TW202215921A - dry film - Google Patents

dry film

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Publication number
TW202215921A
TW202215921A TW110113197A TW110113197A TW202215921A TW 202215921 A TW202215921 A TW 202215921A TW 110113197 A TW110113197 A TW 110113197A TW 110113197 A TW110113197 A TW 110113197A TW 202215921 A TW202215921 A TW 202215921A
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TW
Taiwan
Prior art keywords
layer
resin
adhesion
plating
dry film
Prior art date
Application number
TW110113197A
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Chinese (zh)
Inventor
関口翔也
石川信広
高谷康子
佐土原大祐
鈴木陽平
Original Assignee
日商太陽控股股份有限公司
日商傑希優股份有限公司
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Application filed by 日商太陽控股股份有限公司, 日商傑希優股份有限公司 filed Critical 日商太陽控股股份有限公司
Publication of TW202215921A publication Critical patent/TW202215921A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/30Layered products comprising a layer of synthetic resin comprising vinyl (co)polymers; comprising acrylic (co)polymers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/38Layered products comprising a layer of synthetic resin comprising epoxy resins
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate

Abstract

To provide a curable resin composition suitable for use as an underlayer coating film of an adhesion-imparting coating that can perform good plating of a conductor layer even when a surface unevenness (surface roughness) is small, and has good adhesion for a plated conductor layer. There is provided a curable resin composition that is for forming an underlayer coating film provided between a base material and an adhesion-imparting coating provided in order to improve an adhesion of a plating layer to the base material, in which the curable resin composition is characterized in that: the curable resin composition comprises an epoxy resin (A) and an active ester compound (B); the adhesion-imparting coating comprises a catalyzing metal-containing silicon oligomer; and the catalyzing metal-containing silicon oligomer is obtained by subjecting a tetra-alkoxy silane and a polyvalent alcohol, in which a hydroxy group is bonded to at least n and n+1 sites or n and n+2 sites (in which n is an integer of at least 1), to a condensation reaction in the presence of a catalyzing metal.

Description

乾膜dry film

本發明係關於在表面形成鍍敷層,適合使用於絕緣材的乾膜。The present invention relates to the formation of a plating layer on the surface, and is suitable for use as a dry film for insulating materials.

作為多層印刷配線板之製造方法,已知有將預浸物與銅箔壓製加工,於形成有電路之內層電路板(所謂的覆銅層合板)上交互堆疊絕緣層與導體層之增層方式之製造技術。例如,提出有於形成有電路之內層電路板上塗佈環氧樹脂組成物,加熱硬化而形成絕緣層之後,於該絕緣層表面以粗化劑形成凹凸狀之粗化面後,藉由無電解鍍敷與電解鍍敷之處理形成導體層之方法(參照專利文獻1及專利文獻2)。As a method of manufacturing a multilayer printed wiring board, there is known a build-up layer in which an insulating layer and a conductor layer are alternately stacked on an inner-layer circuit board (so-called copper-clad laminate) on which a circuit is formed by pressing a prepreg and a copper foil. method of manufacturing technology. For example, it is proposed to coat an epoxy resin composition on an inner-layer circuit board on which a circuit is formed, heat and harden to form an insulating layer, and then use a roughening agent to form a roughened surface of the insulating layer on the surface of the insulating layer. A method of forming a conductor layer by treatment of electroless plating and electrolytic plating (refer to Patent Document 1 and Patent Document 2).

又,提出有於形成有電路之內層電路板上疊合環氧樹脂組成物之接著薄片,加熱硬化而形成絕緣層後,於該絕緣層表面以粗化劑形成凹凸狀之粗化面後,將導體層藉由無電解鍍敷與電解鍍敷之處理所形成的多層印刷配線板之製造法(參照專利文獻3)。 如此的提案之技術均為藉由將絕緣層之表面粗面化,而提高鍍敷層(導體電路層)與絕緣層之密著性。 Furthermore, it is proposed to laminate an adhesive sheet of an epoxy resin composition on an inner-layer circuit board on which circuits are formed, heat and harden to form an insulating layer, and then use a roughening agent to form a roughened surface of the insulating layer on the surface of the insulating layer. , a method of manufacturing a multilayer printed wiring board in which a conductor layer is formed by electroless plating and electrolytic plating (refer to Patent Document 3). In such a proposed technique, the adhesion between the plating layer (conductor circuit layer) and the insulating layer is improved by roughening the surface of the insulating layer.

另一方面,近年來之高精細的導體電路圖型中,例如,於導體電路形成時將抗鍍劑下不需要的無電解鍍敷部分以蝕刻處理進行去除時,可能有蝕刻液進入絕緣層表面之凹部,因侵蝕導體層之電路底部而使導體電路剝離的情況,係有無法精度良好地形成微細的導體電路之問題。 又,亦有因絕緣層之表面凹凸而使導體層與絕緣層之接觸面積增大,故特別是高頻之電信號之傳輸損耗增大的問題。 On the other hand, in recent high-definition conductor circuit patterns, for example, when an unnecessary electroless plating portion under a plating resist is removed by etching during conductor circuit formation, an etching solution may enter the surface of the insulating layer. In the concave portion, when the conductor circuit is peeled off due to erosion of the circuit bottom of the conductor layer, there is a problem that a fine conductor circuit cannot be formed with high precision. In addition, there is also a problem that the contact area between the conductor layer and the insulating layer is increased due to the uneven surface of the insulating layer, so the transmission loss of the electrical signal especially at high frequencies increases.

進一步地,於配線板中之層合構造中,由於在絕緣層形成表面凹凸,故為了使上下導體層電性絕緣,所必要之層的厚度係增加凹凸之高度的量,亦有配線板之輕薄化變得困難之問題。 由如此的問題來看,欲得到更為薄膜且更高精細之配線板,在不將絕緣層粗面化之下實現與導體電路之優良密著性的技術受到需求。 Further, in the laminate structure in the wiring board, since the surface unevenness is formed on the insulating layer, in order to electrically insulate the upper and lower conductor layers, the thickness of the necessary layer is increased by the height of the unevenness. Thinning becomes difficult. In view of such a problem, in order to obtain a thinner and higher-definition wiring board, there is a need for a technique for realizing excellent adhesion to the conductor circuit without roughening the insulating layer.

對此,有提出以下的發明:藉由將基材表面,以含有含觸媒金屬寡聚物之塗覆劑進行處理,在不將基材表面粗面化之下,形成鍍敷層之發明(參照專利文獻4)。 [先前技術文獻] [專利文獻] In this regard, the following invention has been proposed: by treating the surface of the substrate with a coating agent containing a metal oligomer containing a catalyst, without roughening the surface of the substrate, a plating layer is formed. (refer to Patent Document 4). [Prior Art Literature] [Patent Literature]

[專利文獻1]日本特開平7-304931號公報 [專利文獻2]日本特開平7-304933號公報 [專利文獻3]日本特開平11-87927號公報 [專利文獻4]國際公開2016/017792號公報 [Patent Document 1] Japanese Patent Application Laid-Open No. 7-304931 [Patent Document 2] Japanese Patent Application Laid-Open No. 7-304933 [Patent Document 3] Japanese Patent Application Laid-Open No. 11-87927 [Patent Document 4] International Publication No. 2016/017792

[發明所欲解決之課題][The problem to be solved by the invention]

但是,發明者等人,為了不經粗面化處理步驟即於絕緣層上析出鍍敷層(導體層),而評估專利文獻4所提案之塗覆劑後,得知依作為塗覆劑之基底的絕緣層種類不同,並不一定可得到鍍敷層之密著性。However, the inventors have evaluated the coating agent proposed in Patent Document 4 in order to deposit a plated layer (conductor layer) on the insulating layer without the roughening treatment step, and found that the coating agent should be used as a coating agent. Depending on the type of insulating layer of the base, the adhesion of the plating layer may not necessarily be obtained.

因而,本發明之課題為提供即使表面凹凸(表面粗度)小(例如,即使Ra為200nm以下),亦可得到與鍍敷層(導體層)之優良密著性的絕緣材料。 [用以解決課題之手段] Therefore, an object of the present invention is to provide an insulating material which can obtain excellent adhesion to a plated layer (conductor layer) even if the surface unevenness (surface roughness) is small (for example, even if Ra is 200 nm or less). [means to solve the problem]

本發明者等人,為了解決上述課題而深入研究之結果,發現藉由具有樹脂層的乾膜,可解決前述課題,而完成本發明。前述樹脂層為將由特定成分組成之熱硬化性樹脂組成物所構成之層,與由特定成分組成之賦予鍍敷密著性之塗覆組成物所構成之層層合於薄膜基材上而成的2層構造之樹脂層。 亦即,本發明係如以下所述。 The present inventors, as a result of intensive studies to solve the above-mentioned problems, found that the above-mentioned problems can be solved by a dry film having a resin layer, and completed the present invention. The resin layer is a layer composed of a thermosetting resin composition composed of a specific component and a layer composed of a coating composition composed of a specific composition that imparts plating adhesion on a film substrate. The resin layer of the 2-layer structure. That is, the present invention is as follows.

本發明之乾膜,為 於薄膜基材上具有2層構造的樹脂層之乾膜,該2層構造的樹脂層係由含有環氧樹脂與活性酯化合物的硬化性樹脂組成物之層,與含有丙烯酸系樹脂與含觸媒金屬矽寡聚物的賦予密著性之塗覆組成物之層所構成,該乾膜之特徵為,前述含觸媒金屬矽寡聚物,為藉由使四烷氧基矽烷,與至少於n,n+1位或n,n+2位(惟n為1以上之整數)上鍵結有羥基之多元醇,在對無電解鍍敷具有觸媒性之金屬的存在下進行縮合反應而得到之含觸媒金屬矽寡聚物。 The dry film of the present invention is A dry film having a resin layer with a two-layer structure on a film substrate, the two-layer structure of the resin layer is a layer of a curable resin composition containing an epoxy resin and an active ester compound, and a layer containing an acrylic resin and a contact The dry film is composed of a layer of an adhesion-imparting coating composition of a catalyst-containing metal-silicon oligomer, and the dry film is characterized in that the catalyst-containing metal-silicon oligomer is prepared by mixing tetraalkoxysilane with at least A polyol having a hydroxyl group bonded to the n, n+1 position or n, n+2 position (only n is an integer of 1 or more) undergoes a condensation reaction in the presence of a metal having catalytic properties for electroless plating The obtained catalyst-containing metal silicon oligomer.

前述乾膜可使所構成之樹脂層硬化而成為硬化物。The said dry film can harden the resin layer which consists of it, and becomes a hardened material.

