TW202319359A - Sliding unit and a scribing head capable of improving the processing accuracy of scribing processing - Google Patents

Abstract

The present invention provides a sliding unit and a scribing head capable of improving the processing accuracy of scribing processing. A sliding unit 100 includes a slider 200, a holder joint 300, and an angle setting unit 500. The holder joint 300 includes: a bearing part connected to the slider 200 and a rotating part 320 configured to be rotatable relative to the bearing part. The angle setting unit 500 is configured to be able to set the rotation angle of the rotating part 320 relative to the slider 200.

Description

Slide unit and scoring head

The present invention relates to a slide unit incorporated into a scribe head, and a scribe head provided with the slide unit.

The scribing device is used for scribing processing of brittle material substrates and other workpieces. The scoring device includes a scoring head. The scoring head includes a slide unit. The sliding unit includes a slider, a holder joint and a holder unit.

The retainer joint includes a bearing part and a winding part. The bearing part is connected to the slider. The winding part is connected to the bearing part in a manner capable of rotating relative to the slider. The holder unit includes a holder and a scoring wheel. The holder is connected to the winding part. The scoring wheel is supported by the holder.

The scribing device is used for scribing processing of workpieces. In the scribing process, the position of the scribing head is set in such a way that the scribing wheel contacts the workpiece. The marking head scans in a given direction. The scoring cutter wheel moves on the workpiece to form a scoring line on the workpiece. Patent Document 1 describes an example of a conventional scribing device. Prior art literature

[Patent Document 1] Japanese Patent No. 4484303

The problem to be solved by the invention

Through the stabilization of the rotation angle of the scoring cutter wheel relative to the slider in the scoring process, the machining accuracy in the scoring process can be improved. means to solve problems

The sliding unit of the present invention has a slider; a retainer joint, which includes a bearing portion connected to the slider, and a winding portion that can rotate relative to the bearing portion; and an angle setting portion that can set the winding portion relative to the slider. The rotation angle.

According to the above-described sliding unit, for example, the following effects can be obtained. Since the winding angle of the winding part can be set by the angle setting part, the winding angle of the winding part in the marking process is more stable. The rotation angle of the holder connected to the rotation part and the rotation angle of the scoring wheel supported by the holder are also more stable. Therefore, the improvement of the processing precision in a scribing process can be expected.

In one example of the sliding unit, the angle setting part includes a first pressing part that presses the winding part so that the winding part rotates in the first winding direction, and presses the winding part so that the winding part is aligned with the first winding direction. The second pressing portion that is wound in the second winding direction in the opposite direction.

According to the above-described sliding unit, for example, the following effects can be obtained. The workability related to the operation of adjusting the winding angle of the winding part is improved.

In one example of the slide unit, one of the first pressing portion and the second pressing portion includes an elastic element.

According to the above-described sliding unit, for example, the following effects can be obtained. The workability related to the operation of adjusting the winding angle of the winding part is improved.

In one example of the slide unit, the other of the first pressing part and the second pressing part includes a screw element.

According to the above-described sliding unit, for example, the following effects can be obtained. The workability related to the operation of adjusting the winding angle of the winding part is improved.

In one example of the sliding unit, the first pressing part and the second pressing part are arranged so that the winding part is sandwiched between the first pressing part and the second pressing part.

According to the above-described sliding unit, for example, the following effects can be obtained. Make the winding angle of the winding part stable.

In one example of the slide unit, the angle setting part includes a first pressing part arrangement part in which the first pressing part is arranged, and a second pressing part arrangement part in which the second pressing part is arranged.

According to the above-described sliding unit, for example, the following effects can be obtained. The positions of the first pressing part and the second pressing part are stabilized.

In one example of the sliding unit, the winding part includes a holder connection part that can connect the holder unit, and a winding shaft connected to the bearing part; the first pressing part and the second pressing part press the holder connection department.

According to the above-described sliding unit, for example, the following effects can be obtained. The structure of the bearing part is simplified.

In one example of the sliding unit, the angle setting part includes a fixing part capable of fixing the winding angle of the winding part.

According to the above-described sliding unit, for example, the following effects can be obtained. The winding angle of the winding part is stable.

In one example of the sliding unit, the fixing part can be attached to and detached from the slider.

According to the above-described sliding unit, for example, the following effects can be obtained. The workability related to the operation of adjusting the winding angle of the winding part is improved.

In one example of the sliding unit, the slider includes a slider body connected to the bearing portion, and the angle setting portion is provided at the bottom of the slider body.

According to the above-described sliding unit, for example, the following effects can be obtained. The workability related to the operation of adjusting the winding angle of the winding part is improved.

The marking head of the present invention has: a slide unit, a slider, a holder joint including a bearing portion connected to the slider and a winding portion that can rotate relative to the bearing portion, and the winding portion can be set relative to the slider. The angle setting part of the winding angle; the base supports the sliding unit; the guide part connects the sliding unit and the base in such a way that the sliding unit can move relative to the base in the height direction; a unit imparting a load; and a supporting portion supporting the sliding unit and the load adjusting portion.

According to the above-mentioned scribing head, for example, the following effects can be obtained. Since the winding angle of the winding part can be set by the angle setting part, the winding angle of the winding part during the scribing process is stable. The rotation angle of the holder connected to the winding part and the rotation angle of the scoring wheel supported by the holder are also stable. Therefore, improvement in processing accuracy in scribing processing can be expected. Invention effect

According to the slide unit and the scribing head of the present invention, improvement in machining accuracy in scribing can be expected.

(first embodiment) Refer to Figures 1 to 15. The scribing head 10 is incorporated in a scribing processing device for scribing a workpiece. The configuration of the scribing processing device can be selected arbitrarily. The configuration of the scribing processing device is not limited to the illustrated configuration. The scribing processing device includes, for example, a table, a driving device, a scribing head 10 and the like.

As an example of a to-be-processed object, a board|substrate is mentioned, for example. As an example of a substrate, a brittle material substrate is mentioned, for example. Examples of brittle material substrates include glass substrates, ceramic substrates, silicon substrates, compound semiconductor substrates, sapphire substrates, and quartz substrates. Examples of ceramic substrates include low-temperature fired ceramics and high-temperature fired ceramics.

The driving device is configured so that the position of the scribing head 10 relative to the workpiece can be changed arbitrarily. The composition of the driving device can be selected arbitrarily. The configuration of the driving device is not limited to the illustrated configuration. The driving device includes, for example, a planar driving unit and a vertical driving unit. The vertical driving part is connected to the table. The plane driving part is connected to the vertical driving part. The scribing head 10 is connected to the planar drive unit.

The vertical drive includes an actuator. The vertical driving part moves the planar driving part to the height direction of the scribing processing device. The planar drive unit includes an actuator. The planar drive unit moves the scribing head 10 in a predetermined parallel direction.

(marking head) Refer to Fig. 1 ~ Fig. 5. The configuration of the scribing head 10 can be selected arbitrarily. The configuration of the scribing head 10 is not limited to the illustrated configuration. The marking head 10 includes, for example, a base 20 , a guide portion 30 , a support portion 40 , a load adjustment portion 50 , and a slide unit 100 .

In the scribing head 10, for example, a first width direction, a second width direction, a front direction, a rear direction, an upper direction, and a lower direction are defined. The first width direction and the second width direction are opposite directions. The right direction in FIG. 4 and the bottom direction in FIG. 5 correspond to the first width direction of the scribing head 10 . The left direction in FIG. 4 and the upper direction in FIG. 5 correspond to the second width direction of the scribing head 10 . The right direction in FIG. 3 and the right direction in FIG. 5 correspond to the front direction of the scribing head 10 . The left direction in FIG. 3 and the left direction in FIG. 5 correspond to the direction behind the scribing head 10 . The upper direction in FIG. 3 and the upper direction in FIG. 4 correspond to the upper direction of the scribing head 10 . The downward direction in FIG. 3 and the downward direction in FIG. 4 correspond to the downward direction of the scribing head 10 .

The width direction is a generic term for the first width direction and the second width direction. The width direction is parallel to the X axis. The depth direction is a general term for the front direction and the rear direction. The depth direction is parallel to the Y axis. The height direction is a general term for the upward direction and the downward direction. The height direction is parallel to the Z axis. The X-axis and the Y-axis define the first coordinate plane. The X axis and the Z axis define the second coordinate plane. The Y axis and the Z axis define the third coordinate plane.

(base) Refer to Fig. 3 ~ Fig. 5. The base 20 is configured to support the slide unit 100 . The base 20 is, for example, a tie plate. The base 20 includes a first main surface 20A and a second main surface 20B. The first main surface 20A is a flat surface. 20 A of 1st main surfaces face a 1st width direction. The second main surface 20B is a flat surface. The second main surface 20B faces the second width direction. The first main surface 20A and the second main surface 20B correspond to the reference plane of the scribing head 10 .

The planar driving part of the driving device includes a connecting part. The first main surface 20A of the base 20 faces the connecting portion of the planar driving portion. The base 20 is connected to the connecting part of the planar driving part. The form of connection between the base 20 and the planar driving part is, for example, a mechanical connection. For example, the base 20 is connected to the plane driving part by a plurality of bolts. In the state where the base 20 is connected to the planar drive unit, the first main surface 20A and the second main surface 20B are parallel to the third coordinate plane.

The base 20 includes, for example, a first arrangement portion 21 . The first arrangement part 21 is constituted in such a way that the fixed rail 31 of the guide part 30 can be arranged. The first arrangement portion 21 is provided on the second main surface 20B of the chassis 20 . The first arrangement portion 21 includes, for example, a groove 21A. The groove 21A extends in the height direction.

(guide department) Refer to FIG. 4 and FIG. 5 . The guide part 30 connects the sliding unit 100 and the base 20 in such a manner that the sliding unit 100 can move relative to the base 20 in the height direction. The guide part 30 includes, for example, a fixed rail 31 and a movable rail 32 .

