CN116062980A

CN116062980A - Sliding unit and scribing head

Info

Publication number: CN116062980A
Application number: CN202211312540.4A
Authority: CN
Inventors: 冈岛康智; 岩坪佑磨; 竹原春香; 阪口良太
Original assignee: Mitsuboshi Diamond Industrial Co Ltd
Current assignee: Mitsuboshi Diamond Industrial Co Ltd
Priority date: 2021-10-29
Filing date: 2022-10-25
Publication date: 2023-05-05
Also published as: KR20230062387A; TW202319359A; JP2023066825A; JP7464991B2

Abstract

The invention provides a sliding unit and a scribing head capable of improving the machining precision of scribing. The slide unit (100) is provided with a slider (200), a holder joint (300), and an angle setting unit (500). The retainer joint (300) includes: a bearing part connected to the slider (200); and a rotating unit (320) configured to be rotatable with respect to the bearing unit. The angle setting unit (500) is configured to be able to set the rotation angle of the rotation unit (320) with respect to the slider (200).

Description

Sliding unit and scribing head

Technical Field

The present invention relates to a slider unit mounted on a scribing head, and a scribing head provided with the slider unit.

Background

A scribing apparatus is used for scribing a workpiece such as a brittle material substrate. The scribing device comprises a scribing head. The scribing head comprises a sliding unit. The sliding unit includes: a slider, a retainer tab, and a retainer unit.

The retainer joint includes a bearing portion and a rotating portion. The bearing portion is coupled to the slider. The rotating portion is rotatably coupled to the bearing portion with respect to the slider. The holder unit includes a holder and a scribing wheel. The retainer is coupled to the rotating portion. The scribing wheel is supported by the holder.

The scribing device is used for scribing the workpiece. In scribing, the position of the scribing head is set so that the scribing wheel contacts the workpiece. The scribe head scans in a prescribed direction. The scribing wheel moves on the workpiece and forms scribing marks on the workpiece. Patent document 1 describes an example of a conventional scribing device.

Prior art literature

Patent literature

Patent document 1: japanese patent No. 4484303

Disclosure of Invention

First, the technical problem to be solved

The rotation angle of the scribing wheel relative to the slide block in scribing can be stabilized, so that the scribing precision can be improved.

(II) technical scheme

The sliding unit of the present invention comprises: a slide block; a holder joint including a bearing portion coupled to the slider and a rotating portion configured to be rotatable with respect to the bearing portion; and an angle setting unit configured to be able to set a rotation angle of the rotation unit with respect to the slider.

According to the above sliding unit, for example, the following effects can be obtained. Since the rotation angle of the rotation portion can be set by the angle setting portion, the rotation angle of the rotation portion in scribing processing is stable. The rotation angle of the holder coupled to the rotation portion and the rotation angle of the scribing wheel supported by the holder are also stable. Therefore, the processing accuracy of scribing processing can be improved.

In one example of the sliding unit, the angle setting unit includes: a first pressing portion that presses the rotating portion so that the rotating portion rotates in a first rotation direction; and a second pressing portion that presses the rotating portion so that the rotating portion rotates in a second rotational direction, which is a direction opposite to the first rotational direction.

According to the above sliding unit, for example, the following effects can be obtained. The operability related to the operation of adjusting the rotation angle of the rotation part is improved.

In one example of the sliding unit, one of the first pressing portion and the second pressing portion includes an elastic element.

In one example of the sliding unit, the other of the first pressing portion and the second pressing portion includes a screw element.

In one example of the sliding unit, the first pressing portion and the second pressing portion are arranged so as to sandwich the rotating portion between the first pressing portion and the second pressing portion.

According to the above sliding unit, for example, the following effects can be obtained. The rotation angle of the rotation part is stable.

In one example of the sliding unit, the angle setting unit includes: a first pressing portion arrangement portion in which the first pressing portion is arranged, and a second pressing portion arrangement portion in which the second pressing portion is arranged.

According to the above sliding unit, for example, the following effects can be obtained. The first pressing part and the second pressing part are stable in position.

In one example of the sliding unit, the rotating unit includes: the first pressing portion and the second pressing portion are configured to press the holder coupling portion.

According to the above sliding unit, for example, the following effects can be obtained. The structure of the bearing part is simplified.

In one example of the sliding unit, the angle setting unit includes a fixing portion configured to be capable of fixing a rotation angle of the rotating portion.

In one example of the slide unit, the fixing portion is configured to be detachable from the slider.

In one example of the sliding unit, the slider includes a slider body coupled to the bearing portion, and the angle setting portion is provided at a bottom portion of the slider body.

The scribing head of the present invention comprises: a sliding unit including a slider, a holder joint including a bearing portion coupled to the slider, and a rotation portion configured to be rotatable with respect to the bearing portion, and an angle setting portion configured to be capable of setting a rotation angle of the rotation portion with respect to the slider; a base that supports the sliding unit; a guide portion that connects the slide unit and the base so that the slide unit can move in a height direction relative to the base; a load adjustment unit that applies a load to the slide unit; and a support portion that supports the slide unit and the load adjustment portion.

According to the scribing head described above, for example, the following effects can be obtained. Since the rotation angle of the rotation portion can be set by the angle setting portion, the rotation angle of the rotation portion in scribing processing is stable. The rotation angle of the holder coupled to the rotation portion and the rotation angle of the scribing wheel supported by the holder are also stable. Therefore, the processing accuracy of scribing processing can be improved.

(III) beneficial effects

According to the slide unit and the scribing head of the present invention, the machining accuracy of scribing can be improved.

Drawings

Fig. 1 is a perspective view (1-1) of the scribing head.

Fig. 2 is a perspective view (1-2) of the line marking head.

Fig. 3 is a side view of the line marking head.

Fig. 4 is a front view of the line marking head.

Fig. 5 is a bottom view of the line marking head.

Fig. 6 is an exploded perspective view (1-1).

Fig. 7 is an exploded perspective view (1-2).

Fig. 8 is an exploded perspective view (1-3).

Fig. 9 is a cross-sectional view of the holder joint.

Fig. 10 is a perspective view of the adjustment unit body.

Fig. 11 is a bottom view (1-1) of the slide unit.

Fig. 12 is a bottom view (1-2) of the slide unit.

Fig. 13 is a bottom view (1-3) of the slide unit.

Fig. 14 is a bottom view (1-4) of the slide unit.

Fig. 15 is a bottom view (1-5) of the slide unit.

Fig. 16 is an exploded perspective view (2-1).

Fig. 17 is an exploded perspective view (2-2).

Fig. 18 is a bottom view (2-1) of the slide unit.

Fig. 19 is a bottom view (2-2) of the slide unit.

Fig. 20 is a bottom view (2-3) of the slide unit.

Fig. 21 is a bottom view (2-4) of the slide unit.

Fig. 22 is a bottom view (2-5) of the slide unit.

Description of the reference numerals

A 100-slide unit; 200-sliding blocks; 300-retainer joint; 310-bearing part; 320-a rotating part; 500-angle setting section.

Detailed Description

(first embodiment)

Reference is made to fig. 1 to 15. The scribing head 10 is mounted on a scribing device for scribing an object to be processed. The structure of the scribing processing device can be arbitrarily selected. The structure of the scribing device is not limited to the exemplified structure. The scribing device includes, for example: a table, a driving device, a scribing head 10, and the like.

As an example of the workpiece, a substrate is given. As an example of the substrate, a brittle material substrate is given. Examples of the brittle material substrate include a glass substrate, a ceramic substrate, a silicon substrate, a compound semiconductor substrate, a sapphire substrate, and a quartz substrate. Examples of the ceramic substrate include a low-temperature sintered ceramic and a high-temperature sintered ceramic.

The driving device is configured to be able to arbitrarily change the position of the scribe head 10 with respect to the workpiece. The structure of the driving device can be arbitrarily selected. The structure of the driving device is not limited to the illustrated structure. The driving device includes, for example, a planar driving section and a vertical driving section. The vertical driving part is connected to the workbench. The planar driving part is connected to the vertical driving part. The scribe head 10 is connected to a planar driving section.

The vertical driving section includes an actuator. The vertical driving part makes the plane driving part along the scribing device moves in the height direction. The planar driving section includes an actuator. The planar driving section moves the scribing head 10 in a predetermined translational direction.

(scribing head)

Reference is made to fig. 1 to 5. The structure of the scribing head 10 may be arbitrarily selected. The structure of the scribing head 10 is not limited to the illustrated structure. The scribe head 10 includes, for example: base 20, guide portion 30, support portion 40, load adjusting portion 50, and slide unit 100.

For the scribe head 10, for example, provision is made for: first width direction, second width direction, front, rear, upper, and lower. The first width direction is the opposite direction of the second width direction. The right side in fig. 4 and the lower side in fig. 5 correspond to the first width direction of the scribing head 10. The left side in fig. 4 and the upper side in fig. 5 correspond to the second width direction of the scribe head 10. The right side in fig. 3 and the right side in fig. 5 correspond to the front of the scribe head 10. The left side in fig. 3 and the left side in fig. 5 correspond to the rear of the scribing head 10. The upper part of fig. 3 and the upper part of fig. 4 correspond to the upper part of the scribe head 10. The lower part of fig. 3 and the lower part of fig. 4 correspond to the lower part of the scribe head 10.

