夠實現普遍應用。(6) By accommodating the pins of the electronic component in the second opening, the main body protrudes from the surface of the outer circuit layer away from the insulating layer, so that the structural design of the packaging module is flexible, the yield is high, and it is suitable for most product designs and can be widely used.

下面將結合本申請實施例中的附圖,對本申請實施例中的技術方案進行清楚、完整地描述,顯然,所描述的實施例僅是本申請一部分實施例,而不是全部的實施例。基於本申請中的實施例,本領域普通技術人員在沒有做出創造性勞動前提下所獲得的所有其他實施例,都屬於本申請保護的範圍。The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the described embodiments are only part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative labor are within the scope of protection of this application.

除非另有定義,本文所使用的所有的技術和科學術語與屬於本申請的技術領域的技術人員通常理解的含義相同。本文中在本申請的說明書中所使用的術語只是為了描述具體的實施例的目的,不是旨在於限制本申請。Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the application. The terms used herein in the specification of the application are only for the purpose of describing specific embodiments and are not intended to limit the application.

下面結合附圖,對本申請的一些實施方式作詳細說明。在不衝突的情況下,下述的實施例及實施例中的特徵可以相互組合。The following is a detailed description of some implementations of the present application in conjunction with the accompanying drawings. The following embodiments and features in the embodiments may be combined with each other without conflict.

請參閱圖1至圖15,本發明一實施方式中具有電磁遮罩結構的封裝模組100的製作方法,其包括以下步驟:Please refer to FIG. 1 to FIG. 15 , a method for manufacturing a package module 100 having an electromagnetic shield structure in an embodiment of the present invention includes the following steps:

步驟S1,請參閱圖5,提供一線路基板10,所述線路基板10包括一基材層101、形成於所述基材層101相對兩側的內側線路層102以及貫穿設於所述基材層101的導通體103,所述導通體103電性連接兩個所述內側線路層102。In step S1, please refer to FIG. 5 , a circuit substrate 10 is provided, wherein the circuit substrate 10 includes a base layer 101, inner circuit layers 102 formed on two opposite sides of the base layer 101, and a conductive body 103 penetrating the base layer 101, wherein the conductive body 103 electrically connects the two inner circuit layers 102.

所述基材層101的材質可選自聚醯亞胺(polyimide,PI)、液晶聚合物(liquid crystal polymer,LCP)、玻璃纖維環氧樹脂(FR4)以及聚四氟乙烯(Polytetrafluoroethylene,PTFE)等材料中的一種。The material of the substrate layer 101 can be selected from one of polyimide (PI), liquid crystal polymer (LCP), glass fiber epoxy (FR4), polytetrafluoroethylene (PTFE), and the like.

在其他實施例中,所述線路基板10也可以為單面板,即所述線路基板10僅包括形成於所述基材層101其中一側的內側線路層102。In other embodiments, the circuit substrate 10 may also be a single-sided board, that is, the circuit substrate 10 only includes the inner circuit layer 102 formed on one side of the base layer 101 .

請一併參閱圖1至圖5,所述線路基板10的製作方法具體包括以下步驟:Please refer to FIG. 1 to FIG. 5 together. The manufacturing method of the circuit substrate 10 specifically includes the following steps:

步驟S11,請參閱圖1,提供一覆銅基板10’, 所述覆銅基板10’包括基材層101以及形成於所述基材層101相對兩側的內側銅箔層102’。In step S11, referring to FIG. 1 , a copper-clad substrate 10 ′ is provided. The copper-clad substrate 10 ′ includes a base layer 101 and inner copper foil layers 102 ′ formed on two opposite sides of the base layer 101 .

步驟S12,請參閱圖2,於所述覆銅基板10’貫穿開設一通孔11。In step S12, please refer to FIG. 2 , a through hole 11 is formed through the copper-clad substrate 10 ′.

在本實施方式中,所述通孔11通過鐳射形成。在其他實施方式中,所述通孔11可通過其他方式形成,如機械鑽孔、衝壓成型等。In this embodiment, the through hole 11 is formed by laser. In other embodiments, the through hole 11 can be formed by other methods, such as mechanical drilling, stamping, etc.

步驟S13,請參閱圖3,將所述覆銅基板10’進行整板電鍍處理,於所述內側銅箔層102’背離所述基材層101的一側形成一第一金屬層12,並於所述通孔11中形成導通體103。In step S13, please refer to FIG. 3 , the copper-clad substrate 10 ′ is subjected to a whole-board electroplating process to form a first metal layer 12 on a side of the inner copper foil layer 102 ′ facing away from the base layer 101 , and a conductive body 103 is formed in the through hole 11 .

步驟S14,請參閱圖4,於所述第一金屬層12背離所述內側銅箔層102’的一側設置第一感光圖樣層13,所述第一感光圖樣層13具有多個第一開口131,部分所述第一金屬層12由所述第一開口131露出。In step S14, please refer to FIG. 4 , a first photosensitive pattern layer 13 is disposed on a side of the first metal layer 12 facing away from the inner copper foil layer 102 ′. The first photosensitive pattern layer 13 has a plurality of first openings 131 , and a portion of the first metal layer 12 is exposed from the first openings 131 .