The fixed rail 31 includes, for example, a fitting portion 31A. The fitting portion 31A is configured to fit with the fitting portion 32A of the movable rail 32 . The fitting portion 31A includes a groove 31A1. The groove 31A1 extends in the height direction.

The fixing rail 31 is disposed in the groove 21A of the base 20 . The fixed rail 31 is connected to the base 20 by one or a plurality of bolts.

The movable rail 32 includes, for example, a fitting portion 32A. The fitting portion 32A is configured to fit into the fitting portion 31A of the fixed rail 31 . The fitting portion 32A includes a convex portion 32A1. The convex portion 32A1 extends in the height direction. The movable rail 32 is coupled to the fixed rail 31 . The movable rail 32 can move relative to the fixed rail 31 .

(support part) Refer to FIG. 3 and FIG. 4 . The supporting portion 40 is configured to support the actuator 51 of the load adjusting portion 50 and the pressed portion 220 of the slide unit 100 . The supporting part 40 is, for example, a tie block.

The support portion 40 includes, for example, an intermediate portion 41 . The intermediate portion 41 includes, for example, a bolt arrangement portion 41A. The bolt arrangement part 41A is configured so that one or a plurality of bolts 10B1 can be arranged. The bolt arrangement portion 41A includes one or a plurality of holes. The hole penetrates through the middle portion 41 . The central axis of the hole is parallel to the width direction.

The support portion 40 includes, for example, an upper portion 42 . The upper part 42 is positioned upward relative to the middle part 41 . The upper part 42 includes, for example, the first arrangement part 42A.

The first arrangement part 42A is configured so that the actuator 51 of the load adjustment part 50 can be arranged therein. The first arrangement portion 42A includes, for example, a recessed portion 42A1. The concave portion 42A1 opens on the upper surface of the upper portion 42 .

The support portion 40 includes, for example, a lower portion 43 . The lower part 43 is located in the downward direction with respect to the middle part 41 and the upper part 42 . A space is formed between the upper part 42 and the lower part 43 . The lower part 43 includes, for example, a pressed part arrangement part 43A.

The pressed portion arrangement portion 43A is configured such that the pressed portion 220 of the slide unit 100 can be arranged. The pressed portion arrangement portion 43A includes, for example, a slit 43A1. The slit 43A1 penetrates the lower part 43 in the height direction. The slit 43A1 is opened on the second side surface of the lower part 43 . The second side faces the second width direction.

The scribing head 10 includes, for example, a spacer 44 . The spacer 44 includes a bolt arrangement portion. The bolt arrangement part is configured so that one or a plurality of bolts 10B1 can be arranged. The bolt placement portion includes one or a plurality of holes. The hole penetrates through the bolt arrangement part. The central axis of the hole is parallel to the width direction.

The spacer 44 is disposed between the support portion 40 and the base 20 . The spacer 44 is located in the second width direction with respect to the second main surface 20B of the chassis 20 . The support portion 40 is located in the second width direction with respect to the spacer 44 . The supporting portion 40 and the spacer 44 are connected to the base 20 by a plurality of bolts 10B1.

(Load Regulator) Refer to FIG. 3 and FIG. 4 . The load adjustment unit 50 is configured to be able to apply a load to the slide unit 100 . The load adjustment unit 50 applies, for example, a load acting in the downward direction to the slide unit 100 . The load adjustment unit 50 includes, for example, an actuator 51 and a pressing unit 52 .

Examples of the actuator 51 include a cylinder, a solenoid, an electric motor, a servo motor, and a linear actuator. Examples of power cylinders include hydraulic cylinders, pneumatic cylinders, hydraulic cylinders, and electric cylinders.

The actuator 51 includes, for example, a bolt arrangement portion 51A. The bolt arrangement part 51A is configured so that one or a plurality of bolts 10B3 can be arranged. The bolt arrangement portion 51A includes one or a plurality of holes. The central axis of the hole is parallel to the height direction.

The pressing part 52 is connected to the actuator 51 . The pressing part 52 includes, for example, a piston 52A. The front end of the pressing part 52 is in contact with the sliding unit 100 . The pressing portion 52 is configured to be displaceable relative to the actuator 51 in the height direction. The pressing part 52 transmits the force imparted by the actuator 51 to the sliding unit 100 .

The actuator 51 is disposed on the first disposition portion 42A of the upper portion 42 of the support portion 40 . The front end portion of the pressing portion 52 is disposed between the upper portion 42 and the lower portion 43 of the support portion 40 . The actuator 51 is connected to the support portion 40 by a plurality of bolts 10B3.

(sliding unit) Refer to FIG. 2 and FIG. 4 . The configuration of the sliding unit 100 can be selected arbitrarily. The configuration of the sliding unit 100 is not limited to the illustrated configuration. The sliding unit 100 includes, for example, a slider 200 , a holder joint 300 , a holder unit 400 and an angle setting part 500 . The slider 200 supports the holder joint 300 . The holder joint 300 supports the holder unit 400 .

(Holder unit) Refer to FIG. 6 and FIG. 7 . The configuration of the holder unit 400 can be selected arbitrarily. The configuration of the holder unit 400 is not limited to the illustrated configuration. The holder unit 400 is configured so that the holder joint 300 can be attached and detached. The holder unit 400 includes, for example, a holder 410 , a scoring wheel 420 , a pin 430 , and a fall-off prevention part 440 .

The holder 410 includes, for example, a base 411 . The base portion 411 is configured to be disposed on the holder joint 300 . The base 411 includes a slope 411A. The slope 411A is provided on the front face of the base 411 . The inclined surface 411A is inclined rearward as it goes upward.

The holder 410 includes, for example, a support portion 412 . The support portion 412 is located below the base portion 411 . The support portion 412 is configured to support the pin 430 . The support portion 412 includes a first support portion 412A and a second support portion 412B. Each support portion 412A, 412B includes a hole 412C. The hole 412C penetrates the support portion 412 . The central axis of the hole 412C is parallel to the width direction.

The holder 410 includes, for example, an arrangement portion 413 . The arrangement part 413 is configured so that the scoring wheel 420 can be arranged. The placement portion 413 is provided on a portion including the inner side of the first support portion 412A and the inner side of the second support portion 412B.

The placement portion 413 includes, for example, a slit 413A. The slit 413A is formed between the first support portion 412A and the second support portion 412B. The slit 413A opens on the front, rear and bottom of the holder 410 .

The scoring wheel 420 is arranged in the slit 413A. The scoring wheel 420 is, for example, made of a high-hardness material. Examples of high-hardness materials include cemented carbide, polycrystalline diamond, and single-crystalline diamond. Examples of polycrystalline diamond include diamond sintered compact (Poly-Crystalline Diamond) and nano-polycrystalline diamond (Nano-Polycrystalline Diamond).

The scoring wheel 420 includes an arrangement portion 421 and a knife edge 422 . The arrangement part 421 is configured in such a way that the pin 430 can be arranged. The arrangement part 421 includes, for example, a hole 421A. The hole 421A penetrates the disposition part 421 . The central axis of the hole 421A is parallel to the width direction.

The knife edge 422 is formed in such a way that the workpiece can be scored. The knife edge 422 is arranged on the outer periphery of the scoring knife wheel 420 . The knife edge 422 is included in the central plane of the scoring knife wheel 420 . The central plane of the scoring knife wheel 420 is perpendicular to the central axis of the scoring knife wheel 420 .

The pin 430 is configured to support the scoring wheel 420 . The pin 430 is disposed in the hole 412C of the first support portion 412A, the hole 412C of the second support portion 412B, and the hole 421A of the scoring wheel 420 .

The scoring wheel 420 is supported by the pin 430 so as to be rotatable relative to the pin 430 . In a state where a load is applied to the slide unit 100 from the load adjustment unit 50 , the scoring wheel 420 is brought into pressure contact with the workpiece based on the load.

The drop-off preventing portion 440 is provided on the support portion 412 so that the pin 430 does not fall off from the support portion 412 . The anti-falling part 440 includes, for example, a plurality of plugs 441 . The first pin 441 is disposed in the hole 412C of the first support portion 412A. The second pin 441 is disposed in the hole 412C of the second support portion 412B.

(retainer connector) Refer to FIG. 6 and FIG. 9 . The configuration of the holder joint 300 can be selected arbitrarily. The configuration of the holder joint 300 is not limited to the illustrated configuration. The holder joint 300 is configured so that the slider 200 can be attached and detached. The holder joint 300 includes, for example, a bearing portion 310 and a winding portion 320 .

The bearing portion 310 is configured to support the winding portion 320 . The bearing unit 310 includes, for example, one or a plurality of bearings 311 . In the illustrated example, the bearing unit 310 includes a plurality of bearings 311 . The plurality of bearings 311 include, for example, a first bearing 311A and a second bearing 311B.

The bearing part 310 includes, for example, a box body 312 . The box body 312 includes, for example, a cylinder 312A, a flange 312B, and a cover 312C. The first bearing 311A and the second bearing 311B are arranged inside the cylinder 312A. The first bearing 311A and the second bearing 311B are arranged in the height direction. The outer wheels of the respective bearings 311A and 311B are connected to the cylinder 312A.

The flange 312B is provided on the outer peripheral portion of the lower opening of the cylinder 312A. The cover 312C is provided at the upper opening of the cylinder 312A. The upper opening of the cylinder 312A is closed by a cover 312C.

The bearing part 310 includes, for example, a spacer 313 and one or a plurality of O-rings 314 . The spacer 313 is arranged inside the cylinder 312A. The spacer 313 is disposed between the first bearing 311A and the second bearing 311B. In the illustrated example, the bearing unit 310 includes a plurality of O-rings 314 . A plurality of O-rings 314 are attached to the outer peripheral portion of the cylinder 312A.