The width direction is a generic term for the first width direction and the second width direction. Width direction and width direction the X-axis is parallel. The depth direction is a general term for the front and rear. The depth direction is parallel to the Y axis. The height direction is a general term for the upper and lower directions. The height direction is parallel to the Z axis. The X-axis and Y-axis define a first coordinate plane. The X-axis and the Z-axis define a second coordinate plane. The Y-axis and the Z-axis define a third coordinate plane.

(base)

Reference is made to fig. 3 to 5. The base 20 is configured to be able to support the slide unit 100. The base 20 is, for example, a plate. The base 20 includes a first main surface 20A and a second main surface 20B. The first major face 20A is planar. The first main surface 20A faces the first width direction. The second main surface 20B is a plane. The second main surface 20B faces the second width direction. The first main surface 20A and the second main surface 20B correspond to reference surfaces of the scribing head 10.

The planar driving part of the driving device comprises a connecting part. The first main surface 20A of the base 20 faces the connection portion of the planar driving portion. The base 20 is connected to a connection portion of the planar driving portion. The base 20 and the planar driving portion are coupled mechanically, for example. In one example, the base 20 is coupled to the planar driving section by a plurality of bolts. In a state where the base 20 is coupled to the planar driving section, the first main surface 20A and the second main surface 20B are parallel to the third coordinate plane.

The base 20 includes, for example, a first arrangement portion 21. The first arrangement portion 21 is configured to be able to arrange the fixed rail 31 of the guide portion 30. The first arrangement portion 21 is provided on the second main surface 20B of the base 20. The first arrangement portion 21 includes, for example, a groove 21A. The groove 21A is elongated in the height direction.

(guiding part)

Reference is made to fig. 4 and 5. The guide portion 30 couples the slide unit 100 and the base 20 in such a manner that the slide unit 100 can move in the height direction with respect to the base 20. The guide portion 30 includes, for example, a fixed rail 31 and a movable rail 32.

The fixing rail 31 includes, for example, a fitting portion 31A. The fitting portion 31A is configured to be fitted with the fitting portion 32A of the movable rail 32. The fitting portion 31A includes a groove 31A1. The groove 31A1 is elongated in the height direction.

The fixed rail 31 is disposed in the groove 21A of the base 20. The fixed rail 31 is coupled to the base 20 using one or more bolts.

The movable rail 32 includes, for example, a fitting portion 32A. The fitting portion 32A is configured to be fitted with the fitting portion 31A of the fixed rail 31. The fitting portion 32A includes a convex portion 32A1. The convex portion 32A1 extends in the height direction. The movable rail 32 is coupled to the fixed rail 31. The movable rail 32 is movable relative to the fixed rail 31.

(support portion)

Reference is made to fig. 3 and 4. The support portion 40 is configured to be capable of supporting the actuator 51 of the load adjuster 50 and the pressed portion 220 of the slide unit 100. The support 40 is, for example, a block.

The support portion 40 includes, for example, an intermediate portion 41. The intermediate portion 41 includes, for example, a bolt arrangement portion 41A. The bolt arrangement portion 41A is configured to be able to arrange one or a plurality of bolts 10B1. The bolt arrangement portion 41A includes one or more holes. The hole penetrates the intermediate portion 41. The central axis of the hole is parallel to the width direction.

The support portion 40 includes, for example, an upper portion 42. The upper portion 42 is located above with respect to the intermediate portion 41. The upper portion 42 includes, for example, a first arrangement portion 42A.

The first arrangement portion 42A is configured to be able to arrange the actuator 51 of the load adjuster 50. The first arrangement portion 42A includes, for example, a recess 42A1. The recess 42A1 is open at the upper surface of the upper portion 42.

The support portion 40 includes, for example, a lower portion 43. The lower portion 43 is located below with respect to the intermediate portion 41 and the upper portion 42. A space is formed between the upper portion 42 and the lower portion 43. The lower portion 43 includes, for example, a pressed portion arrangement portion 43A.

The pressed portion arrangement portion 43A is configured to be able to arrange the pressed portion 220 of the slide unit 100. The pressed portion arrangement portion 43A includes, for example, a slit 43A1. The slit 43A1 penetrates the lower portion 43 in the height direction. The slit 43A1 opens at the second side of the lower portion 43. The second side faces toward the second width direction.

The scribe head 10 includes, for example, a spacer 44. The spacer 44 includes a bolt arrangement portion. The bolt arrangement portion is configured to be able to arrange one or a plurality of bolts 10B1. The bolt arrangement portion includes one or more holes. The hole penetrates the bolt arrangement portion. The central axis of the hole is parallel to the width direction.

The spacer 44 is disposed between the support portion 40 and the base 20. The spacer 44 is located in the second width direction with respect to the second main surface 20B of the base 20. The support portion 40 is located in the second width direction with respect to the spacer 44. The support portion 40 and the spacer 44 are coupled to the base 20 by a plurality of bolts 10B 1.

(load adjusting part)

Reference is made to fig. 3 and 4. The load adjuster 50 is configured to apply a load to the slide unit 100. The load adjuster 50 applies a load acting downward to the slide unit 100, for example. The load adjusting portion 50 includes, for example, an actuator 51 and a pressing portion 52.

Examples of the actuator 51 include a power cylinder, a solenoid, an electric motor, a servo motor, and a linear actuator. Examples of the power cylinder include hydraulic cylinders, pneumatic cylinders, hydraulic cylinders, and electric cylinders.

The actuator 51 includes, for example, a bolt arrangement portion 51A. The bolt arrangement portion 51A is configured to be able to arrange one or a plurality of bolts 10B3. The bolt arrangement portion 51A includes one or more holes.

The central axis of the hole is parallel to the height direction.

The pressing portion 52 is coupled to the actuator 51. The pressing portion 52 includes, for example, a piston 52A. The front end portion of the pressing portion 52 is in contact with the slide unit 100. The pressing portion 52 is configured to be displaceable in the height direction with respect to the actuator 51. The pressing portion 52 transmits the force applied from the actuator 51 to the slide unit 100.

The actuator 51 is disposed at the first disposition portion 42A of the upper portion 42 of the support portion 40. The front end portion of the pressing portion 52 is disposed between the upper portion 42 and the lower portion 43 of the support portion 40. The actuator 51 is coupled to the support portion 40 by a plurality of bolts 10B 3.

(sliding Unit)

Reference is made to fig. 2 and 4. The structure of the sliding unit 100 may be arbitrarily selected. The structure of the sliding unit 100 is not limited to the illustrated structure. The slide unit 100 includes, for example: the slider 200, the holder joint 300, the holder unit 400, and the angle setting unit 500. The slider 200 supports the holder tab 300. The holder tab 300 supports the holder unit 400.

(retainer unit)

Refer to fig. 6 and 7. The structure of the holder unit 400 may be arbitrarily selected. The structure of the holder unit 400 is not limited to the illustrated structure. The holder unit 400 is configured to be detachable from the holder joint 300. The holder unit 400 includes, for example: a holder 410, a scribing wheel 420, a pin 430, and a drop-off prevention portion 440.

The holder 410 includes, for example, a base 411. The base 411 is configured to be capable of being disposed on the holder joint 300. The base 411 includes a bevel 411A. The inclined surface 411A is provided on the front surface of the base 411. The inclined surface 411A is inclined rearward as it goes upward.

The holder 410 includes, for example, a support portion 412. The support portion 412 is located below with respect to the base portion 411. The support portion 412 is configured to be able to support the pin 430. The support portion 412 includes a first support portion 412A and a second support portion 412B. Each of the

support portions

412A, 412B includes a hole 412C. The hole 412C penetrates the support portion 412. The center axis of the hole 412C is parallel to the width direction.

The holder 410 includes, for example, a disposition portion 413. The arrangement portion 413 is configured to be able to arrange the scribing wheel 420. The arrangement portion 413 is provided at a portion including the inner side portion of the first support portion 412A and the inner side portion of the second support portion 412B.

The arrangement portion 413 includes, for example, a slit 413A. A slit 413A is formed between the first support portion 412A and the second support portion 412B. The slit 413A opens at the front surface, the rear surface, and the bottom surface of the holder 410.

Scribing wheel 420 is disposed in gap 413A. The scribing wheel 420 is formed of, for example, a high hardness material. Examples of the high-hardness material include super hard alloy, polycrystalline diamond, and single crystal diamond. Examples of polycrystalline diamond include diamond sintered compact (Poly-Crystalline Diamond) and Nano polycrystalline diamond (Nano-Polycrystalline Diamond).

Scribing wheel 420 includes arrangement 421 and blade 422. The arrangement portion 421 is configured to be able to arrange the pin 430. The arrangement portion 421 includes, for example, a hole 421A. The hole 421A penetrates the arrangement portion 421. The center axis of the hole 421A is parallel to the width direction.