可為具有含有前述硬化物的絕緣層之電子零件。 [發明之效果] It can be an electronic part having an insulating layer containing the above-mentioned cured product. [Effect of invention]

依照本發明,可提供即使表面凹凸(表面粗度)小(例如,即使Ra為200nm以下),亦可得到與鍍敷層(導體層)之優良密著性的絕緣材料。According to the present invention, even if the surface unevenness (surface roughness) is small (for example, even if Ra is 200 nm or less), it is possible to provide an insulating material that can obtain excellent adhesion to a plated layer (conductor layer).

詳述構成本發明之乾膜的各層之硬化性樹脂組成物與賦予鍍敷密著性之塗覆組成物。The curable resin composition of each layer constituting the dry film of the present invention and the coating composition for imparting plating adhesion will be described in detail.

再者,本發明之硬化性樹脂組成物與賦予鍍敷密著性之塗覆組成物,可遵照公知方法製造,例如,可藉由將各成分進行摻合、攪拌及分散均勻化而得到。Furthermore, the curable resin composition of the present invention and the coating composition for imparting plating adhesion can be produced in accordance with known methods, for example, by blending, stirring, and uniformly dispersing each component.

又,本發明中,固體成分,意指構成硬化性樹脂組成物及賦予鍍敷密著性之塗覆組成物中的各原料之溶劑(特別是有機溶劑)以外之組成物的成分,或其質量或體積。In addition, in the present invention, the solid content refers to components other than the solvent (especially the organic solvent) constituting the respective raw materials in the curable resin composition and the coating composition for imparting plating adhesion, or its mass or volume.

本發明中,單表示化合物名時,係包含其全部的異構物。In the present invention, when the compound name is simply expressed, all of its isomers are included.

<<<硬化性樹脂組成物>>> <<成分>> 形成本發明之乾膜之第1層(絕緣層)的硬化性樹脂組成物,含有環氧樹脂與活性酯化合物。由該硬化性樹脂組成物所構成的樹脂層,為作為由後述賦予鍍敷密著性之塗覆組成物所構成的層之基底的層,係成為形成有電路的基材上所設置之絕緣層。 <<<Curable resin composition>>> <<Ingredients>> The curable resin composition forming the first layer (insulating layer) of the dry film of the present invention contains an epoxy resin and an active ester compound. The resin layer composed of the curable resin composition is a layer that serves as a base layer of a layer composed of a coating composition that imparts plating adhesion, which will be described later, and serves as an insulating layer provided on a substrate on which a circuit is formed. layer.

<環氧樹脂> 環氧樹脂並無特別限定,可為2官能、亦可為3官能以上。又,可含有作為反應性稀釋劑之單官能之環氧樹脂。 <Epoxy resin> The epoxy resin is not particularly limited, and may be bifunctional or trifunctional or more. Moreover, a monofunctional epoxy resin may be contained as a reactive diluent.

環氧樹脂可列舉雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、雙酚E型環氧樹脂、雙酚M型環氧樹脂、雙酚P型環氧樹脂、雙酚Z型環氧樹脂等之雙酚型環氧樹脂;雙酚A酚醛清漆型環氧樹脂、苯酚酚醛清漆型環氧樹脂、甲酚酚醛清漆環氧樹脂等之酚醛清漆型環氧樹脂;聯苯基型環氧樹脂、聯苯基芳烷基型環氧樹脂、芳基伸烷基型環氧樹脂、四苯酚基乙烷型環氧樹脂、萘型環氧樹脂、蒽型環氧樹脂、苯氧基型環氧樹脂、二環戊二烯型環氧樹脂、降莰烯型環氧樹脂、三羥基苯基甲烷型環氧樹脂、乙內醯脲型環氧樹脂、四苯酚基乙烷型環氧樹脂、溴化環氧樹脂、氫化(雙酚)型樹脂、環氧丙基胺型環氧樹脂、脂環式環氧樹脂、鄰苯二甲酸二環氧丙酯樹脂、四環氧丙基二甲苯醯基乙烷樹脂、甲基丙烯酸環氧丙酯共聚合系環氧樹脂、環己基馬來醯亞胺與甲基丙烯酸環氧丙酯之共聚合環氧樹脂、環氧改質之聚丁二烯橡膠衍生物、CTBN改質環氧樹脂、三羥甲基丙烷聚環氧丙基醚、苯基-1,3-二環氧丙基醚、1,6-己二醇二環氧丙基醚、乙二醇或丙二醇之二環氧丙基醚、山梨醇聚環氧丙基醚、參(2,3-環氧基丙基)異三聚氰酸酯、三環氧丙基參(2-羥基乙基)異三聚氰酸酯等之環氧樹脂等。此等之環氧樹脂,可單獨或組合2種以上來使用。Examples of epoxy resins include bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bisphenol E type epoxy resin, bisphenol M type epoxy resin, bisphenol P type epoxy resin Oxygen resin, bisphenol Z type epoxy resin, etc. bisphenol type epoxy resin; bisphenol A novolac type epoxy resin, phenol novolak type epoxy resin, cresol novolac epoxy resin, etc. novolak type ring Oxygen resin; biphenyl type epoxy resin, biphenyl aralkyl type epoxy resin, aryl alkylene type epoxy resin, tetraphenol ethane type epoxy resin, naphthalene type epoxy resin, anthracene type ring Oxygen resin, phenoxy type epoxy resin, dicyclopentadiene type epoxy resin, norbornene type epoxy resin, trihydroxyphenylmethane type epoxy resin, hydantoin type epoxy resin, tetraphenol Ethane type epoxy resin, brominated epoxy resin, hydrogenated (bisphenol) type resin, glycidylamine type epoxy resin, alicyclic epoxy resin, diglycidyl phthalate resin, Tetraglycidyl xylyl ethane resin, glycidyl methacrylate copolymer epoxy resin, cyclohexylmaleimide and glycidyl methacrylate copolymer epoxy resin, cyclohexyl Oxygen-modified polybutadiene rubber derivatives, CTBN-modified epoxy resin, trimethylolpropane polyglycidyl ether, phenyl-1,3-diglycidyl ether, 1,6-hexyl Glycol Diglycidyl Ether, Diglycidyl Ether of Ethylene Glycol or Propylene Glycol, Sorbitol Polyglycidyl Ether, Ps(2,3-epoxypropyl)isocyanurate, Epoxy resins such as triglycidyl ginseng (2-hydroxyethyl) isocyanurate, etc. These epoxy resins can be used alone or in combination of two or more.

其中,就所得硬化物之熱尺寸安定性之觀點,較佳使用聯苯基型環氧樹脂或萘型環氧樹脂;就低介電特性之觀點,較佳使用二環戊二烯型環氧樹脂;就耐熱性之觀點,較佳使用酚醛清漆型環氧樹脂。Among them, from the viewpoint of thermal dimensional stability of the obtained cured product, biphenyl type epoxy resin or naphthalene type epoxy resin is preferably used; from the viewpoint of low dielectric properties, dicyclopentadiene type epoxy resin is preferably used Resin; From the viewpoint of heat resistance, a novolak-type epoxy resin is preferably used.

此等可單獨或組合2種以上來使用。These can be used alone or in combination of two or more.

<<活性酯化合物>> 作為活性酯化合物,只要係具有活性酯基者即可,較佳為分子內具有至少2個活性酯基之化合物。 <<Active ester compound>> The active ester compound may be any compound as long as it has an active ester group, and is preferably a compound having at least two active ester groups in the molecule.

活性酯化合物中之活性酯基,可藉由加熱而與環氧基反應,作為本發明所用的環氧樹脂之硬化劑而作用。The active ester group in the active ester compound can react with the epoxy group by heating to act as a hardener for the epoxy resin used in the present invention.

作為活性酯化合物,就提高所得硬化物之耐熱性等之觀點,較佳為使羧酸化合物及/或硫代羧酸化合物,與羥基化合物及/或硫醇化合物進行反應所得之活性酯化合物。作為活性酯化合物,更佳為使羧酸化合物,與選自由具有酚性羥基之芳香族化合物(酚化合物或萘酚化合物等)及硫醇化合物所成之群的1種或2種以上進行反應所得之活性酯化合物;特佳為使羧酸化合物與具有酚性羥基之芳香族化合物進行反應而得到,且分子內具有至少2個活性酯基之芳香族化合物。The active ester compound is preferably an active ester compound obtained by reacting a carboxylic acid compound and/or a thiocarboxylic acid compound with a hydroxy compound and/or a thiol compound from the viewpoint of improving the heat resistance of the cured product obtained. As the active ester compound, it is more preferable to react a carboxylic acid compound with one or two or more kinds selected from the group consisting of an aromatic compound having a phenolic hydroxyl group (a phenol compound, a naphthol compound, etc.) and a thiol compound The obtained active ester compound is particularly preferably an aromatic compound obtained by reacting a carboxylic acid compound with an aromatic compound having a phenolic hydroxyl group, and having at least two active ester groups in the molecule.

用以形成活性酯化合物之羧酸化合物之具體例子,可列舉安息香酸、乙酸、琥珀酸、馬來酸、依康酸、鄰苯二甲酸、間苯二甲酸、對苯二甲酸、苯均四酸等。此等之中,就提高所得電絕緣層之耐熱性的觀點,尤佳為琥珀酸、馬來酸、依康酸、鄰苯二甲酸、間苯二甲酸、對苯二甲酸;更佳為鄰苯二甲酸、間苯二甲酸、對苯二甲酸;又更佳為間苯二甲酸、對苯二甲酸。Specific examples of the carboxylic acid compound used to form the active ester compound include benzoic acid, acetic acid, succinic acid, maleic acid, itaconic acid, phthalic acid, isophthalic acid, terephthalic acid, and pyromellitic acid. acid etc. Among these, from the viewpoint of improving the heat resistance of the obtained electrical insulating layer, succinic acid, maleic acid, itaconic acid, phthalic acid, isophthalic acid, and terephthalic acid are particularly preferred; Phthalic acid, isophthalic acid, terephthalic acid; more preferably isophthalic acid, terephthalic acid.

用以形成活性酯化合物之硫代羧酸化合物之具體例子,可列舉硫代乙酸、硫代安息香酸等。Specific examples of the thiocarboxylic acid compound used to form the active ester compound include thioacetic acid, thiobenzoic acid, and the like.