The winding part 320 is connected to the bearing part 310 in such a way that it can revolve around the central axis of the bearing part 310 . The winding part 320 includes, for example, a winding shaft 321 , an adsorption part 322 , a predetermined part 323 and a holder connection part 330 .

The winding shaft 321 is connected to the inner ring of each bearing 311A, 311B. The rotation shaft 321 rotates relative to the outer wheel of each bearing 311A, 311B and the box body 312 .

The holder connecting portion 330 is configured to be able to connect the holder unit 400 . The holder connection part 330 is, for example, a cylinder. The holder connecting portion 330 includes, for example, a first arrangement portion 331 and a second arrangement portion 332 .

The first arrangement part 331 is configured so that the holder 410 can be arranged. The first arrangement unit 331 includes, for example, an arrangement space 331A. The second arrangement part 332 is configured so that the predetermined part 323 can be arranged. The second arrangement portion 332 includes, for example, a hole 332A. The hole 332A is connected to the arrangement space 331A.

The lower end of the winding shaft 321 is arranged in the arrangement space 331A. The lower end of the winding shaft 321 is connected to the holder connecting part 330 . The connection form of the winding shaft 321 and the holder connection part 330 is, for example, a mechanical connection. In the illustrated example, the winding shaft 321 is press-fitted into the holder connecting portion 330 .

The adsorption portion 322 is configured to be capable of magnetically adsorbing the holder 410 of the holder unit 400 . The adsorption unit 322 includes, for example, a magnet 322A. The adsorption unit 322 is arranged in the arrangement space 331A. The adsorption part 322 is located in a downward direction relative to the winding shaft 321 .

The adsorption part 322 is connected to the holder connection part 330 . The connection form of the adsorption part 322 and the holder connection part 330 is chemical bonding, for example. In the illustrated example, the adsorption portion 322 is bonded to the holder connection portion 330 by an adhesive.

The predetermined portion 323 is configured to determine the position of the holder 410 relative to the holder connection portion 330 in the height direction. In one example, the predetermined part 323 includes a pin 323A. The predetermined part 323 is arranged in the hole 332A and the arrangement space 331A.

The predetermined part 323 is connected to the holder connection part 330 . The connection form of the predetermined part 323 and the holder connection part 330 is mechanical connection, for example. In the illustrated example, the predetermined portion 323 is press-fitted into the holder connection portion 330 .

The winding portion 320 includes one or a plurality of reference surfaces 324 . The reference plane 324 is a plane. In the illustrated example, the winding portion 320 includes a plurality of reference surfaces 324 . The plurality of reference planes 324 include a first reference plane 324A, a second reference plane 324B, a third reference plane 324C, and a fourth reference plane 324D.

The reference surface 324 constitutes, for example, the outer surface of the holder connecting portion 330 . The first reference plane 324A is located in the first width direction with respect to the center of the convoluted portion 320 in the width direction. The second reference plane 324B is located in the second width direction with respect to the center of the convoluted portion 320 in the width direction. The third reference plane 324C is located in the front direction with respect to the center of the convoluted portion 320 in the depth direction. The fourth reference plane 324D is located in the rear direction with respect to the center of the convoluted portion 320 in the depth direction.

(slider) Refer to FIG. 3 and FIG. 7 . The configuration of the slider 200 can be selected arbitrarily. The configuration of the slider 200 is not limited to the illustrated configuration. The slider 200 includes, for example, a slider body 210 , a pressed portion 220 and a position setting portion 230 . The slider body 210 is, for example, a tie block body. The pressed portion 220 and the position setting portion 230 are connected to the slider body 210 .

The slider body 210 includes, for example, a bearing portion arrangement portion 211 . The bearing portion disposing portion 211 is configured so that the bearing portion 310 of the holder joint 300 can be disposed. The bearing arrangement section 211 includes, for example, an arrangement space 211A. The configuration space 211A is opened on the bottom surface 210FB of the slider body 210 .

The slider body 210 includes, for example, an intermediate arrangement portion 212 . The middle arrangement part 212 is configured so that one or a plurality of bolts 10B2 can be arranged. The intermediate arrangement portion 212 includes one or a plurality of holes 212A. The hole 212A penetrates through the middle arrangement part 212 . The central axis of the hole 212A is parallel to the width direction. The slider body 210 is connected to the movable rail 32 by a plurality of bolts 10B2.

The slider body 210 includes, for example, an upper arrangement portion 213 . The upper arrangement part 213 is configured so that the fastening bolts 221 can be arranged. The upper arrangement part 213 includes, for example, screw holes. The screw hole opens on the upper surface of the slider body 210 . The central axis of the screw hole is parallel to the height direction.

The slider body 210 includes, for example, a first bottom arrangement portion 214 . The first bottom arrangement part 214 is configured such that one or a plurality of bolts 10B4 can be arranged. The first bottom arrangement portion 214 includes one or a plurality of screw holes 214A. The screw hole 214A opens on the bottom surface 210FB of the slider body 210 . The central axis of the screw hole 214A is parallel to the height direction.

The slider body 210 includes, for example, a second bottom arrangement portion 215 . The second bottom arrangement part 215 is configured such that one or a plurality of bolts 10B5 can be arranged. The second bottom arrangement portion 215 includes one or a plurality of screw holes 215A. The screw hole 215A opens at 210FB of the slider body 210 . The central axis of the screw hole 215A is parallel to the height direction.

The slider body 210 includes, for example, a third bottom arrangement portion 216 . The third bottom arrangement part 216 is configured such that one or a plurality of pins 231 can be arranged. The third bottom arrangement portion 216 includes one or a plurality of holes 216A. The hole 216A opens on the bottom surface 210FB of the slider body 210 . The central axis of the hole 216A is parallel to the height direction.

The pressed portion 220 is configured to contact the pressing portion 52 of the load adjusting portion 50 . The pressed portion 220 includes, for example, fastening bolts 221 and plates 222 . The screws of the fastening bolts 221 are arranged in the screw holes of the upper arrangement part 213 . The connecting bolt 221 is connected to the slider body 210 .

The plate 222 is connected to the upper end of the connecting bolt 221 . The plate 222 is located upward relative to the slider body 210 . The pressing portion 52 of the load adjusting portion 50 is in contact with the plate 222 . The pressing part 52 applies a load to the slider 200 by pressing the pressed part 220 downward.

The position setting part 230 is configured in such a way that the angle setting part 500 can be used to position the slider 200 . The position setting unit 230 includes, for example, one or a plurality of pins 231 . The pin 231 is arranged in the hole 216A of the third bottom arrangement part 216 . The pin 231 is connected to the slider body 210 . A part of the pin 231 protrudes downward relative to the bottom surface 210FB of the slider body 210 .

(Links of each component) Refer to FIG. 6 and FIG. 7 . The holder unit 400 is connected to the holder joint 300 . The base portion 411 of the holder 410 is arranged in the arrangement space 331A of the holder connection portion 330 . The holder 410 is sucked by the suction unit 322 . The inclined surface 411A of the base portion 411 is in contact with the predetermined portion 323 . The position of the holder 410 relative to the holder connection part 330 is determined by the contact between the base part 411 and the predetermined part 323 .

The holder joint 300 is connected to the slider 200 . The bearing part 310 is arranged in the arrangement space 211A of the slider body 210 . The bottom of the flange 312B of the box body 312 protrudes downward relative to the bottom surface 210FB of the slider body 210 .

The bolt 10B4 is arranged in the screw hole 214A of the first bottom arrangement part 214 . The head portion 10B41 of the bolt 10B4 is positioned downward relative to the bottom surface 312BF of the flange 312B. The head portion 10B41 of the bolt 10B4 is in contact with the bottom surface 312BF of the flange 312B. The position of the bearing portion 310 relative to the slider body 210 is determined by the bolt 10B4.

In the state where the holder joint 300 is connected to the slider 200 , the winding portion 320 of the holder joint 300 and the holder unit 400 are integrally rotated relative to the slider 200 .

The winding part 320 revolves around the central axis of the bearing part 310 relative to the outer ring of the bearing 311 and the box body 312 in a first winding direction or a second winding direction. The first winding direction is the direction opposite to the second winding direction. The winding direction is a general term for the first winding direction and the second winding direction. The movement of the winding portion 320 that winds in the first winding direction is referred to as "the first winding operation". The movement of the winding portion 320 that turns in the second winding direction is referred to as "the second winding operation". The twirling action is a general term for the first twirling action and the second twirling action.

The rotation angle of the winding part 320 and the components integrally winding with the winding part 320 around the central axis of the bearing part 310 is called "winding angle". The torque acting so as to make the winding part 320 perform the first winding operation is referred to as "first torque". The torque acting so as to make the winding part 320 perform the second winding operation is referred to as "second torque".

In the state where the winding angle of the winding portion 320 is 0°, for example, the following state can be observed. The first reference plane 324A is parallel to the second coordinate plane. The second reference plane 324B is parallel to the second coordinate plane. The third reference plane 324C is parallel to the third coordinate plane. The fourth reference plane 324D is parallel to the third coordinate plane. The central axis of the pin 430 of the holder unit 400 is parallel to the width direction. The central plane of the scoring wheel 420 is parallel to the third coordinate plane.

(Angle setting part) Refer to FIG. 8 and FIG. 10 . The angle setting part 500 is configured in such a way that the winding angle of the winding part 320 can be set. The setting of the winding angle of the winding portion 320 includes adjusting and maintaining the winding angle. The angle setting part 500 is configured in such a way that the winding angle of the winding part 320 can be adjusted arbitrarily. The angle setting unit 500 is configured to maintain the turning angle of the turning unit 320 at an arbitrary turning angle.

At least a part of the angle setting part 500 is separately formed from the slider body 210 . In the illustrated example, all of the angle setting part 500 is separately formed from the slider body 210 . The angle setting part 500 is configured to be detachable from the slider body 210 . The angle setting part 500 is disposed at the bottom of the slider body 210 .