The blade 422 is configured to be capable of scribing a workpiece. The blade 422 is provided on the outer peripheral portion of the scribing wheel 420. The blade 422 is included in the center plane of the scribing wheel 420. The center plane of the scribing wheel 420 is orthogonal to the center axis of the scribing wheel 420.

The pin 430 is configured to support the scribing wheel 420. The pin 430 is disposed in the hole 412C of the first support portion 412A, the hole 412C of the second support portion 412B, and the hole 421A of the scribing wheel 420.

The scribing wheel 420 is rotatably supported by the pin 430 with respect to the pin 430. In a state where a load is applied to the slide unit 100 from the load adjusting portion 50, the scribing wheel 420 is pressed against the workpiece in response to the load.

The falling-preventing portion 440 is disposed on the supporting portion 412 to prevent the pin 430 from falling off the supporting portion 412. The drop-off preventing portion 440 includes, for example, a plurality of pins 441. The first pin 441 is disposed in the hole 412C of the first support portion 412A. The second pin 441 is disposed in the hole 412C of the second support portion 412B.

(retainer joint)

Refer to fig. 6 and 9. The structure of the holder tab 300 may be arbitrarily selected. The structure of the holder tab 300 is not limited to the illustrated structure. The holder joint 300 is configured to be detachable from the slider 200. The holder joint 300 includes, for example, a bearing portion 310 and a rotating portion 320.

The bearing portion 310 is configured to be capable of supporting the rotating portion 320. The bearing portion 310 includes, for example, one or more bearings 311. In the illustrated example, the bearing portion 310 includes a plurality of bearings 311. The plurality of bearings 311 include, for example, a first bearing 311A and a second bearing 311B.

The bearing portion 310 includes, for example, a housing 312. The housing 312 includes, for example: sleeve 312A, flange 312B, and cap 312C. The first bearing 311A and the second bearing 311B are disposed inside the sleeve 312A. The first bearing 311A and the second bearing 311B are arranged in the height direction. The outer ring of each bearing 311A, 311B is coupled to a sleeve 312A.

The flange 312B is provided at the outer peripheral portion of the opening of the lower portion of the sleeve 312A. The cover 312C is provided at an opening portion of the upper portion of the sleeve 312A. An opening of an upper portion of the sleeve 312A is closed by a cover 312C.

The bearing portion 310 includes, for example, a spacer 313 and one or more O-rings 314. The spacer 313 is disposed inside the sleeve 312A. The spacer 313 is disposed between the first bearing 311A and the second bearing 311B. In the illustrated example, the bearing portion 310 includes a plurality of O-rings 314. A plurality of O-rings 314 are mounted to the outer peripheral portion of the sleeve 312A.

The rotation portion 320 is rotatably coupled to the bearing portion 310 about a central axis of the bearing portion 310. The rotating portion 320 includes, for example: a rotation shaft 321, an adsorption portion 322, a restriction portion 323, and a holder coupling portion 330.

The rotation shaft 321 is coupled to the inner rings of the

bearings

311A and 311B. The rotation shaft 321 rotates with respect to the outer ring of each bearing 311A, 311B and the housing 312.

The holder coupling portion 330 is configured to be capable of coupling the holder unit 400. The holder coupling portion 330 is, for example, a sleeve. The holder connecting portion 330 includes, for example, a first arrangement portion 331 and a second arrangement portion 332.

The first arrangement portion 331 is configured to be able to arrange the holder 410. The first arrangement portion 331 includes an arrangement space 331A, for example. The second disposing portion 332 is configured to be capable of disposing the restricting portion 323. The second arrangement portion 332 includes, for example, a hole 332A. The hole 332A is connected to the configuration space 331A.

The lower end of the rotation shaft 321 is disposed in the disposition space 331A. The lower end portion of the rotation shaft 321 is coupled to the holder coupling portion 330. The rotation shaft 321 and the holder connecting portion 330 are mechanically coupled, for example. In the illustrated example, the rotation shaft 321 is pressed into the holder connecting portion 330.

The suction portion 322 is configured to be capable of sucking the holder 410 of the holder unit 400 by magnetic force. The suction portion 322 includes, for example, a magnet 322A. The suction unit 322 is disposed in the disposition space 331A. The suction portion 322 is located below the rotation shaft 321.

The suction portion 322 is connected to the holder connection portion 330. The attachment means of the suction portion 322 and the holder attachment portion 330 is, for example, chemical bonding. In the illustrated example, the suction portion 322 is engaged with the holder coupling portion 330 using an adhesive.

The restricting portion 323 is configured to determine the position of the holder 410 in the height direction with respect to the holder coupling portion 330. In one example, the restricting portion 323 includes a pin 323A. The restricting portion 323 is disposed in the hole 332A and the disposition space 331A.

The restricting portion 323 is coupled to the holder coupling portion 330. The restricting portion 323 and the holder connecting portion 330 are mechanically coupled, for example. In the illustrated example, the restricting portion 323 is pressed into the holder coupling portion 330.

The rotating portion 320 includes one or more datum surfaces 324. The reference plane 324 is a plane. In the illustrated example, the rotating portion 320 includes a plurality of datum surfaces 324. The plurality of reference surfaces 324 includes: a first reference surface 324A, a second reference surface 324B, a third reference surface 324C, and a fourth reference surface 324D.

The reference surface 324 constitutes, for example, an outer surface of the holder coupling portion 330. Rotation of the first reference surface 324A with respect to the width direction the center of the portion 320 is located in the first width direction. The second reference surface 324B is located in the second width direction with respect to the center of the rotating portion 320 in the width direction. The third reference surface 324C is located forward with respect to the center of the rotation portion 320 in the depth direction. The fourth reference surface 324D is located rearward with respect to the center of the rotation portion 320 in the depth direction.

(sliding block)

Reference is made to fig. 3 and 7. The structure of the slider 200 can be arbitrarily selected. The structure of the slider 200 is not limited to the illustrated structure. The slider 200 includes, for example: a slider body 210, a pressed portion 220, and a position setting portion 230. The slider body 210 is, for example, a block. The pressed portion 220 and the position setting portion 230 are coupled to the slider body 210.

The slider body 210 includes, for example, a bearing portion arrangement portion 211. The bearing portion arrangement portion 211 is configured to be able to arrange the bearing portion 310 of the holder joint 300. The bearing portion arrangement portion 211 includes an arrangement space 211A, for example. The arrangement space 211A is opened at the bottom surface 210FB of the slider body 210.

The slider body 210 includes, for example, an intermediate arrangement portion 212. The intermediate arrangement portion 212 is configured to be able to arrange one or more bolts 10B2. The intermediate arrangement 212 includes one or more apertures 212A. The hole 212A penetrates the intermediate arrangement portion 212. The center axis of the hole 212A is parallel to the width direction. The slider body 210 is coupled to the movable rail 32 by a plurality of bolts 10B2.

The slider body 210 includes, for example, an upper arrangement portion 213. The upper arrangement portion 213 is configured to be able to arrange the coupling bolt 221. The upper arrangement portion 213 includes, for example, a screw hole. The screw hole is opened at the upper surface of the slider body 210. The center axis of the screw hole is parallel to the height direction.

The slider body 210 includes, for example, a first bottom arrangement portion 214. The first bottom arrangement portion 214 is configured to be able to arrange one or a plurality of bolts 10B4. The first bottom arrangement 214 includes one or more threaded holes 214A. The screw hole 214A opens at the bottom surface 210FB of the slider body 210. The center axis of the screw hole 214A is parallel to the height direction.

The slider body 210 includes, for example, a second bottom arrangement portion 215. The second bottom arrangement portion 215 is configured to be able to arrange one or a plurality of bolts 10B5. The second bottom arrangement 215 includes one or more threaded holes 215A. The screw hole 215A opens at 210FB of the slider body 210. The center axis of the screw hole 215A is parallel to the height direction.

The slider body 210 includes, for example, a third bottom arrangement 216. The third bottom arrangement portion 216 is configured to be able to arrange one or more pins 231. The third bottom arrangement 216 includes one or more apertures 216A. The hole 216A opens at the bottom surface 210FB of the slider body 210. The central axis of the hole 216A is parallel to the height direction.

The pressed portion 220 is configured to contact the pressing portion 52 of the load adjuster 50. The pressed portion 220 includes, for example, a connecting bolt 221 and a plate 222. The screw thread of the coupling bolt 221 is disposed in the screw hole of the upper disposition portion 213. The coupling bolt 221 is coupled to the slider body 210.

The plate 222 is coupled to an upper end portion of the coupling bolt 221. The plate 222 is located above with respect to the slider body 210. The pressing portion 52 of the load adjuster 50 is in contact with the plate 222. The pressing portion 52 presses the pressed portion 220 downward, thereby applying a load to the slider 200.

The position setting unit 230 is configured to be used for positioning the angle setting unit 500 with respect to the slider 200. The position setting part 230 includes, for example, one or more pins 231. The pin 231 is disposed in the hole 216A of the third bottom disposition portion 216. The pin 231 is coupled to the slider body 210. A portion of the pin 231 protrudes downward with respect to the bottom surface 210FB of the slider body 210.