用以形成活性酯化合物之羥基化合物之具體例子,可列舉二羥基苯、雙酚A、雙酚F、雙酚S、酸式酚酞、甲基化雙酚A、甲基化雙酚F、甲基化雙酚S、酚、甲酚、萘酚、二羥基萘、二羥基二苯甲酮、三羥基二苯甲酮、四羥基二苯甲酮、苯三醇、二環戊二烯基二酚、苯酚酚醛清漆等。Specific examples of the hydroxy compound used to form the active ester compound include dihydroxybenzene, bisphenol A, bisphenol F, bisphenol S, acid phenolphthalein, methylated bisphenol A, methylated bisphenol F, methylbenzene Alkylated bisphenol S, phenol, cresol, naphthol, dihydroxynaphthalene, dihydroxybenzophenone, trihydroxybenzophenone, tetrahydroxybenzophenone, benzenetriol, dicyclopentadienyl dicyclopentadienyl Phenol, phenol novolac, etc.

此等之中,就提高活性酯化合物之溶解性,並且提高所得硬化物之耐熱性的觀點,作為用以形成活性酯化合物之羥基化合物,較佳為二羥基萘、二羥基萘、二羥基二苯甲酮、三羥基二苯甲酮、四羥基二苯甲酮、二環戊二烯基二酚、苯酚酚醛清漆;更佳為二羥基二苯甲酮、三羥基二苯甲酮、四羥基二苯甲酮、二環戊二烯基二酚、苯酚酚醛清漆;又更佳為二環戊二烯基二酚、苯酚酚醛清漆。Among these, from the viewpoint of improving the solubility of the active ester compound and improving the heat resistance of the resulting cured product, the hydroxy compound for forming the active ester compound is preferably dihydroxynaphthalene, dihydroxynaphthalene, and dihydroxydihydroxydihydroxynaphthalene. Benzophenone, trihydroxybenzophenone, tetrahydroxybenzophenone, dicyclopentadienyl diphenol, phenol novolac; more preferably dihydroxybenzophenone, trihydroxybenzophenone, tetrahydroxybenzophenone Benzophenone, dicyclopentadienyl diphenol, phenol novolak; more preferably, dicyclopentadienyl diphenol, phenol novolak.

用以形成活性酯化合物之硫醇化合物之具體例子,可列舉苯二硫醇、三嗪二硫醇等。Specific examples of the thiol compound for forming the active ester compound include benzenedithiol, triazinedithiol, and the like.

活性酯化合物之製造方法並無特別限定,可藉由公知方法製造。例如,可藉由前述羧酸化合物及/或硫代羧酸化合物與羥基化合物及/或硫醇化合物之縮合反應而得到。The manufacturing method of an active ester compound is not specifically limited, It can manufacture by a well-known method. For example, it can be obtained by the condensation reaction of the aforementioned carboxylic acid compound and/or thiocarboxylic acid compound and a hydroxyl compound and/or a thiol compound.

本發明中,作為活性酯化合物,例如可使用日本特開2002-12650號公報揭示之具備活性酯基之芳香族化合物及日本特開2004-277460號公報揭示之多官能性聚酯,或市售品。市售品例如可列舉商品名「EXB9451、EXB9460、EXB9460S、Epiclon HPC-8000-65T」(以上、DIC公司製、「Epiclon」為註冊商標)、商品名「DC808」(Japan Epoxy Resin公司製)、商品名「YLH1026」(Japan Epoxy Resin公司製)等。In the present invention, as the active ester compound, for example, an aromatic compound having an active ester group disclosed in Japanese Patent Laid-Open No. 2002-12650 and a polyfunctional polyester disclosed in Japanese Patent Laid-Open No. 2004-277460, or commercially available Taste. Examples of commercially available products include trade names "EXB9451, EXB9460, EXB9460S, Epiclon HPC-8000-65T" (the above, manufactured by DIC Corporation, "Epiclon" is a registered trademark), trade names "DC808" (manufactured by Japan Epoxy Resin Corporation), Trade name "YLH1026" (manufactured by Japan Epoxy Resin Co., Ltd.) and the like.

此等可單獨或組合2種以上來使用。These can be used alone or in combination of two or more.

<其他成分> (酚樹脂) 作為上述環氧樹脂及活性酯化合物以外之成分,較佳含有酚樹脂。環氧樹脂與活性酯化合物之硬化物係硬且脆,因此可能因物理衝擊而發生龜裂,產生剝離,但藉由組合酚樹脂,可得到對硬化物賦予柔軟性,不易產生如龜裂或剝離之不良狀況的製造安定性優良之硬化性樹脂組成物。 <Other ingredients> (Phenolic resin) It is preferable to contain a phenol resin as a component other than the said epoxy resin and an active ester compound. The hardened product of epoxy resin and active ester compound is hard and brittle, so it may be cracked and peeled due to physical impact. Manufacture of peeling failures A curable resin composition with excellent stability.

酚樹脂並無特別限定,可為2官能、亦可為3官能以上。具體而言,可列舉苯酚酚醛清漆樹脂、烷基苯酚酚醛清漆樹脂、含有三嗪構造之苯酚酚醛清漆樹脂、雙酚A酚醛清漆樹脂、含有二環戊二烯構造之酚樹脂、Xylok型酚樹脂、萜烯改質酚樹脂、聚乙烯基酚類、含有萘構造之酚系硬化劑、含有茀構造之酚系硬化劑等。The phenol resin is not particularly limited, and may be bifunctional or trifunctional or more. Specifically, phenol novolac resins, alkylphenol novolac resins, phenol novolac resins containing a triazine structure, bisphenol A novolac resins, phenol resins containing a dicyclopentadiene structure, and Xylok-type phenol resins may be mentioned. , terpene-modified phenol resins, polyvinyl phenols, phenolic hardeners containing naphthalene structure, phenolic hardeners containing pycnogenol structure, etc.

此等可單獨或組合2種以上來使用。These can be used alone or in combination of two or more.

(其他樹脂成分) 硬化性樹脂組成物之其他樹脂成分例如可列舉聚酯系樹脂、苯氧基系樹脂、乙烯-乙酸乙烯酯共聚物、乙烯-丙烯酸共聚物、乙烯-丙烯酸酯共聚物、聚丁二烯樹脂、聚碳酸酯樹脂、聚醯亞胺樹脂、聚醯胺樹脂、丙烯酸樹脂、聚醯胺醯亞胺樹脂或氟樹脂等。 (other resin components) Examples of other resin components of the curable resin composition include polyester-based resins, phenoxy-based resins, ethylene-vinyl acetate copolymers, ethylene-acrylic acid copolymers, ethylene-acrylate copolymers, polybutadiene resins, Polycarbonate resin, polyimide resin, polyimide resin, acrylic resin, polyimide resin or fluororesin, etc.

此等可單獨或組合2種以上來使用。These can be used alone or in combination of two or more.

(樹脂成分以外之成分) 作為硬化性樹脂組成物之樹脂成分以外之成分,可包含無機填充劑、硬化促進劑、有機溶劑、著色劑、增黏劑、消泡劑、調平劑、密著性賦予劑等之公知慣用之成分。 (Ingredients other than resin components) As components other than the resin component of the curable resin composition, known conventional ones such as inorganic fillers, curing accelerators, organic solvents, colorants, tackifiers, antifoaming agents, leveling agents, and adhesion imparting agents may be included. the ingredients.

無機填充劑,可列舉硫酸鋇、鈦酸鋇、二氧化矽(無定形二氧化矽、結晶性二氧化矽、熔融二氧化矽、球狀二氧化矽等)、滑石、黏土、碳酸鎂、碳酸鈣、氧化鋁、氫氧化鋁、氧化鋁、氮化矽、氮化硼、氮化鋁等。此等可單獨或組合2種以上來使用。Inorganic fillers include barium sulfate, barium titanate, silica (amorphous silica, crystalline silica, fused silica, spherical silica, etc.), talc, clay, magnesium carbonate, carbonic acid Calcium, aluminum oxide, aluminum hydroxide, aluminum oxide, silicon nitride, boron nitride, aluminum nitride, etc. These can be used alone or in combination of two or more.

其中,作為無機填充劑,就比重小,可於硬化性樹脂組成物中以高的比例摻合,且熱尺寸安定性(低熱膨脹性)優良的觀點,較佳為二氧化矽,就填充性優良的觀點,特佳為球狀二氧化矽。Among them, as the inorganic filler, from the viewpoint of having a small specific gravity, being able to be blended in a high proportion in the curable resin composition, and being excellent in thermal dimensional stability (low thermal expansion), silica is preferred, and the filling property is Excellent point of view, particularly preferred is spherical silica.

無機填充劑之平均粒徑較佳為3μm以下、更佳為1μm以下。再者,無機填充劑之平均粒徑,可藉由雷射繞射式粒子徑分布測定裝置求得。The average particle diameter of the inorganic filler is preferably 3 μm or less, more preferably 1 μm or less. In addition, the average particle diameter of an inorganic filler can be calculated|required by the laser diffraction particle diameter distribution measuring apparatus.

硬化促進劑例如可列舉咪唑、2-甲基咪唑、2-乙基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、4-苯基咪唑、1-氰基乙基-2-苯基咪唑、1-(2-氰基乙基)-2-乙基-4-甲基咪唑等之咪唑衍生物;二氰二胺、苄基二甲基胺、4-(二甲基胺基)-N,N-二甲基苄基胺、4-甲氧基-N,N-二甲基苄基胺、4-甲基-N,N-二甲基苄基胺等之胺化合物;己二酸二醯肼、癸二酸二醯肼等之肼化合物;三苯基膦等之磷化合物;胍胺、甲基胍胺(acetoguanamine)、苯并胍胺、三聚氰胺、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三嗪、2-乙烯基-2,4-二胺基-S-三嗪、2-乙烯基-4,6-二胺基-S-三嗪•異三聚氰酸加成物、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三嗪•異三聚氰酸加成物等之S-三嗪衍生物等。此等可單獨或組合2種以上來使用。Examples of hardening accelerators include imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, 1-cyanoethyl- Imidazole derivatives of 2-phenylimidazole, 1-(2-cyanoethyl)-2-ethyl-4-methylimidazole, etc.; dicyandiamine, benzyldimethylamine, 4-(dimethylimidazole) amino)-N,N-dimethylbenzylamine, 4-methoxy-N,N-dimethylbenzylamine, 4-methyl-N,N-dimethylbenzylamine, etc. Amine compounds; hydrazine compounds such as dihydrazine adipate, dihydrazine sebacate, etc.; phosphorus compounds such as triphenylphosphine; guanamine, acetoguanamine, benzoguanamine, melamine, 2, 4-Diamino-6-methacryloyloxyethyl-S-triazine, 2-vinyl-2,4-diamino-S-triazine, 2-vinyl-4,6-diazine Amino-S-triazine·isocyanuric acid adduct, 2,4-diamino-6-methacryloyloxyethyl-S-triazine·isocyanuric acid adduct, etc. The S-triazine derivatives and so on. These can be used alone or in combination of two or more.