(press part) Refer to FIG. 8 and FIG. 10 . The angle setting unit 500 includes, for example, a pressing unit 510 . The pressing part 510 is configured to be able to press the winding part 320 . The pressing part 510 is configured to enable the winding part 320 to perform the first winding movement or the second winding movement. The pressing part 510 is configured in such a way that the winding angle of the winding part 320 can be maintained. The pressing part 510 includes, for example, a first pressing part 511 and a second pressing part 512 . The first pressing part 511 and the second pressing part 512 are configured so as to be able to press different parts of the winding part 320 respectively.

One of the first pressing part 511 and the second pressing part 512 includes, for example, an elastic element. The elastic member is configured to impart elastic force to the winding portion 320 . Examples of elastic elements include plungers and springs. The other of the first pressing part 511 and the second pressing part 512 includes, for example, a screw element. Examples of screw elements include screws and bolts.

Hereinafter, the arrangement of the first pressing part 511 and the second pressing part 512 will be exemplified. In the first example, the first pressing part 511 and the second pressing part 512 are arranged so that the winding part 320 is sandwiched between the first pressing part 511 and the second pressing part 512 . In the second example, the first pressing part 511 and the second pressing part 512 are arranged so as to line up in the width direction. In the third example, the first pressing part 511 and the second pressing part 512 are arranged in a row in the depth direction.

The winding portion 320 includes a first contacted portion 320A and a second contacted portion 320B. The first contacted portion 320A is a portion where the first torque acts on the winding portion 320 by being pressed. The second contacted portion 320B is a portion where the second torque acts on the winding portion 320 by being pressed. In one example, the reference plane 324 of the winding portion 320 includes a first contacted portion 320A and a second contacted portion 320B.

The first pressing portion 511 is configured to press the winding portion 320 in a direction along the central axis of the first pressing portion 511 while in contact with the first contacted portion 320A of the winding portion 320 . When the first contacted portion 320A is pressed by the first pressing portion 511 , the first torque acts on the winding portion 320 . In a state where the first pressing portion 511 is in contact with the first contacted portion 320A, the second winding motion of the winding portion 320 is regulated by the first pressing portion 511 .

The second pressing portion 512 is configured to press the winding portion 320 in a direction along the central axis of the second pressing portion 512 while in contact with the second contacted portion 320B of the winding portion 320 . When the second contacted portion 320B is pressed by the second pressing portion 512 , the second torque acts on the winding portion 320 . In a state where the second pressing portion 512 is in contact with the second contacted portion 320B, the first winding motion of the winding portion 320 is regulated by the second pressing portion 512 .

With the first pressing part 511 in contact with the first contacted part 320A and the second pressing part 512 in contact with the second contacted part 320B, each pressing part 511, 512 regulates the winding operation of the winding part 320. The winding angle is maintained by each pressing portion 511 , 512 .

In the case where the first pressing portion 511 includes an elastic element, when the first pressing portion 511 is in contact with the first contacted portion 320A and the second torque based on the elastic force of the elastic element is greater than the first torque acts on the winding portion 320 , the winding unit 320 performs the second winding operation.

In the case where the second pressing part 512 includes an elastic element, when the second pressing part 512 is in contact with the second contacted part 320B and the first torque based on the elastic force of the elastic element is greater than the second torque acts on the winding part 320 , the winding part 320 performs the first winding action.

(setting part body) Refer to FIG. 8 and FIG. 10 . The angle setting unit 500 includes, for example, a setting unit body 600 . The setting part body 600 is configured to be detachable from the slider 200 . The setting part body 600 is, for example, a plate. The setting part main body 600 includes, for example, a first configuration part 601 , a second configuration part 602 , a third configuration part 603 , and a fourth configuration part 604 .

The first configuration part 601 is located in the first width direction relative to the center of the setting part body 600 in the width direction. The second configuration part 602 is located in the second width direction relative to the center of the setting part body 600 in the width direction. The third configuration part 603 is located in the front direction with respect to the center of the setting part body 600 in the depth direction. The fourth configuration part 604 is located in the rear direction with respect to the center of the setting part body 600 in the depth direction.

The setting unit body 600 includes a first connection part 605 , a second connection part 606 , a third connection part 607 , and a fourth connection part 608 . The first connection part 605 connects the first configuration part 601 and the third configuration part 603 . The second connection part 606 connects the first configuration part 601 and the fourth configuration part 604 . The third connection part 607 connects the second configuration part 602 and the third configuration part 603 . The fourth connection part 608 connects the second configuration part 602 and the fourth configuration part 604 .

The setting part body 600 includes, for example, a winding part disposing part 610 . The convoluted part arrangement part 610 is configured so that the convoluted part 320 can be arranged. The convoluted part arrangement part 610 is provided in a part including the inner part of the first configuration part 601 , the inner part of the second configuration part 602 , the inner part of the third configuration part 603 and the inner part of the fourth configuration part 604 . The convoluted part arrangement part 610 includes, for example, a hole 611 and an inner peripheral surface 612 . The hole 611 penetrates the convoluted part arrangement part 610 . The central axis of the hole 611 is parallel to the height direction. The inner peripheral surface 612 defines the hole 611 .

The setting part body 600 includes, for example, a pressing part arrangement part 620 . The pressing part arrangement part 620 is configured so that the pressing part 510 can be arranged. The pressing part arrangement part 620 includes, for example, a first pressing part arrangement part 621 and a second pressing part arrangement part 622 . The first pressing part arrangement part 621 is provided in the first configuration part 601 . The second pressing part arrangement part 622 is provided in the second configuration part 602 .

The first pressing part arrangement part 621 is configured so that the first pressing part 511 can be arranged. The first pressing portion arrangement portion 621 includes, for example, a hole 621A. The hole 621A penetrates through the first pressing portion arrangement portion 621 . The central axis of the hole 621A is parallel to the width direction. The first pressing part arrangement part 621 is located in the front direction or the rear direction with respect to the center of the winding part arrangement part 610 in the depth direction. In the illustrated example, the center of the first pressing part arrangement part 621 is located in the rear direction with respect to the convoluted part arrangement part 610 in the depth direction.

The second pressing part arrangement part 622 is configured so that the second pressing part 512 can be arranged. The second pressing portion arrangement portion 622 includes, for example, a screw hole 622A. The screw hole 622A passes through the second pressing portion arrangement portion 622 . The central axis of the screw hole 622A is parallel to the width direction. The second pressing part arrangement part 622 is located in the front direction or the rear direction with respect to the center of the winding part arrangement part 610 in the depth direction. In the illustrated example, the second pressing portion arrangement portion 622 is located in the rear direction with respect to the center of the convoluted portion arrangement portion 610 in the depth direction.

The setting unit body 600 includes, for example, a bolt arrangement unit 630 . The bolt arrangement part 630 is configured so that one or a plurality of bolts 10B5 can be arranged. The bolt arrangement part 630 includes, for example, a first bolt arrangement part 631 , a second bolt arrangement part 632 , a third bolt arrangement part 633 and a fourth bolt arrangement part 634 .

The first bolt arrangement portion 631 is provided on the first connection portion 605 . The second bolt arrangement portion 632 is provided on the second connection portion 606 . The third bolt arrangement portion 633 is provided at a portion of the third configuration portion 603 close to the third connection portion 607 . The fourth bolt arrangement portion 634 is provided in a portion of the fourth configuration portion 604 close to the fourth connection portion 608 .

The first bolt arrangement part 631 is configured so that the bolts 10B5 can be arranged. The first bolt arrangement portion 631 includes, for example, a hole 631A. The hole 631A penetrates through the first bolt arrangement portion 631 . The central axis of the hole 631A is parallel to the height direction.

The second bolt arrangement portion 632 is configured such that the bolts 10B5 can be arranged. The second bolt arrangement portion 632 includes, for example, a hole 632A. The hole 632A passes through the second bolt arrangement portion 632 . The central axis of the hole 632A is parallel to the height direction.

The third bolt arrangement portion 633 is configured such that the bolts 10B5 can be arranged. The third bolt arrangement portion 633 includes, for example, a hole 633A. The hole 633A passes through the third bolt arrangement portion 633 . The central axis of the hole 633A is parallel to the height direction.

The fourth bolt arrangement part 634 is configured so that the bolts 10B5 can be arranged. The fourth bolt arrangement portion 634 includes, for example, a hole 634A. The hole 634A passes through the fourth bolt arrangement portion 634 . The central axis of the hole 634A is parallel to the height direction.

The setting unit body 600 includes, for example, a setting unit configuration unit 640 . The setting unit arrangement unit 640 is configured to be able to arrange the position setting unit 230 . The setting unit arrangement unit 640 includes, for example, a first arrangement unit 641 and a second arrangement unit 642 . The first arrangement part 641 is provided at a part of the third configuration part 603 close to the first connection part 605 . The second arrangement portion 642 is provided at a portion of the fourth configuration portion 604 close to the first connection portion 605 .

The first arrangement part 641 is configured so that the first pin 231 can be arranged. The first arrangement portion 641 includes, for example, an elongated hole 641A. The elongated hole 641A penetrates through the first arrangement portion 641 . The central axis of the long hole 641A is parallel to the height direction. The elongated hole 641A extends in the depth direction.

The second arrangement part 642 is configured so that the second pin 231 can be arranged. The second arrangement portion 642 includes, for example, a hole 642A. The hole 642A penetrates through the second arrangement portion 642 . The central axis of the hole 642A is parallel to the height direction.

The setting unit body 600 includes, for example, a head arrangement unit 650 . The head arrangement part 650 is configured so that one or a plurality of heads 10B41 of the bolt 10B4 can be arranged. The head placement unit 650 includes, for example, a first placement unit 651 and a second placement unit 652 . The first arrangement part 651 is provided in the third configuration part 603 . The second arrangement part 642 is provided in the fourth configuration part 604 .