(connection of elements)

Refer to fig. 6 and 7. The holder unit 400 is coupled to the holder tab 300. The base 411 of the holder 410 is disposed in the disposition space 331A of the holder coupling portion 330. The holder 410 is adsorbed by the adsorbing portion 322. The inclined surface 411A of the base 411 contacts the restricting portion 323. The position of the holder 410 with respect to the holder coupling part 330 is determined by the contact of the base 411 with the restriction part 323.

The holder joint 300 is coupled to the slider 200. The bearing portion 310 is disposed in the disposition space 211A of the slider body 210. The bottom of the flange 312B of the housing 312 protrudes downward with respect to the bottom surface 210FB of the slider body 210.

The bolt 10B4 is disposed in the screw hole 214A of the first bottom portion 214. The head 10B41 of the bolt 10B4 is located below with respect to the bottom surface 312BF of the flange 312B. The head 10B41 of the bolt 10B4 contacts the bottom surface 312BF of the flange 312B. The position of the bearing portion 310 with respect to the slider body 210 is determined by the bolt 10B 4.

In a state where the holder joint 300 is coupled to the slider 200, the rotating portion 320 of the holder joint 300 and the holder unit 400 integrally rotate with respect to the slider 200.

The rotating portion 320 rotates around the center axis of the bearing portion 310 in the first rotation direction or the second rotation direction with respect to the outer ring of the bearing 311 and the housing 312. The first rotational direction is the opposite direction of the second rotational direction. The rotation direction is a generic term for the first rotation direction and the second rotation direction. The operation of the rotating portion 320 rotating in the first rotation direction is referred to as "first rotation operation". The operation of the rotating portion 320 rotating in the second rotation direction is referred to as "second rotation operation". The rotation operation is a generic term for the first rotation operation and the second rotation operation.

The rotation angle about the central axis of the bearing portion 310 with respect to the rotation portion 320 and the element integrally rotated with the rotation portion 320 is referred to as "rotation angle". The torque that acts to cause the rotating unit 320 to perform the first rotation operation is referred to as "first torque". The torque that acts to cause the rotating unit 320 to perform the second rotation operation is referred to as "second torque".

In a state where the rotation angle of the rotation portion 320 is 0 °, for example, the following state is observed. The first reference plane 324A is parallel to the second coordinate plane. The second reference plane 324B is parallel to the second coordinate plane. The third reference plane 324C is parallel to the third coordinate plane. The fourth reference plane 324D is parallel to the third coordinate plane. The central axis of the pin 430 of the holder unit 400 is parallel to the width direction. The center plane of the scribing wheel 420 is parallel to the third coordinate plane.

(Angle setting part)

Reference is made to fig. 8 and 10. The angle setting unit 500 is configured to be able to set the rotation angle of the rotation unit 320. The setting of the rotation angle of the rotation unit 320 includes: adjustment of the rotation angle, and retention of the rotation angle. The angle setting unit 500 is configured to be able to arbitrarily adjust the rotation angle of the rotation unit 320. The angle setting unit 500 is configured to be able to maintain the rotation angle of the rotation unit 320 at an arbitrary rotation angle.

At least a part of the angle setting unit 500 is formed separately from the slider body 210. In the illustrated example, all of the angle setting unit 500 is configured separately from the slider body 210. The angle setting unit 500 is configured to be detachable from the slider body 210. The angle setting part 500 is provided at the bottom of the slider body 210.

(pressing part)

Reference is made to fig. 8 and 10. The angle setting unit 500 includes, for example, a pressing unit 510. The pressing portion 510 is configured to be capable of pressing the rotating portion 320. The pressing portion 510 is configured to cause the rotating portion 320 to perform the first rotation operation or the second rotation operation. The pressing portion 510 is configured to be able to maintain the rotation angle of the rotating portion 320. The pressing portion 510 includes, for example, a first pressing portion 511 and a second pressing portion 512. The first pressing portion 511 and the second pressing portion 512 are configured to be capable of pressing different portions of the rotating portion 320, respectively.

One of the first pressing portion 511 and the second pressing portion 512 includes, for example, an elastic element. The elastic member is configured to be capable of applying an elastic force to the rotating portion 320. Examples of the elastic member include a plunger and a spring. The other of the first pressing portion 511 and the second pressing portion 512 includes, for example, a screw element. Examples of the screw element include a screw and a bolt.

The arrangement of the first pressing portion 511 and the second pressing portion 512 is exemplified. In the first example, the first pressing portion 511 and the second pressing portion 512 are arranged so as to sandwich the rotating portion 320 between the first pressing portion 511 and the second pressing portion 512. In the second example, the first pressing portion 511 and the second pressing portion 512 are arranged so as to be aligned in the width direction. In the third example, the first pressing portion 511 and the second pressing portion 512 are arranged so as to be aligned in the depth direction.

The rotating portion 320 includes a first contacted portion 320A and a second contacted portion 320B. The first contacted portion 320A is a portion that acts a first torque on the rotating portion 320 by being pressed. The second contacted portion 320B is a portion that acts a second torque on the rotating portion 320 by being pressed. In one example, the reference surface 324 of the rotating portion 320 includes a first contacted portion 320A and a second contacted portion 320B.

The first pressing portion 511 is configured to be capable of pressing the rotating portion 320 in a direction along a central axis of the first pressing portion 511 in a state of being in contact with the first contacted portion 320A of the rotating portion 320. When the first contacted portion 320A is pressed by the first pressing portion 511, a first torque acts on the rotating portion 320. In a state where the first pressing portion 511 is in contact with the first contacted portion 320A, the second rotation operation of the rotation portion 320 is restricted by the first pressing portion 511.

The second pressing portion 512 is configured to be capable of pressing the rotating portion 320 in a direction along the central axis of the second pressing portion 512 in a state of being in contact with the second contacted portion 320B of the rotating portion 320. When the second contacted portion 320B is pressed by the second pressing portion 512, a second torque acts on the rotating portion 320. In a state where the second pressing portion 512 is in contact with the second contacted portion 320B, the first rotation operation of the rotation portion 320 is restricted by the second pressing portion 512.

The rotation operation of the rotating portion 320 is restricted by each

pressing portion

511, 512 in a state where the first pressing portion 511 is in contact with the first contacted portion 320A and the second pressing portion 512 is in contact with the second contacted portion 320B. The rotation angle is maintained by the

pressing portions

511 and 512.

In the example in which the first pressing portion 511 includes an elastic element, when the first pressing portion 511 contacts the first contacted portion 320A and a second torque larger than the first torque due to the elastic force of the elastic element acts on the rotating portion 320, the rotating portion 320 performs a second rotation operation.

In the example in which the second pressing portion 512 includes an elastic element, when the second pressing portion 512 is in contact with the second contacted portion 320B and a first torque larger than a second torque due to an elastic force of the elastic element acts on the rotating portion 320, the rotating portion 320 performs a first rotation operation.

(setting part body)

Reference is made to fig. 8 and 10. The angle setting unit 500 includes, for example, a setting unit body 600. The setting unit main body 600 is configured to be detachable from the slider 200. The setting unit body 600 is, for example, a plate. The setting unit main body 600 includes, for example: first structure 601, second structure 602, third structure 603, and fourth structure 604.

The first structure portion 601 is located in the first width direction with respect to the center of the setting portion main body 600 in the width direction. The second structure 602 is located in the second width direction with respect to the center of the setting unit main body 600 in the width direction. The third structure portion 603 is located forward with respect to the center of the setting portion main body 600 in the depth direction. The fourth structure portion 604 is located rearward with respect to the center of the setting portion main body 600 in the depth direction.

The setting unit main body 600 includes: the first connection portion 605, the second connection portion 606, the third connection portion 607, and the fourth connection portion 608. The first connecting portion 605 connects the first structural portion 601 and the third structural portion 603. The second connecting portion 606 connects the first structural portion 601 and the fourth structural portion 604. The third connection portion 607 connects the second structure portion 602 and the third structure portion 603. The fourth connecting portion 608 connects the second structure portion 602 and the fourth structure portion 604.

The setting unit body 600 includes, for example, a rotating unit arrangement unit 610. The rotating portion arrangement portion 610 is configured to be able to arrange the rotating portion 320. The rotating portion arrangement portion 610 is provided at a portion including the inner portion of the first structure portion 601, the inner portion of the second structure portion 602, the inner portion of the third structure portion 603, and the inner portion of the fourth structure portion 604. The rotating portion arrangement portion 610 includes, for example, a hole 611 and an inner peripheral surface 612. The hole 611 penetrates the rotating portion arrangement portion 610. The central axis of the hole 611 is parallel to the height direction. The inner peripheral surface 612 defines a hole 611.

The setting unit main body 600 includes, for example, a pressing unit arrangement unit 620. The pressing portion arrangement portion 620 is configured to be able to arrange the pressing portion 510. The pressing portion arrangement portion 620 includes, for example, a first pressing portion arrangement portion 621 and a second pressing portion arrangement portion 622. The first pressing portion arrangement portion 621 is provided in the first structure portion 601. The second pressing portion arrangement portion 622 is provided in the second structure portion 602.