其中,所述第一感光圖樣層13可由第一感光乾膜(圖未示)經曝光顯影得到。The first photosensitive pattern layer 13 can be obtained by exposing and developing a first photosensitive dry film (not shown).

步驟S15,請參閱圖5,對所述第一金屬層12和所述內側銅箔層102’同步蝕刻處理,以形成所述內側線路層102,並移除所述第一感光圖樣層13,獲得所述線路基板10。In step S15, please refer to FIG. 5 , the first metal layer 12 and the inner copper foil layer 102′ are simultaneously etched to form the inner circuit layer 102, and the first photosensitive pattern layer 13 is removed to obtain the circuit substrate 10.

步驟S2,請參閱圖6,於所述線路基板10的相對兩側分別壓合一覆銅板20,獲得一載板21。In step S2, please refer to FIG. 6 , a copper-clad plate 20 is pressed on two opposite sides of the circuit substrate 10 to obtain a carrier 21.

所述覆銅板20包括依次疊設的膠粘層201、絕緣層202以及外側銅箔層203,所述膠粘層201朝向所述線路基板10一側,部分所述膠粘層201填充進入所述內側線路層102與所述基材層101之間的間隙。The copper clad laminate 20 includes an adhesive layer 201, an insulating layer 202 and an outer copper foil layer 203 stacked in sequence. The adhesive layer 201 faces the circuit substrate 10 side, and part of the adhesive layer 201 fills the gap between the inner circuit layer 102 and the base layer 101.

其中,所述膠粘層201可為ABF樹脂、半固化片(Prepreg,PP)、環氧樹脂(epoxy resin)、BT樹脂、聚苯醚(Polyphenylene Oxide,PPO)、聚醯亞胺(polyimide,PI)、聚對苯二甲酸乙二醇酯(Polyethylene Terephthalate,PET)以及聚萘二甲酸乙二醇酯(Polyethylene Naphthalate,PEN)等樹脂中的一種。所述絕緣層202的材質可與所述基材層101的材質相同。The adhesive layer 201 may be one of ABF resin, prepreg (PP), epoxy resin, BT resin, polyphenylene oxide (PPO), polyimide (PI), polyethylene terephthalate (PET), polyethylene naphthalate (PEN), etc. The material of the insulating layer 202 may be the same as that of the substrate layer 101.

步驟S3,請參閱圖7,於所述載板21開設多個盲孔211。In step S3 , please refer to FIG. 7 , a plurality of blind holes 211 are formed in the carrier board 21 .

其中,沿所述覆銅板20的層疊方向開設所述盲孔211,所述盲孔211貫穿所述外側銅箔層203以及部分所述絕緣層202。The blind hole 211 is opened along the stacking direction of the copper clad plate 20 , and the blind hole 211 penetrates the outer copper foil layer 203 and a portion of the insulating layer 202 .

步驟S4,請參閱圖8,於所述外側銅箔層203背離所述絕緣層202一側電鍍形成第二金屬層30’,部分所述第二金屬層30’填充入所述盲孔211形成連接線路層31。In step S4, please refer to FIG. 8 , a second metal layer 30 ′ is electroplated on the side of the outer copper foil layer 203 facing away from the insulating layer 202 , and a portion of the second metal layer 30 ′ is filled into the blind hole 211 to form a connecting circuit layer 31 .

步驟S5,請參閱圖9,於所述第二金屬層30’背離所述外側銅箔層203一側設置第二感光圖樣層40,所述第二感光圖樣層40具有第三開口401,部分所述第二金屬層30’由所述第三開口401露出。In step S5, please refer to FIG. 9 , a second photosensitive pattern layer 40 is disposed on the side of the second metal layer 30 ′ facing away from the outer copper foil layer 203 . The second photosensitive pattern layer 40 has a third opening 401 , and a portion of the second metal layer 30 ′ is exposed from the third opening 401 .

其中,所述第二感光圖樣層40可由第二感光乾膜(圖未示)經曝光顯影得到。The second photosensitive pattern layer 40 can be obtained by exposing and developing a second photosensitive dry film (not shown).

步驟S6,請參閱圖10,對所述第二金屬層30’和所述外側銅箔層203進行同步蝕刻處理,以形成外側線路層30,所述外側線路層30包括多個間隔設置的信號線路301。Step S6, please refer to Figure 10, the second metal layer 30' and the outer copper foil layer 203 are subjected to synchronous etching processing to form an outer circuit layer 30, and the outer circuit layer 30 includes a plurality of signal circuits 301 arranged at intervals.

所述外側線路層30具有一第二開口302,所述連接線路層31及部分所述絕緣層202由所述第二開口302露出。The outer circuit layer 30 has a second opening 302 , and the connection circuit layer 31 and a portion of the insulation layer 202 are exposed from the second opening 302 .

其中,步驟S6還包括步驟:微蝕刻所述連接線路層31,使得所述連接線路層31背離所述絕緣層202的表面略低於所述絕緣層202朝向所述外側線路層30的表面,從而形成安裝槽32。Wherein, step S6 further includes the step of micro-etching the connection circuit layer 31 so that the surface of the connection circuit layer 31 facing away from the insulating layer 202 is slightly lower than the surface of the insulating layer 202 facing the outer circuit layer 30, thereby forming a mounting groove 32.

