CN119631092A - 信息处理方法、信息处理系统以及计算机程序 - Google Patents

信息处理方法、信息处理系统以及计算机程序 Download PDF

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Publication number
CN119631092A
CN119631092A CN202380052362.2A CN202380052362A CN119631092A CN 119631092 A CN119631092 A CN 119631092A CN 202380052362 A CN202380052362 A CN 202380052362A CN 119631092 A CN119631092 A CN 119631092A
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China
Prior art keywords
data
representation
mechanical error
intermediate representation
integrated
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Pending
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CN202380052362.2A
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English (en)
Chinese (zh)
Inventor
田村淳
守屋刚
片冈勇树
今仓晓
樱井铁也
二村保德
叶秀彩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
University of Tsukuba NUC
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Tokyo Electron Ltd
University of Tsukuba NUC
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Application filed by Tokyo Electron Ltd, University of Tsukuba NUC filed Critical Tokyo Electron Ltd
Publication of CN119631092A publication Critical patent/CN119631092A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41885—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by modeling, simulation of the manufacturing system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41845—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by system universality, reconfigurability, modularity
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
    • G06Q50/04—Manufacturing
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Automation & Control Theory (AREA)
  • Business, Economics & Management (AREA)
  • Software Systems (AREA)
  • Marketing (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Health & Medical Sciences (AREA)
  • Primary Health Care (AREA)
  • Strategic Management (AREA)
  • Tourism & Hospitality (AREA)
  • General Business, Economics & Management (AREA)
  • Economics (AREA)
  • Artificial Intelligence (AREA)
  • Human Resources & Organizations (AREA)
  • Data Mining & Analysis (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Health & Medical Sciences (AREA)
  • Computing Systems (AREA)
  • Mathematical Physics (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
CN202380052362.2A 2022-07-14 2023-06-22 信息处理方法、信息处理系统以及计算机程序 Pending CN119631092A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022-113348 2022-07-14
JP2022113348 2022-07-14
PCT/JP2023/023072 WO2024014251A1 (ja) 2022-07-14 2023-06-22 情報処理方法、情報処理システム及びコンピュータプログラム

Publications (1)

Publication Number Publication Date
CN119631092A true CN119631092A (zh) 2025-03-14

Family

ID=89536450

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380052362.2A Pending CN119631092A (zh) 2022-07-14 2023-06-22 信息处理方法、信息处理系统以及计算机程序

Country Status (6)

Country Link
US (1) US20250147498A1 (https=)
JP (1) JPWO2024014251A1 (https=)
KR (1) KR20250040000A (https=)
CN (1) CN119631092A (https=)
TW (1) TW202403649A (https=)
WO (1) WO2024014251A1 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4994203B2 (ja) * 2007-11-29 2012-08-08 株式会社リコー 画像処理装置
JP2009295658A (ja) * 2008-06-03 2009-12-17 Renesas Technology Corp 半導体製造装置の校正方法、ならびに半導体装置の製造システムおよび製造方法
JP5433522B2 (ja) * 2010-07-28 2014-03-05 株式会社日立ハイテクノロジーズ 電子顕微鏡を用いたパターン寸法計測方法、パターン寸法計測システム並びに電子顕微鏡装置の経時変化のモニタ方法
JP7137943B2 (ja) 2018-03-20 2022-09-15 株式会社日立ハイテク 探索装置、探索方法及びプラズマ処理装置
CN111007379A (zh) * 2019-12-27 2020-04-14 电子科技大学 一种自校正的igbt健康监测方法

Also Published As

Publication number Publication date
KR20250040000A (ko) 2025-03-21
JPWO2024014251A1 (https=) 2024-01-18
WO2024014251A1 (ja) 2024-01-18
US20250147498A1 (en) 2025-05-08
TW202403649A (zh) 2024-01-16

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