The first disposing portion 651 is configured to be able to dispose the head portion 10B41 of the bolt 10B4. The first arrangement portion 651 includes, for example, a recessed portion 651A. The concave portion 651A opens on the upper surface of the third configuration portion 603 and the inner peripheral surface 612 of the third configuration portion 603 .

The second disposing portion 652 is configured such that the head portion 10B41 of the bolt 10B4 can be disposed. The second arrangement portion 652 includes, for example, a concave portion 652A. The concave portion 652A is opened on the upper surface of the fourth configuration portion 604 and the inner peripheral surface 612 of the fourth configuration portion 604 .

The setting part body 600 includes, for example, a flange arrangement part 660 . The flange arrangement part 660 is configured so that a part of the flange 312B of the case 312 can be arranged. The flange arrangement part 660 includes, for example, a first arrangement part 661 and a second arrangement part 662 . The first arrangement part 661 is provided in the first configuration part 601 . The second arrangement part 662 is provided in the second configuration part 602 .

The first disposing portion 661 is configured such that a part of the flange 312B can be disposed. The first arrangement portion 661 includes, for example, a recessed portion 661A. The concave portion 661A is opened on the upper surface of the first configuration portion 601 and the inner peripheral surface 612 of the first configuration portion 601 .

The second disposing portion 662 is configured such that a part of the flange 312B can be disposed. The second arrangement portion 662 includes, for example, a recessed portion 662A. The concave portion 662A opens on the upper surface of the second configuration portion 602 and the inner peripheral surface 612 of the second configuration portion 602 .

The first pressing part 511 includes, for example, a ball plunger 511A. The ball plunger 511A is disposed in the hole 621A of the first pressing portion disposing portion 621 . The central axis of the ball plunger 511A is parallel to the width direction.

The ball plunger 511A includes, for example, a cylinder 511A1, a ball 511A2, and a coil spring. The cylinder 511A1 is connected to the first pressing portion arrangement portion 621 . The ball 511A2 is arranged at the end of the cylinder 511A1. The coil spring is arranged inside the cylinder 511A1. The end portion of the cylinder 511A1 and the ball 511A2 protrude from the inner peripheral surface 612 of the first configuration portion 601 .

The second pressing part 512 includes, for example, a fine screw 512A. The fine thread screw 512A is arranged in the screw hole 622A of the second pressing part arrangement part 622 . The central axis of the fine thread screw 512A is parallel to the width direction. The central axis of the fine thread screw 512A is coaxial with the central axis of the ball plunger 511A. The fine screw 512A advances in the width direction with respect to the second pressing portion arrangement portion 622 as it rotates.

(fixed part) Refer to Figure 8. The angle setting unit 500 includes, for example, a fixing unit 520 . The fixing part 520 is configured in such a way that the winding motion of the winding part 320 can be prescribed. The fixing part 520 is configured in such a way that the slider 200 can be attached and detached. In the illustrated example, the fixing part 520 is configured in such a manner that the setting part body 600 and the slider body 210 can be attached and detached. The fixing part 520 is, for example, a tie plate. The fixed part 520 includes, for example, a first arrangement part 521 , a second arrangement part 522 and a predetermined part 523 .

The first arrangement part 521 is configured so that the bolts 10B5 can be arranged. The first arrangement portion 521 includes, for example, a hole 521A. The hole 521A penetrates through the first arrangement portion 521 . The central axis of the hole 521A is parallel to the height direction.

The second arrangement part 522 is configured so that the bolt 10B5 can be arranged. The second arrangement portion 522 includes, for example, a hole 522A. The hole 522A penetrates through the second arrangement portion 522 . The central axis of the hole 522A is parallel to the height direction.

The predetermined part 523 is configured so as to be able to contact the first contacted part 320A and the second contacted part 320B of the winding part 320 . The regulation part 523 is arranged in the downward direction with respect to the setting part main body 600, for example. The predetermined portion 523 includes, for example, a first end portion 523A and a second end portion 523B. The first arrangement portion 521 is connected to the first end portion 523A. The second arrangement portion 522 is connected to the second end portion 523B.

The predetermined portion 523 includes a predetermined surface 523C. The predetermined surface 523C is configured to contact the reference surface 324 of the convoluted portion 320 , for example. The predetermined surface 523C is a flat surface. In the illustrated example, the predetermined part 523 is disposed in the downward direction relative to the second configuration part 602 of the setting part main body 600 . The predetermined surface 523C is configured to contact the second reference surface 324B.

(angle setting method) Refer to FIG. 5 and FIGS. 11 to 15 . In FIGS. 11 to 15 , among the elements constituting the scribing head 10 , elements other than the slide unit 100 are omitted. The winding angle of the winding portion 320 is set, for example, by an angle setting method. Examples of the angle setting method include a first angle setting method, a second angle setting method, and a third angle setting method. Hereinafter, the state of the sliding unit 100 in which all elements constituting the sliding unit 100 are combined is referred to as a "standard state".

(1st angle setting method) The first angle setting method includes program A1 to program A6. Procedure A1 is followed by procedure A2. Procedure A3 is followed by procedure A2. Procedure A3 is followed by procedure A4. Procedure A4 is followed by procedure A5. Procedure A5 is followed by procedure A6.

Refer to FIG. 5 and FIG. 11 . In procedure A1, the scribing head 10 is arranged on the base plane of the platform. The base plane of the platform is a plane. The first main surface 20A of the base 20 is in contact with the base surface of the platform. The state of the sliding unit 100 is partially different from the standard state. In the slider body 210 of the slider 200 , the setting part body 600 and the fixing part 520 are not connected. The holder unit 400 is not connected to the holder joint 300 .

Refer to Figure 12. In procedure A2, the setting part main body 600 is arranged downward relative to the slider main body 210 of the slider 200 . The first pin 231 of the slider 200 is arranged in the long hole 641A of the setting part main body 600 . The second pin 231 of the slider 200 is arranged in the hole 642A of the setting part main body 600 .

The ball 511A2 of the ball plunger 511A is in contact with the first contacted portion 320A of the first reference surface 324A of the winding portion 320 . The front end portion 512A1 of the fine thread screw 512A is in contact with the second contacted portion 320B of the second reference plane 324B of the winding portion 320 . The setting part body 600 is connected to the slider body 210 by a plurality of bolts 10B5.

Refer to Figure 13. In procedure A3, the holder 410 for angle setting is connected to the holder joint 300 . The measuring plate 450 is connected to the holder 410 for angle setting.

Part of the measurement plate 450 is placed in the slit 413A of the holder 410 . The measurement plate 450 is connected to the arrangement part 413 . The measurement plate 450 includes a surface 451 to be measured. The surface to be measured 451 is a plane. The parallelism of the surface to be measured 451 relative to the reference plane of the stage or the reference plane of the scribing head 10 is measured by a measuring instrument. As an example of a measuring instrument, a three-dimensional measuring instrument is mentioned.

Refer to Figure 13. In procedure A4, the fine screw 512A is operated so that the parallelism of the surface to be measured 451 becomes a reference value. The fine screw 512A advances in the first advancing direction or the second advancing direction with respect to the second arrangement portion 522 .

When the fine thread screw 512A advances in the first parallel advance direction, the protruding length of the fine thread screw 512A relative to the inner peripheral surface 612 of the convoluted portion arrangement portion 610 becomes longer. When the fine thread screw 512A advances in the second advancing direction, the protruding length of the fine thread screw 512A relative to the inner peripheral surface 612 of the winding portion arrangement portion 610 is shortened.

The reference value related to the parallelism of the surface to be measured 451 can be set arbitrarily. Examples of the reference value include a first reference value and a second reference value. The first reference value is a value indicating that the surface to be measured 451 is parallel to the reference surface of the stage or the reference surface of the scribing head 10 . The second reference value is a value indicating that the surface to be measured 451 has a certain inclination angle with respect to the reference surface of the stage or the reference surface of the scribing head 10 .

When the parallelism of the surface to be measured 451 is the first reference value, the winding angle of the winding portion 320 is 0°. When the winding portion 320 with a winding angle of 0° is connected to the holder unit 400 , the central plane of the scoring wheel 420 is parallel to the reference plane of the stage or the reference plane of the marking head 10 .

Refer to Figure 14. In procedure A5, the fixing part 520 is connected to the slider body 210 by a plurality of bolts 10B5. The predetermined surface 523C of the fixed part 520 is in contact with the first contacted part 320A and the second contacted part 320B of the second reference surface 324B of the winding part 320 .

Refer to Figure 15. In procedure A6, the holder 410 for angle setting is separated from the holder joint 300 . The holder unit 400 is connected to the holder joint 300 .

(Second angle setting method) The second angle setting method includes program B1 to program B5. Procedure B1 is followed by procedure B2. Procedure B2 is followed by procedure B3. Procedure B3 is followed by procedure B4. Procedure B4 is followed by procedure B5.

In the procedure B1, the scribing head 10 in the same state as the procedure A2 of the first angle setting method is arranged on the reference plane of the stage. Procedure B2 is the same as procedure A3 of the first angle setting method. Procedure B3 is the same as procedure A4 of the first angle setting method. Procedure B4 is the same as procedure A5 of the first angle setting method. Procedure B5 is the same as procedure A6 of the first angle setting method.

(the third angle setting method) The 3rd angle setting method includes program C1 - program C4. Procedure C1 is followed by procedure C2. Procedure C2 is followed by procedure C3. Procedure C3 is followed by procedure C4.

In the procedure C1, the scribing head 10 in the same state as the procedure A3 of the first angle setting method is arranged on the reference surface of the stage. Procedure C2 is the same as procedure A4 of the first angle setting method. Procedure C3 is the same as procedure A5 of the first angle setting method. Procedure C4 is the same as procedure A6 of the first angle setting method.

(scribing processing) For the scribing process, a scribing processing device in which the winding angle of the winding portion 320 is set by the angle setting unit 500 is used. During the scribing process, for example, the following states were observed.