所述連接線路層31包括位於兩側的接地墊311以及位於接地墊311之間的連接墊312,所述接地墊311電性連接於所述信號線路301。所述接地墊311和所述信號線路301圍繞所述第二開口302形成有側壁3021。The connection circuit layer 31 includes ground pads 311 on both sides and a connection pad 312 between the ground pads 311. The ground pads 311 are electrically connected to the signal circuits 301. The ground pads 311 and the signal circuits 301 form a side wall 3021 around the second opening 302.

其中,所述信號線路301的截面寬度大於所述連接墊312和所述連接墊312的截面寬度。所述信號線路301用於連接外部電路(圖未示)。The cross-sectional width of the signal line 301 is greater than the cross-sectional width of the connection pad 312 and the connection pad 312. The signal line 301 is used to connect to an external circuit (not shown).

可以理解地,步驟S6還包括:移除所述第二感光圖樣層40。It can be understood that step S6 further includes: removing the second photosensitive pattern layer 40.

可以理解地,在實際應用中,本申請的製作方法還包括:貫穿所述絕緣層202和所述膠粘層201設置至少一導電孔(圖未示),所述導電孔電連接所述外側線路層30和所述內側線路層102。It can be understood that in practical applications, the manufacturing method of the present application further includes: setting at least one conductive hole (not shown) through the insulating layer 202 and the adhesive layer 201, and the conductive hole electrically connects the outer circuit layer 30 and the inner circuit layer 102.

步驟S7,請參閱圖11,於所述連接線路層31朝向所述第二開口302的表面化學鍍錫以形成焊料33。Step S7, please refer to FIG. 11 , chemically tinning is performed on the surface of the connection circuit layer 31 facing the second opening 302 to form solder 33.

其中,所述焊料33還形成於所述側壁3021。所述焊料33用於焊接電子元件50(參見圖12)。The solder 33 is also formed on the side wall 3021. The solder 33 is used to solder the electronic component 50 (see FIG. 12 ).

步驟S8,請參閱圖12,於所述第二開口302中設置電子元件50,所述電子元件50電連接於所述連接線路層31。Step S8 , please refer to FIG. 12 , an electronic component 50 is disposed in the second opening 302 , and the electronic component 50 is electrically connected to the connection circuit layer 31 .

其中,所述電子元件50包括本體501以及電性連接於所述本體501的多個引腳502。所述引腳502收容於所述第二開口302,所述本體501突出於所述外側線路層30背離所述絕緣層202的表面。所述電子元件50的多個引腳502通過所述焊料33焊接於所述安裝槽32底部的連接線路層31上。The electronic component 50 includes a body 501 and a plurality of pins 502 electrically connected to the body 501. The pins 502 are received in the second opening 302, and the body 501 protrudes from the surface of the outer circuit layer 30 away from the insulating layer 202. The plurality of pins 502 of the electronic component 50 are soldered to the connection circuit layer 31 at the bottom of the mounting groove 32 through the solder 33.

可以理解地,所述電子元件50為塑封器件,在出廠時即自帶一層塑封層51,所述塑封層51包覆於所述本體501的表面。It can be understood that the electronic component 50 is a plastic-encapsulated device, and has a plastic-encapsulation layer 51 when it leaves the factory, and the plastic-encapsulation layer 51 is coated on the surface of the body 501.

在本實施例中,所述電子元件50可包括一顆或多顆有源器件,例如有源晶片,包括但不限於電源晶片、數位晶片、射頻晶片等。In this embodiment, the electronic element 50 may include one or more active devices, such as active chips, including but not limited to power chips, digital chips, radio frequency chips, etc.

請一併參閱圖13,所述連接線路層31因內埋於所述絕緣層202,所述連接墊312和所述接地墊311的線寬以及線路之間的間距可實現最小化,最小可達2μm,能夠實現與最密集的所述引腳502實現邦定封裝,且不存在銅離子遷移的問題。另外,所述連接線路層31四周均有保護,可最大程度實現高的剝離強度,保證封裝可靠性。Please refer to FIG. 13 . Since the connection circuit layer 31 is embedded in the insulation layer 202 , the line width of the connection pad 312 and the ground pad 311 and the spacing between the lines can be minimized to 2 μm, so that the bonding package can be realized with the densest pins 502 without the problem of copper ion migration. In addition, the connection circuit layer 31 is protected all around, which can achieve high peeling strength to the greatest extent and ensure packaging reliability.

步驟S9,請參閱圖14,於所述電子元件50底部設置膠體60,所述膠體60包覆所述多個引腳502。In step S9 , please refer to FIG. 14 , a colloid 60 is disposed at the bottom of the electronic component 50 , and the colloid 60 covers the plurality of pins 502 .

其中,所述膠體60設於所述第二開口302內,所述膠體60背離所述絕緣層202的表面不高於所述外側線路層30背離所述絕緣層202的表面。所述膠體60因設於所述第二開口302內,可使得膠液不外流,保證了封裝最小尺寸。The gel 60 is disposed in the second opening 302, and the surface of the gel 60 facing away from the insulating layer 202 is not higher than the surface of the outer circuit layer 30 facing away from the insulating layer 202. Since the gel 60 is disposed in the second opening 302, the gel does not flow out, thereby ensuring the minimum package size.

