KR20250040000A - 정보 처리 방법, 정보 처리 시스템 및 기록 매체 - Google Patents

정보 처리 방법, 정보 처리 시스템 및 기록 매체 Download PDF

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Publication number
KR20250040000A
KR20250040000A KR1020257004004A KR20257004004A KR20250040000A KR 20250040000 A KR20250040000 A KR 20250040000A KR 1020257004004 A KR1020257004004 A KR 1020257004004A KR 20257004004 A KR20257004004 A KR 20257004004A KR 20250040000 A KR20250040000 A KR 20250040000A
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KR
South Korea
Prior art keywords
data
train
integrated
information processing
expression
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Pending
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KR1020257004004A
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English (en)
Korean (ko)
Inventor
준 다무라
츠요시 모리야
유키 가타오카
아키라 이마쿠라
데츠야 사쿠라이
야스노리 후타무라
슈차이 예
Original Assignee
도쿄엘렉트론가부시키가이샤
고쿠리쯔 다이가쿠 호징 츠쿠바 다이가쿠
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Application filed by 도쿄엘렉트론가부시키가이샤, 고쿠리쯔 다이가쿠 호징 츠쿠바 다이가쿠 filed Critical 도쿄엘렉트론가부시키가이샤
Publication of KR20250040000A publication Critical patent/KR20250040000A/ko
Pending legal-status Critical Current

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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41885—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by modeling, simulation of the manufacturing system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41845—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by system universality, reconfigurability, modularity
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
    • G06Q50/04—Manufacturing
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Automation & Control Theory (AREA)
  • Business, Economics & Management (AREA)
  • Software Systems (AREA)
  • Marketing (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Health & Medical Sciences (AREA)
  • Primary Health Care (AREA)
  • Strategic Management (AREA)
  • Tourism & Hospitality (AREA)
  • General Business, Economics & Management (AREA)
  • Economics (AREA)
  • Artificial Intelligence (AREA)
  • Human Resources & Organizations (AREA)
  • Data Mining & Analysis (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Health & Medical Sciences (AREA)
  • Computing Systems (AREA)
  • Mathematical Physics (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
KR1020257004004A 2022-07-14 2023-06-22 정보 처리 방법, 정보 처리 시스템 및 기록 매체 Pending KR20250040000A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2022-113348 2022-07-14
JP2022113348 2022-07-14
PCT/JP2023/023072 WO2024014251A1 (ja) 2022-07-14 2023-06-22 情報処理方法、情報処理システム及びコンピュータプログラム

Publications (1)

Publication Number Publication Date
KR20250040000A true KR20250040000A (ko) 2025-03-21

Family

ID=89536450

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020257004004A Pending KR20250040000A (ko) 2022-07-14 2023-06-22 정보 처리 방법, 정보 처리 시스템 및 기록 매체

Country Status (6)

Country Link
US (1) US20250147498A1 (https=)
JP (1) JPWO2024014251A1 (https=)
KR (1) KR20250040000A (https=)
CN (1) CN119631092A (https=)
TW (1) TW202403649A (https=)
WO (1) WO2024014251A1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019165123A (ja) 2018-03-20 2019-09-26 株式会社日立ハイテクノロジーズ 探索装置、探索方法及びプラズマ処理装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4994203B2 (ja) * 2007-11-29 2012-08-08 株式会社リコー 画像処理装置
JP2009295658A (ja) * 2008-06-03 2009-12-17 Renesas Technology Corp 半導体製造装置の校正方法、ならびに半導体装置の製造システムおよび製造方法
JP5433522B2 (ja) * 2010-07-28 2014-03-05 株式会社日立ハイテクノロジーズ 電子顕微鏡を用いたパターン寸法計測方法、パターン寸法計測システム並びに電子顕微鏡装置の経時変化のモニタ方法
CN111007379A (zh) * 2019-12-27 2020-04-14 电子科技大学 一种自校正的igbt健康监测方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019165123A (ja) 2018-03-20 2019-09-26 株式会社日立ハイテクノロジーズ 探索装置、探索方法及びプラズマ処理装置

Also Published As

Publication number Publication date
JPWO2024014251A1 (https=) 2024-01-18
WO2024014251A1 (ja) 2024-01-18
US20250147498A1 (en) 2025-05-08
TW202403649A (zh) 2024-01-16
CN119631092A (zh) 2025-03-14

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PA0105 International application

Patent event date: 20250207

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application