The first pressing portion arrangement portion 621 is configured to be able to arrange the first pressing portion 511. The first pressing portion arrangement portion 621 includes, for example, a hole 621A. The hole 621A penetrates the first pressing portion arrangement portion 621. The center axis of the hole 621A is parallel to the width direction. The first pressing portion arrangement portion 621 is located forward or rearward with respect to the center of the rotating portion arrangement portion 610 in the depth direction. In the illustrated example, the first pressing portion arrangement portion 621 is located rearward with respect to the center of the rotating portion arrangement portion 610 in the depth direction.

The second pressing portion arrangement portion 622 is configured to be able to arrange the second pressing portion 512. The second pressing portion arrangement portion 622 includes, for example, a screw hole 622A. The screw hole 622A penetrates the second pressing portion arrangement portion 622. The center axis of the screw hole 622A is parallel to the width direction. The second pressing portion arrangement portion 622 is located forward or rearward with respect to the center of the rotating portion arrangement portion 610 in the depth direction. In the example of the drawing, the second pressing portion arrangement portion 622 is located rearward with respect to the center of the rotating portion arrangement portion 610 in the depth direction.

The setting unit body 600 includes, for example, a bolt arrangement unit 630. The bolt arrangement portion 630 is configured to be able to arrange one or a plurality of bolts 10B5. The bolt arrangement portion 630 includes, for example: the first bolt arrangement portion 631, the second bolt arrangement portion 632, the third bolt arrangement portion 633, and the fourth bolt arrangement portion 634.

The first bolt arrangement portion 631 is provided to the first connecting portion 605. The second bolt arrangement portion 632 is provided at the second connection portion 606. The third bolt arrangement portion 633 is provided at a portion of the third structure portion 603 near the third connection portion 607. The fourth bolt arrangement portion 634 is provided at a portion of the fourth structure portion 604 near the fourth connection portion 608.

The first bolt arrangement portion 631 is configured to be able to arrange the bolts 10B5. The first bolt arrangement portion 631 includes, for example, a hole 631A. The hole 631A penetrates the first bolt arrangement portion 631. The central axis of the hole 631A is parallel to the height direction.

The second bolt arrangement portion 632 is configured to be able to arrange the bolts 10B5. The second bolt arrangement portion 632 includes, for example, a hole 632A. The hole 632A penetrates the second bolt arrangement portion 632. The central axis of the hole 632A is parallel to the height direction.

The third bolt arrangement portion 633 is configured to be able to arrange the bolts 10B5. The third bolt arrangement portion 633 includes, for example, a hole 633A. The hole 633A penetrates the third bolt arrangement portion 633. The center axis of the hole 633A is parallel to the height direction.

The fourth bolt disposing portion 634 is configured to be capable of disposing the bolt 10B5. The fourth bolt arrangement portion 634 includes, for example, a hole 634A. The hole 634A penetrates the fourth bolt arrangement portion 634. The central axis of the hole 634A is parallel to the height direction.

The setting unit main body 600 includes, for example, a setting unit arrangement unit 640. The setting unit arrangement unit 640 is configured to be able to arrange the position setting unit 230. The setting unit arrangement unit 640 includes, for example, a first arrangement unit 641 and a second arrangement unit 642. The first arrangement portion 641 is provided at a portion of the third structure portion 603 near the first connection portion 605. The second arrangement portion 642 is provided at a portion of the fourth structure portion 604 near the first connection portion 605.

The first arrangement portion 641 is configured to be capable of arranging the first pin 231. The first arrangement portion 641 includes, for example, a long hole 641A. The long hole 641A penetrates the first arrangement portion 641. The center axis of the long hole 641A is parallel to the height direction. The long hole 641A is elongated in the depth direction.

The second arrangement portion 642 is configured to be able to arrange the second pin 231. The second arrangement portion 642 includes, for example, a hole 642A. The hole 642A penetrates the second arrangement portion 642. The center axis of the hole 642A is parallel to the height direction.

The setting unit main body 600 includes, for example, a head arrangement unit 650. The head arrangement portion 650 is configured to be able to arrange the heads 10B41 of one or more bolts 10B 4. The head arrangement portion 650 includes, for example, a first arrangement portion 651 and a second arrangement portion 652. The first arrangement portion 651 is provided in the third structure portion 603. The second arrangement portion 642 is provided in the fourth structure portion 604.

The first arrangement portion 651 is configured to be able to arrange the head 10B41 of the bolt 10B 4. The first arrangement portion 651 includes, for example, a recess 651A. The recess 651A is opened at the upper surface of the third structure portion 603 and the inner peripheral surface 612 of the third structure portion 603.

The second arrangement portion 652 is configured to be able to arrange the head 10B41 of the bolt 10B 4. The second arrangement portion 652 includes, for example, a concave portion 652A. The concave portion 652A opens on the upper surface of the fourth structural portion 604 and the inner peripheral surface 612 of the fourth structural portion 604.

The setting unit body 600 includes, for example, a flange arrangement portion 660. The flange arrangement portion 660 is configured to be able to arrange a part of the flange 312B of the housing 312. The flange arrangement portion 660 includes, for example, a first arrangement portion 661 and a second arrangement portion 662. The first arrangement portion 661 is provided in the first structure portion 601. The second arrangement portion 662 is provided in the second structure portion 602.

The first arrangement portion 661 is configured to be able to arrange a part of the flange 312B. The first arrangement portion 661 includes, for example, a recess 661A. The concave portion 661A is opened on the upper surface of the first structure portion 601 and the inner peripheral surface 612 of the first structure portion 601.

The second arrangement portion 662 is configured to be able to arrange a part of the flange 312B. The second arrangement portion 662 includes a recess 662A, for example. The recess 662A is open at the upper surface of the second structure portion 602 and the inner peripheral surface 612 of the second structure portion 602.

The first pressing portion 511 includes, for example, a ball plunger 511A. Ball plug 511A is disposed in hole 621A of first pressing portion 621. The center axis of the ball plunger 511A is parallel to the width direction.

Ball plug 511A includes, for example, a sleeve 511A1, a ball 511A2, and a coil spring. The sleeve 511A1 is coupled to the first pressing portion arrangement portion 621. The ball 511A2 is disposed at an end of the sleeve 511 A1. The coil spring is disposed inside the sleeve 511 A1. The end portion of the sleeve 511A1 and the balls 511A2 protrude from the inner peripheral surface 612 of the first structure portion 601.

The second pressing portion 512 includes, for example, a fine thread 512A. The fine screw 512A is disposed in the screw hole 622A of the second pressing portion disposition portion 622. The center axis of the fine thread 512A is parallel to the width direction. The center axis of the fine thread 512A is on the same axis as the center axis of the ball plunger 511A. The fine screw 512A translates in the width direction with respect to the second pressing portion arrangement portion 622 as it rotates.

(fixing part)

Refer to fig. 8. The angle setting unit 500 includes, for example, a fixing unit 520. The fixing portion 520 is configured to be capable of restricting the rotation operation of the rotation portion 320. The fixing portion 520 is configured to be detachable from the slider 200. In the illustrated example, the fixing portion 520 is configured to be detachable from the setting portion main body 600 and the slider main body 210. The fixing portion 520 is, for example, a plate. The fixing portion 520 includes, for example: a first arrangement portion 521, a second arrangement portion 522, and a restriction portion 523.

The first arrangement portion 521 is configured to be able to arrange the bolt 10B5. The first arrangement portion 521 includes, for example, a hole 521A. The hole 521A penetrates the first arrangement portion 521. The central axis of the hole 521A is parallel to the height direction.

The second arrangement portion 522 is configured to be able to arrange the bolt 10B5. The second arrangement portion 522 includes, for example, a hole 522A. The hole 522A penetrates the second arrangement portion 522. The central axis of the hole 522A is parallel to the height direction.

The restricting portion 523 is configured to be capable of contacting the first contacted portion 320A and the second contacted portion 320B of the rotating portion 320. The restricting portion 523 is disposed below the setting portion main body 600, for example. The restricting portion 523 includes, for example, a first end portion 523A and a second end portion 523B. The first arrangement portion 521 is connected to the first end portion 523A. The second arrangement portion 522 is connected to the second end portion 523B.

The restricting portion 523 includes a restricting surface 523C. The restricting surface 523C is configured to contact the reference surface 324 of the rotating portion 320, for example. The restricting surface 523C is a plane. In the example shown in the drawing, the restricting portion 523 is disposed below the second structure portion 602 of the setting portion main body 600. The restricting surface 523C is configured to contact the second reference surface 324B.

(Angle setting method)

Reference is made to fig. 5 and 11 to 15. In fig. 11 to 15, elements other than the slide unit 100 among the elements constituting the scribe head 10 are omitted. The rotation angle of the rotation portion 320 is set by an angle setting method, for example. Examples of the angle setting method include a first angle setting method, a second angle setting method, and a third angle setting method. Hereinafter, the state of the sliding unit 100 in which all the elements constituting the sliding unit 100 are combined with each other is referred to as a "standard state".

(first angle setting method)

The first angle setting method includes steps A1 to A6. Step A2 is performed after step A1. Step A3 is performed after step A2. Step A4 is performed after step A3. Step A5 is performed after step A4. Step A6 is performed after step A5.