在本實施例中,可採用底部填充(underfill)工藝將粘性的樹脂膠液塗布於所述電子元件50的邊緣,使其通過毛細作用滲透到所述本體501的底部,然後加熱予以固化形成所述膠體60。所述膠體60用於提高所述電子元件50焊接的機械強度,提高使用壽命,增強信賴度。其中,所述膠體60的材質可為環氧樹脂。In this embodiment, a bottom filling process can be used to apply a viscous resin glue to the edge of the electronic component 50, so that it can penetrate to the bottom of the body 501 through capillary action, and then heat it to solidify to form the glue 60. The glue 60 is used to improve the mechanical strength of the welding of the electronic component 50, improve the service life, and enhance the reliability. The material of the glue 60 can be epoxy resin.

步驟S10,請參閱圖15,於所述電子元件50的表面設置電磁遮罩殼70。In step S10 , please refer to FIG. 15 , an electromagnetic shielding case 70 is disposed on the surface of the electronic component 50 .

其中,所述電磁遮罩殼70包覆於所述塑封層51。所述電磁遮罩殼70與所述信號線路301接觸,從而所述電磁遮罩殼70電性連接於所述接地墊311,以實現接地。所述電磁遮罩殼70、信號線路301以及所述連接線路層31連接形成全方位包覆所述電子元件50的電磁遮罩結構。The electromagnetic shield shell 70 is coated on the plastic packaging layer 51. The electromagnetic shield shell 70 is in contact with the signal line 301, so that the electromagnetic shield shell 70 is electrically connected to the ground pad 311 to achieve grounding. The electromagnetic shield shell 70, the signal line 301 and the connection line layer 31 are connected to form an electromagnetic shield structure that fully covers the electronic component 50.

在本實施例中,可於所述電子元件50表面選擇性濺射或塗布金屬材料,以形成所述電磁遮罩殼70。其中,所述金屬材料可為銀或銅。In this embodiment, a metal material may be selectively sputtered or coated on the surface of the electronic element 50 to form the electromagnetic shielding shell 70. The metal material may be silver or copper.

請參閱圖15,本申請還提供一種採用上述製作方法製作得到的具有電磁遮罩結構的封裝模組100,所述封裝模組100包括依次疊設的線路基板10、膠粘層201、絕緣層202和外側線路層30,以及內埋於所述絕緣層202的連接線路層31,電性連接於所述連接線路層31的電子元件50,設置於所述連接線路層31與所述電子元件50之間的膠體60,以及設於所述電子元件50周圍的電磁遮罩殼70。Please refer to Figure 15. The present application also provides a packaging module 100 having an electromagnetic shield structure manufactured by the above-mentioned manufacturing method. The packaging module 100 includes a circuit substrate 10, an adhesive layer 201, an insulating layer 202 and an outer circuit layer 30 stacked in sequence, and a connecting circuit layer 31 buried in the insulating layer 202, an electronic component 50 electrically connected to the connecting circuit layer 31, a colloid 60 arranged between the connecting circuit layer 31 and the electronic component 50, and an electromagnetic shield shell 70 arranged around the electronic component 50.

其中,所述線路基板10包括所述線路基板10包括一基材層101、形成於所述基材層101相對兩側的內側線路層102以及貫穿設於所述基材層101的導通體103,所述導通體103電性連接兩個所述內側線路層102。The circuit substrate 10 includes a base layer 101 , inner circuit layers 102 formed on two opposite sides of the base layer 101 , and a conductive body 103 penetrating the base layer 101 , wherein the conductive body 103 electrically connects the two inner circuit layers 102 .

所述外側線路層30具有一第二開口302,所述連接線路層31及部分所述絕緣層202由所述第二開口302露出。所述連接線路層31背離所述絕緣層202的表面略低於所述絕緣層202朝向所述外側線路層30的表面。所述連接線路層31包括位於兩側的接地墊311以及位於接地墊311之間的連接墊312,所述接地墊311電性連接於所述信號線路301。其中,所述接地墊311和所述信號線路301圍繞所述第二開口302形成有側壁3021。所述連接線路層31朝向所述第二開口302的表面以及所述側壁3021上形成有焊料33。The outer circuit layer 30 has a second opening 302, and the connection circuit layer 31 and a portion of the insulation layer 202 are exposed from the second opening 302. The surface of the connection circuit layer 31 facing away from the insulation layer 202 is slightly lower than the surface of the insulation layer 202 facing the outer circuit layer 30. The connection circuit layer 31 includes ground pads 311 located on both sides and a connection pad 312 located between the ground pads 311, and the ground pads 311 are electrically connected to the signal circuit 301. The ground pads 311 and the signal circuit 301 form a side wall 3021 around the second opening 302. Solder 33 is formed on the surface of the connection circuit layer 31 facing the second opening 302 and the sidewall 3021 .

其中,所述信號線路301的截面寬度大於所述連接墊312和所述連接墊312的截面寬度。The cross-sectional width of the signal line 301 is greater than the cross-sectional width of the connection pad 312 and the cross-sectional width of the connection pad 312 .

