TW202227889A - 光照射裝置、及具備它之曝光裝置 - Google Patents

光照射裝置、及具備它之曝光裝置 Download PDF

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Publication number
TW202227889A
TW202227889A TW111100847A TW111100847A TW202227889A TW 202227889 A TW202227889 A TW 202227889A TW 111100847 A TW111100847 A TW 111100847A TW 111100847 A TW111100847 A TW 111100847A TW 202227889 A TW202227889 A TW 202227889A
Authority
TW
Taiwan
Prior art keywords
light
polarizing element
light irradiation
heat sink
workpiece
Prior art date
Application number
TW111100847A
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English (en)
Chinese (zh)
Inventor
井上智彥
山下健一
Original Assignee
日商鳳凰電機股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商鳳凰電機股份有限公司 filed Critical 日商鳳凰電機股份有限公司
Publication of TW202227889A publication Critical patent/TW202227889A/zh

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Liquid Crystal (AREA)
TW111100847A 2021-01-13 2022-01-07 光照射裝置、及具備它之曝光裝置 TW202227889A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2021003723 2021-01-13
JP2021-003723 2021-01-13
PCT/JP2021/042631 WO2022153672A1 (ja) 2021-01-13 2021-11-19 光照射装置、およびこれを備える露光装置
WOPCT/JP2021/042631 2021-11-19

Publications (1)

Publication Number Publication Date
TW202227889A true TW202227889A (zh) 2022-07-16

Family

ID=82447135

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111100847A TW202227889A (zh) 2021-01-13 2022-01-07 光照射裝置、及具備它之曝光裝置

Country Status (5)

Country Link
JP (1) JP7191434B2 (ja)
KR (1) KR20230101902A (ja)
CN (1) CN116635781A (ja)
TW (1) TW202227889A (ja)
WO (1) WO2022153672A1 (ja)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04216614A (ja) * 1990-12-17 1992-08-06 Mitsubishi Electric Corp レーザ光照射装置
JP2005251588A (ja) * 2004-03-04 2005-09-15 Hamamatsu Photonics Kk 光照射装置
JP2007017475A (ja) 2005-07-05 2007-01-25 Sanyo Epson Imaging Devices Corp ラビング処理方法及びこのラビング処理方法を用いた液晶表示パネルの製造方法
JP2011217241A (ja) * 2010-04-01 2011-10-27 Ushio Inc Ｌｅｄ線状光源装置および原稿読取装置用光照射装置
JP6607003B2 (ja) * 2015-11-30 2019-11-20 ウシオ電機株式会社 光照射装置および光照射方法
JP2018017952A (ja) * 2016-07-29 2018-02-01 ウシオ電機株式会社 光照射装置および光照射方法
CN209014871U (zh) * 2018-07-16 2019-06-21 香港科技大学 用于光取向的曝光头和曝光系统

Also Published As

Publication number Publication date
JP7191434B2 (ja) 2022-12-19
KR20230101902A (ko) 2023-07-06
CN116635781A (zh) 2023-08-22
WO2022153672A1 (ja) 2022-07-21
JPWO2022153672A1 (ja) 2022-07-21

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