Reference is made to fig. 5 and 11. In step A1, the scribe head 10 is disposed on the reference surface of the stage. The reference plane of the platform is a plane. The first major surface 20A of the base 20 is in contact with the datum plane of the platform. The state of the sliding unit 100 is partially different from the standard state. The setting unit body 600 and the fixing unit 520 are not connected to the slider body 210 of the slider 200. The holder unit 400 is not coupled to the holder tab 300.

Refer to fig. 12. In step A2, the setting unit main body 600 is disposed below the slider main body 210 of the slider 200. The first pin 231 of the slider 200 is disposed in the long hole 641A of the setting unit body 600. The second pin 231 of the slider 200 is disposed in the hole 642A of the setting unit body 600.

Ball 511A2 of ball plunger 511A contacts first contacted portion 320A of first reference surface 324A of rotating portion 320. The tip portion 512A1 of the fine thread 512A contacts the second contacted portion 320B of the second reference surface 324B of the rotating portion 320. The setting unit body 600 is coupled to the slider body 210 by a plurality of bolts 10B 5.

Refer to fig. 13. In step A3, the holder 410 for angle setting is coupled to the holder joint 300. A measurement plate 450 is connected to the holder 410 for angle setting.

A portion of the measurement plate 450 is disposed in the slit 413A of the holder 410. The measurement plate 450 is connected to the arrangement portion 413. The measurement plate 450 includes a surface 451 to be measured. The surface 451 to be measured is a plane. The parallelism of the surface 451 to be measured with respect to the reference surface of the stage or the reference surface of the scribe head 10 is measured by a measuring instrument. As an example of the measuring instrument, a three-dimensional measuring instrument is given.

Refer to fig. 13. In step A4, the fine thread 512A is operated so that the parallelism of the surface 451 to be measured becomes a reference value. The fine thread 512A translates in a first translation direction or a second translation direction relative to the second arrangement 522.

When the fine screw 512A is translated in the first translation direction, the protruding length of the fine screw 512A with respect to the inner peripheral surface 612 of the rotating portion arrangement portion 610 becomes longer. When the fine screw 512A is translated in the second translation direction, the protruding length of the fine screw 512A with respect to the inner peripheral surface 612 of the rotating portion arrangement portion 610 becomes shorter.

The reference value regarding the parallelism of the measured surface 451 can be arbitrarily set. Examples of the reference value include a first reference value and a second reference value. The first reference value is a value indicating that the surface 451 to be measured is parallel to the reference surface of the stage or the reference surface of the scribe head 10. The second reference value is a value indicating that the surface 451 to be measured has a certain inclination angle with respect to the reference surface of the stage or the reference surface of the scribe head 10.

When the parallelism of the measured surface 451 is the first reference value, the rotation angle of the rotation portion 320 is 0 °. When the holder unit 400 is coupled to the rotation portion 320 having a rotation angle of 0 °, the center surface of the scribing wheel 420 is parallel to the reference surface of the stage or the reference surface of the scribing head 10.

Refer to fig. 14. In step A5, the fixing portion 520 is coupled to the slider body 210 by a plurality of bolts 10B 5. The restricting surface 523C of the fixed portion 520 contacts the first contacted portion 320A and the second contacted portion 320B of the second reference surface 324B of the rotating portion 320.

Refer to fig. 15. In step A6, the holder 410 for angle setting is separated from the holder joint 300. The holder unit 400 is coupled to the holder tab 300.

(second angle setting method)

The second angle setting method includes steps B1 to B5. Step B2 is performed after step B1. Step B3 is performed after step B2. Step B4 is performed after step B3. Step B5 is performed after step B4.

In step B1, the scribing head 10 in the same state as in step A2 of the first angle setting method is disposed on the reference surface of the stage. The step B2 is the same as the step A3 of the first angle setting method. The step B3 is the same as the step A4 of the first angle setting method. The step B4 is the same as the step A5 of the first angle setting method. The step B5 is the same as the step A6 of the first angle setting method.

(third angle setting method)

The third angle setting method includes steps C1 to C4. Step C2 is performed after step C1. Step C3 is performed after step C2. Step C4 is performed after step C3.

In step C1, the scribing head 10 in the same state as in step A3 of the first angle setting method is disposed on the reference surface of the stage. The step C2 is the same as the step A4 of the first angle setting method. The step C3 is the same as the step A5 of the first angle setting method. The step C4 is the same as the step A6 of the first angle setting method.

(scribing process)

In the scribing process, a scribing device is used in which the rotation angle of the rotation unit 320 is set by the angle setting unit 500. In the scribing process, for example, the following is observed.

The position of the scribe head 10 is set to the non-contact position. When the position of the scribing head 10 is the non-contact position, the blade 422 of the scribing wheel 420 is not in contact with the workpiece.

The scribe head 10 is driven downward. The position of the scribe head 10 is set at the initial contact position. When the position of the scribing head 10 is the initial contact position, the blade 422 of the scribing wheel 420 contacts the work object. As the blade 422 contacts the workpiece, an external force acts on the scribing wheel 420.

There is a case where the first torque or the second torque based on the external force acts on the rotating portion 320. The rotation operation of the rotation unit 320 is limited by the angle setting unit 500. As the blade 422 of the scribing wheel 420 contacts the workpiece, the rotation of the rotating portion 320 is restricted. The rotation angle of the rotation part 320 and the holder unit 400 can be maintained.

As an example of the state in which the rotation angle is held, a first holding state and a second holding state are given. In the first holding state, the rotation angle of the scribing head 10 when it is in the initial contact position is the same as the rotation angle of the scribing head 10 when it is in the non-contact position. In the second holding state, the rotation angle of the scribing head 10 when it is in the initial contact position is substantially the same rotation angle as the rotation angle of the scribing head 10 when it is in the non-contact position.

The scribe head 10 scans in a predetermined direction. The scribing wheel 420 moves on the workpiece and forms a scribe line on the workpiece. An external force acts on the scribing wheel 420 as the scribing wheel 420 moves.

There is a case where the first torque or the second torque based on the external force acts on the rotating portion 320. The rotation operation of the rotation unit 320 is limited by the angle setting unit 500. As the scribing wheel 420 travels over the work object, the rotation of the rotation portion 320 is restricted. The rotation angle of the rotation part 320 and the holder unit 400 can be maintained.

As examples of the state in which the rotation angle is held, a third holding state and a fourth holding state are given. In the third holding state, the rotation angle when the scribing head 10 is moved is the same as the rotation angle when the scribing head 10 is located at the initial contact position. In the fourth holding state, the rotation angle when the scribing head 10 is moved is substantially the same rotation angle as the rotation angle when the scribing head 10 is located at the initial contact position.

(Effect)

The following effects are obtained by the configuration exemplified in the embodiment, for example.

In one example, the slide unit 100 includes a holder joint 300 and an angle setting unit 500. The holder joint 300 includes: the slider 200, a bearing portion 310 coupled to the slider 200, and a rotating portion 320 configured to be rotatable with respect to the bearing portion 310. The angle setting unit 500 is configured to be able to set the rotation angle of the rotation unit 320 with respect to the slider 200.

According to the above structure, for example, the following effects can be obtained. Since the rotation angle of the rotation portion 320 can be set by the angle setting portion 500, the rotation angle of the rotation portion 320 in scribing is stable. The rotation angle of the holder 410 coupled to the rotation part 320 and the rotation angle of the scribing wheel 420 supported by the holder 410 are also stabilized. Therefore, the processing accuracy of scribing processing can be improved. The machining accuracy can be improved even in scribing for manufacturing precision parts. Examples of the precision component include an electronic component and a semiconductor component.

In one example, the angle setting unit 500 includes: a first pressing portion 511 that presses the rotating portion 320 so that the rotating portion 320 rotates in a first rotation direction; and a second pressing portion 512 that presses the rotating portion 320 so that the rotating portion 320 rotates in the second rotation direction.

According to the above structure, for example, the following effects can be obtained. The operability regarding the operation of adjusting the rotation angle of the rotation portion 320 is improved.

In one example, the first pressing portion 511 includes an elastic element.

In one example, the other of the second pressing portions 512 includes a screw element.

In one example, the first pressing portion 511 and the second pressing portion 512 are arranged so as to sandwich the rotating portion 320 between the first pressing portion 511 and the second pressing portion 512.

According to the above structure, for example, the following effects can be obtained. The rotation angle of the rotation part 320 is stable.

In one example, the angle setting unit 500 includes: a first pressing portion arrangement portion 621 in which the first pressing portion 511 is arranged, and a second pressing portion arrangement portion 622 in which the second pressing portion 512 is arranged.

According to the above structure, for example, the following effects can be obtained. The positions of the first pressing portion 511 and the second pressing portion 512 are stable.

In one example, the rotating unit 320 includes: the holder unit 400 includes a holder coupling portion 330 to which the rotation shaft 321 of the bearing portion 310 can be coupled. The first pressing portion 511 and the second pressing portion 512 are configured to press the holder coupling portion 330.

According to the above structure, for example, the following effects can be obtained. The structure of the bearing portion 310 is simplified.