所述電子元件50包括本體501以及電性連接於所述本體501的多個引腳502。所述引腳502收容於所述第二開口302,所述膠體60包覆所述多個引腳502。所述本體501突出於所述外側線路層30背離所述絕緣層202的表面。所述電子元件50的多個引腳502通過所述焊料33焊接於所述連接線路層31。所述電子元件50表面還設有一塑封層51,所述塑封層51包覆所述本體501除設有所述引腳502的表面。The electronic component 50 includes a body 501 and a plurality of pins 502 electrically connected to the body 501. The pins 502 are received in the second opening 302, and the colloid 60 covers the plurality of pins 502. The body 501 protrudes from the surface of the outer circuit layer 30 away from the insulating layer 202. The plurality of pins 502 of the electronic component 50 are soldered to the connecting circuit layer 31 through the solder 33. A plastic sealing layer 51 is also provided on the surface of the electronic component 50, and the plastic sealing layer 51 covers the surface of the body 501 except the surface where the pins 502 are provided.

其中,所述膠體60背離所述絕緣層202的表面不高於所述外側線路層30背離所述絕緣層202的表面。The surface of the colloid 60 facing away from the insulating layer 202 is not higher than the surface of the outer circuit layer 30 facing away from the insulating layer 202 .

所述電磁遮罩殼70包覆所述塑封層51。所述電磁遮罩殼70與所述信號線路301接觸,從而所述電磁遮罩殼70電性連接於所述接地墊311,以實現接地。所述電磁遮罩殼70、信號線路301以及所述連接線路層31連接形成全方位包覆所述電子元件50的電磁遮罩結構。The electromagnetic shielding shell 70 covers the plastic packaging layer 51. The electromagnetic shielding shell 70 contacts the signal line 301, so that the electromagnetic shielding shell 70 is electrically connected to the ground pad 311 to achieve grounding. The electromagnetic shielding shell 70, the signal line 301 and the connection line layer 31 are connected to form an electromagnetic shielding structure that fully covers the electronic component 50.

在本實施例中,所述具有電磁遮罩結構的封裝模組100可以廣泛應用於小信號模組、顯示面板、Mini LED、無線耳機、手機或手錶主機板等。In this embodiment, the package module 100 having the electromagnetic shield structure can be widely used in small signal modules, display panels, Mini LEDs, wireless headphones, mobile phones or watch motherboards, etc.

相較於現有技術,本申請提供的具有電磁遮罩結構的封裝模組100具有以下優勢:Compared with the prior art, the packaging module 100 with an electromagnetic shield structure provided by the present application has the following advantages:

(1)通過在所述電子元件50四周設置所述電磁遮罩殼70,並且所述電磁遮罩殼70電性連接所述接地墊311實現接地,所述電磁遮罩殼70、信號線路301以及所述連接線路層31連接形成全方位包覆所述電子元件50的電磁遮罩結構,可實現最大程度的信號遮罩,增加抗信號干擾的可靠性。(1) By arranging the electromagnetic shielding shell 70 around the electronic component 50, and the electromagnetic shielding shell 70 is electrically connected to the grounding pad 311 to achieve grounding, the electromagnetic shielding shell 70, the signal line 301 and the connecting line layer 31 are connected to form an electromagnetic shielding structure that fully covers the electronic component 50, thereby achieving maximum signal shielding and increasing the reliability of anti-signal interference.

(2)通過將連接線路層31內埋於所述絕緣層202,可使得所述接地墊311和所述連接墊312的線寬以及間距最小化,最小可達2μm,能夠實現與具有密集引腳502的電子元件50實現邦定,有利於高密度封裝,且不存在銅離子遷移的問題。(2) By burying the connection line layer 31 in the insulating layer 202, the line width and spacing between the ground pad 311 and the connection pad 312 can be minimized to a minimum of 2 μm, which can achieve bonding with the electronic component 50 with dense pins 502, which is beneficial to high-density packaging and does not cause the problem of copper ion migration.

(3)通過將所述連接線路層31內埋於所述絕緣層202,並在表面設置所述膠體60,使得其四周均有保護,可最大程度實現高的剝離強度,保證封裝可靠性。(3) By burying the connection circuit layer 31 in the insulating layer 202 and providing the colloid 60 on the surface, the connection circuit layer 31 is protected on all sides, and the peeling strength can be maximized to ensure the packaging reliability.

(4)通過將所述膠體60設於所述第二開口302內,且所述膠體60背離所述絕緣層202的表面不高於所述外側線路層30背離所述絕緣層202的表面,保證了封裝最小尺寸。(4) By placing the colloid 60 in the second opening 302 and ensuring that the surface of the colloid 60 facing away from the insulating layer 202 is not higher than the surface of the outer circuit layer 30 facing away from the insulating layer 202, the minimum package size is ensured.

(5)所述電磁遮罩殼70與所述電子元件50之間僅保留所述塑封層51,可實現最小型化遮罩設計,有利於電子產品的輕薄化和小型化。(5) Only the plastic packaging layer 51 is retained between the electromagnetic shield shell 70 and the electronic component 50, so as to realize the most miniaturized shield design, which is beneficial to the lightness, thinness and miniaturization of electronic products.