有機溶劑例如可列舉丙酮、甲基乙基酮、環己酮等之酮類;乙酸乙酯、乙酸丁酯、賽珞蘇乙酸酯、丙二醇單甲基醚乙酸酯、卡必醇乙酸酯等之乙酸酯類;賽珞蘇、丁基賽珞蘇等之賽珞蘇類;卡必醇、丁基卡必醇等之卡必醇類;甲苯、二甲苯等之芳香族烴,此外可列舉二甲基甲醯胺、二甲基乙醯胺等。此等可單獨或組合2種以上來使用。Examples of the organic solvent include ketones such as acetone, methyl ethyl ketone, and cyclohexanone; ethyl acetate, butyl acetate, celosyl acetate, propylene glycol monomethyl ether acetate, carbitol acetic acid Acetates such as esters; serosols such as serosol and butyl carbitol; carbitols such as carbitol and butyl carbitol; aromatic hydrocarbons such as toluene and xylene, etc. Dimethylformamide, dimethylacetamide, etc. are mentioned. These can be used alone or in combination of two or more.

著色劑例如可列舉酞菁藍、酞菁綠、碘綠、雙偶氮黃、結晶紫、氧化鈦、碳黑、萘黑等。此等可單獨或組合2種以上來使用。As a coloring agent, phthalocyanine blue, phthalocyanine green, iodine green, disazo yellow, crystal violet, titanium oxide, carbon black, naphthalene black, etc. are mentioned, for example. These can be used alone or in combination of two or more.

增黏劑例如可列舉石棉、有機皂土(Orben)、有機性搬土(benton)等。此等可單獨或組合2種以上來使用。Examples of the tackifier include asbestos, organic bentonite (Orben), and organic bentonite. These can be used alone or in combination of two or more.

消泡劑例如可列舉聚矽氧系消泡劑、氟系消泡劑、高分子系消泡劑等。此等可單獨或組合2種以上來使用。As an antifoaming agent, a polysiloxane type antifoaming agent, a fluorine type antifoaming agent, a polymer type antifoaming agent, etc. are mentioned, for example. These can be used alone or in combination of two or more.

密著性賦予劑例如可列舉噻唑系密著性賦予劑、三唑系密著性賦予劑、矽烷偶合劑等。此等可單獨或組合2種以上來使用。Examples of the adhesion-imparting agent include thiazole-based adhesion-imparting agents, triazole-based adhesion-imparting agents, and silane coupling agents. These can be used alone or in combination of two or more.

<<含量>> 硬化性樹脂組成物中,環氧樹脂與活性酯之摻合量並無特別限定。一般而言,環氧樹脂中所含有的環氧基之環氧當量(Eq1),與活性酯中所含有的活性酯基當量(Eq2)之比(Eq2/Eq1)可為0.7~1.4,更佳為0.8~1.2。該當量比落在如此的範圍時,硬化性樹脂組成物之硬化物,具有與基材或由賦予鍍敷密著性之塗覆組成物所構成的層之優良密著性,可滿足作為絕緣材料之特性。 <<Content>> In the curable resin composition, the blending amount of the epoxy resin and the active ester is not particularly limited. Generally speaking, the ratio (Eq2/Eq1) of the epoxy equivalent (Eq1) of the epoxy group contained in the epoxy resin to the active ester equivalent (Eq2) contained in the active ester (Eq2/Eq1) can be 0.7~1.4, more The optimum range is 0.8~1.2. When the equivalence ratio falls within such a range, the cured product of the curable resin composition has excellent adhesion to the base material or the layer composed of the coating composition for imparting adhesion to plating, and can be used as an insulating material. material properties.

又,進一步組合酚樹脂來使用時,酚樹脂之摻合量並無特別限定。一般而言,上述環氧當量(Eq1),與上述活性酯當量(Eq2)與酚樹脂中所含有的酚性羥基之羥基當量(Eq3)的和之比{(Eq2+Eq3)/Eq1}可為0.4~1.2,更佳為0.5~1.0,活性酯當量(Eq2)與酚性羥基當量(Eq3)之比(Eq3/Eq2)可為0.05~10、更佳為0.1~1.0。藉由為該範圍,硬化性樹脂組成物之硬化物,會賦予優良柔軟性(延伸性),製造安定性或作為電子零件(多層印刷配線板等)之信賴性提高。In addition, when a phenol resin is further combined and used, the blending amount of the phenol resin is not particularly limited. Generally speaking, the ratio {(Eq2+Eq3)/Eq1} of the above-mentioned epoxy equivalent (Eq1) to the sum of the above-mentioned active ester equivalent (Eq2) and the hydroxyl equivalent of the phenolic hydroxyl group contained in the phenol resin (Eq3) It is 0.4~1.2, more preferably 0.5~1.0, and the ratio (Eq3/Eq2) of active ester equivalent (Eq2) to phenolic hydroxyl equivalent (Eq3) may be 0.05~10, more preferably 0.1~1.0. By being within this range, the cured product of the curable resin composition is provided with excellent flexibility (extensibility), and the stability of manufacture and reliability as electronic parts (multilayer printed wiring boards, etc.) are improved.

<<<賦予鍍敷密著性之塗覆組成物>>> <<成分>> 形成本發明之乾膜之第2層(鍍敷密著層)的賦予鍍敷密著性之塗覆組成物,含有丙烯酸系樹脂與含觸媒金屬矽寡聚物。作為如此的賦予鍍敷密著性之塗覆組成物,可使用市售品,例如可列舉JCU公司製 SIPAC300等。 本發明中,由賦予鍍敷密著性之塗覆組成物所構成的層,係隔著由前述硬化性樹脂組成物所構成的層而形成於基材上,於層上形成金屬鍍敷層。 <<<Coating composition for imparting plating adhesion >>> <<Ingredients>> The coating composition for imparting plating adhesion, which forms the second layer (plating adhesion layer) of the dry film of the present invention, contains an acrylic resin and a catalyst-containing metal silicon oligomer. As such a coating composition for imparting adhesion to plating, a commercial item can be used, for example, SIPAC300 manufactured by JCU Corporation, and the like. In the present invention, the layer composed of the coating composition for imparting plating adhesion is formed on the base material via the layer composed of the aforementioned curable resin composition, and the metal plating layer is formed on the layer. .

<丙烯酸系樹脂> 丙烯酸系樹脂,為包含源自選自由(甲基)丙烯酸及其衍生物所成之群的至少1種(甲基)丙烯酸單體之構成單位的聚合物。再者,本說明書中(甲基)丙烯酸意指丙烯酸、甲基丙烯酸,或丙烯酸及甲基丙烯酸雙方。例如,可列舉(甲基)丙烯酸、(甲基)丙烯酸酯、(甲基)丙烯醯胺、(甲基)丙烯腈等之(甲基)丙烯酸單體之均聚物或此等之2種以上的共聚物,以及使(甲基)丙烯酸單體及可與該單體共聚合之其他單體聚合而得的共聚物等。丙烯酸系樹脂,亦可使上述(甲基)丙烯酸單體及/或可與此等共聚合之其他單體,藉由以往已知之方法聚合。其中尤以(甲基)丙烯酸烷基酯共聚物、膠體二氧化矽/丙烯酸複合體、乙烯/丙烯酸共聚物銨鹽為佳;更佳為(甲基)丙烯酸烷基酯共聚物。此等之樹脂可使用1種或2種以上。又,此等之樹脂係溶液狀者亦可,粉末狀者亦可。 <Acrylic resin> The acrylic resin is a polymer including a structural unit derived from at least one (meth)acrylic monomer selected from the group consisting of (meth)acrylic acid and derivatives thereof. In addition, in this specification, (meth)acrylic acid means acrylic acid, methacrylic acid, or both acrylic acid and methacrylic acid. For example, homopolymers of (meth)acrylic monomers such as (meth)acrylic acid, (meth)acrylate, (meth)acrylamide, (meth)acrylonitrile, etc., or two kinds of these can be mentioned. The above copolymers, and copolymers obtained by polymerizing (meth)acrylic monomers and other monomers that can be copolymerized with the monomers, and the like. In the acrylic resin, the above-mentioned (meth)acrylic monomers and/or other monomers that can be copolymerized with these may be polymerized by a conventionally known method. Among them, alkyl (meth)acrylate copolymers, colloidal silica/acrylic acid composites, and ethylene/acrylic acid copolymer ammonium salts are particularly preferred; and alkyl (meth)acrylate copolymers are more preferred. These resins can be used 1 type or 2 or more types. In addition, these resins may be in the form of a solution or in the form of a powder.

<含觸媒金屬矽寡聚物> 作為含觸媒金屬矽寡聚物,係使用藉由使四烷氧基矽烷,與至少於n,n+1位或n,n+2位(惟n為1以上之整數)上鍵結有羥基之多元醇,在具有觸媒性之金屬(以下有記載為觸媒金屬者)之存在下進行縮合反應而得到者。 <Catalyst-containing metal silicon oligomer> As a catalyst-containing metal silicon oligomer, a tetraalkoxysilane is used by bonding at least n, n+1 positions or n, n+2 positions (only n is an integer of 1 or more). The polyol of the hydroxyl group is obtained by performing a condensation reaction in the presence of a metal having catalytic properties (hereafter, it is described as a catalytic metal).

使用於含觸媒金屬矽寡聚物之四烷氧基矽烷,並無特別限定,例如可使用四甲氧基矽烷、四乙氧基矽烷、四丁氧基矽烷等。此等之中尤以四乙氧基矽烷為佳。此等四烷氧基矽烷可單獨或組合複數種來使用。The tetraalkoxysilane used in the catalyst-containing metal silicon oligomer is not particularly limited, and for example, tetramethoxysilane, tetraethoxysilane, tetrabutoxysilane, etc. can be used. Of these, tetraethoxysilane is particularly preferred. These tetraalkoxysilanes can be used alone or in combination.