In one example, the angle setting unit 500 includes a fixing unit 520, and the fixing unit 520 is configured to fix the rotation angle of the rotating unit 320.

In one example, the fixing portion 520 is configured to be detachable from the slider 200.

In one example, the slider 200 includes a slider body 210, and the slider body 210 is coupled to a bearing portion 310. The angle setting part 500 is provided at the bottom of the slider body 210.

(second embodiment)

Refer to fig. 16 to 22. The sliding unit 100 of the second embodiment is configured based on the first embodiment. The sliding unit 100 of the present embodiment includes the same structure as the previous embodiment.

The following mainly shows the points of difference of the sliding unit 100 of the present embodiment from the sliding unit 100 of the foregoing embodiment. And a part or all of the description of the same configuration of the sliding unit 100 of the present embodiment as the sliding unit 100 of the foregoing embodiment is omitted.

(bearing portion)

Refer to fig. 16. The bearing portion 310 does not include a housing 312 and a plurality of O-rings 314. The outer ring of each bearing 311A, 311B is coupled to the slider 200.

(sliding block)

Refer to fig. 16. The structure of the slider 200 can be arbitrarily selected. The structure of the slider 200 is not limited to the illustrated structure. The slider 200 includes, for example: the slider body 700, the pressed portion 220, and the position setting portion 230. The slider body 700 is, for example, a block. The pressed portion 220 and the position setting portion 230 are connected to the slider body 700.

The slider body 700 includes, for example, a first body structure portion 710 and a second body structure portion 720. The first body structure portion 710 and the second body structure portion 720 are respectively constituted. The first main body structure 710 includes, for example, an upper structure 710A and a lower structure 710B. The lower structure portion 710B is located below the side portion of the upper structure portion 710A in the first width direction. The second main body structure 720 is configured to be detachable from the lower structure 710B.

The upper structure portion 710A includes, for example, an intermediate arrangement portion 711. The intermediate arrangement portion 711 is configured to be able to arrange one or a plurality of bolts 10B2. The intermediate arrangement 711 includes one or more holes 711A. The hole 711A penetrates the upper structure 710A. The center axis of the hole 711A is parallel to the width direction. The upper structure 710A is coupled to the movable rail 32 by a plurality of bolts 10B2.

The upper structure portion 710A includes, for example, an upper arrangement portion 712. The upper arrangement portion 712 is configured to be able to arrange the coupling bolt 221. The upper arrangement portion 712 includes, for example, a screw hole. The threaded bore is open at the upper surface 731 of the upper structure 710A. The center axis of the screw hole is parallel to the height direction.

The bottom surface 732 of the upper structure 710A faces downward. The bottom surface 732 of the upper structure 710A is planar. The bottom surface 732 of the upper structure 710A faces the second main structure 720.

The lower structure portion 710B includes, for example, an opposing portion 713. The opposing portion 713 includes a portion opposing the holder coupling portion 330 of the holder joint 300 in the width direction. The opposing portion 713 includes, for example, a concave portion 713A.

The concave portion 713A opens at the second side 733 of the lower structure portion 710B. The second side 733 of the lower structure portion 710B faces the second width direction. The second side 733 of the lower structure portion 710B faces the first side 743 of the second main structure portion 720. The second side 733 of the lower structure portion 710B is a plane.

The concave portion 713A opens to the bottom surface 734 of the lower structure portion 710B. The bottom surface 734 of the lower structure portion 710B faces downward. The bottom surface 734 of the lower structure portion 710B is planar.

The lower structure portion 710B includes, for example, an intermediate arrangement portion 714. The intermediate arrangement portion 714 is configured to be able to arrange one or a plurality of bolts 10B6. The intermediate arrangement 714 includes one or more threaded holes 714A. The screw hole 714A is opened at the second side 733 of the lower structure portion 710B. The center axis of the screw hole 714A is parallel to the width direction.

The second main body structure portion 720 includes, for example, a joint arrangement portion 721. The joint arrangement portion 721 is configured to be able to arrange the retainer joint 300. The joint arrangement portion 721 includes, for example, a recess 721A

And hole 721B.

The recess 721A is formed so that a part of the holder coupling portion 330 can be disposed. The recess 721A opens at the bottom surface 742 of the second body structure portion 720. The bottom surface 742 of the second body structure 720 faces downward. The bottom surface 742 of the second body structure portion 720 is planar.

The recess 721A opens at the first side surface 743 of the second main body structure portion 720. The first side surface 743 of the second body structure portion 720 faces the first width direction. The first side 743 of the second body structure portion 720 is planar. The first side 743 of the second main body structure portion 720 contacts the second side 733 of the lower structure portion 710B. The hole 721B is formed so that the bearing portion 310 can be disposed. The hole 721B opens at the bottom surface of the recess 721A.

The second main body structure portion 720 includes, for example, an intermediate arrangement portion 722. The intermediate arrangement portion 722 is configured to be able to arrange one or more bolts 10B6. The intermediate arrangement 722 includes one or more apertures 722A. The hole 722A penetrates the second body structure portion 720. The center axis of the hole 722A is parallel to the width direction.

The upper surface 741 of the second body structure 720 faces upward. The upper surface 741 of the second body structure portion 720 is planar. The upper surface 741 of the second body structure 720 contacts the bottom surface 732 of the upper structure 710A.

(Angle setting part)

Refer to fig. 16 and 17. At least a part of the angle setting part 500 is integrally formed with the slider body 700. In the illustrated example, a part of the angle setting unit 500 is integrally formed with the slider body 700. The angle setting part 500 is provided at the bottom of the slider body 700.

(setting part body)

Refer to fig. 16 and 17. The angle setting unit 500 includes, for example, a setting unit body 800. The setting unit body 800 is configured as a part of the slider body 700. The setting unit main body 800 includes, for example, a first main body structure portion 810 and a second main body structure portion 820. The first body structure 810 is configured as a part of the lower structure 710B of the first body structure 710 of the slider body 700. The second body structure portion 820 is configured as a part of the second body structure portion 720 of the slider body 700.

The setting unit body 800 includes, for example, a pressing unit arrangement unit 830. The pressing portion arrangement portion 830 is configured to be able to arrange the pressing portion 510. The pressing portion arrangement portion 830 includes, for example, a first pressing portion arrangement portion 831 and a second pressing portion arrangement portion 832. The first pressing portion arrangement portion 831 is provided to the first main body structure portion 810. The second pressing portion arrangement portion 832 is provided to the second main body structure portion 820.

The first pressing portion arrangement portion 831 is configured to be able to arrange the first pressing portion 511. The first pressing portion arrangement portion 831 includes, for example, a hole 831A. The hole 831A penetrates the first pressing portion arranging portion 831. The center axis of the hole 831A is parallel to the width direction. The first pressing portion arrangement portion 831 is provided in the concave portion 713A of the lower structure portion 710B. The hole 831A is open at the bottom surface of the recess 713A.

The first pressing portion arrangement portion 831 is located forward or rearward with respect to the center of the slider body 700 in the depth direction. In the illustrated example, the first pressing portion arrangement portion 831 is located rearward with respect to the center of the slider body 700 in the depth direction.

The second pressing portion arrangement portion 832 is configured to be able to arrange the second pressing portion 512. The second pressing portion arrangement portion 832 includes, for example, a screw hole 832A. The screw hole 832A penetrates the second pressing portion arrangement portion 832. The center axis of the screw hole 832A is parallel to the width direction. The second pressing portion arrangement portion 832 is provided in the recess 721A of the second main body structure portion 720. The screw hole 832A opens at the bottom surface of the recess 721A.

The second pressing portion arrangement portion 832 is located forward or rearward with respect to the center of the slider body 700 in the depth direction. In the example of the drawing, the second pressing portion arrangement portion 832 is located rearward with respect to the center of the slider body 700 in the depth direction.

The setting unit body 800 includes, for example, a bolt arrangement unit 840. The bolt arrangement portion 840 is configured to be able to arrange one or a plurality of bolts 10B5. The bolt arrangement portion 840 includes, for example, a first bolt arrangement portion 841 and a second bolt arrangement portion 842.

The first bolt arrangement portion 841 is provided in the first main body structure portion 810. The first bolt arrangement portion 841 is configured to be able to arrange one or a plurality of bolts 10B5. The first bolt arrangement portion 841 includes one or more screw holes 841A. The screw hole 841A opens at the bottom surface 734 of the first body structure 810. The center axis of the screw hole 841A is parallel to the height direction.

The second bolt arrangement portion 842 is provided to the second main body structure portion 820. The second bolt arrangement portion 842 is configured to be able to arrange one or more bolts 10B5. The second bolt arrangement portion 842 includes one or more threaded holes 842A. The screw hole 842A is open at the bottom surface 742 of the second body structure 820. The center axis of the screw hole 842A is parallel to the height direction.

The first pressing portion 511 includes, for example, a ball plunger 511A. Ball plunger 511A is disposed in hole 831A of first pressing portion disposed portion 831 of pressing portion disposed portion 830. The center axis of the ball plunger 511A is parallel to the width direction.