(6)通過將所述電子元件50的所述引腳502收容於所述第二開口302,所述本體501突出於所述外側線路層30背離所述絕緣層202的表面,使得所述封裝模組100的結構設計靈活,良率高,適用於大部分產品設計,能夠實現普遍應用。(6) By accommodating the pin 502 of the electronic component 50 in the second opening 302, the main body 501 protrudes from the surface of the outer circuit layer 30 away from the insulating layer 202, so that the structural design of the packaging module 100 is flexible, the yield is high, and it is suitable for most product designs and can be widely used.

以上所述,僅是本申請的較佳實施方式而已,並非對本申請任何形式上的限制,雖然本申請已是較佳實施方式揭露如上,並非用以限定本申請,任何熟悉本專業的技術人員,在不脫離本申請技術方案範圍內,當可利用上述揭示的技術內容做出些許更動或修飾為等同變化的等效實施方式,但凡是未脫離本申請技術方案內容,依據本申請的技術實質對以上實施方式所做的任何簡單修改、等同變化與修飾,均仍屬於本申請技術方案的範圍內。The above is only the best implementation method of this application and is not any form of limitation on this application. Although this application has been disclosed as the best implementation method as above, it is not used to limit this application. Any technical personnel familiar with this profession can make some changes or modifications to the equivalent implementation methods of equivalent changes by using the technical contents disclosed above without departing from the scope of the technical solution of this application. However, any simple modification, equivalent change and modification made to the above implementation methods based on the technical essence of this application without departing from the content of the technical solution of this application are still within the scope of the technical solution of this application.

100:封裝模組 10:線路基板 101:基材層 102:內側線路層 103:導通體 10’:覆銅基板 102’:內側銅箔層 11:通孔 12:第一金屬層 13:第一感光圖樣層 131:第一開口 20:覆銅板 201:膠粘層 202:絕緣層 203:外側銅箔層 21:載板 211:盲孔 30’:第二金屬層 30:外側線路層 301:信號線路 302:第二開口 3021:側壁 31:連接線路層 311:接地墊 312:連接墊 32:安裝槽 33:焊料 40:第二感光圖樣層 401:第三開口 50:電子元件 501:本體 502:引腳 51:塑封層 60:膠體 70:電磁遮罩殼 100: Package module 10: Circuit substrate 101: Base material layer 102: Inner circuit layer 103: Conductor 10’: Copper-clad substrate 102’: Inner copper foil layer 11: Through hole 12: First metal layer 13: First photosensitive pattern layer 131: First opening 20: Copper-clad substrate 201: Adhesive layer 202: Insulation layer 203: Outer copper foil layer 21: Carrier 211: Blind hole 30’: Second metal layer 30: Outer circuit layer 301: Signal line 302: Second opening 3021: Side wall 31: Connection circuit layer 311: Ground pad 312: Connection pad 32: Mounting slot 33: Solder 40: Second photosensitive pattern layer 401: Third opening 50: Electronic components 501: Main body 502: Pins 51: Plastic layer 60: Colloid 70: Electromagnetic shield shell

圖1是本申請一實施方式提供的覆銅基板的剖視示意圖。 圖2是於圖1所示之覆銅基板開設通孔後的剖視示意圖。 圖3是於圖2所示之覆銅基板兩側設置第一金屬層後的剖視示意圖。 圖4是於圖3所示之第一金屬層上設置第一感光圖樣層後的剖視示意圖。 圖5是將圖4所示之第一金屬層和內側銅箔層蝕刻形成內側線路層後獲得的線路基板的剖視示意圖。 圖6是於圖5所示之線路基板兩側設置覆銅板後的剖視示意圖。 圖7是於圖6所示之覆銅板開設多個第二盲孔的剖視示意圖。 圖8是於圖7所示之覆銅板一側形成第二金屬層後的剖視示意圖。 圖9是於圖8所示之第二金屬層上設置第二感光圖樣層後的剖視示意圖。 圖10是將圖9所示之第二金屬層和外側銅箔層蝕刻形成外側線路層後的剖視示意圖。 圖11是於圖10所示之連接線路層上設置焊料後的剖視示意圖。 圖12是於圖11所示之第二開口中設置電子元件後的剖面示意圖。 圖13是圖12所示之接地墊和連接墊的俯視圖。 圖14是於圖12所述之開槽中設置膠體後的剖面示意圖。 圖15是於圖14所述之電子元件表面設置電磁遮罩殼後的剖面示意圖。 FIG1 is a schematic cross-sectional view of a copper-clad substrate provided in an embodiment of the present application. FIG2 is a schematic cross-sectional view after a through hole is opened in the copper-clad substrate shown in FIG1. FIG3 is a schematic cross-sectional view after a first metal layer is set on both sides of the copper-clad substrate shown in FIG2. FIG4 is a schematic cross-sectional view after a first photosensitive pattern layer is set on the first metal layer shown in FIG3. FIG5 is a schematic cross-sectional view of a circuit substrate obtained after etching the first metal layer shown in FIG4 and the inner copper foil layer to form an inner circuit layer. FIG6 is a schematic cross-sectional view after copper-clad substrates are set on both sides of the circuit substrate shown in FIG5. FIG7 is a schematic cross-sectional view of a plurality of second blind holes opened in the copper-clad substrate shown in FIG6. FIG8 is a schematic cross-sectional view after forming a second metal layer on one side of the copper-clad plate shown in FIG7. FIG9 is a schematic cross-sectional view after setting a second photosensitive pattern layer on the second metal layer shown in FIG8. FIG10 is a schematic cross-sectional view after etching the second metal layer shown in FIG9 and the outer copper foil layer to form an outer circuit layer. FIG11 is a schematic cross-sectional view after setting solder on the connecting circuit layer shown in FIG10. FIG12 is a schematic cross-sectional view after setting an electronic component in the second opening shown in FIG11. FIG13 is a top view of the ground pad and the connecting pad shown in FIG12. FIG14 is a schematic cross-sectional view after setting a colloid in the groove described in FIG12. FIG15 is a schematic cross-sectional view of the electronic component shown in FIG14 after an electromagnetic shielding shell is installed on its surface.

