JPWO2024014251A1 - - Google Patents

Info

Publication number
JPWO2024014251A1
JPWO2024014251A1 JP2024533609A JP2024533609A JPWO2024014251A1 JP WO2024014251 A1 JPWO2024014251 A1 JP WO2024014251A1 JP 2024533609 A JP2024533609 A JP 2024533609A JP 2024533609 A JP2024533609 A JP 2024533609A JP WO2024014251 A1 JPWO2024014251 A1 JP WO2024014251A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024533609A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2024014251A1 publication Critical patent/JPWO2024014251A1/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06NCOMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00Machine learning
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Program-control systems
    • G05B19/02Program-control systems electric
    • G05B19/418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41885Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by modeling, simulation of the manufacturing system
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Program-control systems
    • G05B19/02Program-control systems electric
    • G05B19/418Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41845Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by system universality, reconfigurability, modularity
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06QINFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
    • G06Q50/04Manufacturing
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/45Nc applications
    • G05B2219/45031Manufacturing semiconductor wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Automation & Control Theory (AREA)
  • Business, Economics & Management (AREA)
  • Software Systems (AREA)
  • Marketing (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Health & Medical Sciences (AREA)
  • Primary Health Care (AREA)
  • Strategic Management (AREA)
  • Tourism & Hospitality (AREA)
  • General Business, Economics & Management (AREA)
  • Economics (AREA)
  • Artificial Intelligence (AREA)
  • Human Resources & Organizations (AREA)
  • Data Mining & Analysis (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Health & Medical Sciences (AREA)
  • Computing Systems (AREA)
  • Mathematical Physics (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
JP2024533609A 2022-07-14 2023-06-22 Pending JPWO2024014251A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022113348 2022-07-14
PCT/JP2023/023072 WO2024014251A1 (ja) 2022-07-14 2023-06-22 情報処理方法、情報処理システム及びコンピュータプログラム

Publications (1)

Publication Number Publication Date
JPWO2024014251A1 true JPWO2024014251A1 (https=) 2024-01-18

Family

ID=89536450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024533609A Pending JPWO2024014251A1 (https=) 2022-07-14 2023-06-22

Country Status (6)

Country Link
US (1) US20250147498A1 (https=)
JP (1) JPWO2024014251A1 (https=)
KR (1) KR20250040000A (https=)
CN (1) CN119631092A (https=)
TW (1) TW202403649A (https=)
WO (1) WO2024014251A1 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4994203B2 (ja) * 2007-11-29 2012-08-08 株式会社リコー 画像処理装置
JP2009295658A (ja) * 2008-06-03 2009-12-17 Renesas Technology Corp 半導体製造装置の校正方法、ならびに半導体装置の製造システムおよび製造方法
JP5433522B2 (ja) * 2010-07-28 2014-03-05 株式会社日立ハイテクノロジーズ 電子顕微鏡を用いたパターン寸法計測方法、パターン寸法計測システム並びに電子顕微鏡装置の経時変化のモニタ方法
JP7137943B2 (ja) 2018-03-20 2022-09-15 株式会社日立ハイテク 探索装置、探索方法及びプラズマ処理装置
CN111007379A (zh) * 2019-12-27 2020-04-14 电子科技大学 一种自校正的igbt健康监测方法

Also Published As

Publication number Publication date
KR20250040000A (ko) 2025-03-21
WO2024014251A1 (ja) 2024-01-18
US20250147498A1 (en) 2025-05-08
TW202403649A (zh) 2024-01-16
CN119631092A (zh) 2025-03-14

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Legal Events

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