The sleeve 511A1 is coupled to the first pressing portion arrangement portion 831. The ball 511A2 is disposed at an end of the sleeve 511 A1. The coil spring is disposed inside the sleeve 511 A1. The end of the sleeve 511A1 and the ball 511A2 protrude from the side surface of the first pressing portion 831.

The second pressing portion 512 includes, for example, a fine thread 512A. The fine screw 512A is disposed in the screw hole 832A of the second pressing portion disposition portion 832 of the pressing portion disposition portion 830. The center axis of the fine thread 512A is parallel to the width direction. The center axis of the fine thread 512A is on the same axis as the center axis of the ball plunger 511A. The fine screw 512A translates in the width direction with respect to the second pressing portion arrangement portion 832 as it rotates.

(fixing part)

Refer to fig. 16 and 17. The angle setting unit 500 includes, for example, a plurality of fixing units 520. The first fixing portion 520 is disposed below the first body structure portion 810. The restricting surface 523C of the first fixing portion 520 is configured to contact the first reference surface 324A. The second fixing portion 520 is opposite to the second main body the structure portion 820 is disposed below. The restricting surface 523C of the second fixing portion 520 is configured to contact the second reference surface 324B.

(connection of elements)

Refer to fig. 16 and 17. The holder joint 300 is coupled to the slider 200. The bearing portion 310 is disposed in the hole 721B of the second body structure portion 720 of the slider body 700. The upper portion of the holder coupling portion 330 is disposed in the recess 721A.

The outer ring of the bearing 311 of the bearing portion 310 is coupled to the second main body structure portion 720. The outer ring of the bearing 311 and the second body structure 720 are connected by chemical bonding, for example. In the illustrated example, the outer race of the bearing 311 is joined to the second body structure portion 720 with an adhesive.

(Angle setting method)

Reference is made to fig. 5 and 18 to 22. In fig. 18 to 22, elements other than the slide unit 100 among the elements constituting the scribe head 10 are omitted. The rotation angle of the rotation portion 320 is set by an angle setting method, for example. Examples of the angle setting method include a fourth angle setting method, a fifth angle setting method, and a sixth angle setting method.

(fourth angle setting method)

The fourth angle setting method includes steps D1 to D6. Step D2 is performed after step D1. Step D3 is performed after step D2. Step D4 is performed after step D3. Step D5 is performed after step D4. Step D6 is performed after step D5.

Reference is made to fig. 5 and 18. In step D1, the scribe head 10 is disposed on the reference surface of the stage. The reference plane of the platform is a plane. The first major surface 20A of the base 20 is in contact with the datum plane of the platform. The state of the sliding unit 100 is partially different from the standard state. The second body structure portion 720 and the fixing portion 520 are not connected to the first body structure portion 710 of the slider body 700.

Refer to fig. 19. In step D2, the second main body structure 720 to which the retainer joint 300 is coupled to the first main body structure 710 by the plurality of bolts 10B 6. The holder unit 400 is not coupled to the holder tab 300.

Ball 511A2 of ball plunger 511A contacts first contacted portion 320A of first reference surface 324A of rotating portion 320. The tip portion 512A1 of the fine thread 512A contacts the second contacted portion 320B of the second reference surface 324B of the rotating portion 320.

Refer to fig. 20. In step D3, the holder 410 for angle setting is coupled to the holder joint 300. A measurement plate 450 is connected to the holder 410 for angle setting.

Refer to fig. 20. In step D4, the fine thread 512A is operated so that the parallelism of the surface 451 to be measured becomes a reference value. The fine thread 512A translates in a first translation direction or a second translation direction relative to the second arrangement 522.

When the fine screw 512A is translated in the first translation direction, the protruding length of the fine screw 512A with respect to the bottom surface of the recess 721A of the second main body structure portion 720 becomes longer. When the fine screw 512A is translated in the second translation direction, the protruding length of the fine screw 512A with respect to the bottom surface of the recess 721A of the second main body structure portion 720 becomes shorter.

Refer to fig. 21. In step D5, the first fixing portion 520 is coupled to the first main body structure portion 710 by a plurality of bolts 10B 5. The restricting surface 523C of the fixed portion 520 contacts the first contacted portion 320A and the second contacted portion 320B of the first reference surface 324A of the rotating portion 320.

In step D5, the second fixing portion 520 is coupled to the second main body structure portion 720 by a plurality of bolts 10B 5. The restricting surface 523C of the fixed portion 520 contacts the first contacted portion 320A and the second contacted portion 320B of the second reference surface 324B of the rotating portion 320.

Refer to fig. 22. In step D6, the holder 410 for angle setting is separated from the holder joint 300. The holder unit 400 is coupled to the holder tab 300.

(fifth angle setting method)

The fifth angle setting method includes steps E1 to E5. Step E2 is performed after step E1. Step E3 is performed after step E2. Step E4 is performed after step E3. Step E5 is performed after step E4.

In step E1, the scribing head 10 in the same state as in step D2 of the fourth angle setting method is disposed on the reference surface of the stage. The step E2 is the same as the step D3 of the fourth angle setting method. The step E3 is the same as the step D4 of the fourth angle setting method. The step E4 is the same as the step D5 of the fourth angle setting method. The step E5 is the same as the step D6 of the fourth angle setting method.

(sixth angle setting method)

The sixth angle setting method includes steps F1 to F4. Step F2 is performed after step F1. Step F3 is performed after step F2. Step F4 is performed after step F3.

In step F1, the scribing head 10 in the same state as in step D3 of the fourth angle setting method is disposed on the reference surface of the stage. The step F2 is the same as the step D4 of the fourth angle setting method. The step F3 is the same as the step D5 of the fourth angle setting method. The step F4 is the same as the step D6 of the fourth angle setting method.

(scribing process)

In the scribing process, a scribing device is used in which the rotation angle of the rotation unit 320 is set by the angle setting unit 500. The same state as in the foregoing embodiment is observed in scribing, for example.

(Effect)

In one example, the sliding unit 100 includes the same structure as the sliding unit 100 of the foregoing embodiment.

According to the above structure, for example, the following effects can be obtained. The same effects as those obtained by the foregoing embodiments are obtained.

In one example, the bearing portion 310 is joined to the second body structure portion 720, which is a part of the slider body 700.

According to the above structure, for example, the following effects can be obtained. Since the bearing portion 310 is engaged with a highly rigid element, the rotation angle of the rotation portion 320 set by the angle setting portion 500 is not easily changed even when an impact is applied to the slide unit 100.

The manner in which the sliding unit of the present invention can take is not limited to the descriptions of the above embodiments. The sliding unit of the present invention can take a form different from that exemplified in the respective embodiments. Examples thereof include a system in which a part of the structure of each embodiment is replaced, modified, or omitted, and a system in which a new structure is added to each embodiment.

Claims

1. A sliding unit is provided with:

a slide block;

a holder joint including a bearing portion coupled to the slider and a rotating portion configured to be rotatable with respect to the bearing portion; and

And an angle setting unit configured to be able to set a rotation angle of the rotation unit with respect to the slider.

2. The sliding unit according to claim 1, wherein,

the angle setting unit includes: a first pressing portion that presses the rotating portion so that the rotating portion rotates in a first rotation direction; and a second pressing portion that presses the rotating portion so that the rotating portion rotates in a second rotational direction, which is a direction opposite to the first rotational direction.

3. A sliding unit according to claim 2, characterized in that,

one of the first pressing portion and the second pressing portion includes an elastic element.

4. A sliding unit according to claim 3, characterized in that,

the other of the first pressing portion and the second pressing portion includes a screw element.

5. The sliding unit according to any one of claims 2 to 4, wherein,

the first pressing portion and the second pressing portion are arranged so as to sandwich the rotating portion between the first pressing portion and the second pressing portion.

6. The sliding unit according to any one of claims 2 to 5, characterized in that,

the angle setting unit includes: a first pressing portion arrangement portion in which the first pressing portion is arranged, and a second pressing portion arrangement portion in which the second pressing portion is arranged.

7. The sliding unit according to any one of claims 2 to 6, characterized in that,

the rotating part includes: a holder coupling part configured to be capable of coupling with the holder unit, and a rotation shaft coupled to the bearing part,

the first pressing portion and the second pressing portion are configured to press the holder connecting portion.

8. The sliding unit according to any one of claims 1 to 7, characterized in that,

the angle setting unit includes a fixing unit configured to fix a rotation angle of the rotation unit.

9. The sliding unit according to claim 8, wherein,

the fixing portion is configured to be detachable with respect to the slider.

10. The sliding unit according to any one of claims 1 to 9, characterized in that,

the slider includes a slider body coupled to the bearing portion,

the angle setting part is arranged at the bottom of the sliding block main body.

11. A scribing head, comprising:

a sliding unit including a slider, a holder joint including a bearing portion coupled to the slider, and a rotation portion configured to be rotatable with respect to the bearing portion, and an angle setting portion configured to be capable of setting a rotation angle of the rotation portion with respect to the slider;

A base that supports the sliding unit;

a guide portion that connects the slide unit and the base so that the slide unit can move in a height direction relative to the base;

a load adjustment unit that applies a load to the slide unit; and

and a support portion that supports the slide unit and the load adjustment portion.