The position of the scribing head 10 is set at the non-contact position. When the position of the scribing head 10 is the non-contact position, the cutting edge 422 of the scribing wheel 420 does not contact the workpiece.

The scribing head 10 is driven in the downward direction. The position of the scribing head 10 is set at the initial contact position. When the position of the scribing head 10 is the initial contact position, the edge 422 of the scribing wheel 420 contacts the workpiece. With the contact between the cutting edge 422 and the workpiece, external force acts on the scoring wheel 420 .

The first torque or the second torque due to the external force may act on the winding portion 320 . The winding motion of the winding part 320 is regulated by the angle setting part 500 . The winding motion of the winding portion 320 accompanying the cutting edge 422 of the scoring wheel 420 contacting the workpiece is regulated. The winding angles of the winding portion 320 and the holder unit 400 are maintained.

Examples of the state in which the winding angle is held include the first held state and the second held state. In the first holding state, the turning angle when the scribing head 10 is at the initial contact position is the same as the turning angle when the scribing head 10 is at the non-contact position. In the second holding state, the turning angle when the scribing head 10 is at the initial contact position is substantially the same as the turning angle when the scribing head 10 is at the non-contact position.

The scribing head 10 scans in a predetermined direction. The scoring wheel 420 moves on the workpiece to form a scoring line on the workpiece. Along with the movement of the scoring wheel 420 , an external force acts on the scoring wheel 420 .

The first torque or the second torque due to the external force may act on the winding portion 320 . The winding motion of the winding part 320 is regulated by the angle setting part 500 . The winding motion of the winding portion 320 accompanying the scribing wheel 420 traveling on the workpiece is regulated. The winding angles of the winding portion 320 and the holder unit 400 are maintained.

Examples of the state in which the winding angle is held include the third held state and the fourth held state. In the third holding state, the turning angle when the scribing head 10 moves is the same as the turning angle when the scribing head 10 is at the initial contact position. In the fourth holding state, the rotation angle when the scribing head 10 moves is substantially the same as the rotation angle when the scribing head 10 is located at the initial contact position.

(Effect) With the configurations exemplified in the embodiments, for example, the following effects can be obtained.

In one example, the slide unit 100 includes a holder joint 300 and an angle setting part 500 . The holder joint 300 includes a slider 200 , a bearing part 310 connected to the slider 200 , and a winding part 320 configured to be able to rotate relative to the bearing part 310 . The angle setting part 500 is configured in such a way that the winding angle of the winding part 320 relative to the slider 200 can be set.

With the above configuration, for example, the following effects can be obtained. Since the winding angle of the winding part 320 can be set by the angle setting part 500, the winding angle of the winding part 320 during the marking process can be stabilized. The rotation angle of the holder 410 connected to the rotation part 320 and the rotation angle of the scoring wheel 420 supported by the holder 410 are also stable. Therefore, the improvement of the processing precision in a scribing process can be expected. In the scoring process of manufacturing precision parts, the improvement of machining accuracy can also be expected. Examples of precision parts include electronic parts and semiconductor parts.

In one example, the angle setting part 500 includes a first pressing part 511 for pressing the winding part 320 to make the winding part 320 rotate in the first winding direction, and a second pressing part 511 for pressing the winding part 320 to make the winding part 320 rotate in the second winding direction. Pressing part 512 .

With the above configuration, for example, the following effects can be obtained. The operability of the operation of adjusting the winding angle of the winding portion 320 is improved.

In one example, the first pressing portion 511 includes elastic elements.

With the above configuration, for example, the following effects can be obtained. The workability related to the operation of adjusting the winding angle of the winding portion 320 is improved.

In one example, the other side of the second pressing portion 512 includes a screw element.

With the above configuration, for example, the following effects can be obtained. The workability related to the operation of adjusting the winding angle of the winding portion 320 is improved.

In one example, the first pressing part 511 and the second pressing part 512 are arranged so that the winding part 320 is sandwiched between the first pressing part 511 and the second pressing part 512 .

With the above configuration, for example, the following effects can be obtained. The winding angle of the winding portion 320 is stabilized.

In one example, the angle setting part 500 includes a first pressing part arrangement part 621 in which the first pressing part 511 is arranged, and a second pressing part arrangement part 622 in which the second pressing part 512 is arranged.

With the above configuration, for example, the following effects can be obtained. The positions of the first pressing part 511 and the second pressing part 512 are stabilized.

In one example, the winding portion 320 includes a holder connecting portion 330 to which the holder unit 400 can be connected, and a winding shaft 321 connected to the bearing portion 310 . The first pressing part 511 and the second pressing part 512 press the holder coupling part 330 .

According to the above configuration, for example, the following effects can be obtained. The structure of the bearing part 310 is simplified.

In one example, the angle setting part 500 includes a fixing part 520 capable of fixing the winding angle of the winding part 320 .

With the above configuration, for example, the following effects can be obtained. The winding angle of the winding portion 320 is stable.

In one example, the fixing part 520 can attach and detach the slider 200 .

With the above configuration, for example, the following effects can be obtained. The workability related to the operation of adjusting the winding angle of the winding portion 320 is improved.

In one example, the slider 200 includes a slider body 210 connected to a bearing portion 310 . The angle setting part 500 is disposed at the bottom of the slider body 210 .

With the above configuration, for example, the following effects can be obtained. The workability related to the operation of adjusting the winding angle of the winding portion 320 is improved.

(Second Embodiment) Refer to Fig. 16 to Fig. 22 . The slide unit 100 of the second embodiment is configured on the premise of the first embodiment. The slide unit 100 of the present embodiment includes the same configuration as the premise of the embodiment.

Hereinafter, differences between the slide unit 100 of the present embodiment and the slide unit 100 of the premise embodiment will be mainly shown. Some or all of the descriptions related to the configuration of the slide unit 100 of the present embodiment that is common to the slide unit 100 of the premise embodiment will be omitted.

(bearing part) Refer to Figure 16. The bearing part 310 does not include a box body 312 and a plurality of O-rings 314 . The outer wheels of the respective bearings 311A and 311B are connected to the slider 200 .

(slider) Refer to Figure 16. The configuration of the slider 200 can be selected arbitrarily. The configuration of the slider 200 is not limited to the illustrated configuration. The slider 200 includes, for example, a slider body 700 , a pressed portion 220 and a position setting portion 230 . The slider body 700 is, for example, a block body. The pressed portion 220 and the position setting portion 230 are connected to the slider body 700 .

The slider body 700 includes, for example, a first body configuration portion 710 and a second body configuration portion 720 . The first body configuration part 710 and the second body configuration part 720 are individually configured. The first main body configuration part 710 includes, for example, an upper configuration part 710A and a lower configuration part 710B. The lower configuration part 710B is located in the downward direction with respect to the side part of the upper configuration part 710A in the first width direction. The second main body configuration part 720 is configured to be detachable from the lower configuration part 710B.

The upper configuration portion 710A includes, for example, the middle arrangement portion 711 . The middle arrangement part 711 is configured so that one or a plurality of bolts 10B2 can be arranged. The intermediate arrangement portion 711 includes one or a plurality of holes 711A. The hole 711A penetrates the upper configuration part 710A. The central axis of the hole 711A is parallel to the width direction. The upper configuration part 710A is connected to the movable rail 32 by a plurality of bolts 10B2.

The upper configuration section 710A includes, for example, an upper arrangement section 712 . The upper arrangement part 712 is configured so that the fastening bolts 221 can be arranged. The upper arrangement portion 712 includes, for example, screw holes. The screw holes are opened on the upper surface 731 of the upper configuration part 710A. The central axis of the screw hole is parallel to the height direction.

The bottom surface 732 of the upper configuration portion 710A faces downward. The bottom surface 732 of the upper configuration part 710A is a plane. The bottom surface 732 of the upper configuration part 710A faces the second main body configuration part 720 .

The lower configuration part 710B includes, for example, the facing part 713 . The facing portion 713 includes a portion facing the holder coupling portion 330 of the holder joint 300 in the width direction. The facing portion 713 includes, for example, a concave portion 713A.

The concave portion 713A is opened on the second side surface 733 of the lower configuration portion 710B. The second side surface 733 of the lower configuration portion 710B faces the second width direction. The second side surface 733 of the lower configuration part 710B faces the first side surface 743 of the second main body configuration part 720 . The second side surface 733 of the lower configuration part 710B is a plane.

The recessed portion 713A is opened on the bottom surface 734 of the lower configuration portion 710B. The bottom surface 734 of the lower configuration part 710B faces downward. The bottom surface 734 of the lower configuration part 710B is a plane.

The lower configuration part 710B includes, for example, an intermediate arrangement part 714 . The intermediate arrangement portion 714 is configured such that one or a plurality of bolts 10B6 can be arranged. The middle arrangement portion 714 includes one or a plurality of screw holes 714A. The screw hole 714A opens to the second side surface 733 of the lower configuration part 710B. The central axis of the screw hole 714A is parallel to the width direction.

The second body configuration part 720 includes, for example, a joint arrangement part 721 . The joint arrangement part 721 is configured so that the holder joint 300 can be arranged. The joint arrangement part 721 includes, for example, a recessed part 721A and a hole 721B.

The concave portion 721A is formed so that a part of the holder coupling portion 330 can be arranged. The recessed portion 721A opens to the bottom surface 742 of the second main body configuration portion 720 . The bottom surface 742 of the second main body configuration part 720 faces downward. The bottom surface 742 of the second main body configuration part 720 is a plane.

The recessed portion 721A opens to the first side surface 743 of the second main body configuration portion 720 . The first side surface 743 of the second main body configuration part 720 faces the first width direction. The first side surface 743 of the second main body configuration part 720 is a plane. The first side surface 743 of the second body configuration part 720 is in contact with the second side surface 733 of the lower configuration part 710B. The hole 721B is formed so that the bearing part 310 can be arranged. The hole 721B opens on the bottom surface of the concave portion 721A.