100:封裝模組 100:Packaging module

10:線路基板 10: Circuit board

101:基材層 101: Base material layer

102:內側線路層 102: Inner wiring layer

103:導通體 103: Conductor

201:膠粘層 201: Adhesive layer

202:絕緣層 202: Insulation layer

30:外側線路層 30: External circuit layer

301:信號線路 301:Signal line

302:第二開口 302: Second opening

31:連接線路層 31: Connection circuit layer

33:焊料 33: Solder

50:電子元件 50: Electronic components

501:本體 501:Entity

502:引腳 502: Pin

51:塑封層 51: Plastic sealing layer

60:膠體 60:Colloid

70:電磁遮罩殼 70: Electromagnetic shielding shell

Claims (10)

一種具有電磁遮罩結構的封裝模組,其改良在於,包括線路基板、膠粘層、絕緣層、連接線路層、電子元件、外側線路層以及電磁遮罩殼; 所述膠粘層設於所述線路基板,所述絕緣層設於所述膠粘層,所述連接線層路埋設於所述絕緣層,所述外側線路層設於所述絕緣層,所述電子元件連接所述連接線路層,所述電磁遮罩殼蓋設於所述電子元件; 所述外側線路層包括信號線路,所述電磁遮罩殼電性連接所述信號線路,所述連接線路層包括間隔設置的接地墊,所述接地墊電性連接所述信號線路,所述電磁遮罩殼、所述信號線路和所述連接線路層依次連接以形成包圍所述電子元件的電磁遮罩結構。 A packaging module with an electromagnetic shielding structure is improved in that it includes a circuit substrate, an adhesive layer, an insulating layer, a connecting circuit layer, an electronic component, an external circuit layer, and an electromagnetic shielding shell; the adhesive layer is arranged on the circuit substrate, the insulating layer is arranged on the adhesive layer, the connecting circuit layer is buried in the insulating layer, the external circuit layer is arranged on the insulating layer, the electronic component is connected to the connecting circuit layer, and the electromagnetic shielding shell is arranged on the electronic component; The outer circuit layer includes a signal circuit, the electromagnetic shield shell is electrically connected to the signal circuit, the connection circuit layer includes spaced ground pads, the ground pads are electrically connected to the signal circuit, and the electromagnetic shield shell, the signal circuit and the connection circuit layer are sequentially connected to form an electromagnetic shield structure surrounding the electronic component. 如請求項1所述之封裝模組,其中,所述電子元件包括本體和電性連接於所述本體的引腳,所述連接線路層還包括設於所述接地墊之間的連接墊,所述引腳連接於所述接地墊與所述連接墊; 所述電子元件表面設有一塑封層,所述電磁遮罩殼包覆所述塑封層。 The packaging module as described in claim 1, wherein the electronic component includes a body and pins electrically connected to the body, the connection circuit layer further includes a connection pad disposed between the ground pads, and the pins are connected to the ground pad and the connection pad; A plastic sealing layer is disposed on the surface of the electronic component, and the electromagnetic shielding shell covers the plastic sealing layer. 如請求項2所述之封裝模組,其中,所述外側線路層具有一開口,所述連接線路層和部分所述絕緣層由所述開口露出,所述引腳收容於所述開口,所述本體突出於所述外側線路層背離所述絕緣層的表面。A packaging module as described in claim 2, wherein the external circuit layer has an opening, the connecting circuit layer and a portion of the insulating layer are exposed from the opening, the pins are accommodated in the opening, and the body protrudes from the surface of the external circuit layer away from the insulating layer. 如請求項3所述之封裝模組,其中,所述封裝模組還包括膠體,所述膠體設於所述本體和所述連接線路層之間,所述膠體包覆所述引腳,所述膠體背離所述絕緣層的表面不高於所述外側線路層背離所述絕緣層的表面。A packaging module as described in claim 3, wherein the packaging module further includes a gel, wherein the gel is disposed between the main body and the connecting circuit layer, the gel covers the pins, and the surface of the gel facing away from the insulating layer is not higher than the surface of the outer circuit layer facing away from the insulating layer. 如請求項1所述之封裝模組,其中,所述連接線路層背離所述絕緣層的表面設有焊料,所述焊料連接所述電子元件和所述連接線路。A packaging module as described in claim 1, wherein a surface of the connecting circuit layer facing away from the insulating layer is provided with solder, and the solder connects the electronic component and the connecting circuit. 一種具有電磁遮罩結構的封裝模組的製作方法,其改良在於,包括以下步驟: 提供一載板,所述載板包括依次疊設的線路基板、膠粘層、絕緣層和外側銅箔層; 於所述載板開設多個間隔設置的盲孔,所述盲孔貫穿所述外側銅箔層和部分所述絕緣層; 於所述外側銅箔層背離所述絕緣層一側形成金屬層,部分所述金屬層填充入所述盲孔以形成連接線路層,所述連接線路層包括間隔設置的接地墊; 蝕刻所述金屬層和外側銅箔層形成外側線路層,所述外側線路層包括信號線路,所述信號線路電性連接所述接地墊,所述外側線路層具有一開口,所述連接電路層由所述開口露出; 於所述電子元件週邊設置電磁遮罩殼,所述電磁遮罩殼電性連接所述信號線路,所述電磁遮罩殼、信號線路與所述連接線路層形成包覆所述電子元件的電磁遮罩結構。 