又,使用於含觸媒金屬矽寡聚物之至少於n,n+1位或n,n+2位(惟n為1以上之整數)上鍵結有羥基之多元醇,並無特別限定,例如可列舉n為1~3之整數之2元~4元醇、較佳為n為1~2之整數之2~3元醇等。此等多元醇之具體例子,例如可列舉乙二醇、1,2-丙二醇、1,3-丙二醇、1,2-丁二醇、1,3-丁二醇、2,3-丁二醇、2-甲基-1,3-丙二醇、1,2-戊二醇、1,3-戊二醇、2,3-戊二醇、2,4-戊二醇等之2元醇;甘油等之3元醇等;赤藻糖醇等之4元醇。此等之多元醇之中尤以2元醇為佳、更佳為乙二醇及/或1,3-丙二醇、特佳為乙二醇。此等多元醇可單獨,或組合複數種使用。In addition, the polyol having hydroxyl groups bonded to at least n, n+1 positions or n, n+2 positions (only n is an integer of 1 or more) used in the catalyst-containing metal-silicon oligomer is not particularly limited. For example, the dihydric to tetrahydric alcohol in which n is an integer of 1 to 3, the dihydric to trihydric alcohol in which n is an integer of 1 to 2 is preferable, and the like. Specific examples of these polyols include ethylene glycol, 1,2-propanediol, 1,3-propanediol, 1,2-butanediol, 1,3-butanediol, and 2,3-butanediol, for example. , 2-methyl-1,3-propanediol, 1,2-pentanediol, 1,3-pentanediol, 2,3-pentanediol, 2,4-pentanediol and other dihydric alcohols; glycerin Trivalent alcohols such as erythritol, etc.; tetravalent alcohols such as erythritol. Among these polyhydric alcohols, dihydric alcohols are particularly preferred, ethylene glycol and/or 1,3-propanediol are more preferred, and ethylene glycol is particularly preferred. These polyols may be used alone or in combination.

進一步地,使用於含觸媒金屬矽寡聚物的觸媒金屬,並非就四烷氧基矽烷與多元醇之縮合反應而言具有催化作用之金屬,而是就後述鍍敷之析出反應而言具有自我催化作用之金屬。因此,係與WO2014/207885或WO2014/207886中所稱之金屬觸媒不同者。Further, the catalyst metal used in the catalyst metal-silicon oligomer is not a metal having a catalytic function in the condensation reaction of tetraalkoxysilane and polyol, but in the precipitation reaction of the plating described later. Metals with autocatalytic properties. Therefore, it is different from the metal catalyst mentioned in WO2014/207885 or WO2014/207886.

如此的觸媒金屬例如可列舉鐵、鎳、鈷、銅、鈀、銀、金、鉑等。此等之觸媒金屬之中尤以鐵、鎳、鈷、銅、鈀為佳;更佳為鐵、鎳、銅、鈀;特佳為鈀。再者,上述觸媒金屬較佳為於縮合反應時,以溶解於上述多元醇之狀態存在,此時,例如較佳為利用氯化鐵、氯化鎳、氯化銅、氯化鈀、氯化金(III)、氯化銀(I)、氯化鉑(IV)等之含有觸媒金屬之金屬鹽。再者,觸媒金屬難溶解於多元醇時,可預先溶解於鹽酸等之無機酸。此等觸媒金屬可單獨,或組合複數種來使用,此時較佳至少含有鈀。As such a catalyst metal, iron, nickel, cobalt, copper, palladium, silver, gold, platinum, etc. are mentioned, for example. Among these catalyst metals, iron, nickel, cobalt, copper, and palladium are particularly preferred; iron, nickel, copper, and palladium are more preferred; and palladium is particularly preferred. Furthermore, the above-mentioned catalyst metal is preferably present in a state of being dissolved in the above-mentioned polyol during the condensation reaction. Metal salts containing catalyst metals such as gold(III), silver(I) chloride, platinum(IV) chloride, etc. Furthermore, when the catalyst metal is hardly dissolved in the polyol, it can be dissolved in a mineral acid such as hydrochloric acid in advance. These catalytic metals may be used alone or in combination, and in this case, at least palladium is preferably contained.

使四烷氧基矽烷與多元醇在觸媒金屬之存在下進行縮合反應之方法並無特別限定,例如可於上述多元醇中添加觸媒金屬為0.01~20g/kg、較佳為0.1~10g/kg並使其溶解後,一邊攪拌一邊加熱至反應溫度,進一步添加四烷氧基矽烷來進行反應。反應溫度為25~150℃、較佳為30~70℃,反應時間為30分鐘~8小時、較佳為2小時~4小時。再者,反應時,使四烷氧基矽烷與多元醇以莫耳比4:1~1:4、較佳為1:2~1:4進行反應一事係重要的。藉此,四烷氧基矽烷與四烷氧基矽烷之間係攝入多元醇。The method for condensing tetraalkoxysilane and polyol in the presence of catalyst metal is not particularly limited. For example, catalyst metal can be added to the above-mentioned polyol at a rate of 0.01~20g/kg, preferably 0.1~10g /kg and dissolved, it was heated to the reaction temperature while stirring, and tetraalkoxysilane was further added and reacted. The reaction temperature is 25 to 150° C., preferably 30 to 70° C., and the reaction time is 30 minutes to 8 hours, preferably 2 hours to 4 hours. In addition, it is important that the tetraalkoxysilane and the polyol are reacted at a molar ratio of 4:1 to 1:4, preferably 1:2 to 1:4, during the reaction. Thereby, a polyol is incorporated between the tetraalkoxysilane and the tetraalkoxysilane.

再者,上述反應時會生成醇,但因為藉由不分餾該醇,聚合反應會被控制,故較佳為不分餾醇。In addition, although alcohol is produced|generated in the said reaction, it is preferable not to fractionate alcohol because the polymerization reaction will be controlled by not fractionating this alcohol.

又,上述反應中,使四烷氧基矽烷與多元醇進行縮合反應之前會分離為2層,但反應結束時會變為1層,因此可於成為1層的時間點終結反應。In addition, in the above reaction, the tetraalkoxysilane and the polyol are separated into two layers before the condensation reaction is performed. However, when the reaction is completed, it becomes one layer. Therefore, the reaction can be terminated when the one layer is formed.

如此方式所得之含觸媒金屬矽寡聚物,為於四烷氧基矽烷2~4個,與多元醇1~13個進行縮合反應後的矽寡聚物中攝入有觸媒金屬者。The catalyst-containing metal-silicon oligomer obtained in this way is a silicon oligomer obtained by condensation reaction of 2-4 tetraalkoxysilanes and 1-13 polyols with a catalyst metal incorporated therein.

再者,含觸媒金屬矽寡聚物,為四烷氧基矽烷之烷氧基,與多元醇中存在的n,n+1位或n,n+2位之羥基之1個或2個進行縮合反應而得者,例如具有如下述(a)~(d)之部分構造。又,推測其係於含觸媒金屬矽寡聚物中,觸媒金屬存在於氧原子間,形成以觸媒金屬為頂點的5員環構造或6員環構造,而經安定化者。因此,本發明之含觸媒金屬矽寡聚物於生成後,即使經過1年亦觀察不到觸媒金屬的沈澱。Furthermore, the catalyst-containing metal silicon oligomer is the alkoxy group of tetraalkoxysilane, and one or two hydroxyl groups at the n, n+1 position or n, n+2 position present in the polyol Those obtained by a condensation reaction have, for example, the following partial structures (a) to (d). In addition, it is presumed that the catalyst metal is present between oxygen atoms in a catalyst metal-silicon oligomer to form a 5-membered ring structure or a 6-membered ring structure with the catalyst metal as a vertex, and it is stabilized. Therefore, after the catalyst-containing metal silicon oligomer of the present invention is formed, the precipitation of the catalyst metal is not observed even after one year.

Figure 02_image001
Figure 02_image001

含觸媒金屬矽寡聚物,可藉由1HNMR、29SiNMR等之NMR、IR、MASS等之公知方法鑑定。具體而言,若為NMR,可藉由以1HNMR確認藉由四烷氧基矽烷與多元醇之縮合反應所生成的醇,進一步地以29SiNMR確認含觸媒金屬矽寡聚物中之矽之數目,來鑑定本發明之含觸媒金屬矽寡聚物。又,於矽寡聚物中攝入有觸媒金屬,可藉由生成矽寡聚物後,一定期間經過後,例如1年經過後,未觀察到觸媒金屬之沈澱來確認。The catalyst-containing metal silicon oligomer can be identified by known methods such as NMR, IR, and MASS such as 1HNMR and 29SiNMR. Specifically, in the case of NMR, the alcohol generated by the condensation reaction of tetraalkoxysilane and polyol can be confirmed by 1HNMR, and the number of silicon in the catalyst-containing metal silicon oligomer can be confirmed by 29SiNMR. , to identify the catalyst-containing metal silicon oligomer of the present invention. In addition, the incorporation of the catalyst metal into the silicon oligomer can be confirmed by the fact that no precipitation of the catalyst metal is observed after a certain period of time, such as one year, after the silicon oligomer is formed.

含觸媒金屬矽寡聚物,會藉由組合使用所含之觸媒金屬不同的2種以上之含觸媒金屬矽寡聚物,或藉由使用於調製含觸媒金屬矽寡聚物時在2種以上之觸媒金屬的存在下所調製者,而增強觸媒金屬之催化作用,故較佳。又,觸媒金屬之組合並無特別限定,例如較佳為鈀,與由鐵、鎳、鈷、銅中選出的1種以上之組合。Catalyst-containing metal-silicon oligomers can be prepared by combining two or more catalyst-containing metal-silicon oligomers with different catalyst metals, or by using them in the preparation of catalyst-containing metal-silicon oligomers. Those prepared in the presence of two or more kinds of catalytic metals are preferred because the catalytic effect of the catalytic metals is enhanced. In addition, the combination of the catalyst metal is not particularly limited, and for example, it is preferably a combination of palladium and one or more selected from iron, nickel, cobalt, and copper.

<其他成分> (丙烯酸系樹脂以外之樹脂成分) 賦予鍍敷密著性之塗覆組成物中,可含有丙烯酸系樹脂以外之樹脂成分。作為如此的樹脂成分,只要係於賦予鍍敷密著性之塗覆組成物中可溶或分散者則無特別限定,例如可列舉胺基甲酸酯系樹脂、酚系樹脂、環氧系樹脂等。 <Other ingredients> (resin components other than acrylic resin) The coating composition for imparting plating adhesion may contain resin components other than acrylic resins. Such resin components are not particularly limited as long as they are soluble or dispersed in the coating composition for imparting plating adhesion, and examples thereof include urethane-based resins, phenol-based resins, and epoxy-based resins. Wait.

