CN116635781A - 光照射装置及具备其的曝光装置 - Google Patents

光照射装置及具备其的曝光装置 Download PDF

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Publication number
CN116635781A
CN116635781A CN202180084664.9A CN202180084664A CN116635781A CN 116635781 A CN116635781 A CN 116635781A CN 202180084664 A CN202180084664 A CN 202180084664A CN 116635781 A CN116635781 A CN 116635781A
Authority
CN
China
Prior art keywords
light
light irradiation
polarizing element
workpiece
heat sink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180084664.9A
Other languages
English (en)
Chinese (zh)
Inventor
井上智彦
山下健一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Phoenix Electric Co Ltd
Original Assignee
Phoenix Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Phoenix Electric Co Ltd filed Critical Phoenix Electric Co Ltd
Publication of CN116635781A publication Critical patent/CN116635781A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Liquid Crystal (AREA)
CN202180084664.9A 2021-01-13 2021-11-19 光照射装置及具备其的曝光装置 Pending CN116635781A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021-003723 2021-01-13
JP2021003723 2021-01-13
PCT/JP2021/042631 WO2022153672A1 (ja) 2021-01-13 2021-11-19 光照射装置、およびこれを備える露光装置

Publications (1)

Publication Number Publication Date
CN116635781A true CN116635781A (zh) 2023-08-22

Family

ID=82447135

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180084664.9A Pending CN116635781A (zh) 2021-01-13 2021-11-19 光照射装置及具备其的曝光装置

Country Status (5)

Country Link
JP (1) JP7191434B2 (ja)
KR (1) KR20230101902A (ja)
CN (1) CN116635781A (ja)
TW (1) TW202227889A (ja)
WO (1) WO2022153672A1 (ja)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04216614A (ja) * 1990-12-17 1992-08-06 Mitsubishi Electric Corp レーザ光照射装置
JP2005251588A (ja) * 2004-03-04 2005-09-15 Hamamatsu Photonics Kk 光照射装置
JP2007017475A (ja) 2005-07-05 2007-01-25 Sanyo Epson Imaging Devices Corp ラビング処理方法及びこのラビング処理方法を用いた液晶表示パネルの製造方法
JP2011217241A (ja) * 2010-04-01 2011-10-27 Ushio Inc Ｌｅｄ線状光源装置および原稿読取装置用光照射装置
JP6607003B2 (ja) * 2015-11-30 2019-11-20 ウシオ電機株式会社 光照射装置および光照射方法
JP2018017952A (ja) * 2016-07-29 2018-02-01 ウシオ電機株式会社 光照射装置および光照射方法
CN209014871U (zh) * 2018-07-16 2019-06-21 香港科技大学 用于光取向的曝光头和曝光系统

Also Published As

Publication number Publication date
KR20230101902A (ko) 2023-07-06
TW202227889A (zh) 2022-07-16
JPWO2022153672A1 (ja) 2022-07-21
WO2022153672A1 (ja) 2022-07-21
JP7191434B2 (ja) 2022-12-19

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