A method for manufacturing a package module with an electromagnetic shield structure, the improvement of which is that it includes the following steps: Providing a carrier board, the carrier board including a circuit substrate, an adhesive layer, an insulating layer and an outer copper foil layer stacked in sequence; Opening a plurality of blind holes arranged at intervals on the carrier board, the blind holes penetrating the outer copper foil layer and part of the insulating layer; Forming a metal layer on the side of the outer copper foil layer away from the insulating layer, part of the metal layer is filled into the blind hole to form a connecting circuit layer, the connecting circuit layer including ground pads arranged at intervals; Etching the metal layer and the outer copper foil layer to form an outer circuit layer, the outer circuit layer includes a signal line, the signal line is electrically connected to the ground pad, the outer circuit layer has an opening, and the connection circuit layer is exposed from the opening; An electromagnetic shielding shell is arranged around the electronic component, the electromagnetic shielding shell is electrically connected to the signal line, and the electromagnetic shielding shell, the signal line and the connection circuit layer form an electromagnetic shielding structure covering the electronic component. 如請求項6所述之封裝模組的製作方法,其中,所述電子元件包括本體和與所述本體電性連接的多個引腳,所述連接電路層還包括設於所述接地墊之間的連接墊; 步驟“將電子元件焊接於所述連接線路層”包括: 於所述連接線路層背離所述絕緣層的表面設置焊料,所述多個引腳通過所述焊料焊接於所述接地墊和所述連接墊。 The method for manufacturing a package module as described in claim 6, wherein the electronic component includes a body and a plurality of pins electrically connected to the body, and the connection circuit layer further includes a connection pad disposed between the ground pads; The step of "welding the electronic component to the connection circuit layer" includes: Solder is provided on the surface of the connection circuit layer away from the insulation layer, and the plurality of pins are welded to the ground pad and the connection pad through the solder. 如請求項7所述之封裝模組的製作方法,其中,步驟“蝕刻所述金屬層和外側銅箔層形成外側線路層”後,還包括: 蝕刻所述連接線路層,以使得所述連接線路層背離所述絕緣層的表面與所述絕緣層朝向所述外側線路層的表面錯開以形成安裝槽;以及 於所述安裝槽內設置所述焊料。 The method for manufacturing a package module as described in claim 7, wherein after the step of "etching the metal layer and the outer copper foil layer to form an outer circuit layer", it further includes: etching the connecting circuit layer so that the surface of the connecting circuit layer facing away from the insulating layer and the surface of the insulating layer facing the outer circuit layer are offset to form a mounting groove; and placing the solder in the mounting groove. 如請求項7所述之封裝模組的製作方法,其中,所述引腳收容於所述開口,所述本體突出於所述外側線路層背離所述絕緣層的表面; 步驟“將電子元件焊接於所述連接線路層”後,還包括: 於所述本體和所述連接線路層之間設置膠體,所述膠體包覆所述引腳,所述膠體背離所述絕緣層的表面不高於所述外側線路層背離所述絕緣層的表面。 The method for manufacturing a package module as described in claim 7, wherein the pin is received in the opening, and the body protrudes from the surface of the outer circuit layer away from the insulating layer; After the step of "welding the electronic component to the connecting circuit layer", it further comprises: Placing a gel between the body and the connecting circuit layer, the gel covering the pin, and the surface of the gel away from the insulating layer is not higher than the surface of the outer circuit layer away from the insulating layer. 如請求項6所述之封裝模組的製作方法,其中,所述電子元件表面設有一塑封層; 步驟“於所述電子元件周圍設置電磁遮罩殼”包括: 於所述塑封層濺射金屬材料形成所述電磁遮罩殼。 The method for manufacturing a packaging module as described in claim 6, wherein a plastic sealing layer is provided on the surface of the electronic component; The step of "providing an electromagnetic shielding shell around the electronic component" includes: Sputtering a metal material on the plastic sealing layer to form the electromagnetic shielding shell.
TW111139072A 2022-09-13 2022-10-14 Package module with electromagnetic shielding structure and manufacturing method thereof TWI830436B (en)

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