(樹脂成分以外之成分) 賦予鍍敷密著性之塗覆組成物,可摻合公知慣用之溶劑,或只要不損及本發明之效果,可摻合著色劑、摩擦係數調整劑、增膜劑、其他賦予機能性之添加劑。 例如,作為溶劑,可列舉水、異丙醇、乙基賽珞蘇等。 (Ingredients other than resin components) The coating composition for imparting the adhesion to the plating can be blended with a well-known and conventional solvent, or as long as the effect of the present invention is not impaired, a colorant, a friction coefficient modifier, a film enhancer, and other functional agents can be blended. additive. For example, as a solvent, water, isopropyl alcohol, ethyl cyloxine, etc. are mentioned.

<<含量>> 賦予鍍敷密著性之塗覆組成物中,丙烯酸系樹脂與含觸媒金屬矽寡聚物之摻合量並無特別限定。一般而言,於賦予鍍敷密著性之塗覆組成物中,源自含觸媒金屬矽寡聚物之金屬觸媒之濃度為50~200ppm之範圍,丙烯酸系樹脂或丙烯酸系樹脂以外之樹脂成分,係以賦予鍍敷密著性之塗覆組成物中之50質量%以下、較佳為0.1~50質量%、更佳為1~20質量%之範圍摻合。 <<Content>> In the coating composition for imparting plating adhesion, the blending amount of the acrylic resin and the catalyst-containing metal silicon oligomer is not particularly limited. In general, in the coating composition for imparting plating adhesion, the concentration of the metal catalyst derived from the catalyst metal silicon oligomer is in the range of 50 to 200 ppm, and the concentration of the metal catalyst other than acrylic resin or acrylic resin is in the range of 50 to 200 ppm. The resin component is blended in a range of 50 mass % or less, preferably 0.1 to 50 mass %, more preferably 1 to 20 mass % of the coating composition for imparting plating adhesion.

<<<乾膜>>> 本發明之乾膜,為於薄膜基材上,形成由硬化性樹脂組成物之層與賦予鍍敷密著性之塗覆組成物之層所構成的2層構造之樹脂層所得到者。 <<<Dry Film>>> The dry film of the present invention is obtained by forming, on a film substrate, a resin layer having a two-layer structure consisting of a layer of a curable resin composition and a layer of a coating composition that imparts plating adhesion.

<<乾膜之製造方法>> 本發明之乾膜,可於薄膜基材上,首先形成上述第1層(由熱硬化性樹脂組成物所構成之層)後,於該第1層之表面形成第2層(由賦予密著性之塗覆組成物所構成之層)來製作、可於形成第2層後,於該第2層之表面形成第1層來製作、亦可分別形成第1層與第2層,並將兩者貼合來製作。 <<Manufacturing method of dry film>> In the dry film of the present invention, the first layer (a layer composed of a thermosetting resin composition) is first formed on the film substrate, and then a second layer (a layer composed of a thermosetting resin composition) is formed on the surface of the first layer. After forming the second layer, the first layer can be formed on the surface of the second layer, or the first layer and the second layer can be formed separately, and the The two are made to fit together.

具體而言,於薄膜基材上形成第1層之後,於該第1層之表面形成第2層來製作乾膜時,首先藉由於薄膜基材上塗佈熱硬化性樹脂組成物進行製膜,而形成第1層。該製膜,可藉由將熱硬化性樹脂組成物藉由加熱而低黏度化,塗佈於薄膜基材上,或預先以溶劑稀釋而塗佈於薄膜基材上後,以加熱去除溶劑來進行。 接著,可於形成於薄膜基材上之第1層的表面,塗佈賦予鍍敷密著性之塗覆組成物進行製膜,藉以形成第2層,來製作乾膜。該製膜,可採用與上述相同之方法。 Specifically, after the first layer is formed on the film base, when the second layer is formed on the surface of the first layer to form a dry film, the film is first formed by coating the thermosetting resin composition on the film base. , forming the first layer. The film can be formed by heating the thermosetting resin composition to reduce the viscosity and coating it on the film base, or by diluting it with a solvent and coating it on the film base in advance, and then removing the solvent by heating. conduct. Next, the surface of the first layer formed on the film base material can be coated with a coating composition for imparting plating adhesion to form a film, thereby forming a second layer to prepare a dry film. For the film formation, the same method as described above can be used.

又,如上所述,於薄膜基材上形成第2層後,於該第2層之表面形成第1層來製作乾膜時,可於薄膜基材上形成第2層,接著,於該第2層之表面塗佈熱硬化性樹脂組成物而製膜第1層,來製作乾膜。 又,分別形成第1層與第2層,並將兩者貼合來製作乾膜時,可將構成第2層之賦予密著性之塗覆組成物與構成第1層之熱硬化性樹脂組成物,分別塗佈於薄膜基材上進行製膜,並將兩者貼合來製作乾膜。 Furthermore, as described above, after forming the second layer on the film substrate, and then forming the first layer on the surface of the second layer to prepare a dry film, the second layer may be formed on the film substrate, and then, the first layer may be formed on the film substrate. The surface of the two layers was coated with the thermosetting resin composition to form the first layer, thereby producing a dry film. In addition, when the first layer and the second layer are formed separately, and the two are laminated to produce a dry film, the coating composition for imparting adhesion constituting the second layer and the thermosetting resin constituting the first layer may be combined The composition was applied to a film substrate, respectively, to form a film, and the two were laminated to produce a dry film.

此處,塗佈方法可應用以往公知之方法,可採用平板壓製法、缺角輪塗佈器、刮刀塗佈器、唇口塗佈器、桿塗佈器、擠壓塗佈器、反向塗佈器、轉輥塗佈器、凹版塗佈器、噴霧塗佈器、浸漬塗佈器等之公知手段。塗佈之後,係於25~130℃之溫度乾燥1~30分鐘。該乾燥可使用熱風循環式乾燥爐、IR爐、加熱板、對流烘箱等進行。Here, as the coating method, a conventionally known method can be applied, and a flat press method, a notch wheel coater, a knife coater, a lip coater, a rod coater, a extrusion coater, a reverse coater, etc. can be used. Known means such as coater, roll coater, gravure coater, spray coater, dip coater and the like. After coating, it is dried for 1 to 30 minutes at a temperature of 25 to 130°C. This drying can be performed using a hot air circulating drying furnace, an IR furnace, a hot plate, a convection oven, or the like.

薄膜基材,可列舉聚乙烯、聚氯乙烯等之聚烯烴;聚對苯二甲酸乙二酯等之聚酯;聚碳酸酯、聚醯亞胺、進而脫模紙或如銅箔、鋁箔之金屬箔等。再者,於薄膜基材,亦可實施消光處理、電暈處理,以及脫模處理。Film substrates include polyolefins such as polyethylene and polyvinyl chloride; polyesters such as polyethylene terephthalate; polycarbonate, polyimide, and further release paper or other materials such as copper foil and aluminum foil. Metal foil, etc. Furthermore, on the film substrate, matting treatment, corona treatment, and mold release treatment can also be performed.

如此方式製作之本發明之乾膜中,第1層之厚度,較佳為較作為絕緣材料之第1層所鄰接的基材上之導體電路的厚度更厚。例如,印刷配線板之導體電路的厚度,大致為5~100μm左右,故第1層之厚度較佳為10~ 120μm。又,第2層之厚度並無特別限定,就實用的範圍而言係0.01~5μm、較佳為0.5~1μm。In the dry film of the present invention produced in this way, the thickness of the first layer is preferably thicker than the thickness of the conductor circuit on the substrate adjacent to the first layer as an insulating material. For example, the thickness of the conductor circuit of the printed wiring board is approximately 5 to 100 μm, so the thickness of the first layer is preferably 10 to 120 μm. In addition, the thickness of the second layer is not particularly limited, but in a practical range, it is 0.01 to 5 μm, preferably 0.5 to 1 μm.

本發明之乾膜中,亦可於形成第1層及第2層之後剝離薄膜基材,但可藉由直接作為支持體(支持薄膜)而殘留,來提高操作性。又,於由第1層與第2層所構成的2層構造之樹脂層的無薄膜基材之面上,亦可貼合別的薄膜基材作為保護材(保護薄膜),可抑制損傷或異物之附著等之不良狀況。如此的保護材(保護薄膜),可使用與上述薄膜基材相同之材料,係以輥疊合機等貼合。In the dry film of the present invention, the film base material may be peeled off after forming the first layer and the second layer, but the handleability can be improved by leaving it as a support (support film) as it is. In addition, on the surface of the non-film base material of the resin layer of the two-layer structure consisting of the first layer and the second layer, another film base material can be pasted as a protective material (protective film), so that damage or damage can be suppressed. Defects such as adhesion of foreign objects. As such a protective material (protective film), the same material as the above-mentioned film base material can be used, and it can be bonded together by a roll laminator or the like.

本發明之乾膜,係於印刷配線板等之基材上,以第1層(由熱硬化性組成物所構成之層)鄰接的方式進行疊合。 此處,疊合係使用輥疊合機或批式之真空疊合機、真空壓製裝置等,於第1層會流動的條件,例如溫度30~130℃、壓力1.5MPa以下、時間180秒以內來實施。 The dry film of this invention is laminated|stacked on the base material, such as a printed wiring board, so that a 1st layer (layer which consists of a thermosetting composition) may adjoin. Here, the lamination system uses a roll lamination machine, a batch type vacuum lamination machine, a vacuum pressing device, etc., under the conditions that the first layer will flow, such as a temperature of 30 to 130°C, a pressure of 1.5 MPa or less, and a time of 180 seconds or less. to implement.

<<<硬化物>>> 本發明之硬化物,可藉由將使用上述本發明之乾膜所疊合的樹脂層予以加熱,進行硬化反應而得到。 此處,硬化方法並無特別限定,例如,係藉由惰性氣體烘箱、加熱板、真空烘箱、真空壓製機等來加熱即可。再者,加熱溫度及時間,係依熱硬化成分之反應性來適當變更即可,例如係於100~200℃進行30~120分鐘。 <<<hardened product>>> The cured product of the present invention can be obtained by heating the resin layer laminated using the dry film of the present invention to perform a curing reaction. Here, the hardening method is not particularly limited, and may be heated by, for example, an inert gas oven, a hot plate, a vacuum oven, a vacuum press, or the like. In addition, the heating temperature and time may be appropriately changed depending on the reactivity of the thermosetting component, for example, it is performed at 100 to 200° C. for 30 to 120 minutes.

