TW202403649A - 資訊處理方法、資訊處理系統及電腦程式產品 - Google Patents

資訊處理方法、資訊處理系統及電腦程式產品 Download PDF

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Publication number
TW202403649A
TW202403649A TW112125048A TW112125048A TW202403649A TW 202403649 A TW202403649 A TW 202403649A TW 112125048 A TW112125048 A TW 112125048A TW 112125048 A TW112125048 A TW 112125048A TW 202403649 A TW202403649 A TW 202403649A
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Taiwan
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data
mentioned
integrated
representation
intermediate representation
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TW112125048A
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English (en)
Chinese (zh)
Inventor
田村淳
守屋剛
片岡勇樹
今倉暁
櫻井鉄也
二村保徳
叶秀彩
Original Assignee
日商東京威力科創股份有限公司
國立大學法人筑波大學
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Application filed by 日商東京威力科創股份有限公司, 國立大學法人筑波大學 filed Critical 日商東京威力科創股份有限公司
Publication of TW202403649A publication Critical patent/TW202403649A/zh

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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41885—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by modeling, simulation of the manufacturing system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41845—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by system universality, reconfigurability, modularity
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
    • G06Q50/04—Manufacturing
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Automation & Control Theory (AREA)
  • Business, Economics & Management (AREA)
  • Software Systems (AREA)
  • Marketing (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Health & Medical Sciences (AREA)
  • Primary Health Care (AREA)
  • Strategic Management (AREA)
  • Tourism & Hospitality (AREA)
  • General Business, Economics & Management (AREA)
  • Economics (AREA)
  • Artificial Intelligence (AREA)
  • Human Resources & Organizations (AREA)
  • Data Mining & Analysis (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Health & Medical Sciences (AREA)
  • Computing Systems (AREA)
  • Mathematical Physics (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
TW112125048A 2022-07-14 2023-07-05 資訊處理方法、資訊處理系統及電腦程式產品 TW202403649A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-113348 2022-07-14
JP2022113348 2022-07-14

Publications (1)

Publication Number Publication Date
TW202403649A true TW202403649A (zh) 2024-01-16

Family

ID=89536450

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112125048A TW202403649A (zh) 2022-07-14 2023-07-05 資訊處理方法、資訊處理系統及電腦程式產品

Country Status (6)

Country Link
US (1) US20250147498A1 (https=)
JP (1) JPWO2024014251A1 (https=)
KR (1) KR20250040000A (https=)
CN (1) CN119631092A (https=)
TW (1) TW202403649A (https=)
WO (1) WO2024014251A1 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4994203B2 (ja) * 2007-11-29 2012-08-08 株式会社リコー 画像処理装置
JP2009295658A (ja) * 2008-06-03 2009-12-17 Renesas Technology Corp 半導体製造装置の校正方法、ならびに半導体装置の製造システムおよび製造方法
JP5433522B2 (ja) * 2010-07-28 2014-03-05 株式会社日立ハイテクノロジーズ 電子顕微鏡を用いたパターン寸法計測方法、パターン寸法計測システム並びに電子顕微鏡装置の経時変化のモニタ方法
JP7137943B2 (ja) 2018-03-20 2022-09-15 株式会社日立ハイテク 探索装置、探索方法及びプラズマ処理装置
CN111007379A (zh) * 2019-12-27 2020-04-14 电子科技大学 一种自校正的igbt健康监测方法

Also Published As

Publication number Publication date
KR20250040000A (ko) 2025-03-21
JPWO2024014251A1 (https=) 2024-01-18
WO2024014251A1 (ja) 2024-01-18
US20250147498A1 (en) 2025-05-08
CN119631092A (zh) 2025-03-14

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