The second body configuration part 720 includes, for example, an intermediate placement part 722 . The middle arrangement part 722 is configured so that one or a plurality of bolts 10B6 can be arranged. The intermediate arrangement portion 722 includes one or a plurality of holes 722A. The hole 722A penetrates through the second body configuration portion 720 . The central axis of the hole 722A is parallel to the width direction.

The upper surface 741 of the second main body configuration part 720 faces upward. The upper surface 741 of the second main body configuration part 720 is a plane. The upper surface 741 of the second body configuration part 720 is in contact with the bottom surface 732 of the upper configuration part 710A.

(Angle setting part) Refer to FIG. 16 and FIG. 17 . At least a part of the angle setting portion 500 is integrally formed with the slider body 700 . In the illustrated example, a part of the angle setting portion 500 is integrally formed with the slider body 700 . The angle setting part 500 is disposed at the bottom of the slider body 700 .

(setting part body) Refer to FIG. 16 and FIG. 17 . The angle setting unit 500 includes, for example, a setting unit body 800 . The setting part body 800 constitutes a part of the slider body 700 . The setting unit body 800 includes, for example, a first body configuration part 810 and a second body configuration part 820 . The first body configuration part 810 is configured as a part of the lower configuration part 710B of the first body configuration part 710 of the slider body 700 . The second body configuration part 820 is configured as a part of the second body configuration part 720 of the slider body 700 .

The setting unit body 800 includes, for example, a pressing unit arrangement unit 830 . The pressing part arrangement part 830 is configured so that the pressing part 510 can be arranged. The pressing part arrangement part 830 includes, for example, a first pressing part arrangement part 831 and a second pressing part arrangement part 832 . The first pressing part arrangement part 831 is provided on the first main body configuration part 810 . The second pressing part arrangement part 832 is provided on the second main body configuration part 820 .

The first pressing part arrangement part 831 is configured so that the first pressing part 511 can be arranged. The first pressing portion arrangement portion 831 includes, for example, a hole 831A. The hole 831A penetrates through the first pressing portion arrangement portion 831 . The central axis of the hole 831A is parallel to the width direction. The first pressing portion arrangement portion 831 is provided in the recessed portion 713A of the lower configuration portion 710B. The hole 831A opens on the bottom surface of the concave portion 713A.

The first pressing part arrangement part 831 is located in the front direction or the rear direction with respect to the center of the slider body 700 in the depth direction. In the illustrated example, the first pressing portion arrangement portion 831 is located in the rear direction with respect to the center of the slider body 700 in the depth direction.

The second pressing part arrangement part 832 is configured so that the second pressing part 512 can be arranged. The second pressing portion arrangement portion 832 includes, for example, a screw hole 832A. The screw hole 832A passes through the second pressing portion arrangement portion 832 . The central axis of the screw hole 832A is parallel to the width direction. The second pressing part arrangement part 832 is provided in the recessed part 721A of the second main body configuration part 720 . The screw hole 832A opens on the bottom surface of the concave portion 721A.

The second pressing part arrangement part 832 is located in the front direction or the rear direction with respect to the center of the slider body 700 in the depth direction. In the illustrated example, the second pressing portion arrangement portion 832 is located in the rear direction with respect to the center of the slider body 700 in the depth direction.

The setting unit body 800 includes, for example, a bolt arrangement unit 840 . The bolt arrangement part 840 is configured so that one or a plurality of bolts 10B5 can be arranged. The bolt arrangement part 840 includes, for example, a first bolt arrangement part 841 and a second bolt arrangement part 842 .

The first bolt arrangement portion 841 is provided on the first main body configuration portion 810 . The first bolt arrangement part 841 is configured so that one or a plurality of bolts 10B5 can be arranged. The first bolt arrangement portion 841 includes one or a plurality of screw holes 841A. The screw hole 841A opens to the bottom surface 734 of the first body configuration part 810 . The central axis of the screw hole 841A is parallel to the height direction.

The second bolt arrangement portion 842 is provided on the second main body configuration portion 820 . The second bolt arrangement part 842 is configured so that one or a plurality of bolts 10B5 can be arranged. The second bolt arrangement portion 842 includes one or a plurality of screw holes 842A. The screw hole 842A opens to the bottom surface 742 of the second body configuration part 820 . The central axis of the screw hole 842A is parallel to the height direction.

The first pressing part 511 includes, for example, a ball plunger 511A. The ball plunger 511A is disposed in the hole 831A of the first pressing portion arrangement portion 831 of the pressing portion arrangement portion 830 . The central axis of the ball plunger 511A is parallel to the width direction.

The cylinder 511A1 is connected to the first pressing portion arrangement portion 831 . The ball 511A2 is arranged at the end of the cylinder 511A1. The coil spring is arranged inside the cylinder 511A1. The end portion of the cylinder 511A1 and the ball 511A2 protrude from the side surface of the first pressing portion arrangement portion 831 .

The second pressing part 512 includes, for example, a fine screw 512A. The fine screw 512A is arranged in the screw hole 832A of the second pressing part arrangement part 832 of the pressing part arrangement part 830 . The central axis of the fine thread screw 512A is parallel to the width direction. The central axis of the fine thread screw 512A is coaxial with the central axis of the ball plunger 511A. The fine screw 512A advances in the width direction relative to the second pressing portion disposing portion 832 as it rotates.

(fixed part) Refer to FIG. 16 and FIG. 17 . The angle setting unit 500 includes, for example, a plurality of fixing units 520 . The first fixing part 520 is disposed in a downward direction relative to the first main body configuration part 810 . The predetermined surface 523C of the first fixing portion 520 is configured to contact the first reference surface 324A. The second fixing part 520 is arranged in the downward direction with respect to the second main body configuration part 820 . The predetermined surface 523C of the second fixing portion 520 is configured to contact the second reference surface 324B.

(Links of each component) Refer to FIG. 16 and FIG. 17 . The holder joint 300 is connected to the slider 200 . The bearing portion 310 is disposed in the hole 721B of the second body configuration portion 720 of the slider body 700 . The upper part of the holder coupling part 330 is arranged in the recessed part 721A.

The outer ring of the bearing 311 of the bearing part 310 is connected to the second main body configuration part 720 . The connection form of the outer ring of the bearing 311 and the second main body configuration part 720 is, for example, chemical bonding. In the illustrated example, the wheel train outside the bearing 311 is bonded to the second main body configuration portion 720 with an adhesive.

(angle setting method) Refer to FIG. 5 and FIG. 18 to FIG. 22 . In FIGS. 18 to 22 , among the elements constituting the scribing head 10 , elements other than the slide unit 100 are omitted. The winding angle of the winding portion 320 is set, for example, by an angle setting method. Examples of the angle setting method include a fourth angle setting method, a fifth angle setting method, and a sixth angle setting method.

(the fourth angle setting method) The fourth angle setting method includes program D1 to program D6. Procedure D1 is followed by procedure D2. Procedure D3 is followed by procedure D2. Procedure D3 is followed by procedure D4. Procedure D4 is followed by procedure D5. Procedure D5 is followed by procedure D6.

Refer to FIG. 5 and FIG. 18 . In procedure D1, the scribing head 10 is arranged on the base plane of the platform. The base plane of the platform is a plane. The first main surface 20A of the base 20 is in contact with the base surface of the platform. The state of the sliding unit 100 is partially different from the standard state. The second body configuration part 720 and the fixing part 520 are not connected to the first body configuration part 710 of the slider body 700 .

Refer to Figure 19. In step D2, the second body configuration part 720 to which the holder joint 300 is connected is connected to the first body configuration part 710 by a plurality of bolts 10B6. The holder unit 400 is not connected to the holder joint 300 .

The ball 511A2 of the ball plunger 511A is in contact with the first contacted portion 320A of the first reference surface 324A of the winding portion 320 . The front end portion 512A1 of the fine thread screw 512A is in contact with the second contacted portion 320B of the second reference plane 324B of the winding portion 320 .

Refer to Figure 20. In procedure D3, the holder 410 for angle setting is connected to the holder joint 300 . The measuring plate 450 is connected to the holder 410 for angle setting.

Refer to Figure 20. In step D4, the fine screw 512A is operated so that the parallelism of the surface to be measured 451 becomes a reference value. The fine screw 512A advances in the first advancing direction or the second advancing direction with respect to the second arrangement portion 522 .

When the fine screw 512A advances in the first advancing direction, the protruding length of the fine screw 512A relative to the bottom surface of the recessed portion 721A of the second main body configuration portion 720 becomes longer. When the fine screw 512A advances in the second advancing direction, the protruding length of the fine screw 512A relative to the bottom surface of the concave portion 721A of the second main body configuration portion 720 becomes shorter.

Refer to Figure 21. In step D5, the first fixing part 520 is connected to the first main body configuration part 710 by a plurality of bolts 10B5. The predetermined surface 523C of the fixing portion 520 is in contact with the first contacted portion 320A and the second contacted portion 320B of the first reference surface 324A of the winding portion 320 .

In step D5, the second fixing part 520 is connected to the second main body configuration part 720 by a plurality of bolts 10B5. The predetermined surface 523C of the fixing portion 520 is in contact with the first contacted portion 320A and the second contacted portion 320B of the second reference surface 324B of the winding portion 320 .

Refer to Figure 22. In procedure D6, the holder 410 for angle setting is separated from the holder joint 300 . The holder unit 400 is connected to the holder joint 300 .

(the fifth angle setting method) The 5th angle setting method includes program E1 - program E5. Procedure E1 is followed by procedure E2. Procedure E3 is followed by procedure E2. Procedure E3 is followed by procedure E4. Procedure E4 is followed by procedure E5.

In procedure E1, the scribing head 10 in the same state as that in procedure D2 of the fourth angle setting method is arranged on the reference plane of the stage. Procedure E2 is the same as procedure D3 of the fourth angle setting method. Procedure E3 is the same as procedure D4 of the fourth angle setting method. Procedure E4 is the same as procedure D5 of the fourth angle setting method. Procedure E5 is the same as procedure D6 of the fourth angle setting method.