<<<電子零件>>> 本發明之電子零件,具有上述之硬化物。更具體而言,係於印刷配線板等之形成有電路的基材上,具有依本發明之乾膜之第1層、第2層的順序層合的硬化物(層),與前述第2層上藉由鍍敷處理所形成之導體層(鍍敷層)。因此,亦可將分別形成有上述第1層與第2層之乾膜,於基材上依第1層、第2層的順序疊合,來進行硬化。 <<<Electronic Parts>>> The electronic component of the present invention has the above-mentioned cured product. More specifically, it has a cured product (layer) laminated in the order of the first layer and the second layer of the dry film of the present invention on a substrate on which a circuit is formed, such as a printed wiring board, and the second layer described above. A conductor layer (plating layer) formed by a plating process on the layer. Therefore, the dry film in which the said 1st layer and the 2nd layer were respectively formed may be laminated|stacked on a base material in this order of a 1st layer, and a 2nd layer, and it may be hardened.

作為本發明之電子零件之製造方法,例如,藉由上述之乾膜之疊合方法、硬化方法所得到的硬化物(層),可藉由CO 2雷射或UV-YAG雷射等之雷射或鑽頭而形成孔(洞)。孔(洞)可為以導通基板之表面與背面為目的之貫通孔(貫穿孔)、以導通基材上之電路與第2層上之電路為目的之有底洞(通孔)的任意者。 As the manufacturing method of the electronic component of the present invention, for example, the cured product (layer) obtained by the above-mentioned dry film lamination method and curing method can be obtained by a CO 2 laser or a UV-YAG laser or the like. Shots or drills to form holes (holes). The hole (hole) can be any one of a through hole (through hole) for the purpose of conducting the front and back surfaces of the substrate, and a bottomed hole (through hole) for the purpose of conducting the circuit on the substrate and the circuit on the second layer. .

孔(洞)之形成後,依需要將由加工所產生之殘渣(膠渣)藉由除膠渣液或電漿處理而去除。通常,藉由膠渣去除,第2層之表面也可能有粗面化的情況,考慮到對高頻通信(例如5G通信等)的適應時,通常,要求算術平均表面粗度Ra(根據JIS B 0601)為200nm以下。After the holes (holes) are formed, the residues (smears) produced by the processing are removed by desmearing liquid or plasma treatment as required. Usually, the surface of the second layer may be roughened by smear removal. Considering the adaptation to high-frequency communication (such as 5G communication, etc.), the arithmetic mean surface roughness Ra (according to JIS) is usually required. B 0601) is 200 nm or less.

接著,可對硬化物(層)之表面,照射至少照射強度10 mW/cm 2以上之紫外線。藉此,硬化物(層)之表面與鍍敷層之密著性進一步提高。此時之紫外線之主波長為310nm左右以下、較佳為260nm左右以下、更佳為150~ 200nm左右。特佳紫外線之波長包含約184nm與約254nm之2種。 Next, the surface of the cured product (layer) can be irradiated with ultraviolet rays with an irradiation intensity of at least 10 mW/cm 2 or more. Thereby, the adhesiveness of the surface of a hardened|cured material (layer) and a plated layer is further improved. The dominant wavelength of the ultraviolet rays at this time is about 310 nm or less, preferably about 260 nm or less, and more preferably about 150 to 200 nm. The wavelengths of the ultra-optimal ultraviolet rays include two kinds of about 184 nm and about 254 nm.

紫外線之光源,可使用低壓水銀燈、準分子雷射、障壁放電燈、介電體障壁放電燈、微波無電極放電燈、瞬時放電燈等。例如使用低壓水銀燈時,184.9nm、253.7nm之主波長特別有效。又,使用準分子燈時,具體而言較期望為Ar2*(126nm)、Kr2*(146nm)、F2*(153nm)、ArBr*(165nm)、Xe2*(172nm)、ArCl*(175nm)、ArF(193nm)、KrBr*(207nm)、KrCl*(222nm)、KrF(248nm)、Xel*(253nm)、Cl2*(259nm)、XeBr*(283nm)、Br2*(289nm)、XeCl*(308nm)之波長之光。特別是Xe2*與KrCl*具有安定性,波長亦較小,能量大,因此表面改質效果大而較佳。As the light source of ultraviolet rays, low-pressure mercury lamps, excimer lasers, barrier discharge lamps, dielectric barrier discharge lamps, microwave electrodeless discharge lamps, and instantaneous discharge lamps can be used. For example, when using a low-pressure mercury lamp, the dominant wavelengths of 184.9 nm and 253.7 nm are particularly effective. When using an excimer lamp, specifically, Ar2*(126nm), Kr2*(146nm), F2*(153nm), ArBr*(165nm), Xe2*(172nm), ArCl*(175nm), ArF(193nm), KrBr*(207nm), KrCl*(222nm), KrF(248nm), Xel*(253nm), Cl2*(259nm), XeBr*(283nm), Br2*(289nm), XeCl*(308nm) ) of the wavelength of light. Especially Xe2* and KrCl* have stability, small wavelength and high energy, so the surface modification effect is large and better.

紫外線之照射時間,雖依所用之樹脂材料、紫外線之強度(照射量)而異,(紫外線之強度為5~20 mW/cm 2左右時)可於10秒~30分鐘左右之範圍適當調整、更佳為20秒~10分鐘左右。 Although the irradiation time of ultraviolet rays varies according to the resin material used and the intensity of ultraviolet rays (irradiation amount), (when the intensity of ultraviolet rays is about 5~20 mW/cm 2 ), it can be adjusted appropriately in the range of about 10 seconds to 30 minutes. More preferably, it is about 20 seconds to 10 minutes.

再者,紫外線之照射,亦可於進行無電解鍍敷之處理之前進行複數次。In addition, the irradiation of an ultraviolet-ray may be performed several times before performing the process of electroless plating.

接著,於硬化物(層)之表面形成鍍敷層。鍍敷金屬,係銅、錫、焊料、鎳等,無特別限制,亦可組合複數種來使用。Next, a plating layer is formed on the surface of the cured product (layer). Plating metals are copper, tin, solder, nickel, etc., and are not particularly limited, and a plurality of them may be used in combination.

以一般的電子零件所用的鍍銅來形成電路時,作為用以實施電解鍍銅之饋電層,係以0.1~2.0μm左右之厚度實施無電解鍍銅,接著,實施電解鍍銅,形成特定厚度之導體層(銅層)。導體層之電路圖型之形成,可使用如減成法或半加成法之公知方法。再者,鍍銅相較於鍍鎳等而言,係有與樹脂之密著性低的困難點,但對遵照本發明所形成之絕緣層表面實施鍍銅來形成導體層時,可得到優良的密著強度。When forming a circuit with copper plating used for general electronic parts, as a feeding layer for performing electrolytic copper plating, electroless copper plating is performed with a thickness of about 0.1 to 2.0 μm, and then electrolytic copper plating is performed to form a specific Thickness of conductor layer (copper layer). The circuit pattern of the conductor layer can be formed by a known method such as a subtractive method or a semi-additive method. Furthermore, compared with nickel plating, copper plating has a difficulty in that the adhesion to resin is low, but when copper plating is applied to the surface of the insulating layer formed in accordance with the present invention to form a conductor layer, excellent results can be obtained. adhesion strength.

對硬化物之表面所實施的無電解鍍敷及電解鍍敷只要係公知方法即可,不限定於特定方法,較佳為無電解鍍敷處理步驟之觸媒包含鈀-錫混合觸媒,且觸媒之1次粒子徑為10nm以下。又,較佳為無電解鍍敷處理步驟之鍍敷組成含有次磷酸作為還原劑。The electroless plating and electrolytic plating performed on the surface of the cured product are not limited to a specific method as long as it is a known method, and the catalyst in the electroless plating treatment step preferably contains a palladium-tin mixed catalyst, and The primary particle diameter of the catalyst is 10 nm or less. Furthermore, it is preferable that the plating composition of the electroless plating treatment step contains hypophosphorous acid as a reducing agent.

關於無電解鍍敷,例如可應用日本特開平8-253869號公報、日本特開2002-57456號公報、日本特開2000-212762號公報等記載之方法。For electroless plating, methods described in, for example, Japanese Patent Laid-Open No. 8-253869, Japanese Patent Laid-Open No. 2002-57456, and Japanese Patent Laid-Open No. 2000-212762 can be applied.

又,可依需要重複複數次的以本發明之乾膜形成絕緣層及鍍敷密著層,與形成導體電路層,藉以製造所期望之多層印刷配線板。In addition, the formation of the insulating layer and the plating adhesion layer with the dry film of the present invention, and the formation of the conductor circuit layer can be repeated as many times as necessary, thereby producing a desired multilayer printed wiring board.

可進一步構裝半導體元件等作為電子零件。本發明所得之電子零件,高頻之電信號的傳輸損耗少,可適合地使用於以第5世代通信系統(5G)為代表的大容量高速通信或適於汽車之ADAS(先進駕駛系統)的毫米波雷達等。 [實施例] Semiconductor elements and the like can be further packaged as electronic parts. The electronic components obtained by the present invention have less transmission loss of high-frequency electrical signals, and can be suitably used for large-capacity high-speed communications represented by the fifth-generation communication system (5G) or ADAS (advanced driving system) suitable for automobiles. Millimeter wave radar, etc. [Example]

以下使用實施例而更詳細說明本發明。再者,表中之摻合量表示作為不揮發分成分之質量份。The present invention will be described in more detail below using examples. In addition, the compounding quantity in a table|surface shows the mass part as a non-volatile component.

硬化性樹脂組成物之原料,係使用以下者。As the raw material of the curable resin composition, the following are used.

<<原料>> <樹脂成分> •環氧樹脂(A) jER828(三菱化學(股)製、雙酚A型環氧樹脂) NC-3000H(日本化藥(股)製、聯苯基芳烷基型環氧樹脂) •酚樹脂(B) LA-3018-50P(DIC(股)製、含有胺基三嗪之苯酚酚醛清漆樹脂、甲基乙基酮溶液、不揮發成分50質量%、表1中之記載係不計揮發成分) HF-4M(明和化成(股)製、苯酚酚醛清漆樹脂) •活性酯(C) HPC-8000-65T(DIC(股)製、甲苯溶液、不揮發成分65質量%、表1中之記載係不計揮發成分) <樹脂以外之成分> •無機填充劑 Admafine SC2050((股)Admatechs)球狀二氧化矽(平均粒徑0.5μm) •硬化促進劑 Curezol 2E4MZ(四國化成工業(股)製) •添加劑 KBM-403(信越化學工業(股)製) <<Ingredients>> <Resin composition> • Epoxy resin (A) jER828 (manufactured by Mitsubishi Chemical Corporation, bisphenol A epoxy resin) NC-3000H (made by Nippon Kayaku Co., Ltd., biphenyl aralkyl type epoxy resin) • Phenolic resin (B) LA-3018-50P (manufactured by DIC Corporation, aminotriazine-containing phenol novolac resin, methyl ethyl ketone solution, non-volatile content 50% by mass, the description in Table 1 is not counting volatile content) HF-4M (Meiwa Chemical Co., Ltd., phenol novolak resin) • Active ester (C) HPC-8000-65T (manufactured by DIC Co., Ltd., toluene solution, non-volatile content 65% by mass, the description in Table 1 is not counting the volatile content) <Ingredients other than resin> •Inorganic fillers Admafine SC2050 ((stock) Admatechs) spherical silica (average particle size 0.5μm) • Hardening accelerator Curezol 2E4MZ (Shikoku Chemical Industry Co., Ltd.) •additive KBM-403 (Shin-Etsu Chemical Industry Co., Ltd.)

<<硬化性樹脂組成物之準備>> 將上述各原料以表1所示摻合量進行摻合,攪拌後,以3輥磨機均勻分散,製造各實施例及各比較例之硬化性樹脂組成物。 <<Preparation of curable resin composition> The above-mentioned respective raw materials were blended in the blending amounts shown in Table 1, and after stirring, they were uniformly dispersed with a 3-roll mill, and the curable resin compositions of the respective Examples and respective Comparative Examples were produced.

<<賦予鍍敷密著性之塗覆組成物之準備>> 準備市售品之JCU公司製SIPAC300。 <<Preparation of coating composition for imparting plating adhesion>> A commercially available product, SIPAC300 manufactured by JCU Corporation, was prepared.

<<樣品(基板)之製作>> 接著,使用各硬化性樹脂組成物,遵照以下之流程製造評估用之樣品(基板)。 <<Production of sample (substrate)> Next, using each curable resin composition, a sample (substrate) for evaluation was produced according to the following procedure.

<<乾膜之製作>> 首先,將各硬化性樹脂組成物使用自轉/公轉混合器,充分攪拌、脫泡後,以塗抹器於PET薄膜上塗佈,使乾燥後之膜厚成為40μm,以乾燥爐於90℃乾燥10分鐘,製作具備由各硬化性樹脂組成物所構成之層(絕緣層)的乾膜。 接著,將前述於PET薄膜上具備絕緣層之乾膜浸漬塗佈賦予密著性之塗覆組成物(SIPAC300),在垂直吊起的狀態下以乾燥爐30℃乾燥3分鐘,形成0.6μm之鍍敷密著層,藉以製作依序層合有PET薄膜、絕緣層、鍍敷密著層、PET薄膜之乾膜。 <<Production of dry film>> First, each curable resin composition was thoroughly stirred and defoamed using an autorotation/revolution mixer, and then coated on a PET film with an applicator so that the film thickness after drying was 40 μm, and dried in a drying furnace at 90° C. for 10 Within minutes, a dry film having a layer (insulating layer) composed of each curable resin composition was produced. Next, the above-mentioned dry film provided with an insulating layer on the PET film was dip-coated with a coating composition (SIPAC300) for imparting adhesion, and was dried in a drying oven at 30° C. for 3 minutes in the state of being vertically suspended to form a 0.6 μm layer. The adhesion layer is plated, thereby producing a dry film in which the PET film, the insulating layer, the plating adhesion layer, and the PET film are laminated in sequence.

接著,將所製作之乾膜的絕緣層所鄰接之PET薄膜剝離,設置為絕緣層鄰接於覆銅層合板,使用真空疊合機(名機製作所股份有限公司製MVLP-500),以溫度100℃、壓力0.5MPa、加壓時間30秒進行疊合。之後,將鍍敷密著層側之PET薄膜剝離,以乾燥爐90℃加熱30分鐘,進一步於170℃加熱30分鐘,製作各鍍敷用基板。Next, peel off the PET film adjacent to the insulating layer of the prepared dry film, set the insulating layer to be adjacent to the copper-clad laminate, and use a vacuum laminating machine (MVLP-500 manufactured by Meiki Seisakusho Co., Ltd.) at a temperature of 100 ℃, a pressure of 0.5 MPa, and a pressurization time of 30 seconds for superimposition. Then, the PET film on the plating adhesion layer side was peeled off, heated in a drying furnace at 90° C. for 30 minutes, and further heated at 170° C. for 30 minutes to prepare each plating substrate.

各鍍敷用基板之表面平均粗度Ra示於表1。再者,表面平均粗度Ra係遵照以下方法測定。 (測定方法) 測定機器:白色干涉顯微鏡(Bruker Contour GT-I) 測定條件:VSI模式、50倍鏡頭、測定範圍174.6×130.9μm、以5點測定部位之平均值為測定值。 The surface average roughness Ra of each board|substrate for plating is shown in Table 1. In addition, the surface average roughness Ra was measured according to the following method. (test methods) Measuring machine: White interference microscope (Bruker Contour GT-I) Measurement conditions: VSI mode, 50x lens, measurement range 174.6×130.9 μm, the average value of 5 measurement points is the measurement value.

接著,對所製作之各鍍敷用基板實施無電解鍍敷處理及電解鍍敷處理,形成導體層。具體而言,作為無電解鍍敷處理,係於清潔劑處理液(JCU製、ES-100)中50℃浸漬3分鐘,於觸媒賦予處理液(JCU製、ES-300)中50℃浸漬2分鐘,於還原處理液(JCU製、ES-400)中35℃浸漬5分鐘,於無電解鍍敷處理液(JCU製、PB-507F)中35℃浸漬15分鐘,藉以形成饋電層。以於5%硫酸水溶液中室溫浸漬10秒,於硫酸銅鍍敷液(JCU製、CU-BRITE21)中室溫45分鐘、電流密度3A/dm 2之條件形成電解鍍敷層,製作依序層合有覆銅層合板、絕緣層、鍍敷密著層、鍍敷層之樣品(基板)。 Next, electroless plating treatment and electrolytic plating treatment were performed on each of the produced substrates for plating to form conductor layers. Specifically, as an electroless plating treatment, immersion at 50° C. for 3 minutes in a detergent treatment solution (manufactured by JCU, ES-100), and immersion at 50° C. in a catalyst-imparting treatment solution (manufactured by JCU, ES-300) A feed layer was formed by immersing in a reduction treatment solution (manufactured by JCU, ES-400) for 2 minutes at 35°C for 5 minutes, and in an electroless plating treatment solution (manufactured by JCU, PB-507F) at 35°C for 15 minutes. Immerse in a 5% sulfuric acid aqueous solution for 10 seconds at room temperature, then in a copper sulfate plating solution (manufactured by JCU, CU-BRITE21) for 45 minutes at room temperature and a current density of 3A/dm 2 to form an electrolytic plating layer. A sample (substrate) in which a copper-clad laminate, an insulating layer, a plating adhesion layer, and a plating layer are laminated.

<<評估>> <剝離強度(P/S)試驗:鍍敷密著性評估> 對於各樣品進行剝離強度之評估。剝離強度係如以下般實施。首先,對各樣品之鍍銅層切出寬10mm、長60mm之切口。將該一方的端部剝離,並且以夾具夾住剝離部位,以桌上型拉伸試驗器(島津製作所製EZ-SX)以90度之角度、50mm/分鐘之速度剝下鍍銅層35mm之長度,測定剝離強度(N/cm)。 <<Assessment>> <Peel Strength (P/S) Test: Evaluation of Plating Adhesion> An evaluation of peel strength was performed for each sample. The peel strength was implemented as follows. First, the copper plating layer of each sample was cut with a width of 10 mm and a length of 60 mm. The one end was peeled off, and the peeled part was clamped with a clamp, and a 35 mm portion of the copper plating layer was peeled off at an angle of 90 degrees and a speed of 50 mm/min with a desktop tensile tester (EZ-SX, manufactured by Shimadzu Corporation). length, and the peel strength (N/cm) was measured.

Figure 02_image003
Figure 02_image003

如上述結果,確認到藉由使用2層構造之乾膜,該2層構造之乾膜,具有由含有環氧樹脂與活性酯化合物之硬化性樹脂組成物所構成之層,與由含有丙烯酸系樹脂與含觸媒金屬矽寡聚物之鍍敷層形成用組成物所構成之層,而可形成即使表面粗度小(即使Ra為200nm以下),與導體層之密著性亦良好的絕緣層。From the above results, it was confirmed that by using the dry film of the two-layer structure, the dry film of the two-layer structure had a layer composed of a curable resin composition containing an epoxy resin and an active ester compound, and a layer composed of a curable resin composition containing an epoxy resin and an active ester compound, and a dry film containing an acrylic resin. A layer composed of a resin and a composition for forming a plating layer containing a catalyst metal silicon oligomer can form an insulating layer with good adhesion to the conductor layer even if the surface roughness is small (even if Ra is 200 nm or less). layer.

Claims (3)

一種乾膜,其係於薄膜基材上具有2層構造的樹脂層之乾膜,該2層構造的樹脂層由含有環氧樹脂與活性酯化合物的硬化性樹脂組成物之層,與含有丙烯酸系樹脂與含觸媒金屬矽寡聚物的賦予鍍敷密著性之塗覆組成物之層構成,該乾膜之特徵為 前述含觸媒金屬矽寡聚物,為藉由使四烷氧基矽烷,與至少於n,n+1位或n,n+2位(惟n為1以上之整數)上鍵結有羥基之多元醇,在對無電解鍍敷具有觸媒性之金屬的存在下進行縮合反應而得到之含觸媒金屬矽寡聚物。 A dry film, which is a dry film having a resin layer with a two-layer structure on a film substrate, the two-layer structure of the resin layer is composed of a layer of a curable resin composition containing an epoxy resin and an active ester compound, and a layer containing an acrylic acid. It is composed of a layer of a resin and a coating composition containing a catalyst metal silicon oligomer that imparts plating adhesion. The dry film is characterized by The aforementioned catalyst-containing metal-silicon oligomer is obtained by making a tetraalkoxysilane bond with a hydroxyl group at least at the n, n+1 position or n, n+2 position (only n is an integer of 1 or more). The polyol is a catalyst-containing metal-silicon oligomer obtained by condensation reaction in the presence of a metal having catalytic properties for electroless plating. 一種硬化物,其係使構成如請求項1之乾膜的樹脂層硬化而成。A cured product obtained by curing a resin layer constituting the dry film of claim 1. 一種電子零件,其具有含有如請求項2之硬化物的絕緣層。An electronic part having an insulating layer containing the hardened product as claimed in claim 2.
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