(the sixth angle setting method) The sixth angle setting method includes program F1 to program F4. Procedure F1 is followed by procedure F2. Procedure F2 is followed by procedure F3. Procedure F3 is followed by procedure F4.

In the procedure F1, the scribing head 10 in the same state as the procedure D3 of the fourth angle setting method is arranged on the reference plane of the stage. Procedure F2 is the same as procedure D4 of the fourth angle setting method. Procedure F3 is the same as procedure D5 of the fourth angle setting method. Procedure F4 is the same as procedure D6 of the fourth angle setting method.

(scribing processing) For the scribing process, a scribing processing device in which the winding angle of the winding portion 320 is set by the angle setting unit 500 is used. In the scribing process, for example, the same state as that of the premise embodiment was observed.

(Effect) According to the structure illustrated in the embodiment, for example, the following effects can be obtained.

In one example, the sliding unit 100 includes the same configuration as the sliding unit 100 of the embodiment of the premise.

With the above configuration, for example, the following effects can be obtained. The same effect as that obtained by the embodiment of the premise is obtained.

In one example, the bearing portion 310 is a second body forming portion 720 that is joined to a part of the slider body 700 .

With the above configuration, for example, the following effects can be obtained. Since the bearing portion 310 is joined to a highly rigid element, the winding angle of the winding portion 320 set by the angle setting portion 500 is not easily changed even when an impact is applied to the sliding unit 100 .

Moreover, the form which the slide unit of this invention can take is not limited to the description described in each said embodiment. The sliding unit of this invention can take the form different from the form illustrated in each embodiment. As an example, there is an aspect in which a part of the configuration of each embodiment is replaced, changed, or omitted, or an aspect in which a new configuration is added to each embodiment.

10: Scoring head 10B1～10B6: bolts 10B41: head 20: base 20A: The first main surface 20B: The second main surface 30: Guidance department 31: fixed rail 31A: Fitting part 31A1: Slot 32: Movable rail 32A: Fitting part 32A1: convex part 40: support part 41: middle part 41A: Bolt configuration department 42: upper part 42A: The first configuration department 42A1: concave part 43: lower part 43A: Pressed part arrangement part 43A1: Slit 44: spacer 50:Load regulation department 51: Actuator 51A: Bolt configuration department 52: Pressing part 52A: Piston 100: sliding unit 200: slide 210: slider body 210FB: Bottom 211: Bearing configuration department 211A: configuration space 212: Intermediate configuration department 212A: hole 213: Upper configuration department 214: The first bottom configuration department 214A: screw hole 215: The second bottom configuration department 215A: screw hole 216: The third bottom configuration department 216A: hole 220: Pressed part 222: plate 230: Position setting department 231: pin 300: Holder connector 310: Bearing Department 311, 311A, 311B: bearing 312: box body 312A: Cylinder 312B: Flange 312BF: Bottom 312C: cover 313: spacer 314: O-ring 320: winding part 320A: the first contacted part 320B: the second contacted part 321: winding shaft 322: adsorption part 322A: magnet 323: Ministry of Regulations 323A: pin 324: reference plane 324A: 1st datum plane 324B: The second reference plane 324C: 3rd reference plane 324D: 4th datum plane 330: Holder connection part 331: The first configuration department 331A: configuration space 332: The second configuration department 332A: hole 400: holder unit 411: base 411A: Bevel 412: support part 412A: the first support part 412B: The second support part 412C: hole 413: configuration department 413A: Slit 420: scoring knife wheel 421: configuration department 421A: hole 422: knife edge 430: pin 440: anti-falling part 441: bolt 450: Measuring plate 451: Surface to be measured 500: Angle setting department 510: pressing part 511: the first pressing part 511A: Ball plunger 511A1: Cylinder 511A2: ball 512A: fine tooth screw 512A1: front end 520: fixed part 521: The first configuration department 521A: hole 522: The second configuration department 522A: hole 523: Ministry of Regulations 523A: 1st end 523B: 2nd end 523C: Specified surface 600: Setting part body 601: The first component 602: The second component 603: The third component 604: 4th Composition 605: The first connecting part 606: The second connecting part 607: The third connecting part 608: The 4th connecting part 610: Convoluted part configuration department 611: hole 612: inner peripheral surface 620: Pressing part configuration part 621: The first pressing part configuration part 621A: hole 622: The second pressing part arrangement part 622A: screw hole 630: Bolt configuration department 631: 1st Bolt Arrangement Department 631A: hole 632: 2nd Bolt Arrangement Department 632A: hole 633: The 3rd Bolt Arrangement Department 633A: hole 634: The 4th Bolt Arrangement Department 634A: hole 640: Setting Department Configuration Department 641: The first configuration department 641A: long hole 642: The second configuration department 642A: hole 650: Head configuration department 651: The first configuration department 651A: Concave 652: The second configuration department 652A: Concave 660: Flange arrangement part 661: The first configuration department 661A: concave part 662: The second configuration department 662A: concave part 700: slider body 710: The 1st main body component 710A: upper part 710B: Lower part 711: Intermediate configuration department 711A: hole 712: Upper configuration department 713: opposite part 713A: concave part 714: Intermediate configuration department 714A: screw hole 720: The second main body structure 721: Joint configuration department 721A: concave part 721B: hole 722: Intermediate configuration department 722A: hole 731: above 732: Bottom 733: 2nd side 734: Bottom 741: above 742: Bottom 743: 1st side 800: Setting part body 810: The 1st main body component 820: The second main body component 830: Pressing part configuration department 831: The first pressing part configuration part 831A: hole 832: The second pressing part arrangement part 832A: screw hole 840: Bolt configuration department 841: 1st Bolt Arrangement Department 841A: screw hole 842: 2nd Bolt Arrangement Department 842A: screw hole

[Figure 1] is a three-dimensional view of the marking head (1-1). [Figure 2] is a three-dimensional view of the marking head (1-2). [Fig. 3] is a side view of the marking head. [Fig. 4] Front view of the marking head. [Figure 5] is the bottom view of the marking head. [Fig. 6] It is an exploded perspective view (1-1). [Fig. 7] It is an exploded perspective view (1-2). [Fig. 8] It is an exploded perspective view (1-3). [Fig. 9] A cross-sectional view of the retainer joint. [Figure 10] is a perspective view of the main body of the adjustment part. [Fig. 11] is the bottom view (1-1) of the sliding unit. [Fig. 12] is the bottom view (1-2) of the sliding unit. [Fig. 13] is the bottom view (1-3) of the sliding unit. [Fig. 14] is the bottom view (1-4) of the sliding unit. [Fig. 15] is the bottom view (1-5) of the sliding unit. [Fig. 16] It is an exploded perspective view (2-1). Fig. 17] is an exploded perspective view (2-2). [Fig. 18] is the bottom view (2-1) of the sliding unit. [Fig. 19] is the bottom view (2-2) of the sliding unit. [Fig. 20] is the bottom view (2-3) of the sliding unit. [Fig. 21] is the bottom view (2-4) of the sliding unit. [Fig. 22] is the bottom view (2-5) of the sliding unit.

10B4: Bolt

10B5: Bolt

100: sliding unit

200: slide

210: slider body

210FB: Bottom

220: Pressed part

230: Position setting department

231: pin

300: Holder connector

312BF: Bottom

320: winding part

400: holder unit

500: Angle setting department

510: pressing part

520: fixed part

521: The first configuration department

521A: hole

522: The second configuration department

522A: hole

523: Ministry of Regulations

523A: 1st end

523B: 2nd end

523C: Specified surface

600: Setting part body

610: Convoluted part configuration department

620: Pressing part configuration part

630: Bolt configuration department

640: Setting Department Configuration Department

Claims (11)

A sliding unit having: slider; A retainer joint, which includes a bearing portion connected to the slider, and a winding portion that can rotate relative to the bearing portion; and The angle setting part can set the winding angle of the winding part relative to the slider. The sliding unit according to claim 1, wherein the angle setting part includes a first pressing part that presses the winding part to make the winding part rotate in the first winding direction, and presses the winding part to make the winding part rotate in the first winding direction. A second pressing portion that rotates in a second winding direction that is opposite to the first winding direction. The sliding unit according to claim 2, wherein one of the first pressing portion and the second pressing portion includes an elastic element. The sliding unit according to claim 3, wherein the other of the first pressing portion and the second pressing portion includes a screw element. The sliding unit according to any one of Claims 2 to 4, wherein the first pressing part and the second pressing part are configured such that the winding part is sandwiched between the first pressing part and the second pressing part between. The sliding unit according to any one of Claims 2 to 4, wherein the angle setting part includes a first pressing part arrangement part in which the first pressing part is arranged, and a second pressing part in which the second pressing part is arranged configuration department. The sliding unit according to any one of claims 2 to 4, wherein the winding portion includes a holder connecting portion that can be connected to the holder unit, and a winding shaft connected to the bearing portion; The first pressing part and the second pressing part press the holder connection part. The sliding unit according to any one of claims 1 to 4, wherein the angle setting part includes a fixing part capable of fixing the winding angle of the winding part. The sliding unit according to claim 8, wherein the fixing part can be attached to and detached from the sliding piece. The sliding unit according to any one of claims 1 to 4, wherein the slider includes a slider body connected to the bearing portion; The angle setting part is arranged at the bottom of the slider body. A scoring head having: The sliding unit has a slider, a holder joint including a bearing part connected to the slider and a winding part that can rotate relative to the bearing part, and an angle setting part that can set the winding angle of the winding part relative to the slider; a base supporting the sliding unit; a guide part that connects the sliding unit and the base in such a way that the sliding unit can move relative to the base in the height direction; a load adjusting unit that applies a load to the slide unit; and The supporting part supports the sliding unit and the load adjusting part.

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